JP2019060894A - Three-dimensional coordinate measurement device - Google Patents

Abstract

To provide a three-dimensional coordinate measurement device with which it is possible to suppress deformation of a surface plate due to heat and perform highly accurate measurement.SOLUTION: A groove 40 is formed in a right side of a stone surface plate 10 along a direction of an axis Y, and a Y guide 42 for supporting a portal Y carriage between the groove 40 and a right-side face 10R of the surface plate 10 so as to be movable in the direction of the axis Y. A support part is provided at a lower end on a right side of the Y carriage, the support part being supported by the Y guide 42 so as to be movable in the direction of the axis Y. A front side face 10F and a rear side face 10E of the surface plate 10 are provided with heat insulation members 150 and 152 covering the whole surfaces of these, to shut off heat coming into the inside of the surface plate 10 and going out to open air from the front side face 10F and the rear side face 10E of the surface plate 10.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a three-dimensional coordinate measuring apparatus, and more particularly to a three-dimensional coordinate measuring apparatus for measuring a three-dimensional shape of a measurement object by moving a measurement probe in three axial directions of X, Y and Z axes.

  In a general three-dimensional coordinate measuring apparatus, a Y carriage movable in the front-rear direction (Y-axis direction) is disposed above the surface plate on which the measurement object is placed. The Y carriage has a columnar X guide extended along the left-right direction (X axis direction), and the X carriage is supported movably in the X axis direction by the X guide. A columnar Z carriage along the vertical direction (Z axis direction) is supported movably in the Z axis direction on the X carriage, and a measurement probe is attached to the lower end of the Z carriage. Thereby, the measuring element (stylus) of the measurement probe is supported so as to be movable in the three axial directions of the X, Y, and Z axes.

  In such a three-dimensional coordinate measuring apparatus, Patent Document 1 discloses a support structure for supporting a Y carriage via an air pad (air bearing) by the left and right side surfaces of the surface plate and the upper surface of the surface plate along the left and right side surfaces. It is done.

  In addition, as described in Patent Document 1, a granite having a high hardness and a large specific gravity is used as a surface plate to avoid a decrease in measurement accuracy due to a decrease in straightness or vibration of the surface of the surface plate due to deformation of the surface plate. Stone materials such as marble and marble are used.

  On the other hand, the surface plate of stone has low heat conductivity, so heat can not be transmitted to the inside, and when the temperature of ambient air around the surface plate (ambient temperature) changes, the temperature inside the surface plate becomes uniform. The temperature gradient occurs over a long time. When such a temperature gradient occurs, there is a problem that the surface plate is deformed and the straightness of the surface (upper surface, side surface, etc.) of the surface plate is lowered, leading to a decrease in measurement accuracy. In particular, since the left and right side surfaces of the surface plate are used as guides for the Y carriage, the decrease in straightness of the left and right side surfaces causes an error in the support angle of the Y carriage, which greatly affects the measurement results.

  Therefore, Patent Document 1 discloses that the surface of the platen not used as a guide of the Y carriage, that is, the front and back sides be covered with a heat insulating member. According to this, since the heat quantity coming in and out from the side surfaces before and after the platen is reduced, the occurrence of the temperature gradient in the Y-axis direction is suppressed even if the ambient temperature changes and the temperature gradient is generated inside the platen. . Therefore, regardless of the change in the ambient temperature, the decrease in straightness on the left and right sides of the platen is suppressed, and the decrease in measurement accuracy is suppressed.

JP 2007-33052 A

  By the way, like patent document 1, the measurement area where a measurement object is mounted and measurement is performed among the areas of a surface plate, and the guide area which guides a Y carriage in the direction of the Y-axis are integrally formed. When the Y carriage is moved, the heat generated by the motor or the like of the Y drive mechanism for moving the Y carriage in the Y axis direction flows into the measurement region through the guide region.

Since the measurement area has a large volume and a large heat capacity (low thermal conductivity), when heat flows into the measurement area, it takes a long time for the platen to reach a uniform temperature.

  Therefore, even if the side surfaces before and after the surface plate are covered with the heat insulating member as in Patent Document 1 to suppress the generation of the temperature gradient in the Y axis direction of the surface plate due to the influence of ambient temperature, the Y drive mechanism is generated. The heat may cause a temperature gradient in the Y-axis direction. In this case, the straightness of the surface of the guide portion is reduced, which leads to a reduction in measurement accuracy.

  The present invention has been made in view of such circumstances, and it is an object of the present invention to provide a three-dimensional coordinate measurement apparatus capable of performing highly accurate measurement by suppressing deformation of a platen due to heat.

  In order to achieve the above object, a three-dimensional coordinate measurement apparatus according to one aspect of the present invention has an upper surface perpendicular to the Z-axis and a first side surface along the Y-axis direction, and has an object to be measured on the upper surface. A three-dimensional coordinate measuring apparatus comprising: a platen to be mounted; and a Y carriage that supports the measurement probe on the upper surface side of the platen and is movably disposed in the Y-axis direction. A groove formed along the side surface of the groove, the groove internally supporting the Y carriage movably in the Y-axis direction by the inner surface and the first side surface, and thermal insulation covering the side surface of the platen different from the first side surface And a member.

  According to this aspect, since the heat entering and exiting the inside or the outside of the platen from the side surface of the platen is reduced by the heat insulating member, even if the ambient temperature of the platen changes, the temperature changes inside the platen. It becomes difficult to occur and the deformation of the platen is suppressed. Further, even if a temperature change occurs inside the surface plate, the occurrence of a temperature gradient in the Y-axis direction is suppressed, so that the decrease in the rectilinearity of at least the first side surface and the inner surface of the groove is suppressed. Movement in the axial direction is performed with high accuracy.

  In addition, heat generated near the area (guide area) of the surface plate on the first side face side of the groove, for example, heat generated from a motor or the like that moves the Y carriage in the Y axis direction, Y carriage and surface plate The grooves prevent the frictional heat between the guide region and the guide region from flowing into the measurement region of the platen on which the measurement object is placed and the measurement is performed. Therefore, the temperature change of the measurement area of the platen due to the heat is suppressed, and the deformation of the measurement area of the platen is suppressed. At this time, even if a temperature change occurs in the guide area and a temperature gradient is generated in the guide area, the volume of the guide area is small compared to the measurement area, and the amount of deformation due to heat is small and the first side and the inner surface of the groove The decrease in the degree of straightness is suppressed, and the movement of the Y carriage in the Y-axis direction is accurately performed.

