USD958093S1 - Boat of substrate processing apparatus - Google Patents

Boat of substrate processing apparatus Download PDF

Info

Publication number
USD958093S1
USD958093S1 US29/735,900 US202029735900F USD958093S US D958093 S1 USD958093 S1 US D958093S1 US 202029735900 F US202029735900 F US 202029735900F US D958093 S USD958093 S US D958093S
Authority
US
United States
Prior art keywords
boat
processing apparatus
substrate processing
view
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/735,900
Other languages
English (en)
Inventor
Satoru Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MURATA, SATORU
Application granted granted Critical
Publication of USD958093S1 publication Critical patent/USD958093S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

US29/735,900 2019-11-28 2020-05-26 Boat of substrate processing apparatus Active USD958093S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2019-26362F JP1665228S (cs) 2019-11-28 2019-11-28
JP2019-026362 2019-11-28

Publications (1)

Publication Number Publication Date
USD958093S1 true USD958093S1 (en) 2022-07-19

Family

ID=71843123

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/735,900 Active USD958093S1 (en) 2019-11-28 2020-05-26 Boat of substrate processing apparatus

Country Status (3)

Country Link
US (1) USD958093S1 (cs)
JP (1) JP1665228S (cs)
TW (1) TWD212726S (cs)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD981971S1 (en) * 2021-03-15 2023-03-28 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD868012S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD868012S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD981971S1 (en) * 2021-03-15 2023-03-28 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
JP1665228S (cs) 2020-08-03
TWD212726S (zh) 2021-07-21

Similar Documents

Publication Publication Date Title
USD846514S1 (en) Boat of substrate processing apparatus
USD958093S1 (en) Boat of substrate processing apparatus
USD920935S1 (en) Boat for substrate processing apparatus
USD880484S1 (en) Data processing equipment
USD923399S1 (en) Lid for bottle
USD932527S1 (en) Laser processing machine
USD847105S1 (en) Boat of substrate processing apparatus
USD882940S1 (en) Pill organizer
USD899877S1 (en) Cutting board
USD839219S1 (en) Boat for substrate processing apparatus
USD965542S1 (en) Boat of substrate processing apparatus
USD866900S1 (en) Paint vessel
USD888196S1 (en) Gas nozzle for substrate processing apparatus
USD940669S1 (en) Boat for substrate processing apparatus
USD867707S1 (en) Paint vessel
USD888498S1 (en) Drinking vessel
USD978765S1 (en) Underwater scooter
USD942447S1 (en) Electronic console
USD858152S1 (en) Multifunction plate rack
USD929922S1 (en) Bicycle rim with surface indicia
USD926061S1 (en) Electronic scale
USD986040S1 (en) Marking apparatus
USD1034715S1 (en) Tray
USD1070489S1 (en) Handle for cookware
USD928688S1 (en) Sailboat

Legal Events

Date Code Title Description
FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY