US9515275B2 - Inverted organic photosensitive devices - Google Patents
Inverted organic photosensitive devices Download PDFInfo
- Publication number
- US9515275B2 US9515275B2 US12/605,958 US60595809A US9515275B2 US 9515275 B2 US9515275 B2 US 9515275B2 US 60595809 A US60595809 A US 60595809A US 9515275 B2 US9515275 B2 US 9515275B2
- Authority
- US
- United States
- Prior art keywords
- donor
- organic
- acceptor
- photosensitive device
- inverted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 claims description 82
- 229910052751 metal Inorganic materials 0.000 claims description 52
- 239000002184 metal Substances 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 44
- STTGYIUESPWXOW-UHFFFAOYSA-N 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline Chemical compound C=12C=CC3=C(C=4C=CC=CC=4)C=C(C)N=C3C2=NC(C)=CC=1C1=CC=CC=C1 STTGYIUESPWXOW-UHFFFAOYSA-N 0.000 claims description 34
- 230000005670 electromagnetic radiation Effects 0.000 claims description 18
- 230000000903 blocking effect Effects 0.000 claims description 17
- 239000011888 foil Substances 0.000 claims description 8
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 6
- RTZYCRSRNSTRGC-LNTINUHCSA-K (z)-4-oxopent-2-en-2-olate;ruthenium(3+) Chemical compound [Ru+3].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O RTZYCRSRNSTRGC-LNTINUHCSA-K 0.000 claims description 5
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 5
- 229910003472 fullerene Inorganic materials 0.000 claims description 5
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 claims description 5
- XQNMSKCVXVXEJT-UHFFFAOYSA-N 7,14,25,32-tetrazaundecacyclo[21.13.2.22,5.03,19.04,16.06,14.08,13.020,37.024,32.026,31.034,38]tetraconta-1(36),2,4,6,8,10,12,16,18,20(37),21,23(38),24,26,28,30,34,39-octadecaene-15,33-dione 7,14,25,32-tetrazaundecacyclo[21.13.2.22,5.03,19.04,16.06,14.08,13.020,37.025,33.026,31.034,38]tetraconta-1(37),2,4,6,8,10,12,16,18,20,22,26,28,30,32,34(38),35,39-octadecaene-15,24-dione Chemical compound O=c1c2ccc3c4ccc5c6nc7ccccc7n6c(=O)c6ccc(c7ccc(c8nc9ccccc9n18)c2c37)c4c56.O=c1c2ccc3c4ccc5c6c(ccc(c7ccc(c8nc9ccccc9n18)c2c37)c46)c1nc2ccccc2n1c5=O XQNMSKCVXVXEJT-UHFFFAOYSA-N 0.000 claims description 4
- ZSYMVHGRKPBJCQ-UHFFFAOYSA-N 1,1'-biphenyl;9h-carbazole Chemical group C1=CC=CC=C1C1=CC=CC=C1.C1=CC=C2C3=CC=CC=C3NC2=C1 ZSYMVHGRKPBJCQ-UHFFFAOYSA-N 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 claims description 3
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 claims description 3
- IBHBKWKFFTZAHE-UHFFFAOYSA-N n-[4-[4-(n-naphthalen-1-ylanilino)phenyl]phenyl]-n-phenylnaphthalen-1-amine Chemical compound C1=CC=CC=C1N(C=1C2=CC=CC=C2C=CC=1)C1=CC=C(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C3=CC=CC=C3C=CC=2)C=C1 IBHBKWKFFTZAHE-UHFFFAOYSA-N 0.000 claims description 3
- 150000002790 naphthalenes Chemical class 0.000 claims description 3
- 150000002979 perylenes Chemical class 0.000 claims description 3
- 150000004032 porphyrins Chemical class 0.000 claims description 3
- 229910052723 transition metal Inorganic materials 0.000 claims description 3
- 150000003624 transition metals Chemical class 0.000 claims description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 1
- 229910001887 tin oxide Inorganic materials 0.000 claims 1
- 230000005693 optoelectronics Effects 0.000 abstract description 25
- 239000010410 layer Substances 0.000 description 143
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 45
- 238000004768 lowest unoccupied molecular orbital Methods 0.000 description 21
- 238000005286 illumination Methods 0.000 description 20
- 239000010453 quartz Substances 0.000 description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 238000004770 highest occupied molecular orbital Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 13
- 238000012546 transfer Methods 0.000 description 13
- 238000010521 absorption reaction Methods 0.000 description 12
- 230000006798 recombination Effects 0.000 description 11
- 238000005215 recombination Methods 0.000 description 11
- 230000009102 absorption Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 10
- 239000011368 organic material Substances 0.000 description 10
- 230000005684 electric field Effects 0.000 description 9
- 239000012044 organic layer Substances 0.000 description 9
- 239000002800 charge carrier Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 238000010494 dissociation reaction Methods 0.000 description 7
- 230000005593 dissociations Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000005611 electricity Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 6
- 238000004381 surface treatment Methods 0.000 description 6
