USD1012051S1 - Electrostatic chuck for semiconductor manufacturing device - Google Patents

Electrostatic chuck for semiconductor manufacturing device Download PDF

Info

Publication number
USD1012051S1
USD1012051S1 US29/715,863 US201929715863F USD1012051S US D1012051 S1 USD1012051 S1 US D1012051S1 US 201929715863 F US201929715863 F US 201929715863F US D1012051 S USD1012051 S US D1012051S
Authority
US
United States
Prior art keywords
semiconductor manufacturing
electrostatic chuck
manufacturing device
view
lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/715,863
Other languages
English (en)
Inventor
Masato Takayama
Yasuharu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SASAKI, YASUHARU, TAKAYAMA, MASATO
Application granted granted Critical
Publication of USD1012051S1 publication Critical patent/USD1012051S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

US29/715,863 2019-06-17 2019-12-05 Electrostatic chuck for semiconductor manufacturing device Active USD1012051S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2019-13256F JP1655453S (enrdf_load_html_response) 2019-06-17 2019-06-17
JP2019-013256 2019-06-17

Publications (1)

Publication Number Publication Date
USD1012051S1 true USD1012051S1 (en) 2024-01-23

Family

ID=69897361

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/715,863 Active USD1012051S1 (en) 2019-06-17 2019-12-05 Electrostatic chuck for semiconductor manufacturing device

Country Status (2)

Country Link
US (1) USD1012051S1 (enrdf_load_html_response)
JP (1) JP1655453S (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber
USD1074040S1 (en) * 2024-05-11 2025-05-06 Kai YI Table lamp base

Citations (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1009027A (en) * 1911-01-14 1911-11-14 Percival Hammer Troutman Orchard-heater.
USD308419S (en) * 1987-06-01 1990-06-05 Casablanca Fan Company, Inc. Cover plate for a ceiling fan
US20060285310A1 (en) * 2005-06-15 2006-12-21 Shing-Jy Shyu Ceiling fan light LED assembly device
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
US20130056142A1 (en) * 2011-09-02 2013-03-07 Joseph W. Fiore Decorative decal for recessed light trim
USD701181S1 (en) * 2012-12-03 2014-03-18 Molex Incorporated LED holder
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD869409S1 (en) * 2016-09-30 2019-12-10 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD877101S1 (en) * 2018-03-09 2020-03-03 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD884873S1 (en) * 2018-05-09 2020-05-19 Benjamin D. Bortnick Inverted fan enclosure
USD894137S1 (en) * 2017-10-05 2020-08-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD908645S1 (en) * 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD913979S1 (en) * 2019-08-28 2021-03-23 Applied Materials, Inc. Inner shield for a substrate processing chamber
USD931240S1 (en) * 2019-07-30 2021-09-21 Applied Materials, Inc. Substrate support pedestal
USD937329S1 (en) * 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD940765S1 (en) * 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD940837S1 (en) * 2019-08-22 2022-01-11 Asm Ip Holding B.V. Electrode
USD944946S1 (en) * 2019-06-14 2022-03-01 Asm Ip Holding B.V. Shower plate
USD947144S1 (en) * 2019-05-10 2022-03-29 Tdk Corporation Vibration element for a haptic actuator
USD949319S1 (en) * 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
USD958764S1 (en) * 2019-01-17 2022-07-26 Asm Ip Holding B.V. Higher temperature vented susceptor
USD980813S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD980814S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus

Patent Citations (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1009027A (en) * 1911-01-14 1911-11-14 Percival Hammer Troutman Orchard-heater.
USD308419S (en) * 1987-06-01 1990-06-05 Casablanca Fan Company, Inc. Cover plate for a ceiling fan
US20060285310A1 (en) * 2005-06-15 2006-12-21 Shing-Jy Shyu Ceiling fan light LED assembly device
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
US20130056142A1 (en) * 2011-09-02 2013-03-07 Joseph W. Fiore Decorative decal for recessed light trim
USD701181S1 (en) * 2012-12-03 2014-03-18 Molex Incorporated LED holder
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD869409S1 (en) * 2016-09-30 2019-12-10 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD894137S1 (en) * 2017-10-05 2020-08-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD946638S1 (en) * 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD902165S1 (en) * 2018-03-09 2020-11-17 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD877101S1 (en) * 2018-03-09 2020-03-03 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD884873S1 (en) * 2018-05-09 2020-05-19 Benjamin D. Bortnick Inverted fan enclosure
USD958764S1 (en) * 2019-01-17 2022-07-26 Asm Ip Holding B.V. Higher temperature vented susceptor
USD947144S1 (en) * 2019-05-10 2022-03-29 Tdk Corporation Vibration element for a haptic actuator
USD944946S1 (en) * 2019-06-14 2022-03-01 Asm Ip Holding B.V. Shower plate
USD931240S1 (en) * 2019-07-30 2021-09-21 Applied Materials, Inc. Substrate support pedestal
USD949319S1 (en) * 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
USD940837S1 (en) * 2019-08-22 2022-01-11 Asm Ip Holding B.V. Electrode
USD908645S1 (en) * 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD913979S1 (en) * 2019-08-28 2021-03-23 Applied Materials, Inc. Inner shield for a substrate processing chamber
USD937329S1 (en) * 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD970566S1 (en) * 2020-03-23 2022-11-22 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD940765S1 (en) * 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD966357S1 (en) * 2020-12-02 2022-10-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD980813S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD980814S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber
USD1074040S1 (en) * 2024-05-11 2025-05-06 Kai YI Table lamp base

Also Published As

Publication number Publication date
JP1655453S (enrdf_load_html_response) 2020-03-23

Similar Documents

Publication Publication Date Title
USD939411S1 (en) Vehicle fender
USD924369S1 (en) Faucet
USD957471S1 (en) Fender
USD992615S1 (en) Focus ring
USD899970S1 (en) Passenger car
USD992614S1 (en) Focus ring
USD888295S1 (en) Vehicle lamp
USD826437S1 (en) Headlamp for a vehicle
USD803802S1 (en) Electrostatic chuck for semiconductor manufacturing equipment
USD795208S1 (en) Electrostatic chuck for semiconductor manufacturing equipment
USD856412S1 (en) Printer
USD868866S1 (en) Robot
USD929198S1 (en) Tungsten grinder
USD1045691S1 (en) Self-balancing vehicle
USD825525S1 (en) Earphone
USD863623S1 (en) Headlight for a motor vehicle
USD899971S1 (en) Passenger car
USD940028S1 (en) Automobile interior
USD978040S1 (en) Instrument panel for a vehicle
USD936121S1 (en) Industrial robot
USD935969S1 (en) Dashboard for automobile
USD890044S1 (en) Automobile bonnet component
USD849889S1 (en) Nozzle
USD924272S1 (en) Engine
USD866016S1 (en) Headlight for a motor vehicle

Legal Events

Date Code Title Description
FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY