USD882536S1 - Plasma source liner - Google Patents

Plasma source liner Download PDF

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Publication number
USD882536S1
USD882536S1 US29/602,230 US201729602230F USD882536S US D882536 S1 USD882536 S1 US D882536S1 US 201729602230 F US201729602230 F US 201729602230F US D882536 S USD882536 S US D882536S
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United States
Prior art keywords
plasma source
source liner
liner
view
plasma
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US29/602,230
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English (en)
Inventor
Eric Kihara Shono
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Applied Materials Inc
Original Assignee
Applied Materials Inc
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Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/602,230 priority Critical patent/USD882536S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHONO, ERIC KIHARA
Priority to TW106306308F priority patent/TWD192022S/zh
Priority to JPD2017-24109F priority patent/JP1612650S/ja
Application granted granted Critical
Publication of USD882536S1 publication Critical patent/USD882536S1/en
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US29/602,230 2017-04-28 2017-04-28 Plasma source liner Active USD882536S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/602,230 USD882536S1 (en) 2017-04-28 2017-04-28 Plasma source liner
TW106306308F TWD192022S (zh) 2017-04-28 2017-10-27 電漿源襯墊
JPD2017-24109F JP1612650S (enrdf_load_stackoverflow) 2017-04-28 2017-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/602,230 USD882536S1 (en) 2017-04-28 2017-04-28 Plasma source liner

Publications (1)

Publication Number Publication Date
USD882536S1 true USD882536S1 (en) 2020-04-28

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ID=63369443

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Application Number Title Priority Date Filing Date
US29/602,230 Active USD882536S1 (en) 2017-04-28 2017-04-28 Plasma source liner

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US (1) USD882536S1 (enrdf_load_stackoverflow)
JP (1) JP1612650S (enrdf_load_stackoverflow)
TW (1) TWD192022S (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1071836S1 (en) * 2023-01-19 2025-04-22 Geotab Inc. Solar-powered electronic device housing

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040166612A1 (en) * 2002-06-05 2004-08-26 Applied Materials, Inc. Fabrication of silicon-on-insulator structure using plasma immersion ion implantation
USD799439S1 (en) * 2016-05-31 2017-10-10 Rohm Co., Ltd. Power converting semiconductor module
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD804436S1 (en) * 2015-06-12 2017-12-05 Hitachi High-Technologies Corporation Upper chamber for a plasma processing apparatus
USD818447S1 (en) * 2017-04-28 2018-05-22 Applied Materials, Inc. Plasma feedthrough flange
USD818968S1 (en) * 2016-06-16 2018-05-29 Tridonic Gmbh & Co. Kg Sensor
US20180347045A1 (en) * 2017-05-31 2018-12-06 Applied Materials, Inc. Remote plasma oxidation chamber
USD837754S1 (en) * 2017-04-28 2019-01-08 Applied Materials, Inc. Plasma chamber liner
USD838681S1 (en) * 2017-04-28 2019-01-22 Applied Materials, Inc. Plasma chamber liner
USD840365S1 (en) * 2017-01-31 2019-02-12 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD842259S1 (en) * 2017-04-28 2019-03-05 Applied Materials, Inc. Plasma chamber liner

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040166612A1 (en) * 2002-06-05 2004-08-26 Applied Materials, Inc. Fabrication of silicon-on-insulator structure using plasma immersion ion implantation
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD804436S1 (en) * 2015-06-12 2017-12-05 Hitachi High-Technologies Corporation Upper chamber for a plasma processing apparatus
USD799439S1 (en) * 2016-05-31 2017-10-10 Rohm Co., Ltd. Power converting semiconductor module
USD818968S1 (en) * 2016-06-16 2018-05-29 Tridonic Gmbh & Co. Kg Sensor
USD840365S1 (en) * 2017-01-31 2019-02-12 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD818447S1 (en) * 2017-04-28 2018-05-22 Applied Materials, Inc. Plasma feedthrough flange
USD837754S1 (en) * 2017-04-28 2019-01-08 Applied Materials, Inc. Plasma chamber liner
USD838681S1 (en) * 2017-04-28 2019-01-22 Applied Materials, Inc. Plasma chamber liner
USD842259S1 (en) * 2017-04-28 2019-03-05 Applied Materials, Inc. Plasma chamber liner
US20180347045A1 (en) * 2017-05-31 2018-12-06 Applied Materials, Inc. Remote plasma oxidation chamber

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Search Report for Taiwan Design Application No. 106306308 dated Jun. 6, 2018.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1071836S1 (en) * 2023-01-19 2025-04-22 Geotab Inc. Solar-powered electronic device housing

Also Published As

Publication number Publication date
TWD192022S (zh) 2018-08-01
JP1612650S (enrdf_load_stackoverflow) 2018-09-03

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