  In the three-dimensional coordinate measurement apparatus according to another aspect of the present invention, it is preferable that the first and second support members and the third and fourth support members be disposed at mutually opposing positions.

  In the three-dimensional coordinate measurement apparatus according to still another aspect of the present invention, the heat insulating member can be provided on the side surface along the X-axis direction of the surface plate.

  In the three-dimensional coordinate measurement apparatus according to still another aspect of the present invention, the Y carriage can be configured to have a support that moves in the Y-axis direction slidably on the first side surface and the inner surface of the groove.

  In the three-dimensional coordinate measurement apparatus according to still another aspect of the present invention, the support may be provided with a motor for moving the Y carriage in the Y axis direction.

  In the three-dimensional coordinate measurement apparatus according to still another aspect of the present invention, the platen may be an aspect that is a platen of stone.

  According to the present invention, it is possible to perform highly accurate measurement by suppressing deformation of the platen due to heat.

The perspective view which showed the external appearance of the three-dimensional coordinate measuring apparatus to which this invention is applied Front view showing the appearance of a three-dimensional coordinate measuring apparatus to which the present invention is applied Front view showing the right side of the platen in an enlarged manner Right side view showing the right side of the platen enlarged A perspective view showing the Y carriage with the cover removed FIG. 18 is a top view showing the upper surface of a platen, showing the arrangement of air pads provided on a Y carriage with respect to the platen. FIG. 18 is a right side view showing the right side of the platen, showing the arrangement of the air pads provided on the Y carriage with respect to the platen. Front view showing the groove part of the platen enlarged It is the perspective view which expanded and showed the groove part of the platen, and the figure which showed the bellows cover A perspective view showing the Z column removed from the X guide A perspective view showing the Z column removed from the X guide A perspective view showing the Z column removed from the X guide The perspective view which showed the support part of Z column removed from X guide The perspective view which showed the support part of Z column removed from X guide A schematic view showing the positional relationship between the support point at which the Y guide of the platen supports the Y carriage, the scale in the linear encoder, and the measurement region in which the measurement object is disposed from the upper surface side of the platen A diagram showing how the platen shrinks when the ambient temperature drops A diagram showing how the platen shrinks when the ambient temperature rises

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

  1 and 2 are a perspective view and a front view showing an appearance of a three-dimensional coordinate measurement apparatus 1 to which the present invention is applied.

  The three-dimensional coordinate measurement apparatus 1 shown in these figures has a platen 10 supported via a gantry 12 on an installation surface (floor surface). The platen 10 is integrally formed in a rectangular shape by a stone material such as granite or marble, and has a flat upper surface 10T on which an object to be measured is placed. The upper surface 10T is disposed parallel to the X axis and the Y axis, that is, perpendicular to the Z axis. The platen 10 is not limited to a stone platen.

  A gate-shaped Y carriage 14 is installed on the upper surface 10T side of the platen 10. A right Y-carriage is a first support member erected extending along the Z-axis direction on each of the right side and the left side of the platen 10 when the platen 10 is viewed from the front side. A left Y carriage 18 which is a support member 16 and a second support member, and a columnar X guide 20 which extends over the upper ends of the right Y carriage 16 and the left Y carriage 18 and extends along the X-axis direction.

  The lower end portion of the right Y carriage 16 is movably supported by a Y guide 42 described later along the Y axis direction formed on the surface plate 10. Further, at the lower end portion of the right Y carriage 16, a drive unit that abuts on the Y guide 42 is provided, and the right Y carriage 16 moves along the Y guide 42 by the driving force of the drive unit. The lower end portion of the left Y carriage 18 is slidably supported on the upper surface 10T of the platen 10.

By this, the Y carriage 14 is supported so as to be movable in the Y axis direction with respect to the surface plate 10, and the drive portion on the lower end of the right Y carriage 16 makes the right Y carriage 16 the driving side, and the left Y carriage It moves in the Y-axis direction with 18 as the driven side.

  A Z column 22 is movably supported along the X guide 20 by the X guide 20. The Z column 22 incorporates a drive unit in contact with the X guide 20, and moves in the X axis direction along the X guide 20 by the driving force of the drive unit.

  In addition, a columnar Z carriage 24 extending along the Z axis is supported movably in the Z axis direction inside the Z column 22 (see FIG. 2), and the lower end side of the Z carriage 24 is Z It projects from the lower end side of the column 22. The Z column 22 incorporates a drive unit in contact with the Z carriage 24. The Z carriage 24 is moved in the Z axis direction by the driving force of the drive unit.

  A measurement probe 26 such as a touch probe is attached to the lower end of the Z carriage 24. The measurement probe 26 has, for example, a rod-like stylus 28 having a tip ball, and the measurement probe 26 measures the presence or absence of contact of the tip (tip ball) of the stylus 28 with the measurement object or the measurement object of the tip of the stylus 28 The amount of displacement of the stylus 28 caused by the contact with it is detected.

  The three-dimensional coordinate measuring apparatus 1 configured as described above is measured by the movement of the Y carriage 14 in the Y axis direction, the movement of the Z column 22 in the X axis direction, and the movement of the Z carriage 24 in the Z axis direction. The stylus 28 of the probe 26 is moved in the X, Y, Z axis directions, and the tip (tip ball) of the stylus 28 is moved along the surface of the measurement object placed on the upper surface 10T of the platen 10. Then, the position (movement amount) of the Y carriage 14 in the Y axis direction, the position (movement amount) of the Z column 22 in the X axis direction, the position (movement amount) of the Z carriage 24 in the Z axis direction, and the stylus 28 at that time. The three-dimensional coordinates of each position on the surface of the measurement object are measured by measuring the position (displacement amount) of The process related to measurement of three-dimensional coordinates is well known, and thus detailed description will be omitted.

  Next, a Y drive mechanism that supports the Y carriage 14 movably in the Y axis direction and moves the Y carriage 14 in the Y axis direction will be described.

  First, the support means (Y guide mechanism) of the Y carriage 14 in the Y drive mechanism will be described.

  FIG.3 and FIG.4 is the front view and right side view which expanded and showed the right side part of the surface plate 10. FIG.

  As shown in FIG. 3, the platen 10 has an upper surface 10T and a lower surface 10B perpendicular to the Z axis, and a right side surface 10R perpendicular to the X axis. A groove 40 along the Y-axis direction is formed near the right side surface 10R of the platen 10 and on the upper surface 10T side of the platen 10.

