WO1994016228A1 - Vacuum pump with a rotor - Google Patents

Vacuum pump with a rotor Download PDF

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Publication number
WO1994016228A1
WO1994016228A1 PCT/EP1993/003106 EP9303106W WO9416228A1 WO 1994016228 A1 WO1994016228 A1 WO 1994016228A1 EP 9303106 W EP9303106 W EP 9303106W WO 9416228 A1 WO9416228 A1 WO 9416228A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
vacuum pump
rotors
stator
aluminum
Prior art date
Application number
PCT/EP1993/003106
Other languages
German (de)
French (fr)
Inventor
Paul Bachmann
Michael Froitzheim
Original Assignee
Leybold Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Aktiengesellschaft filed Critical Leybold Aktiengesellschaft
Publication of WO1994016228A1 publication Critical patent/WO1994016228A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/02—Light metals
    • F05C2201/021—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/90—Coating; Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating

Definitions

  • the invention relates to a vacuum pump, in particular a high vacuum pump, with a rotor which, together with a stator and optionally with a further rotor, forms a lubricant-free delivery space through which the gases to be conveyed flow.
  • Vacuum pumps of the type mentioned include friction vacuum pumps such as turbo vacuum pumps (axial, radial), molecular vacuum pumps, turbomolecular vacuum pumps and combinations of these pumps, which are often referred to as hybrid or compound pumps.
  • Roots and Claw vacuum pumps are also operated with lubricant-free scoops (delivery rooms) and thus belong to the generic vacuum pumps.
  • these single-stage or multi-stage vacuum pumps there is a pair of rotors in the scoop chamber, which together with the housing (stator) forms the delivery chamber.
  • the pumping speed of the vacuum pumps affected here largely depends on the speed of the rotor or rotors. They are therefore operated at the highest possible speeds. However, there are limits to increasing the speed, which depend largely on the strength of the rotor material. It should be taken into account here that vacuum pumps of the type mentioned are frequently used for repeated evacuation of vacuum chambers in which etching processes, coating processes and chemical processes of the most varied types are carried out. In the case of etching processes in particular, the gases to be conveyed by the vacuum pump have an elevated temperature (for example 120 ° C.). Because the strength of a material decreases with increasing temperature, the lower the maximum speed limit, the higher the operating temperature.
  • heat-hardenable alloys of the type AlMgSi or AlCuSiMn are used as the rotor material.
  • the speeds, for example in the case of a rotor with a diameter of 130 (mm), are approx. 50,000 rpm.
  • the present invention has for its object to provide a vacuum pump of the type mentioned, the rotor or the rotors can be operated at increased speeds.
  • the rotor consists at least partially of an aluminum-lithium alloy.
  • the lithium alloy proportion is preferably between 0.5% and 10%.
  • the best experience so far has been made with alloys with a Li alloy content between 1.5% and 3%. Materials of this type are described in A.K. Vasudevan and R.D. Doherty "Aluminum Alloys - Contemporary Research and Applications", ACADEMIC PRESS, INC., 1989.
  • only the rotor or only the rotors of the vacuum pump consist - at least partially - of the proposed aluminum-lithium alloy, since this measure alone achieves the increased rotor strength.
  • the stator - or at least the surface of the stator facing the rotor - consists of the aluminum-lithium alloy. Even when 100% chlorine is produced, this measure can achieve long service lives for the vacuum pumps.
  • the figure sheet schematically shows four examples of vacuum pumps of the type concerned here.
  • it is a turbomolecular vacuum pump 1 (FIG. 1), Roots vacuum pump 2 (FIG. 2), claw pump 3 (section through a stage, FIG. 3) and turbo vacuum pump 4 (FIG 4).
  • All pumps or pump stages have an inlet 5 and an outlet 6.
  • the rotors 7, 8, 9 consist of an aluminum-lithium alloy, expediently made of the material 8090 or 8090A (see Table I in the above article). Due to the increased strength and rigidity of the rotors, they can be operated at higher speeds. They are also corrosion-resistant. In order to achieve a corrosion resistance also with the stators 11, 12, these can likewise consist of one of the specified materials or at least be coated with them on the delivery chamber side.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The invention concerns a vacuum pump, in particular a high-vacuum pump, with a rotor which forms, together with a stator and, optionally, a second rotor, a lubricant-free pump chamber through which the gases being pumped pass. In order to be able to operate the rotor(s) at high speeds, the invention proposes that the rotor(s) (7, 8) are made at least partly of an aluminium-lithium alloy.

