WO1990015354A1 - Vorrichtung zum ablenken eines strahlenbündels - Google Patents

Vorrichtung zum ablenken eines strahlenbündels Download PDF

Info

Publication number
WO1990015354A1
WO1990015354A1 PCT/DE1990/000410 DE9000410W WO9015354A1 WO 1990015354 A1 WO1990015354 A1 WO 1990015354A1 DE 9000410 W DE9000410 W DE 9000410W WO 9015354 A1 WO9015354 A1 WO 9015354A1
Authority
WO
WIPO (PCT)
Prior art keywords
prism
angle
deflecting
axis
exit surface
Prior art date
Application number
PCT/DE1990/000410
Other languages
German (de)
English (en)
French (fr)
Inventor
Heinrich KÜHLEWEIN
Original Assignee
Optische Werke G. Rodenstock
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optische Werke G. Rodenstock filed Critical Optische Werke G. Rodenstock
Publication of WO1990015354A1 publication Critical patent/WO1990015354A1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/108Scanning systems having one or more prisms as scanning elements

Definitions

  • the invention relates to a device for deflecting a
  • Beam bundle at a predeterminable angle Beam bundle at a predeterminable angle.
  • the invention relates to a device in which the beam is deflected by means of a deflecting prism which can be rotated about the axis of the incident beam and whose beam entry surface is perpendicular to the axis of rotation. If necessary, the deflected beam is imaged on a surface to be scanned using an imaging system assigned to the deflecting prism.
  • Such devices are used for example in scanner systems.
  • a beam of rays emitted by a light source is deflected by a rotating deflecting element and imaged as a light spot on a surface to be scanned.
  • the light spot depicted describes a linear movement on the surface.
  • the surface is scanned line by line. This is achieved, for example, in that the surface to be scanned is applied to a roller which rotates step by step about its figure axis.
  • the accuracy of the scanner system depends crucially on how straight the scanning lines run on the surface to be scanned.
  • a source of error which leads to deviations from a straight-line scanning is that the axis of rotation of the deflecting element is caused to flutter or vibrate (wobble) by manufacturing or wear-related inaccuracies in the pivot bearings.
  • the flutter movement is increasingly transmitted to the movement of the deflected bundle of rays.
  • the illustrated light point then does not perform a linear but a wave-like movement.
  • DE-PS 37 07 023 specifies two different beam guides.
  • the beam is totally reflected twice in succession by the side surfaces after it has entered through a surface perpendicular to the beam, before it penetrates the exit surface perpendicular to the input surface.
  • the side length of the square prism must be approximately 3.5 times as large as the beam diameter.
  • Such prisms are comparatively large and are not suitable for use in scanner systems in which the deflection prism rotates at high speed.
  • a second beam guide is therefore specified, in which the square prism has a smaller volume and weight than a pentaprism for a given cross section of the beam.
  • the beam is reflected four times inside the prism. The reflection takes place on two surfaces at an angle which is smaller than the angle of the total reflection. That's why they have to both surfaces are provided with a reflection layer.
  • the invention is based on the object of specifying a deflection prism for a scanner system which reacts insensitively to tilting of the prism axis against the direction of the incident beam, which has the smallest possible volume and weight and which is easy to manufacture.
  • the deflection in the device according to the invention takes place partly by reflection and partly by refraction.
  • the two reflections within the prism have the effect that a tilt of the prism against the beam axis has a weaker effect on the beam deflection by a factor of 10 than, for example, the tilt of a mirror.
  • a vibration movement of the axis of rotation affects the deflected beam 10 times less than when a mirror is used, so that the accuracy requirements for the position of the axis of rotation relative to the deflection prism are lower than in known solutions.
  • the contribution of the refraction to the deflection of the beam causes an inaccuracy of the angle between two prism surfaces to be compensated for by a slight tilt. This results in lower requirements for the tolerances in the manufacture of the deflection prism according to the invention than in the manufacture of a square prism according to Wollaston.
  • the deflection prism according to the invention has only three optical surfaces, which simplifies the manufacturing process compared to the square prism.
