JPH05166B2 - - Google Patents
Info
- Publication number
- JPH05166B2 JPH05166B2 JP23589683A JP23589683A JPH05166B2 JP H05166 B2 JPH05166 B2 JP H05166B2 JP 23589683 A JP23589683 A JP 23589683A JP 23589683 A JP23589683 A JP 23589683A JP H05166 B2 JPH05166 B2 JP H05166B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- guide
- movable guide
- vertical
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000000694 effects Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
Description
【発明の詳細な説明】
＜発明の技術分野＞
本発明は、本題対製造装置、精密測定機、精密
加工機、ロボツト等に適用され、ワークの高精度
な位置決めを行う自在テーブル装置、いわゆる
XYステージに関する。[Detailed Description of the Invention] <Technical Field of the Invention> The present invention is applied to manufacturing equipment, precision measuring machines, precision processing machines, robots, etc., and provides a so-called flexible table device for positioning a workpiece with high precision.
Regarding the XY stage.
＜発明の背景＞
従来この種XYステージは、第４図および第５
図に示す如く、案内面を構成するベース８の四辺
に固定ガイド８１，８１ａ，８２，８２ａを設
け、各固定ガイド８１，８１ａ，８２，８２ａに
沿つてリニアモータ８３，８４を配設し、一方、
ベース８の上方には縦横に可動ガイド８５，８６
を直交配備して各可動ガイド８５，８６の両端は
空気軸受を介して固定ガイド８１，８２およびリ
ニアモータ８３，８４に連繋すると、共に、縦横
の可動ガイド８５，８６の交叉部に空気軸受８７
を介して自在ステージ８９を配備した構造のもの
であり、縦横の可動ガイド８５，８６の交叉部の
変位により自在ステージ８９を目標位置へ移行す
る。<Background of the invention> Conventionally, this type of XY stage is
As shown in the figure, fixed guides 81, 81a, 82, 82a are provided on the four sides of the base 8 constituting the guide surface, and linear motors 83, 84 are arranged along each fixed guide 81, 81a, 82, 82a, on the other hand,
Above the base 8 are vertically and horizontally movable guides 85 and 86.
When the movable guides 85, 86 are arranged orthogonally and both ends of the movable guides 85, 86 are connected to the fixed guides 81, 82 and the linear motors 83, 84 via air bearings, air bearings 87 are installed at the intersections of the vertical and horizontal movable guides 85, 86.
The flexible stage 89 is disposed through the movable guides 85 and 86, and the movable stage 89 is moved to the target position by displacement of the intersecting portions of the vertical and horizontal movable guides 85 and 86.
ところがこの種のXYステージでは、自在ステ
ージ８９に加わる力のうち、鉛直下方に向かう力
はベース８に支持されるが、鉛直上方に向かう力
はこれを支持する部分がなく、鉛直方向は重量バ
ランスによつて案内されていることになる。この
ためかりにステージ８９に鉛直上方の力成分が加
わると、自在ステージ８９は、浮上する虞があ
る。さらに重量バランス型であるため、軸受剛性
はステージ８９の重量を増さない限り高めること
ができず、リニアモータ８３，８４の負荷も必然
的に増加する。従つて、上下動やピツチングが生
じ、走り精度が低下し、位置決め精度も悪くな
る。 However, in this type of XY stage, among the forces applied to the flexible stage 89, the vertically downward force is supported by the base 8, but the vertically upward force has no part to support it, and the weight balance in the vertical direction It will be guided by. If a vertically upward force component is applied to the stage 89 due to this, there is a possibility that the movable stage 89 will float up. Furthermore, since it is a weight balance type, the bearing rigidity cannot be increased unless the weight of the stage 89 is increased, and the load on the linear motors 83 and 84 will inevitably increase. Therefore, vertical movement and pitching occur, resulting in lower running accuracy and poor positioning accuracy.