  In FIGS. 1 and 2, a telescopic covering member such as a bellows cover is installed at the upper opening of the groove 40, and a plate is formed on the front side and rear side (front side 10F and rear side 10E) of the platen 10. In the state where the covering members (the heat insulating members 150 and 152 described later) are attached, FIG. 3 and FIG. 4 show the state in which the covering members are removed.

  The groove 40 has a right side surface 40R and a left side surface 40L perpendicular to the X axis, which face each other, and a bottom surface 40B perpendicular to the Z axis.

  Thus, the right side surface 40R of the groove 40, the right side surface 10R of the platen 10, the upper surface 10T of the platen 10 between them, and the lower surface 10B of the platen 10 extend along the Y-axis direction. The Y guide 42 is formed.

  The right side 10R of the surface plate 10 and the right side 40R and the left side 40L of the groove 40 may not necessarily be planes perpendicular to the X axis as long as they are planes formed along the Y axis direction. The lower surface 10B of the disc 10 and the bottom surface 40B of the groove 40 may not necessarily be perpendicular to the Z axis.

  In the following, the right side 40R of the groove 40 is the left side 42L of the Y guide 42, the right side 10R of the surface plate 10 is the right side 42R of the Y guide 42, and the upper surface 10T of the surface plate 10 between them is the Y guide 42. The upper surface 42T of the second embodiment and the lower surface 10B of the platen 10 are referred to as the lower surface 42B of the Y guide 42.

  On the other hand, FIG. 5 shows a perspective view of the Y carriage 14 with the cover of each part removed, and as shown in FIG. 4 and FIG. And a wide support 50 is provided.

  Further, as shown in FIG. 3, the support portion 50 is formed in a bifurcated shape when viewed from the front side.

  In addition, the state which removed the covering member which covers the support part 50 is shown in FIG.3 and FIG.4.

  The supporting portion 50 mainly faces the upper surface 42T of the Y guide 42, as shown in FIG. 3, and has a proximal end 52 and a proximal end 52 disposed along a direction (horizontal direction) orthogonal to the Z axis. From the base end 52 to the left side 42L of the Y guide 42, and extends from the base end 52 to the left side 42L of the Y guide 42. And a left side portion 56 disposed on the opposite side.

  Further, at the lower end portion of the right side portion 54, support plates 58A, 58A extended in the X-axis direction to a position opposed to the lower surface 42B of the Y guide 42 are provided as the tip portion 58 of the support portion 50.

  Each of the proximal end 52, the right side 54, the left side 56, and the distal end 58 of the support portion 50 can slide relative to the Y guide 42 by ejecting air as described below. A plurality of disc-shaped air pads are provided. Further, a disc-shaped air pad which can slide on the upper surface 10T of the surface plate 10 by ejecting air also to the lower end portion of the left Y carriage 18 is provided.

  6 and 7 are a top view and a right side view showing the top surface 10T and the right side surface 10R of the platen 10, showing the arrangement of the air pads provided on the Y carriage 14 with respect to the platen 10. FIG.

  In these figures, the two air pads 62F and 62E disposed along the upper surface 42T of the Y guide 42 are two points (on straight lines parallel to the Y axis) at the base end 52 of the support portion 50 along the Y axis direction. 2) and is disposed facing the upper surface 42T of the Y guide 42 downward.

  The two air pads 64F and 64E disposed along the right side surface 42R of the Y guide 42 are provided at two places (two places on a straight line parallel to the Y axis) along the Y axis direction at the right side 54 of the support portion 50. It is provided at a position, and is disposed facing the right side surface 42R of the Y guide 42 and facing left.

  The two air pads 66F, 66E disposed along the left side surface 42L (the right side surface 40R of the groove 40) of the Y guide 42 are two points (parallel to the Y axis) along the Y axis direction in the left side portion 56 of the support portion 50. Provided at two positions on a straight line, facing the left side surface 42L of the Y guide 42 and disposed rightward.

  The two air pads 68F and 68E (see FIGS. 3 and 7) disposed along the lower surface 42B of the Y guide 42 are two points (parallel to the Y axis) along the Y axis direction at the tip portion 58 of the support portion 50. It is provided at two positions on a straight line, and is disposed facing the lower surface of the Y guide 42 upward.

  An air pad 70 disposed on the upper surface near the left side surface of the platen 10 is provided at the lower end portion of the left Y carriage 18 and is disposed facing the upper surface 10T of the platen 10 downward.

  Here, the air pads 62F, 64F, 66F, and 68F installed on the front side (front side) in each of the base end 52, the right side 54, the left side 56, and the tip 58 of the support unit 50 are in the Y-axis direction. The air pads 62E, 64E, 66E, 68E disposed at substantially the same position with respect to (i.e., disposed along the same XZ plane) and disposed at the rear side (rear side) are approximately the same position in the Y-axis direction Will be placed.

  The air pads 64F and 64E installed on the right side portion 54 of the support portion 50 and the air pads 66F and 66E installed on the left side portion 56 are disposed at mutually opposing positions (that is, substantially the same positions in the Z axis direction).

  The air pads 62F and 62E installed at the proximal end 52 of the support 50 and the air pads 68F and 68E installed at the distal end 58 are disposed at mutually opposing positions (that is, substantially the same positions in the X axis direction) .

  The air pad 70 installed at the lower end portion of the left Y carriage 18 has the Y axis of the center of gravity of all members (Y carriage 14 and Z column 22) whose position in the Y axis direction moves along with the Y carriage 14 in the Y axis direction. It is arranged at a position substantially coincident with the position of the direction.

  Also, while the air pads 62F, 62E, 70 have a diameter of 110 mm, for example, the air pads 64F, 64E, 66F, 66E have a diameter smaller than that of the air pads 62F, 62E, 70, for example, a diameter of 80 mm. . Further, as the air pads 68F, 68E, one having a diameter smaller than that of the air pads 64F, 64E, 66F, 66E, for example, a diameter of 60 mm is used.

  As a reference, the platen 10 has a width (lateral width) of about 800 mm to about 1000 mm in the X-axis direction and a width (depth) of about 1200 mm to about 2700 mm in the Y-axis direction. The width (height) in the Z-axis direction is about 600 mm to about 800 mm, and the support 50 has a width (depth) in the Y-axis direction of about 650 mm.