  • the use of the triangular prism within a device of the generic type proves to be particularly advantageous with regard to the volume, the weight and the distance between the axis of rotation and the most distant prism part which determines the input focal length.
  • the triangular prism according to the invention has less than half the minimum weight of a corresponding square prism according to Wollaston and the input focal length is about a third smaller.
  • any deflection angle can be achieved in a simple manner by machining only one surface.
  • a deflection angle of 90 ° proves to be particularly favorable.
  • the surface on which the beam experiences the second reflection is provided with a reflective layer.
  • the angles between the optical surfaces can vary within a wide range.
  • the angle between the entrance and beam exit surface must be greater than the critical angle of total reflection and can be selected between 45 ° and approximately 90 °.
  • a laser diode is used as the light source and diffraction-limited optics (F-theta optics) are used as the imaging system (claim 6) assigned to the deflection prism.
  • F-theta optics diffraction-limited optics
  • This development takes advantage of the fact that, due to the refraction of the light beam at the beam exit surface, a light beam entering with a circular cross section is given an elliptical cross section on the beam exit side. The ratio of the axes is approximately 1: 0.85. If the beam of the laser diode, which generally has a cross-section deviating from the circular shape, passes through the triangular prism, this deviation is at least partially compensated for.
  • Fig. 1 a the deflection of a beam on one
  • Wollaston Fig. 2 b shows a section through an inventive
  • Deflection elements are shown in all the figures, which deflect the incoming beam by 90 °.
  • the light sources, the brackets and bearings of the deflecting elements and the associated imaging systems have not been shown.
  • FIG. 1 b shows a triangular prism according to the invention with the non-mirrored surfaces (4, 5) and the mirrored surface (6), on which a beam of rays impinges.
  • the prism according to the invention is thus less sensitive to tilting than the mirror by a factor of 10.
  • FIG. 2a shows a square prism according to Wollaston for comparison with a prism according to the invention. It has two non-mirrored surfaces 9, 10, which form a right angle, " as well as two mirrored surfaces 11, 12. The surfaces 10, 11 and the surfaces 9, 12 enclose an angle of 67.5 °.
  • the emerging beam is deflected by 90 ° with respect to the incoming beam, and the beam axis (14) is also the axis of rotation of the quadrangular prism 10 and the cut edge between the surfaces 9 and 12.
  • the beam has a distance x of, for example, 0.15 d (d: diameter of the beam line) compared to surface 10 ritts beam).
  • the distance x is required so that too when the prism axis of rotation is tilted, a beam of rays is deflected correctly.
  • FIG. 2b shows a triangular prism according to the invention which is suitable for deflecting a beam with the same cross section d as in FIG. 2a. It has two non-mirrored surfaces 4, 5 which form an angle of 50 ° and a mirrored surface 6 which forms an angle of 37.5 ° with surface 5.
  • the beam of rays leaves the prism at an angle ⁇ with respect to the surface normal of the beam exit surface.
  • the axis of rotation of the triangular prism is oriented approximately perpendicular to the prism surface 4.
  • FIG. 2b The ideal case of a non-tilted axis of rotation is shown in FIG. 2b.
  • the beam in turn has the cross section d.
  • the width of the beam entry surface 4 projects beyond the cross-section of the beam on both sides by an amount x of, for example, 0.1 d, so that a complete deflection of the beam is guaranteed when the axis of rotation is tilted.
  • the triangular prism takes up less than half the space, saving more than half of the material.
  • the entrance focal length is also significantly reduced compared to the Wollaston square prism.
  • the numerical values of the exemplary embodiments do not represent any restriction of generality. The choice of the angles depends both on the respective application and on the refractive power of the prism material used.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
PCT/DE1990/000410 1989-06-02 1990-05-31 Vorrichtung zum ablenken eines strahlenbündels WO1990015354A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19893918075 DE3918075C1 (enrdf_load_stackoverflow) 1989-06-02 1989-06-02
DEP3918075.1 1989-06-02