Description

Vakuumpumpe mit RotorVacuum pump with rotor
Die Erfindung bezieht sich auf eine Vakuumpumpe, insbeson¬ dere Hochvakuumpumpe, mit einem Rotor, der gemeinsam mit einem Stator und gegebenenfalls mit einem weiteren Rotor einen schmiermittelfreien, von den zu fördernden Gasen durchströmten Förderraum bildet.The invention relates to a vacuum pump, in particular a high vacuum pump, with a rotor which, together with a stator and optionally with a further rotor, forms a lubricant-free delivery space through which the gases to be conveyed flow.
Zu Vakuumpumpen der erwähnten Art gehören zum einen Reibungs- Vakuumpumpen, wie Turbovakuumpumpen (axial, radial), Mole¬ kularvakuumpumpen, Turbomolekularvakuumpumpen und Kombina¬ tionen dieser Pumpen, die häufig mit Hybrid- oder Compound- pumpen bezeichnet werden. Zum anderen werden auch Wälzkol¬ ben- und Klauenvakuumpumpen mit schmiermittelfreien Schöpf¬ räumen (Förderräumen) betrieben und gehören somit zu den gattungsgemäßen Vakuumpumpen. Bei diesen ein- oder mehrstu¬ fig ausgebildeten Vakuumpumpen befindet sich im Schöpfraum jeweils ein Rotorpaar, das gemeinsam mit dem Gehäuse (Sta¬ tor) den Förderraum bildet.Vacuum pumps of the type mentioned include friction vacuum pumps such as turbo vacuum pumps (axial, radial), molecular vacuum pumps, turbomolecular vacuum pumps and combinations of these pumps, which are often referred to as hybrid or compound pumps. On the other hand, Roots and Claw vacuum pumps are also operated with lubricant-free scoops (delivery rooms) and thus belong to the generic vacuum pumps. In these single-stage or multi-stage vacuum pumps, there is a pair of rotors in the scoop chamber, which together with the housing (stator) forms the delivery chamber.
Das Saugvermögen der hier betroffenen Vakuumpumpen hängt maßgeblich von der Drehzahl des bzw. der Rotoren ab. Sie werden deshalb mit möglichst hohen Drehzahlen betrieben.. Der Erhöhung der Drehzahl sind jedoch Grenzen gesetzt, die maßgeblich von der Festigkeit des Rotormaterials abhängen. Zu berücksichtigen ist dabei, daß Vakuumpumpen der erwähnten Art häufig zur wiederholten Evakuierung von Vakuumkammern eingesetzt werden, in denen Ätzprozesse, Beschichtungspro- zesse und chemische Prozesse der verschiedensten Art durch¬ geführt werden. Insbesondere bei Ätzprozessen haben die von der Vakuumpumpe zu fördernden Gase eine erhöhte Temperatur (beispielsweise 120° C). Da die Festigkeit eines Werkstoffes mit steigender Temperatur abnimmt, muß die Höchstdrehzahl- grenze umso niedriger gewählt werden, je höher die Betriebs¬ temperatur ist.The pumping speed of the vacuum pumps affected here largely depends on the speed of the rotor or rotors. They are therefore operated at the highest possible speeds. However, there are limits to increasing the speed, which depend largely on the strength of the rotor material. It should be taken into account here that vacuum pumps of the type mentioned are frequently used for repeated evacuation of vacuum chambers in which etching processes, coating processes and chemical processes of the most varied types are carried out. In the case of etching processes in particular, the gases to be conveyed by the vacuum pump have an elevated temperature (for example 120 ° C.). Because the strength of a material decreases with increasing temperature, the lower the maximum speed limit, the higher the operating temperature.
Bei modernen Turbomolekularvakuumpumpen werden warmaushärt- bare Legierungen vom Typ AlMgSi oder auch AlCuSiMn als Rotorwerkstoff eingesetzt. Die Drehzahlen liegen beispiels¬ weise bei einem Rotor mit einem Durchmesser von 130 (mm) bei rd. 50.000 U/min.In modern turbomolecular vacuum pumps, heat-hardenable alloys of the type AlMgSi or AlCuSiMn are used as the rotor material. The speeds, for example in the case of a rotor with a diameter of 130 (mm), are approx. 50,000 rpm.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe der eingangs erwähnten Art zu schaffen, deren Rotor bzw. deren Rotoren mit erhöhten Drehzahlen betrieben werden können.The present invention has for its object to provide a vacuum pump of the type mentioned, the rotor or the rotors can be operated at increased speeds.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß der Rotor zumindest teilweise aus einer Aluminium-Lithium-Legie¬ rung besteht. Vorzugsweise liegt der Lithium-Legierungsan¬ teil zwischen 0,5 % und 10 %. Die besten Erfahrungen werden bisher mit Legierungen mit einem Li-Legierungsanteil zwi¬ schen 1,5 % und 3 % gemacht. Werkstoffe dieser Art sind im Aufsatz von A.K. Vasudevan und R.D. Doherty "Aluminium Alloys - Contemporary Research and Applications", ACADEMIC PRESS, INC., 1989 beschrieben.According to the invention, this object is achieved in that the rotor consists at least partially of an aluminum-lithium alloy. The lithium alloy proportion is preferably between 0.5% and 10%. The best experience so far has been made with alloys with a Li alloy content between 1.5% and 3%. Materials of this type are described in A.K. Vasudevan and R.D. Doherty "Aluminum Alloys - Contemporary Research and Applications", ACADEMIC PRESS, INC., 1989.
Werkstoffe dieser Art sind leichter als die bisher verwen¬ deten. Neben der sehr hohen Festigkeit' im Bereich der höchstfesten Legierungen vom Typ AlZnMgCu besitzen die AlLi-Legierungen die höchste Steifigkeit (E-Modul) aller genormten Al-Knet- und Gußlegierungen. Vakuumpumpen, deren Rotoren zumindest in den Bereichen hoher Fliehkraftbelastung aus AlLi-Werkstoffen bestehen, können so mit erhöhten Drehzahlen betrieben werden. Bei Turbomolekularpumpen können die Rotor-Drehzahlen, je nach bisher verwendeter Al-Legie- rung, um bis zu rd. 10 % erhöht werden. Überraschenderweise ist die Erfindung noch mit einem weite¬ ren wesentlichen Vorteil verbunden. Bei den erwähnten Einsätzen - Evakuierung von Vakuumkammern, in denen chemi¬ sche Prozesse, Ätzprozesse, Beschichtungsprozesse usw. ablaufen - fallen vielfach aggressive Gase, insbesondere Halogene und deren Verbindungen, an. Diese verursachen bevorzugt an den Rotoren der verwendeten Vakuumpumpen Korrosionen, die das Saugvermögen der Vakuumpumpe sehr schnell beeinträchtigen können. Zur Vermeidung dieser Korrosionen ist es bekannt, die aus den üblichen Alumini¬ um-Werkstoffen bestehenden Rotoren zu beschichten. Diese Verfahren sind aufwendig. Überraschenderweise hat sich der erfindungsgemäße Aluminium-Lithium-Werkstoff als nahezu korrosionsfest erwiesen. Aufwendige Maßnahmen zum Schutz der Oberfläche des Rotors vor den anfallenden aggressiven Gasen sind nicht mehr erforderlich.Materials of this type are lighter than those previously used. Besides the very high strength 'in the field of ultra high-strength alloys of the type AlZnMgCu the AlLi alloys have the highest stiffness (modulus) of all standardized Al wrought and cast alloys. Vacuum pumps, the rotors of which are made of AlLi materials at least in the areas of high centrifugal force, can be operated at higher speeds. With turbomolecular pumps, the rotor speeds can be up to approx. 