  According to the support means of the Y carriage 14 configured as described above, the Y carriage 14 is driven by the Y via the air pads 62F, 62E, 64F, 64E, 66F, 66E, 68F, 68E of the support portion 50 of the right Y carriage 16. It is supported by the guide 42 (surface plate 10). That is, the Y carriage 14 is supported by the Y guide 42 by the engagement between the support portion 50 and the Y guide 42. At the same time, the Y carriage 14 is supported by the surface plate 10 (upper surface 10T) via the air pad 70 of the left Y carriage 18.

  In addition, the air pads 62F, 62E, 64F, 64E, 66F, 66E, 68F, 68E, and 70 eject air to form the air pads 62F, 62E, 64F, 64E, and 66F, of the support portion 50 of the right Y carriage 16. 66E, 68F, 68E can slide in the Y-axis direction with respect to the Y guide 42, and the air pad 70 of the left Y carriage 18 can slide on the upper surface 10T of the platen 10.

  Therefore, the Y carriage 14 can move in the Y axis direction with respect to the surface plate 10.

  Subsequently, drive means of the Y carriage 14 in the Y drive mechanism will be described.

  As shown in FIG. 4, a drive unit 80 is provided on the right side portion 54 of the support unit 50. As also shown in FIGS. 6 and 7, the drive unit 80 is disposed at a position substantially intermediate between the two air pads 64F and 64E provided on the right side 54 of the support unit 50.

  The driving unit 80 is integrally configured by assembling a motor 82, a rotatable roller 84, and a reduction mechanism that couples them in a power transmittable manner to a support member, and the motor 84 is driven when the motor 82 is driven. Rotate.

  As shown in FIG. 6, the drive unit 80 has the Y guide 42 at a position where the rotation axis of the roller 84 is parallel to the Z axis and the outer peripheral surface of the roller 84 is approximately halfway between the two air pads 64F and 64E. Of the support portion 50 so as to abut on the right side surface 42R (right side surface 10R of the surface plate 10).

  Therefore, by driving the motor 82 of the drive unit 80 to rotate the roller 84, the support unit 50 moves along the Y guide 42, and the Y carriage 14 moves in the Y axis direction.

  In addition to the drive unit 80, for example, a drive unit in contact with the left side surface 42L of the Y guide 42 may be provided opposite to the drive unit 80 as a drive unit of the Y carriage 14. Only the drive portion that contacts the left side surface 42L of the guide 42 may be provided.

  Subsequently, position detection means of the Y carriage 14 in the Y drive mechanism will be described.

  FIG. 8 is a front view showing a portion of the groove 40 of the platen 10 in an enlarged manner. As shown in the figure, on the left side surface 40L of the groove 40, for example, a scale 112 which is a long plate scale constituting an optical linear encoder 110 and on which a grid scale is provided is installed along the Y-axis direction (See FIG. 6).

  On the other hand, on the left side portion 56 of the support portion 50, the optical sensor 114 constituting the linear encoder 110 is provided with a support member and disposed at a position facing the scale 112 (see FIG. 6). Then, a detection signal corresponding to the grid scale at the position facing the light sensor 114 is output from the light sensor 114.

  According to this linear encoder 110, when the Y carriage 14 moves in the Y axis direction, the optical sensor 114 moves along with the Y carriage 14 in the Y axis direction, and the facing position of the optical sensor 114 with respect to the scale 112 changes. At this time, the position of the Y carriage 14 in the Y-axis direction is detected based on the detection signal output from the light sensor 114.

  Subsequently, a covering member for covering the upper opening of the groove 40 and the front side surface 10F and the rear side surface 10E of the platen 10 will be described.

  FIG. 9 is a perspective view showing the groove 40 of the platen 10 in an enlarged manner.

  As shown in the figure, right rail 130R and left rail 130L which are omitted in FIG. 8 are fixed to the surface plate 10 and arranged at the right edge and the left edge of the upper opening of the groove 40.

  The right rail 130R and the left rail 130L both extend from the front end (front end) of the groove 40 to the rear end (rear end) of the groove 40, and the right rail 130R corresponds to the right side 40R of the groove 40 (Y guide 42 The left rail 130L is provided along the left side surface 40L of the groove 40 (see FIG. 6).

  In addition, the right rail 130R and the left rail 130L have symmetrical shapes, and are provided with guide grooves 132R and 132L which are laterally-oriented openings and have openings in directions facing each other.

  Then, at the upper opening of the groove 40, an extendable bellows cover 134 is installed, which is supported by the end edges of the left and right sides inserted into the guide groove 132R of the right rail 130R and the guide groove 132L of the left rail 130L.

  The bellows cover 134 is installed separately on the front side bellows cover 134F and the rear side bellows cover 134E (see FIG. 1) across the left side portion 56 of the support portion 50 of the right Y carriage 16 and installed on the front side The front end of the bellows cover 134F is fixed to the front side surface 10F of the platen 10 via a fixing member (not shown) (such as a covering member covering the front side surface 10F of the platen 10). It is fixed to the front of the left side portion 56. The front end of the bellows cover 134E installed on the rear side is fixed to the rear surface of the left side 56 of the support portion 50, and the rear end is a fixing member (not shown) on the rear side 10E of the platen 10 (rear side 10E of the platen 10) Is fixed to the platen 10 via a covering member or the like that covers the

  According to this, the upper opening of the groove 40 is covered by the bellows cover 134. Then, along with the movement of the Y carriage 14 (support portion 50) in the Y axis direction, the bellows cover 134 expands and contracts in the Y axis direction, and when the Y carriage 14 moves forward, the front bellows cover 134F contracts. The rear bellows cover 134E stretches. When the Y carriage 14 moves rearward, the front bellows cover 134F expands and the rear bellows cover 134E contracts. Therefore, the upper opening of the groove 40 is always covered with the bellows cover 134 regardless of the position of the Y carriage 14 in the Y-axis direction.

  Thus, the scale 112 installed inside the groove 40 can be prevented from being directly hit by the outside air, and the temperature change inside the groove 40 can be suppressed, and the scale 112 is expanded and contracted by the temperature change of the outside air. Is prevented.

  In addition, dust or the like is prevented from entering the inside of the groove 40, dust or the like adheres to the scale 112, and a measurement error due to a reading error of the grid scale occurs, or the inside of the groove 40 is It is possible to prevent the situation where the movement of the Y carriage 14 in the Y-axis direction becomes unstable due to the adhesion of dust etc. to the air pads 66F, 66E.

  In addition, covering members are provided on the front side surface 10F and the rear side surface 10E of the platen 10. As shown in FIGS. 6 and 7, each of the front side surface 10F and the rear side surface 10E of the platen 10 has plate-like heat insulating members 150, 152 as covering members covering substantially the entire surfaces thereof. It is fixed.