- 238000011282 treatment Methods 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 229920000144 PEDOT:PSS Polymers 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- -1 for example Substances 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- 238000013086 organic photovoltaic Methods 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229920000767 polyaniline Polymers 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- PMJMHCXAGMRGBZ-UHFFFAOYSA-N subphthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(=N3)N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C3=N1 PMJMHCXAGMRGBZ-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- YTDHEFNWWHSXSU-UHFFFAOYSA-N 2,3,5,6-tetrachloroaniline Chemical compound NC1=C(Cl)C(Cl)=CC(Cl)=C1Cl YTDHEFNWWHSXSU-UHFFFAOYSA-N 0.000 description 1
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- PONZBUKBFVIXOD-UHFFFAOYSA-N 9,10-dicarbamoylperylene-3,4-dicarboxylic acid Chemical compound C=12C3=CC=C(C(O)=O)C2=C(C(O)=O)C=CC=1C1=CC=C(C(O)=N)C2=C1C3=CC=C2C(=N)O PONZBUKBFVIXOD-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- RAABOESOVLLHRU-UHFFFAOYSA-N diazene Chemical compound N=N RAABOESOVLLHRU-UHFFFAOYSA-N 0.000 description 1
- 229910000071 diazene Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 229920002457 flexible plastic Polymers 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000002073 nanorod Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000013041 optical simulation Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-M phenolate Chemical compound [O-]C1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-M 0.000 description 1
- 229940031826 phenolate Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- CLYVDMAATCIVBF-UHFFFAOYSA-N pigment red 224 Chemical compound C=12C3=CC=C(C(OC4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)OC(=O)C4=CC=C3C1=C42 CLYVDMAATCIVBF-UHFFFAOYSA-N 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229960002796 polystyrene sulfonate Drugs 0.000 description 1
- 239000011970 polystyrene sulfonate Substances 0.000 description 1
- 238000006862 quantum yield reaction Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/20—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising organic-organic junctions, e.g. donor-acceptor junctions
- H10K30/211—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising organic-organic junctions, e.g. donor-acceptor junctions comprising multiple junctions, e.g. double heterojunctions
-
- H01L51/441—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/2225—Diffusion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/228—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/30—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
- H10K30/353—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains comprising blocking layers, e.g. exciton blocking layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/50—Photovoltaic [PV] devices
- H10K30/57—Photovoltaic [PV] devices comprising multiple junctions, e.g. tandem PV cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/311—Phthalocyanine
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
- H10K85/6572—Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole
-
- H01L27/302—
-
- H01L51/0053—
-
- H01L51/0078—
-
- H01L51/424—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/20—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising organic-organic junctions, e.g. donor-acceptor junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/50—Photovoltaic [PV] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/621—Aromatic anhydride or imide compounds, e.g. perylene tetra-carboxylic dianhydride or perylene tetracarboxylic di-imide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Definitions
- the subject matter of the present disclosure was made by, on behalf of, and/or in connection with one or more of the following parties to a joint university-corporation research agreement: Princeton University, The University of Michigan, and Global Photonic Energy Corporation.
- the agreement was in effect on and before the date the subject matter of the present disclosure was made, and such was made as a result of activities undertaken within the scope of the agreement.
- the present disclosure generally relates to organic photosensitive optoelectronic devices. More specifically, it is directed to organic photosensitive optoelectronic devices grown in an inverted manner, comprising a reflective substrate and transparent top electrode.
- Optoelectronic devices rely on the optical and electronic properties of materials to either produce or detect electromagnetic radiation electronically or to generate electricity from ambient electromagnetic radiation.
- Photosensitive optoelectronic devices convert electromagnetic radiation into electricity.
- Solar cells also called photovoltaic (PV) devices, are a type of photosensitive optoelectronic device that is specifically used to generate electrical power.
