USD658691S1 - Liner for plasma processing apparatus - Google Patents

Liner for plasma processing apparatus Download PDF

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Publication number
USD658691S1
USD658691S1 US29/400,581 US201129400581F USD658691S US D658691 S1 USD658691 S1 US D658691S1 US 201129400581 F US201129400581 F US 201129400581F US D658691 S USD658691 S US D658691S
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United States
Prior art keywords
liner
processing apparatus
plasma processing
view
ornamental design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/400,581
Inventor
Kouki Suzuki
Jun Yamashita
Masakazu Ban
Atsushi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BAN, MASAKAZU, SUZUKI, KOUKI, UEDA, ATSUSHI, YAMASHITA, JUN
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Description

FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a sectional view taken along line 7-7 of FIG. 1 thereof;
FIG. 8 is a sectional view taken along line 8-8 of FIG. 1 thereof; and,
FIG. 9 is a perspective view thereof.

Claims (1)

  1. The ornamental design for a liner for plasma processing apparatus, as shown and described.
US29/400,581 2011-03-30 2011-08-30 Liner for plasma processing apparatus Active USD658691S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011007264 2011-03-30
JP2011-007264 2011-03-30

Publications (1)

Publication Number Publication Date
USD658691S1 true USD658691S1 (en) 2012-05-01

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Family Applications (1)

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US29/400,581 Active USD658691S1 (en) 2011-03-30 2011-08-30 Liner for plasma processing apparatus

Country Status (2)

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US (1) USD658691S1 (en)
TW (1) TWD149224S (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802545S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Lower chamber for a plasma processing apparatus
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD837754S1 (en) * 2017-04-28 2019-01-08 Applied Materials, Inc. Plasma chamber liner
USD838681S1 (en) * 2017-04-28 2019-01-22 Applied Materials, Inc. Plasma chamber liner
USD842259S1 (en) * 2017-04-28 2019-03-05 Applied Materials, Inc. Plasma chamber liner
USD909439S1 (en) * 2018-11-30 2021-02-02 Ferrotec (Usa) Corporation Two-piece crucible cover
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802545S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Lower chamber for a plasma processing apparatus
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD837754S1 (en) * 2017-04-28 2019-01-08 Applied Materials, Inc. Plasma chamber liner
USD838681S1 (en) * 2017-04-28 2019-01-22 Applied Materials, Inc. Plasma chamber liner
USD842259S1 (en) * 2017-04-28 2019-03-05 Applied Materials, Inc. Plasma chamber liner
USD909439S1 (en) * 2018-11-30 2021-02-02 Ferrotec (Usa) Corporation Two-piece crucible cover
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus

Also Published As

Publication number Publication date
TWD149224S (en) 2012-09-11

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