  As a result, the amount of heat transferred to and from the inside or outside of the platen 10 from the front side 10F and the back side 10E of the platen 10 is reduced, so that the temperature of the outside air (ambient temperature) around the platen 10 changes. The temperature change inside the surface plate 10 hardly occurs, and the deformation of the surface plate 10 is suppressed. Further, even if the temperature change occurs inside the surface plate 10 as described later, the generation of the temperature gradient in the Y-axis direction is suppressed. Therefore, the decrease in the degree of straightness of the Y carriage 14 is suppressed.

Next, an X driving mechanism for supporting the Z column 22 movably in the X axis direction and moving the Z column 22 in the X axis direction will be described.

  First, the support means (X guide mechanism) of the Z column 22 in the X drive mechanism will be described.

  FIG. 5 shows the Y carriage 14 with the cover removed as described above, and FIGS. 10, 11 and 12 show the Z column 22 removed from the X guide 20. As shown in these figures, the Z column 22 is a support portion 200 to which various parts are assembled, and includes a support portion 200 corresponding to an X carriage, and the support portion 200 has a square columnar X guide 20. A rectangular X guide insertion hole 202 along the X axis direction to be inserted is provided.

  In the support portion 200, the X guide is formed by ejecting air to each of the front surface 202F defining the X guide insertion hole 202, the rear surface 202E, the upper surface 202T, and the lower surface 202B (referred to as the front surface 202F of the X guide insertion hole 202). A disc-like air pad is provided which is slidable with respect to 20.

  As shown in FIG. 11, a total of four air pads 210, 210, 210, and 210 are disposed on the front face 202F of the X guide insertion hole 202, one for each of four places symmetrical vertically and horizontally. It is arrange | positioned facing the front surface 20F (refer FIG. 5) of 20 facing back.

  As shown in FIG. 12, a total of three air pads 212, 212, 212 are disposed on the rear surface 202 E of the X guide insertion hole 202 at each of the upper two places and the lower one as shown in FIG. Is disposed facing the rear face 20E (see FIG. 5).

  On the upper surface 202T of the X guide insertion hole 202, as shown in FIG. 10, a total of two air pads 214, 214 are disposed at each of the two left and right places, and the upper surface 20T of the X guide 20 (see FIG. 5) Is placed facing downwards.

  As shown in FIG. 11, one air pad 216 is disposed on the lower surface 202B of the X guide insertion hole 202, and is disposed facing the lower surface 20B (see FIG. 5) of the X guide 20 and facing upward.

  According to the support means of the Z column 22 configured as described above, when the X guide 20 is inserted into the X guide insertion hole 202 of the support portion 200, the support portion 200 is inserted through the air pads 210, 212, 214, and 216. The Z column 22 is supported by the X guide 20 via the support 200 while being supported by the X guide 20.

  In addition, the air pads 210, 212, 214, and 216 can eject air from the air pads 210, 212, 214, and 216 so that the air pads 210, 212, 214, and 216 of the support unit 200 can slide in the X axis direction with respect to the X .

  Therefore, the Z column 22 can move in the X axis direction.

  Subsequently, drive means of the Z column 22 in the X drive mechanism will be described.

  As shown in FIGS. 10 to 12, the rear surface 202E of the X guide insertion hole 202 has the same configuration as the drive unit 80 in the above Y drive mechanism, and is provided with a motor 222 and a roller 224 (see FIG. 12). A drive unit 220 is provided. The drive unit 220 is installed on the rear surface 202E of the X guide insertion hole 202 so that the rotation axis of the roller 224 is parallel to the Z axis, and the outer peripheral surface of the roller 224 is above the rear surface 202E of the X guide insertion hole 202. It is installed so as to abut on the rear surface 20E (see FIG. 5) of the X-guide 20 at a position approximately halfway between the two installed air pads 212, 212.

  Therefore, by driving the motor 222 of the drive unit 220 to rotate the roller 224, the support unit 200 moves along the X guide 20, and the Z column 22 moves in the X axis direction.

  The X guide 20 and the support portion 200 are provided with an optical linear encoder similar to the above-mentioned linear encoder 110 in the Y drive mechanism as a position detection means of the Z column 22 in the X drive mechanism. A long plate-like scale is installed along the X-axis direction, and a light sensor is disposed on the support 200 at a position facing the scale.

  Next, a Z drive mechanism for supporting the Z carriage 24 movably in the Z axis direction and moving the Z carriage 24 in the Z axis direction will be described.

  First, the support means (Z guide mechanism) of the Z carriage 24 in the Z drive mechanism will be described.

  13 and 14 show a state in which the Z carriage 24 is removed from the support portion 200 of the Z column 22 shown in FIGS. 10 to 12, and as shown in these figures, the support portion 200 is shown. In this case, a rectangular Z carriage insertion hole 250 along the Z-axis direction for inserting the square pillar Z carriage 24 is provided on the front side of the X guide insertion hole 202.

  In the support portion 200, air (refer to FIG. 14) is provided to each of the front surface 250F defining the Z carriage insertion hole 250, the rear surface 250E, the right side surface 250R, and the left side 250L (referred to as the front surface 250F of the Z carriage insertion hole 250). An air pad is provided which can slide relative to the Z carriage 24 by ejecting the

  Near the lower opening of the Z carriage insertion hole 250, as shown in FIG. 13, a total of four air pads, one for each of the front face 250F, rear face 250E, right side 250R and left side 250L of the Z carriage insertion hole 250. 260, 262, 264, 266 are disposed, and their air pads 260, 262, 264, 266 are respectively the front surface 24F, rear surface 24E, right side 24R, and left side 24L (see FIG. 12) of the Z carriage 24. Facing back, facing forward, facing left, facing right.

  In the vicinity of the upper opening of the Z carriage insertion hole 250, as shown in FIG. 14, a total of three air pads 260, 262, 264, one for each of the front surface 250F, rear surface 250E and right side 10R of the Z carriage insertion hole 250. The air pads 260, 262, and 264 are disposed rearward, forward, and left facing the front surface 24F, the rear surface 24E, and the right surface 24R of the Z carriage 24, respectively.

  On the other hand, two air pads 266, 266 are disposed on the left side surface 250L of the Z carriage insertion hole 250 near the upper opening of the Z carriage insertion hole 250, and the air pads 266, 266 face the left side 24L of the Z carriage 24. And placed in the right direction.