- PV devices which may generate electrical energy from light sources other than sunlight, can be used to drive power consuming loads to provide, for example, lighting or heating, or to power electronic circuitry or devices such as calculators, radios, computers or remote monitoring or communications equipment.
- resistive load refers to any power consuming or storing circuit, device, equipment or system.
- photosensitive optoelectronic device is a photoconductor cell.
- signal detection circuitry monitors the resistance of the device to detect changes due to the absorption of light.
- photosensitive optoelectronic device is a photodetector.
- a photodetector is used in conjunction with a current detecting circuit which measures the current generated when the photodetector is exposed to electromagnetic radiation and may have an applied bias voltage.
- a detecting circuit as described herein is capable of providing a bias voltage to a photodetector and measuring the electronic response of the photodetector to electromagnetic radiation.
- a photoconductor cell does not have a rectifying junction and is normally operated with a bias.
- a PV device has at least one rectifying junction and is operated with no bias.
- a photodetector has at least one rectifying junction and is usually but not always operated with a bias.
- a PV cell may provide power to a circuit, device or equipment, but may not provide a signal or current to control detection circuitry, or the output of information from the detection circuitry.
- a photodetector or photoconductor provides a signal or current to control detection circuitry, or the output of information from the detection circuitry but does not provide power to the circuitry, device or equipment.
- photosensitive optoelectronic devices have been constructed of a number of inorganic semiconductors, e.g., crystalline, polycrystalline and amorphous silicon, gallium arsenide, cadmium telluride and others.
- semiconductor denotes materials that can conduct electricity when charge carriers are induced by thermal or electromagnetic excitation.
- photoconductive generally relates to the process in which electromagnetic radiant energy is absorbed and thereby converted to excitation energy of electric charge carriers so that the carriers can conduct, i.e., transport, electric charge in a material.
- photoconductor and “photoconductive material” are used herein to refer to semiconductor materials which are chosen for their property of absorbing electromagnetic radiation to generate electric charge carriers.
- PV devices may be characterized by the efficiency with which they can convert incident solar power to useful electric power.
- Devices utilizing crystalline or amorphous silicon dominate commercial applications, and some have achieved efficiencies of 23% or greater.
- efficient crystalline-based devices, especially of large surface area are difficult and expensive to produce due to the problems inherent in producing large crystals without significant efficiency-degrading defects.
- high efficiency amorphous silicon devices still suffer from problems with stability.
- Present commercially available amorphous silicon cells have stabilized efficiencies between 4 and 8%. More recent efforts have focused on the use of organic PV cells to achieve acceptable photovoltaic conversion efficiencies with economical production costs.
- PV devices may be optimized for maximum electrical power generation under standard illumination conditions (i.e., Standard Test Conditions which are 1000 W/m 2 , AM1.5 spectral illumination), for the maximum product of photocurrent times photovoltage.
- standard illumination conditions i.e., Standard Test Conditions which are 1000 W/m 2 , AM1.5 spectral illumination
- the power conversion efficiency of such a cell under standard illumination conditions depends on the following three parameters: (1) the current under zero bias, i.e., the short-circuit current (J SC , in Amperes (2) the photovoltage under open circuit conditions, i.e., the open circuit voltage (V OC ), in Volts (V) and (3) the fill factor, FF.
- PV devices produce a photo-generated current when they are connected across a load and are irradiated by light.
- a PV device When irradiated under infinite load, a PV device generates its maximum possible voltage, or V OC .
- V OC When irradiated with its electrical contacts shorted, a PV device generates its maximum possible current, I short-circuit, or I SC .
- I SC When actually used to generate power, a PV device is connected to a finite resistive load and the power output is given by the product of the current and voltage, I ⁇ V.
- the maximum total power generated by a PV device is inherently incapable of exceeding the product, I SC ⁇ V OC .
- the current and voltage When the load value is optimized for maximum power extraction, the current and voltage have the values, I max and V max , respectively.
- FF fill factor
- an organic molecular crystal (OMC) material for example, an organic molecular crystal (OMC) material, or a polymer
- OMC organic molecular crystal
- S 0 +hv ⁇ S 0 * ground and excited molecular states, respectively.
- This energy absorption is associated with the promotion of an electron from a bound state in the Highest Occupied Molecular Orbital (HOMO) energy level, which may be a B-bond, to the Lowest Unoccupied Molecular Orbital (LUMO) energy level, which may be a B-bond, or equivalently, the promotion of a hole from the LUMO energy level to the HOMO energy level.