10% can be increased. Surprisingly, the invention is associated with a further substantial advantage. In the operations mentioned - evacuation of vacuum chambers in which chemical processes, etching processes, coating processes etc. take place - aggressive gases, in particular halogens and their compounds, occur in many cases. These preferably cause corrosion on the rotors of the vacuum pumps used, which can quickly impair the pumping speed of the vacuum pump. In order to avoid this corrosion, it is known to coat the rotors, which consist of the usual aluminum materials. These procedures are complex. Surprisingly, the aluminum-lithium material according to the invention has proven to be almost corrosion-resistant. Elaborate measures to protect the surface of the rotor from the aggressive gases are no longer necessary.
Vorzugsweise besteht nur der Rotor bzw. bestehen nur die Rotoren der Vakuumpumpe - zumindest teilweise - aus der vorgeschlagenen Aluminium-Lithium-Legierung, da allein durch diese Maßnahme die erhöhte Rotor-Festigkeit, erreicht wird. Für den Fall, daß der Korrosionsschutz im Vordergrund steht, ist es zweckmäßig, daß auch der Stator - oder zumindest die dem Rotor zugewandte Oberfläche des Stators - aus der Aluminium-Lithium-Legierung besteht. Selbst beim Anfall von 100 % Chlor können durch diese Maßnahme hohe Standzeiten der Vakuumpumpen erreicht werden.Preferably, only the rotor or only the rotors of the vacuum pump consist - at least partially - of the proposed aluminum-lithium alloy, since this measure alone achieves the increased rotor strength. In the event that corrosion protection is in the foreground, it is expedient that the stator - or at least the surface of the stator facing the rotor - consists of the aluminum-lithium alloy. Even when 100% chlorine is produced, this measure can achieve long service lives for the vacuum pumps.
Das Figurenblatt zeigt schematisch vier Beispiele für Vakuumpumpen der hier betroffenen Art. Im einzelnen handelt es sich um eine Turbomolekularvakuumpumpe 1 (Figur 1), Wälzkolbenvakuumpumpe 2 (Figur 2), Klauenpumpe 3 (Schnitt durch eine Stufe, Figur 3) sowie Turbovakuumpumpe 4 (Figur 4). Alle Pumpen bzw. Pumpenstufen haben einen Einlaß 5 und einen Auslaß 6. Zwischen Einlaß 5 und Auslaß 6 befinden sich die Rotoren 7 bzw. Rotorpaare 8, 9. Diese bilden gemeinsam mit einem Stator 11 bzw. mit dem Gehäuse 12 einen Förderraum 13, der von den gepumpten Gasen durchströmt wird.The figure sheet schematically shows four examples of vacuum pumps of the type concerned here. In particular, it is a turbomolecular vacuum pump 1 (FIG. 1), Roots vacuum pump 2 (FIG. 2), claw pump 3 (section through a stage, FIG. 3) and turbo vacuum pump 4 (FIG 4). All pumps or pump stages have an inlet 5 and an outlet 6. Between the inlet 5 and outlet 6 there are the rotors 7 or pairs of rotors 8, 9. These form together with a stator 11 or with the housing 12, a delivery chamber 13 through which the pumped gases flow.
Die Rotoren 7, 8, 9 bestehen aus einer Aluminium-Lithium- Legierung, zweckmäßig aus dem Werkstoff 8090 oder 8090A (vgl. Tabelle I im o.a. Aufsatz). Aufgrund der erhöhten Festigkeit und Steifigkeit der Rotoren können diese mit erhöhten Drehzahlen betrieben werden. Zusätzlich sind sie korrosionsfest. Um eine Korrosionsfestigkeit auch bei den Statoren 11, 12 zu erreichen, können diese ebenfalls aus einem der angegebenen Werkstoffe bestehen oder zumindest förderraumseitig damit beschichtet sein. The rotors 7, 8, 9 consist of an aluminum-lithium alloy, expediently made of the material 8090 or 8090A (see Table I in the above article). Due to the increased strength and rigidity of the rotors, they can be operated at higher speeds. They are also corrosion-resistant. In order to achieve a corrosion resistance also with the stators 11, 12, these can likewise consist of one of the specified materials or at least be coated with them on the delivery chamber side.