  According to the support means of the Z carriage 24 configured as described above, when the Z carriage 24 is inserted into the Z carriage insertion hole 250 of the support portion 200, the support portion 200 is inserted via the air pads 260, 262, 264, and 266. The Z carriage 24 is supported.

  In addition, the air pads 260, 262, 264, 266 eject air so that the air pads 260, 262, 264, 266 of the support portion 200 can slide relative to the Z carriage 24, and the Z carriage 24 It becomes movable in the Z-axis direction.

  Subsequently, drive means of the Z carriage 24 in the Z drive mechanism will be described.

  As shown in FIGS. 13 and 14, the front surface 250F of the Z carriage insertion hole 250 has the same configuration as the drive unit 80 in the above Y drive mechanism, and is provided with a motor 272 and a roller 274 (see FIG. 14). A drive unit 270 is provided. Drive portion 270 is installed on front surface 250F of Z carriage insertion hole 250 so that the rotation axis of roller 274 is parallel to the X axis, and the outer peripheral surface of roller 274 is installed on front surface 250F of Z carriage insertion hole 250 It is installed to abut on the front surface 24F of the Z carriage 24 at a position approximately halfway between the two air pads 260, 260.

  Therefore, by driving the motor 272 of the drive unit 270 to rotate the roller 274, the Z carriage 24 moves in the Z axis direction with respect to the support unit 200.

  The Z carriage 24 and the support portion 200 are provided with an optical linear encoder similar to the above-mentioned linear encoder 110 in the Y drive mechanism as a position detection means of the Z carriage 24 in the Z drive mechanism. A long plate-like scale is installed along the Z-axis direction, and a light sensor is disposed on the support 200 at a position facing the scale.

  Also, the cable protection pipe 278 shown in FIGS. 10 to 14 is a bendable guide member for guiding the cable through the inside. The cable of the measurement probe 26 attached to the lower end of the Z carriage 24 is inserted through the inside of the Z carriage 24 and the inside of the cable protection tube 278 inside the Z column 22 and interference with other members is prevented. .

  In the three-dimensional coordinate measurement apparatus 1 configured as described above, mainly, the measurement accuracy of the position (Y coordinate value) of the Y carriage 14 in the Y axis direction, that is, the measurement accuracy of the Y coordinate value of the measurement object is improved. The effects of the plan will be described.

  FIG. 15 shows the positional relationship between the support point at which the Y guide 42 of the platen 10 supports the Y carriage 14, the scale 112 of the linear encoder 110, and the measurement region in which the object to be measured is disposed. It is a schematic diagram shown from the side.

  In the figure, two support points P1 and P2 located on the left side surface 42L of the Y guide 42 formed on the surface plate 10 indicate positions where the air pads 66F and 66E of the Y carriage 14 (support portion 50) abut. The two support points P3 and P4 on the right side surface 42R of the Y guide 42 indicate positions where the air pads 64F and 64E of the Y carriage 14 (support portion 50) abut, and exist on the right side surface 42R of the Y guide 42. The supporting point P0 (driving point) indicates the position where the roller 84 of the driving unit 80 of the Y carriage 14 (supporting unit 50) abuts (see FIG. 6).

  Also, the support points P1 and P2 indicate fixed support points, and the support points P3 and P4 indicate auxiliary support points. That is, the air pads 66F and 66E which become fixed support points P1 and P2 can not move forward and backward in the normal direction of the left side surface 42L of the Y guide 42 which is a guide surface on which the support portion 50 of the Y carriage 14 slides. Supported by On the other hand, air pads 64F and 64E serving as auxiliary support points P3 and P4 are in the support portion 50 of Y carriage 14 with respect to the normal direction of right side surface 42R of Y guide 42 which is a guide surface on which they slide. It is supported so as to be movable forward and backward, and is urged in a direction to abut the right side surface 42R.

  As shown to the same figure, the scale 112 installed in left side 40L of the groove | channel 40 is arrange | positioned between a measurement area | region and the Y guide 42 in which supporting point P0-P4 are provided. That is, the scale 112 is disposed closer to the measurement area than the air pads 64F, 64E, 66F, 66E of the Y carriage 14 (right Y carriage 16) and the drive unit 80.

  Therefore, the right Y carriage 16 which is a support member along the Z-axis direction of the Y carriage 14 is not interposed between the measurement area and the scale 112, and the distance from the measurement area to the scale 112 is short.

  Therefore, even if the direction of the X guide 20 of the Y carriage 14 deviates from the X axis direction due to the yawing direction (direction around the Z axis) of the Y carriage 14 or the like, the stylus 28 of the measurement probe 26 in the measurement area The difference between the Y coordinate value of the position actually arranged and the Y coordinate value of the stylus 28 obtained from the Y coordinate value of the Y carriage 14 measured by the scale 112 (linear encoder 110) is reduced.

  Therefore, even when a shake or the like in the yawing direction occurs in the Y carriage 14, the measurement accuracy of the Y coordinate value of the Y carriage 14, that is, the measurement accuracy of the Y coordinate value of the measurement object can be improved.

  When the roller 84 of the drive unit 80 is pressed against the right side surface 42R of the Y guide 42, the Y guide 42 uses one support point P0 of the right side surface 42R with the support points P3 and P4 as auxiliary support points. , It is stabilized in a state where it is supported by two support points P1 and P2 of the left side surface 42L. As a result, the yawing direction of the Y carriage 14 is less likely to occur.

  Further, since the scale 112 is installed on the platen 10, the influence of thermal deformation of the Y guide, the platen and Y as compared with the case where the scale 112 is installed on a Y guide or the like separate from the platen 10. There is no reduction in measurement accuracy due to the instability of the joint with the guide. Therefore, high measurement accuracy can be maintained continuously.

  In addition, since the scale 112 is not provided on the peripheral portion (right side surface 10R, left side surface 10L, etc.) of the surface plate 10, the scale 112 is less affected by changes in ambient temperature because the scale 112 is disposed inside the surface plate 10 The reduction in accuracy due to the expansion and contraction of the In particular, since the bellows cover 134 is installed at the upper opening of the groove 40 as described above to shield the inside of the groove 40 from the outside air, direct contact of the scale 112 with the outside air is prevented. Internal temperature changes are also suppressed. Therefore, the expansion and contraction of the scale 112 due to the change of the ambient temperature is surely suppressed, and it is not necessary to use an expensive material which does not expand and contract even if the ambient temperature changes. it can.

