USD1053830S1 - Wafer support of semiconductor manufacturing apparatus - Google Patents

Wafer support of semiconductor manufacturing apparatus Download PDF

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Publication number
USD1053830S1
USD1053830S1 US29/848,819 US202229848819F USD1053830S US D1053830 S1 USD1053830 S1 US D1053830S1 US 202229848819 F US202229848819 F US 202229848819F US D1053830 S USD1053830 S US D1053830S
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United States
Prior art keywords
manufacturing apparatus
semiconductor manufacturing
wafer support
view
sectional
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US29/848,819
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English (en)
Inventor
Daiki Taniguchi
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Kokusai Electric Corp
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Kokusai Electric Corp
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Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TANIGUCHI, Daiki
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US29/848,819 2022-03-04 2022-08-05 Wafer support of semiconductor manufacturing apparatus Active USD1053830S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-004465D 2022-03-04
JP2022004465F JP1731670S (ja) 2022-03-04 2022-03-04 基板処理装置用基板保持具

Publications (1)

Publication Number Publication Date
USD1053830S1 true USD1053830S1 (en) 2024-12-10

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ID=84322250

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US29/848,819 Active USD1053830S1 (en) 2022-03-04 2022-08-05 Wafer support of semiconductor manufacturing apparatus

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US (1) USD1053830S1 (enExample)
JP (1) JP1731670S (enExample)
TW (1) TWD228269S (enExample)

Citations (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6099302A (en) * 1998-06-23 2000-08-08 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
US9153466B2 (en) 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD940669S1 (en) * 2018-11-19 2022-01-11 Kokusai Electric Corporation Boat for substrate processing apparatus
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD981971S1 (en) * 2021-03-15 2023-03-28 Kokusai Electric Corporation Boat of substrate processing apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1682719S (enExample) 2020-06-15 2021-04-05

Patent Citations (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6099302A (en) * 1998-06-23 2000-08-08 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US9153466B2 (en) 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD940669S1 (en) * 2018-11-19 2022-01-11 Kokusai Electric Corporation Boat for substrate processing apparatus
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD981971S1 (en) * 2021-03-15 2023-03-28 Kokusai Electric Corporation Boat of substrate processing apparatus

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Design U.S. Appl. No. 29/807,738. Boat of Substrate Processing Apparatus. (Kokusai Electric Corporation) Sep. 14, 2021.
Design U.S. Appl. No. 29/811,337. Boat of Substrate Processing Apparatus. (Kokusai Electric Corporation) Oct. 13, 2021.

Also Published As

Publication number Publication date
JP1731670S (ja) 2025-12-15
TWD228269S (zh) 2023-11-01

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