第６図および第７図は、従来の他のXYステー
ジを示す。このXYステージは、ベース９上に平
行配備された２本の固定ガイド９１，９１ａ間に
縦可動ガイド９２を、この縦可動ガイド９２に横
可動ガイド９３を、それぞれ配設したもので、モ
ータ９４，９５と送りネジ９６，９７とによつて
縦横の各可動ガイド９２，９３を移行させ、横可
動ガイド９３の上面に形成したステージ９８を目
標位置へ移行する。ところがこのXYステージで
は、ステージ９８の負荷は、縦横の各可動ガイド
９２，９３に支持されることになり、ガイドの弾
性たわみや重心の移動にともなうガイドの傾斜な
どの現象が生じ、上下動、ピツチングなどにより
走り精度および位置決め精度が低下する。また全
体が２層構造であるため、XYステージの小型
化、薄型化が困難である。 6 and 7 show other conventional XY stages. This XY stage has a vertically movable guide 92 disposed between two fixed guides 91 and 91a arranged in parallel on a base 9, and a horizontally movable guide 93 disposed on this vertically movable guide 92. , 95 and feed screws 96, 97, the vertical and horizontal movable guides 92, 93 are moved, and the stage 98 formed on the upper surface of the horizontally movable guide 93 is moved to the target position. However, in this XY stage, the load of the stage 98 is supported by the vertical and horizontal movable guides 92 and 93, and phenomena such as elastic deflection of the guides and tilting of the guides due to movement of the center of gravity occur, resulting in vertical movement, Running accuracy and positioning accuracy decrease due to pitting, etc. Furthermore, since the entire structure has two layers, it is difficult to make the XY stage smaller and thinner.
＜発明の目的＞
本発明は、ステージに対し下方および上方に加
わる力成分を基準ベースおよび可動ガイドにて支
承して拘束することにより、上下動およびピツチ
ングの減少をはかり、走り精度、位置決め精度を
一段と向上できるXYステージを提供することを
目的とする。<Object of the Invention> The present invention aims to reduce vertical movement and pitching by supporting and restraining force components applied downward and upward to the stage using a reference base and a movable guide, thereby improving running accuracy and positioning accuracy. The purpose is to provide an XY stage that can be further improved.
＜実施例の説明＞
第１図〜第３図は、本発明にかかるXYステー
ジを示すもので、走行基準面となるベース１の上
面には、Ｙ軸方向に平行しかつそれぞれ対向する
内面に垂直ガイド部２１，２１およびその上端に
内向きに突出した水平ガイド部２２，２２を有す
る固定ガイド２，２ａが取付け固定されている。
両固定ガイド２，２ａ間には縦可動ガイド３が係
合され、縦可動ガイド３と固定ガイド２，２ａと
の間に縦軸駆動装置４が構成される。<Description of Embodiments> FIGS. 1 to 3 show an XY stage according to the present invention. The top surface of the base 1, which serves as a running reference surface, has inner surfaces parallel to the Y-axis direction and facing each other. Fixed guides 2, 2a having vertical guide portions 21, 21 and horizontal guide portions 22, 22 projecting inward at the upper ends thereof are attached and fixed.
A vertically movable guide 3 is engaged between the fixed guides 2 and 2a, and a vertical shaft drive device 4 is constructed between the vertically movable guide 3 and the fixed guides 2 and 2a.
この縦軸駆動装置４は、各固定ガイド２，２ａ
に沿つてリニアモータヨーク４１，４１を配設
し、縦可動ガイド３の両端にそれぞれアーム３１
を介してリニアモータコイル４２，４２を取付け
てリニアモータを構成している。 This vertical shaft drive device 4 has each fixed guide 2, 2a
Linear motor yokes 41, 41 are arranged along
A linear motor is constructed by attaching linear motor coils 42, 42 via the .
縦可動ガイド３の両端部には、ベース１の走行
基準面１１と固定ガイド２，２ａの垂直ガイド部
２１および水平ガイド部２２とにそれぞれ対向し
て圧力空気源に連通したオリフイスを設けて空気
軸受３２，３２を構成しており、縦可動ガイド３
は固定ガイド２，２ａに沿つて固定ガイド２，２
ａおよび走行基準面１１に対し非接触にて移動す
る。 At both ends of the vertically movable guide 3, orifices communicating with a pressurized air source are provided, facing the travel reference surface 11 of the base 1 and the vertical guide portion 21 and horizontal guide portion 22 of the fixed guides 2, 2a, respectively. It constitutes bearings 32, 32, and the vertically movable guide 3
is fixed guide 2, 2 along fixed guide 2, 2a.
a and the travel reference surface 11 without contacting them.