  Further, since the front side 10F and the rear side 10E of the platen 10 are covered with the heat insulating members 150 and 152, the front side 10F and the rear side 10E of the platen 10 are thermally isolated from the outside air. Therefore, the amount of heat transferred from the front side 10F and the rear side 10E of the platen 10 to the inside or the outside of the platen 10 is reduced.

  Here, assuming that the surface plate 10 does not have the grooves 40 formed therein and does not have the heat insulating members 150 and 152, the manner of deformation of the surface plate 10 with respect to changes in ambient temperature will be described. .

FIG. 16 shows how the platen 10 contracts as the ambient temperature of the platen 10 decreases. When the ambient temperature decreases, the temperature of the surface plate 10 decreases from its periphery prior to its inside. Therefore, the central portion of the platen 10 has a temperature distribution higher than that of the peripheral portion until the inside of the platen 10 is stabilized at a uniform temperature after the ambient temperature decreases. During this time, the middle portion of the right side 10R and the left side 10L along the Y-axis direction of the surface plate 10 and the front side 10F and the rear side 10E along the X-axis expand outward from the end.

  Conversely, FIG. 17 shows how the platen 10 expands as the ambient temperature of the platen 10 rises. When the ambient temperature rises, the temperature of the platen 10 rises from the periphery prior to its interior. Therefore, the central portion of the platen 10 has a temperature distribution lower than that of the peripheral portion until the inside of the platen 10 is stabilized at a uniform temperature after the ambient temperature rises. During this time, the middle portion of the right side 10R and the left side 10L along the Y-axis direction of the surface plate 10 and the front side 10F and the rear side 10E along the X-axis are inward of the end.

  Such deformation of the surface plate 10 causes a decrease in the straightness of the right side surface 10R and the left side surface 10L along the Y-axis direction. Then, when the Y carriage 14 is moved in the Y axis direction with reference to the right side surface 10R, a shake occurs in the yawing direction (direction around the Z axis) in the Y carriage 14, and the direction of the X guide 20 of the Y carriage 14 is the X axis. It deviates from the direction. Therefore, the measurement accuracy of the Y coordinate value of the Y carriage 14 is lowered.

  On the other hand, in the surface plate 10 of the present embodiment, the front side surface 10F and the rear side surface 10E are covered with the heat insulating members 150 and 152, so the front side surface 10F and the rear side surface 10E to the inside or outside air of the surface plate 10 The amount of heat that goes in and out is reduced. Therefore, a temperature change is less likely to occur inside the platen 10 due to a decrease or an increase in ambient temperature, and the occurrence of a temperature gradient in the Y-axis direction is suppressed even if the temperature change occurs.

  Therefore, the straightness of the Y guide 42 of the platen 10, that is, the decrease in the straightness of the left side surface 42L, the right side surface 42R, the upper surface 42T, and the lower surface 42B of the Y guide 42 is suppressed regardless of the change in ambient temperature.

  Further, in the surface plate 10 of the present embodiment, the measurement area where the measurement object is placed and measurement is performed, and the area (guide area) of the Y guide 42 for guiding the Y carriage 14 in the Y axis direction are grooves. 40 is discontinuous in the X-axis direction. Therefore, heat conduction between the measurement area and the guide area is suppressed, and the heat generated near the guide area (Y guide 42), that is, the heat generated by the Y drive mechanism, for example, Y Heat generated by the motor or the like of the drive unit 80 of the drive mechanism or frictional heat between the Y guide 42 and the air pads 62F, 62E, 64F, 64E, 66F, 66E 68F, 68E flows into the measurement area through the guide area Are suppressed.

  Therefore, it is suppressed that a temperature change arises in the measurement area | region of the surface plate 10 by the heat | fever which generate | occur | produced in the vicinity of a guide area | region, and a deformation | transformation of the measurement area | region of the surface plate 10 is suppressed. The heat causes a temperature change in the guide area of the platen 10, and the volume of the guide area is small even if a temperature gradient occurs, so the amount of deformation of the guide area is small, and the straightness of the Y guide 42 is affected. Is almost non-existent.

  From the above, the deformation of the surface plate 10 due to heat is suppressed, and the decrease in straightness of the Y guide 42 is suppressed, so that the movement of the Y carriage 14 in the Y axis direction is performed with high accuracy. Therefore, highly accurate measurement that is not affected by heat is possible.

  A cover is provided along the right side surface 10R of the platen 10 to cover the entire area of the Y guide 42 or the entire Y guide 42 and the groove 40, and the guide area of the platen 10 is affected by changes in ambient temperature. It is also possible to maintain the straightness of the Y guide 42 by not receiving the In addition, an exhaust means may be provided for discharging the air in the cover to the outside to keep the temperature in the cover constant when the temperature in the cover is increased by the heat generated from the Y drive mechanism or the like.

  As described above, the three-dimensional coordinate measuring apparatus 1 of the above embodiment may be configured such that the left and right are reversed, and the groove 40 and the Y guide 42 are not positions along the right side surface 10R of the surface plate 10, but the surface plate You may form in the position along the left side of ten.

  In the above embodiment, the air pad (air bearing) is used as a support member slidably abutted on each surface of the Y guide 42 or the like, but a support member other than the air pad may be used. Good. In addition, the arrangement of the support member slidably in contact with each surface of the Y guide 42 or the like and the arrangement of the drive unit 80 can be appropriately changed. The support members (air pads 66F, 66E) disposed inside the groove 40 may be slidably disposed on the inner surface of the groove 40 other than the right side surface 40R of the groove 40.

  Further, in the above embodiment, the scale 112 is installed on the left side 40L of the groove 40, but along the Y-axis direction on the inner surface of the groove 40 other than the left side 40L (right side 40R, bottom 40B, etc. of the groove 40) By installing it, the same effect as described above can be obtained.

  Moreover, in the said embodiment, although the bellows cover 134 was used as a coating | coated member which coat | covers the upper opening of the groove | channel 40, you may use coating | coated members of kinds other than a bellows cover. For example, a covering member made of a stretchable material can cover the upper openings of the front and rear grooves 40 of the lower end portion (the left side 56 of the support portion 50) of the Y carriage 14 inserted into the grooves 40. . Also, the entire upper opening of the groove 40 is covered with the integrally formed covering member, and the lower end portion of the Y carriage 14 (the left side portion 56 of the support portion 50) is inserted into the covering member from the outside to the inside of the groove 40 An insertion path such as a notch may be formed along the groove 40 (Y-axis direction) except when the lower end portion of the Y carriage 14 is inserted. Furthermore, the cover member that covers the upper opening of the groove 40 may not be provided.