Claims

PATENTANSPRÜCHE PATENT CLAIMS
1. Vakuumpumpe, insbesondere Hochvakuumpumpe, mit einem Rotor, der gemeinsam mit einem Stator und gegebenen¬ falls mit einem weiteren Rotor einen schmiermittel¬ freien, von den zu fördernden Gasen durchströmten Förderraum bildet, dadurch gekennzeichnet, daß der bzw. die Rotoren (7, 8) zumindest teilweise aus einer Aluminium-Lithium-Legierung bestehen.1. Vacuum pump, in particular high vacuum pump, with a rotor which, together with a stator and optionally with a further rotor, forms a lubricant-free delivery space through which the gases to be conveyed flow, characterized in that the rotor or rotors (7, 8) at least partially consist of an aluminum-lithium alloy.
2. Vakuumpumpe, insbesondere Hochvakuumpumpe, mit einem Rotor, der gemeinsam mit einem Stator und gegebenen¬ falls mit einem weiteren Rotor einen schmiermittel¬ freien, von den zu fördernden Gasen durchströmten Förderraum bildet, dadurch gekennzeichnet, daß der bzw. die Rotoren (7, 8) zumindest teilweise mit einer Aluminium-Lithium-Legierung beschichtet sind.2. Vacuum pump, in particular high vacuum pump, with a rotor which, together with a stator and optionally with a further rotor, forms a lubricant-free delivery space through which the gases to be conveyed flow, characterized in that the rotor or rotors (7, 8) are at least partially coated with an aluminum-lithium alloy.
3. Vakuumpumpe nach anspruch 1 oder 2, dadurch gekennzeich¬ net, daß auch der Stator (11, 12) aus der Aluminium- Lithium-Legierung besteht oder zumindest förderraum¬ seitig damit beschichtet ist.3. Vacuum pump according to claim 1 or 2, characterized gekennzeich¬ net that the stator (11, 12) consists of the aluminum-lithium alloy or is at least coated on the delivery side.
4. Vakuumpumpe nach Anspruch 1, 2 oder 3, dadurch gekenn¬ zeichnet, daß der Litium-Anteil zwischen 0,5 % und4. Vacuum pump according to claim 1, 2 or 3, characterized gekenn¬ characterized in that the lithium content between 0.5% and
10 %, vorzugsweise zwischen 1,5 % und 3 % liegt. Vakuumpumpe nach einem der ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Werkstoffe 8090 oder 8090 A als Rotorwerkstoffe eingesetzt werden. 10%, preferably between 1.5% and 3%. Vacuum pump according to one of claims 1 to 4, characterized in that the materials 8090 or 8090 A are used as rotor materials.
PCT/EP1993/003106 1993-01-08 1993-11-06 Vacuum pump with a rotor WO1994016228A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4300274.9 1993-01-08
DE4300274A DE4300274A1 (en) 1993-01-08 1993-01-08 Vacuum pump with rotor

Publications (1)

Publication Number Publication Date
WO1994016228A1 true WO1994016228A1 (en) 1994-07-21

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002010593A1 (en) * 2000-08-02 2002-02-07 Werner Rietschle Gmbh + Co. Kg Compressor
WO2007125042A1 (en) 2006-04-29 2007-11-08 Oerlikon Leybold Vacuum Gmbh Coating for gas bearings

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10212940A1 (en) * 2002-03-22 2003-10-02 Leybold Vakuum Gmbh Eccentric pump and method for operating this pump
US20100199495A1 (en) * 2006-04-29 2010-08-12 Oerlikon Leybold Vacuum Gmbh Process for preparing rotors or stators of a turbomolecular pump

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DE3014518A1 (en) * 1979-04-23 1980-10-30 Ford Werke Ag TURBOCHARGER
JPS62180030A (en) * 1986-02-03 1987-08-07 Hitachi Ltd Turbine moving blade
EP0281654A1 (en) * 1987-03-11 1988-09-14 Leybold Aktiengesellschaft Two-shaft machine

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DE2654055B2 (en) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor and stator disks for turbo molecular pumps

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Publication number Priority date Publication date Assignee Title
DE3014518A1 (en) * 1979-04-23 1980-10-30 Ford Werke Ag TURBOCHARGER
JPS62180030A (en) * 1986-02-03 1987-08-07 Hitachi Ltd Turbine moving blade
EP0281654A1 (en) * 1987-03-11 1988-09-14 Leybold Aktiengesellschaft Two-shaft machine

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
A.K. VASUDEVAN AND R.D. DOHERTY: "aluminum alloys-contemporary research and applications", ACADEMIC PRESS, INC., SAN DIEGO *
DATABASE WPI Section 768 Week 8737, Derwent World Patents Index; AN 87-260436 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002010593A1 (en) * 2000-08-02 2002-02-07 Werner Rietschle Gmbh + Co. Kg Compressor
US6918749B2 (en) 2000-08-02 2005-07-19 Werner Rietschle Gmbh & Co. Kg Compressor with aluminum housing and at least one aluminum rotor
WO2007125042A1 (en) 2006-04-29 2007-11-08 Oerlikon Leybold Vacuum Gmbh Coating for gas bearings

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