上記縦可動ガイド３には、長手方向、すなわち
Ｘ軸方向に沿つてガイド用窓孔３３が開設されて
いる。この窓孔３３には、対向する内側面に垂直
ガイド部３４，３４およびその上端に内向きに突
出した水平ガイド部３５が形成され、この窓孔３
３に横可動ガイド５を係合している。 A guide window hole 33 is provided in the vertically movable guide 3 along the longitudinal direction, that is, the X-axis direction. This window hole 33 is formed with vertical guide portions 34, 34 on opposing inner surfaces and a horizontal guide portion 35 projecting inward at its upper end.
3 is engaged with a horizontally movable guide 5.
横可動ガイド５には、前記窓孔３３の垂直ガイ
ド部３４，３４間に適合するスライド部５１およ
び上部に窓孔３３から突出するステージ６を一体
に形成すると共に、縦可動ガイド３と横可動ガイ
ド５との間に横軸駆動装置７を設けている。この
横軸駆動装置７は、縦可動ガイド３の上下側縁に
沿つてリニアモータヨーク７１，７１を配設し、
横可動ガイド５には、上下に突出したアーム５
２，５２を介してリニアモータコイル７２，７２
を配備してリニアモータを構成している。 The horizontally movable guide 5 is integrally formed with a slide portion 51 that fits between the vertical guide portions 34, 34 of the window hole 33, and a stage 6 projecting from the window hole 33 at the upper part. A horizontal shaft drive device 7 is provided between the guide 5 and the guide 5. This horizontal axis drive device 7 has linear motor yokes 71, 71 arranged along the upper and lower side edges of the vertically movable guide 3,
The horizontally movable guide 5 has an arm 5 that protrudes vertically.
Linear motor coils 72, 72 via 2, 52
are installed to form a linear motor.
横可動ガイド５のスライド部５１には、ベース
１の走行基準面１１と窓孔３３内の垂直ガイド部
３４および水平ガイド部３５とにそれぞれ対向し
て圧力空気源に連通したオリフイスを設けて空気
軸受５３を構成しており、横可動ガイド５は窓孔
３３に沿つて走行基準面１１および縦可動ガイド
３に対し非接触にて往復動する。 The sliding portion 51 of the horizontally movable guide 5 is provided with orifices communicating with a pressure air source, facing the travel reference surface 11 of the base 1 and the vertical guide portion 34 and horizontal guide portion 35 in the window hole 33, respectively. A bearing 53 is configured, and the horizontally movable guide 5 reciprocates along the window hole 33 with respect to the travel reference plane 11 and the vertically movable guide 3 without contacting it.
しかして、ステージ６は縦軸駆動装置４および
横軸駆動装置７の作動により縦横の各可動ガイド
３，５が移行して目標位置に移行するもので、ス
テージ６に加わる力のうち、鉛直下方に向うもの
はベース１にて支持され、また鉛直上方に向う力
はスライド部５１が縦可動ガイド３の水平ガイド
部３５にて支承され、縦可動ガイド５は固定ガイ
ド２の水平ガイド部２２に支承されるため、ステ
ージ６は、上下動およびピツチングが全くなく、
走り精度を向上できるのである。 Thus, the stage 6 is moved to the target position by moving the vertical and horizontal movable guides 3 and 5 by the operation of the vertical axis drive device 4 and the horizontal axis drive device 7. The vertically movable guide 5 is supported by the base 1, the vertically upward force is supported by the horizontal guide part 35 of the vertically movable guide 3, and the vertically movable guide 5 is supported by the horizontal guide part 22 of the fixed guide 2. Since the stage 6 is supported, there is no vertical movement or pitching.
Running accuracy can be improved.
＜発明の効果＞
本発明は上記の如く、ステージの走行案内にお
いて、鉛直下方に加わる力はベース、鉛直上方に
加わる力は縦可動ガイドに支承させて、鉛直上下
とも拘束するようにしたから、ステージの走り精
度が向上し、従つて高精度の位置決めを実現でき
る。しかも、本発明は、縦可動ガイドを係合し、
横可動ガイドに直接ステージを構成したから、従
来の縦横ガイドが交叉した構造のステージに比較
して、装置全体の小型化、薄形化を実現できるな
ど、構成簡易にして発明目的を達成した効果を有
する。<Effects of the Invention> As described above, in the stage traveling guide, the present invention is configured such that the force applied vertically downward is supported by the base, and the force applied vertically upward is supported by the vertically movable guide, so that both vertically upward and downward restraints are achieved. The running accuracy of the stage is improved, and therefore highly accurate positioning can be achieved. Moreover, the present invention engages the vertically movable guide,
Because the stage is configured directly on the horizontally movable guide, the overall device can be made smaller and thinner than the conventional stage that has a structure in which vertical and horizontal guides intersect, and this has the effect of simplifying the configuration and achieving the purpose of the invention. has.