  Further, although the heat insulating members 150 and 152 are provided on the front side surface 10F and the rear side surface 10E of the surface plate 10 in the above embodiment, a heat insulating member may be provided on the left side surface 10L of the surface plate 10.

  In the above embodiment, an optical linear encoder is used as a position detection unit of the Y carriage 14 for measuring the Y coordinate value of the Y carriage 14, a position detection unit of the Z column 22, and a position detection unit of the Z carriage 24. Although the form which used the scale was shown, not only an optical type but other types of linear encoders and scales, such as a magnetic type, can be used.

  The operation and effects of the above three-dimensional coordinate measurement apparatus 1 will be supplementarily described below.

  In the three-dimensional coordinate measurement apparatus 1 of the above-described embodiment, the axis of the roller 84 of the drive unit 80 is disposed in the vertical direction with respect to the upper surface 10T of the platen 10. Therefore, since the roller 84 contacts the vertical surface of the platen 10, it does not bite the dust, and it can be accurately measured on the basis of the side surface of the platen 10.

  The roller 84 is driven along the side surface (right side surface 10R) of the platen 10. Therefore, even if the surface plate 10 is minutely deformed, it can be measured based on the surface plate 10. If the roller 84 moves along another rail different from the platen 10, it will not synchronize with the deformation of the platen 10 due to other factors such as thermal expansion of another rail.

  Also, the air pads 64F, 64E, 66F, 66E are also arranged vertically along the side surface of the platen 10. Therefore, the position is set based on the surface plate 10 as described above. In addition, it is possible to reduce a yawing error that is swung to the left and right with respect to the traveling direction when the Y carriage 14 moves.

  Further, the rollers 84 of the drive unit 80 arranged in the vertical direction are arranged to be sandwiched by the air pads 66F and 66E arranged in the vertical direction as well. Therefore, yawing error and vibration can be reduced without breaking the posture by pinching the air pad back and forth even in the case of a sudden drive.

  Further, the distance (interval) between the support point P1 and the support point P2 in the Y carriage 14 is sufficiently larger than the distance (interval) between the support points P1 and P2 and the drive point P0. Therefore, the vibration of the Y carriage 14 can be reduced, and the yawing error in which the moving direction swings to the left and right with respect to the moving direction can be reduced.

  In addition, the air pads 66F and 66E are disposed in an arrangement perpendicular to the side surface of the groove 40 of the platen 10. Therefore, the grooves 40 are formed in the surface plate 10, and supporting points P1 and P2 by the air pads 66F and 66E are the side surfaces of the grooves 40 of the surface plate 10, thereby following deformation such as thermal expansion of the surface plate 10, It can measure on the basis of the platen 10.

  Further, air pads 66F and 66E facing support points P3 and P4 by the air pads 64F and 64E exist as support points P1 and P2 on the side surfaces of the groove 40 of the surface plate 10 and are supported by the Y guide 42 by them. Therefore, the Y carriage 14 is supported only on the drive side (the right Y carriage 16 side on which the drive unit 80 is disposed) with respect to the driven side (the left Y carriage 18 side) with reference to the side surface of the surface plate 10 . Therefore, the sliding resistance on the driven side is negligible, and the yawing error is significantly reduced.

  Further, only the air pad 70 in the Z-axis direction is disposed on the driven side of the Y carriage 14, and there is no air pad for suppressing the Y-axis direction. Therefore, the movement in the Y-axis direction follows the driving side without creating an extra resistance on the driven side. As a result, vibration can be reduced and yawing can be reduced.

  Further, the positions of the air pads 70 on the driven side of the X guide 20 and the Y carriage 18 in the Y axis direction are the air pads 66F and 66E (supporting points P1 and P2) or the air pads 64F and 64E on the drive side of the Y carriage 18. It exists between (supporting points P3 and P4). Therefore, even in the case of sudden acceleration and deceleration, only the moment of the X guide 20 and the measuring portion is received by the width of the support points P1 and P2 (or support points P3 and P4), and there is almost no sliding resistance. As a result, vibration and yawing errors become extremely small.

  1: Three-dimensional coordinate measuring device, 10: Plate, 10B, 20B, 42B, 202B: lower surface, 10R, 24R, 40R, 42R, 250R: right side surface, 10T, 20T, 42T, 202T, upper surface, 12: frame, 14 ... Y carriage, 16 ... right Y carriage, 18 ... left Y carriage, 20 ... X guide, 20E, 24E, 202E, 250E ... back surface, 20F, 24F, 202F, 250F ... front surface, 22 ... Z column, 24 ... Z column Carriage, 24L, 40L, 42L, 250L ... left side, 26 ... measurement probe, 28 ... stylus, 40 ... groove, 40B ... bottom surface, 42 ... Y guide, 50, 200 ... support portion, 52 ... base end, 54 ... Right side, 56: left side, 58: tip, 58A: support plate, 62E, 62F, 64E, 64F, 66E, 66F, 68E, 68F, 70, 21 , 212, 214, 216, 260, 262, 264, 266 ... air pad, 80, 220, 270 ... drive unit, 82, 222, 272 ... motor, 84, 224, 274 ... roller, 110 ... linear encoder, 112 ... scale 114: optical sensor 130L: left rail 130R: right rail 132L, 132R: guide groove 134, 134E, 134F: bellows cover 150, 152: heat insulating member 202: X guide insertion hole 250: Z carriage Insertion hole

Claims (5)

A platen having an upper surface perpendicular to the Z-axis and a first side surface along the Y-axis direction, and supporting the measurement probe on the upper surface side of the platen; A three-dimensional coordinate measurement apparatus comprising: a Y carriage movably disposed in the Y axis direction;
A groove formed on the surface plate along the first side surface, and supporting the Y carriage movably in the Y-axis direction by the inner surface of the groove and the first side surface;
A heat insulating member covering a side surface of the surface plate different from the first side surface;
Coordinate measuring device equipped with.   The three-dimensional coordinate measuring apparatus according to claim 1, wherein the heat insulating member is provided on a side surface along the X-axis direction of the surface plate.   The three-dimensional coordinate measurement apparatus according to claim 1, wherein the Y carriage has a support that moves in the Y-axis direction slidably on the first side surface and the inner surface of the groove.   The three-dimensional coordinate measurement apparatus according to claim 3, wherein the support unit includes a motor that moves the Y carriage in the Y-axis direction.   The three-dimensional coordinate measurement apparatus according to any one of claims 1 to 4, wherein the surface plate is a surface plate of stone.

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