JPS62161938U - - Google Patents
Info
- Publication number
- JPS62161938U JPS62161938U JP5082086U JP5082086U JPS62161938U JP S62161938 U JPS62161938 U JP S62161938U JP 5082086 U JP5082086 U JP 5082086U JP 5082086 U JP5082086 U JP 5082086U JP S62161938 U JPS62161938 U JP S62161938U
- Authority
- JP
- Japan
- Prior art keywords
- air pad
- air
- sliding
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000036316 preload Effects 0.000 claims 3
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986050820U JPH0525789Y2 (fr) | 1986-04-07 | 1986-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986050820U JPH0525789Y2 (fr) | 1986-04-07 | 1986-04-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62161938U true JPS62161938U (fr) | 1987-10-15 |
| JPH0525789Y2 JPH0525789Y2 (fr) | 1993-06-29 |
Family
ID=30874524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986050820U Expired - Lifetime JPH0525789Y2 (fr) | 1986-04-07 | 1986-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0525789Y2 (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194819A (ja) * | 2005-01-17 | 2006-07-27 | Lasertec Corp | 検査装置 |
| JP2014059035A (ja) * | 2012-09-19 | 2014-04-03 | Takenori Kawazoe | 移動機構および高さ測定器 |
| WO2016121967A1 (fr) * | 2015-01-30 | 2016-08-04 | 株式会社東京精密 | Appareil de mesure de coordonnées tridimensionnelles |
| JP2021092590A (ja) * | 2021-03-16 | 2021-06-17 | 株式会社東京精密 | 三次元座標測定装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5058454A (fr) * | 1973-09-21 | 1975-05-21 | ||
| JPS5419283A (en) * | 1977-07-11 | 1979-02-13 | Dea Spa | Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe |
| JPS58177245A (ja) * | 1982-04-12 | 1983-10-17 | Toyoda Mach Works Ltd | 静圧軸受を用いた可動台のバ−ガイド装置 |
-
1986
- 1986-04-07 JP JP1986050820U patent/JPH0525789Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5058454A (fr) * | 1973-09-21 | 1975-05-21 | ||
| JPS5419283A (en) * | 1977-07-11 | 1979-02-13 | Dea Spa | Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe |
| JPS58177245A (ja) * | 1982-04-12 | 1983-10-17 | Toyoda Mach Works Ltd | 静圧軸受を用いた可動台のバ−ガイド装置 |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194819A (ja) * | 2005-01-17 | 2006-07-27 | Lasertec Corp | 検査装置 |
| JP4547562B2 (ja) * | 2005-01-17 | 2010-09-22 | レーザーテック株式会社 | 検査装置 |
| JP2014059035A (ja) * | 2012-09-19 | 2014-04-03 | Takenori Kawazoe | 移動機構および高さ測定器 |
| WO2016121967A1 (fr) * | 2015-01-30 | 2016-08-04 | 株式会社東京精密 | Appareil de mesure de coordonnées tridimensionnelles |
| JP6099290B2 (ja) * | 2015-01-30 | 2017-03-22 | 株式会社東京精密 | 三次元座標測定装置 |
| US9921049B2 (en) | 2015-01-30 | 2018-03-20 | Tokyo Seimitsu Co., Ltd. | Three-dimensional coordinate measurement apparatus |
| US10663283B2 (en) | 2015-01-30 | 2020-05-26 | Tokyo Seimitsu Co., Ltd. | Three-dimensional coordinate measurement apparatus |
| US11067382B2 (en) | 2015-01-30 | 2021-07-20 | Tokyo Seimitsu Co., Ltd. | Three-dimensional coordinate measurement apparatus |
| JP2021092590A (ja) * | 2021-03-16 | 2021-06-17 | 株式会社東京精密 | 三次元座標測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0525789Y2 (fr) | 1993-06-29 |