第１図は本発明にかかるXYステージの平面
図、第２図は第１図Ａ−Ａ線に沿う断面図、第３
図は第１図Ｂ−Ｂ線に沿う断面図、第４図は従来
のXYステージの平面図、第５図は第４図Ｃ−Ｃ
線に沿う断面図、第６図は従来の他のXYステー
ジの平面図、第７図は第６図Ｄ−Ｄ線に沿う断面
図である。
１……ベース、１１……基準面、２，２ａ……
固定ガイド、３……縦可動ガイド、４……縦軸駆
動装置、５……横可動ガイド、６……ステージ、
７……横軸駆動装置。
FIG. 1 is a plan view of the XY stage according to the present invention, FIG. 2 is a sectional view taken along line A-A in FIG. 1, and FIG.
The figure is a sectional view taken along the line B-B in Figure 1, Figure 4 is a plan view of a conventional XY stage, and Figure 5 is a cross-sectional view taken along the line B-B in Figure 4.
6 is a plan view of another conventional XY stage, and FIG. 7 is a sectional view taken along line DD in FIG. 6. 1...Base, 11...Reference surface, 2, 2a...
Fixed guide, 3... Vertical movable guide, 4... Vertical axis drive device, 5... Laterally movable guide, 6... Stage,
7...Horizontal shaft drive device.
Claims (1)
ス上に互いに平行して取付けられた一対の固定ガ
イドと、固定ガイドに空気軸受を介して支持され
たガイド方向に往復動可能な縦可動ガイドと、縦
可動ガイドに空気軸受を介して支持されたステー
ジを備えた横可動ガイドと、縦可動ガイドに連繋
された縦軸駆動装置と、横可動ガイドに連繋され
た横軸駆動装置とから構成され、前記ステージに
加わる垂直方向の負荷が縦可動ガイドとベースと
で支持されて成るXYステージ。1. A base that serves as a reference plane for the XY stage, a pair of fixed guides mounted parallel to each other on the base, and a vertically movable guide supported by the fixed guide via an air bearing and capable of reciprocating in the guide direction. It consists of a horizontally movable guide equipped with a stage supported by the vertically movable guide via an air bearing, a vertical axis drive device linked to the vertically movable guide, and a horizontal axis drive device linked to the horizontally movable guide, An XY stage in which a vertical load applied to the stage is supported by a vertically movable guide and a base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23589683A JPS60127932A (en) | 1983-12-13 | 1983-12-13 | Xy stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23589683A JPS60127932A (en) | 1983-12-13 | 1983-12-13 | Xy stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60127932A JPS60127932A (en) | 1985-07-08 |
| JPH05166B2 true JPH05166B2 (en) | 1993-01-05 |
Family
ID=16992842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23589683A Granted JPS60127932A (en) | 1983-12-13 | 1983-12-13 | Xy stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60127932A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6258133U (en) * | 1985-09-30 | 1987-04-10 | ||
| JPH01188241A (en) * | 1988-01-22 | 1989-07-27 | Canon Inc | Shift guiding device |
| JP2513374B2 (en) * | 1991-06-26 | 1996-07-03 | ソニー株式会社 | Orthogonal bidirectional movement table device |
| JP2921750B2 (en) * | 1996-06-17 | 1999-07-19 | キヤノン株式会社 | Travel guide device |
| JP4673215B2 (en) * | 2005-12-28 | 2011-04-20 | 住友重機械工業株式会社 | Stage equipment |
| JP5406507B2 (en) * | 2008-11-06 | 2014-02-05 | オイレス工業株式会社 | Planar moving stage device |
| JP6520073B2 (en) * | 2014-11-25 | 2019-05-29 | 日本精工株式会社 | Table device, positioning device, flat panel display manufacturing device, and precision machine |
-
1983
- 1983-12-13 JP JP23589683A patent/JPS60127932A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60127932A (en) | 1985-07-08 |
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