Publications (1)

Publication Number Publication Date
WO1990015354A1 true WO1990015354A1 (de) 1990-12-13

Family

ID=6381970

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1990/000410 WO1990015354A1 (de) 1989-06-02 1990-05-31 Vorrichtung zum ablenken eines strahlenbündels

Country Status (3)

Country Link
EP (1) EP0428662A1 (enrdf_load_stackoverflow)
DE (1) DE3918075C1 (enrdf_load_stackoverflow)
WO (1) WO1990015354A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0549106A1 (en) * 1991-12-23 1993-06-30 Crosfield Electronics Limited Light deflecting device
DE10261530A1 (de) * 2002-12-23 2004-07-22 Gerhard Wanger Optisches Element zur Anbringung an einer Welle

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4128469C2 (de) * 1991-08-28 1997-12-18 Hell Ag Linotype Strahlteiler-Vorrichtung
DE4130977C2 (de) * 1991-09-18 1994-05-19 Hell Ag Linotype Lichtstrahl-Ablenkvorrichtung
DE4132025C2 (de) * 1991-09-26 1994-07-21 Hell Ag Linotype Lichtstrahl-Ablenkvorrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3442575A (en) * 1965-03-04 1969-05-06 Bell Aerospace Corp Optical scanning system
JPS61160841A (ja) * 1985-01-09 1986-07-21 Nippon Kogaku Kk <Nikon> 光学式ヘツドのトラツキング装置
EP0257408A1 (de) * 1986-08-21 1988-03-02 Dornier Gmbh Vorrichtung zur hochauflösenden stereoskopischen Aufzeichnung von Bildern
EP0307094A2 (en) * 1987-09-05 1989-03-15 THORN EMI plc Optical image rotators

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4297031A (en) * 1979-09-26 1981-10-27 Hamar M R Apparatus and process for sweeping a flat optical light plane
CA1176879A (en) * 1981-02-06 1984-10-30 Gary K. Starkweather Single facet wobble free scanner
DE3707023A1 (de) * 1987-03-05 1988-09-15 Rodenstock Optik G Vorrichtung zum ablenken eines strahlenbuendels

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3442575A (en) * 1965-03-04 1969-05-06 Bell Aerospace Corp Optical scanning system
JPS61160841A (ja) * 1985-01-09 1986-07-21 Nippon Kogaku Kk <Nikon> 光学式ヘツドのトラツキング装置
EP0257408A1 (de) * 1986-08-21 1988-03-02 Dornier Gmbh Vorrichtung zur hochauflösenden stereoskopischen Aufzeichnung von Bildern
EP0307094A2 (en) * 1987-09-05 1989-03-15 THORN EMI plc Optical image rotators

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 10, Nr. 364 (P-524) 5. Dezember 1986; & JP-A-61160841 (Nippon Kogaku K.K.) 21. Juli 1986 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0549106A1 (en) * 1991-12-23 1993-06-30 Crosfield Electronics Limited Light deflecting device
US5323259A (en) * 1991-12-23 1994-06-21 Crosfield Electronics Limited Light deflecting device
DE10261530A1 (de) * 2002-12-23 2004-07-22 Gerhard Wanger Optisches Element zur Anbringung an einer Welle

Also Published As

Publication number Publication date
DE3918075C1 (enrdf_load_stackoverflow) 1990-10-04
EP0428662A1 (de) 1991-05-29

Similar Documents

Publication Publication Date Title
DE19743322B4 (de) Laserstrahlformgebungssystem
DE69521675T2 (de) Optische Anordnung für passive Abtastwinkelverdopplung
EP0894247B1 (de) Vorrichtung zur berührungslosen temperaturmessung
DE3207467C2 (enrdf_load_stackoverflow)
DE69504496T2 (de) Optische vorrichtung mit gerichteter reflexion
DE4315077A1 (de) Optische Sende- und Empfangs-Abtastvorrichtung
DE2751915A1 (de) Lichtleitfaser mit einer anordnung zum seitlichen ein- und auskoppeln vonlicht
DE4445136A1 (de) Axialspiegel-Abtastsystem und -verfahren
DE3881768T2 (de) Polygon-Spiegel.
DE3601442C2 (enrdf_load_stackoverflow)
DE3707023C2 (enrdf_load_stackoverflow)
DE3918075C1 (enrdf_load_stackoverflow)
EP4483130A1 (de) Vorrichtung und verfahren zum vermessen von wafern
DE3242867A1 (de) Optisch-mechanischer abtaster
DE102018104198B4 (de) Projektormodul, mobiles Gerät und Verwendung eines Projektormoduls
DE19941030C1 (de) Laseranordnung für ein mehrstrahliges Laserrichtgerät
DE69410336T2 (de) Spiegellage und -richtungs Kontrollvorrichtung
DE102017123462A1 (de) Optische Vorrichtung für eine Abstandsmessvorrichtung nach dem LIDAR-Prinzip
DE2756650A1 (de) Querschnittsumrisskontrollgeraet
EP0179213A1 (de) Optisches Laserstrahl-Ablenksystem
DE4201010A1 (de) Optisches abtastsystem
DE102012015209B3 (de) Ringlaserkreisel
DE19820154A1 (de) Vorrichtung und Verfahren zur optischen Strahltransformation
EP0667545B1 (de) Anordnung zur Anpassung unterschiedlicher Feldverteilungen von Lichtstrahlen
WO2018224365A1 (de) Mikromechanische lichtumlenkvorrichtung

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB IT LU NL SE

WWE Wipo information: entry into national phase

Ref document number: 1990908189

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1990908189

Country of ref document: EP

WWW Wipo information: withdrawn in national office

Ref document number: 1990908189

Country of ref document: EP