- HOMO Highest Occupied Molecular Orbital
- LUMO Lowest Unoccupied Molecular Orbital
- the generated molecular state is generally believed to be an exciton, i.e., an electron-hole pair in a bound state which is transported as a quasi-particle.
- the excitons can have an appreciable life-time before geminate recombination, which refers to the process of the original electron and hole recombining with each other, as opposed to recombination with holes or electrons from other pairs.
- the electron-hole pair becomes separated, typically at a donor-acceptor interface between two dissimilar contacting organic thin films. If the charges do not separate, they can recombine in a geminant recombination process, also known as quenching, either radiatively, by the emission of light of a lower energy than the incident light, or non-radiatively, by the production of heat. Either of these outcomes is undesirable in a photosensitive optoelectronic device.
- Electric fields or inhomogeneities at a contact may cause an exciton to quench rather than dissociate at the donor-acceptor interface, resulting in no net contribution to the current. Therefore, it may be desirable to keep photogenerated excitons away from the contacts. This has the effect of limiting the diffusion of excitons to the region near the junction so that the associated electric field has an increased opportunity to separate charge carriers liberated by the dissociation of the excitons near the junction.
- PV heterojunction To produce internally generated electric fields which occupy a substantial volume, the usual method is to juxtapose two layers of material with appropriately selected conductive properties, especially with respect to their distribution of molecular quantum energy states.
- the interface of these two materials is called a PV heterojunction.
- materials for forming PV heterojunctions have been denoted as generally being of either n or p type.
- n-type denotes that the majority carrier type is the electron. This could be viewed as the material having many electrons in relatively free energy states.
- the p-type denotes that the majority carrier type is the hole. Such material has many holes in relatively free energy states.
- the type of the background, i.e., not photo-generated, majority carrier concentration depends primarily on unintentional doping by defects or impurities.
- the type and concentration of impurities determine the value of the Fermi energy, or level, within the gap between the HOMO energy level and LUMO energy level, called the HOMO-LUMO gap.
- the Fermi energy characterizes the statistical occupation of molecular quantum energy states denoted by the value of energy for which the probability of occupation is equal to 1 ⁇ 2.
- a Fermi energy near the LUMO energy level indicates that electrons are the predominant carrier.
- a Fermi energy near the HOMO energy level indicates that holes are the predominant carrier. Accordingly, the Fermi energy is a primary characterizing property of traditional semiconductors and the prototypical PV heterojunction has traditionally been the p-n interface.
- rectifying denotes, inter alia, that an interface has an asymmetric conduction characteristic, i.e., the interface supports electronic charge transport preferably in one direction. Rectification is associated normally with a built-in electric field which occurs at the heterojunction between appropriately selected materials.
- a first HOMO or LUMO energy level is “greater than” or “higher than” a second HOMO or LUMO energy level if the first energy level is closer to the vacuum energy level. Since ionization potentials (IP) are measured as a negative energy relative to a vacuum level, a higher HOMO energy level corresponds to an IP having a smaller absolute value (an IP that is less negative). Similarly, a higher LUMO energy level corresponds to an electron affinity (EA) having a smaller absolute value (an EA that is less negative).
- EA electron affinity
- the LUMO energy level of a material is higher than the HOMO energy level of the same material.
- a “higher” HOMO or LUMO energy level appears closer to the top of such a diagram than a “lower” HOMO or LUMO energy level.
- the terms “donor” and “acceptor” refer to the relative positions of the HOMO and LUMO energy levels of two contacting but different organic materials. This is in contrast to the use of these terms in the inorganic context, where “donor” and “acceptor” may refer to types of dopants that may be used to create inorganic n- and p-types layers, respectively.
- donor and “acceptor” may refer to types of dopants that may be used to create inorganic n- and p-types layers, respectively.
- the LUMO energy level of one material in contact with another is lower, then that material is an acceptor. Otherwise it is a donor. It is energetically favorable, in the absence of an external bias, for electrons at a donor-acceptor junction to move into the acceptor material, and for holes to move into the donor material.
- a significant property in organic semiconductors is carrier mobility. Mobility measures the ease with which a charge carrier can move through a conducting material in response to an electric field.
- a layer including a material that conducts preferentially by electrons due to a high electron mobility may be referred to as an electron transport layer, or ETL.
- a layer including a material that conducts preferentially by holes due to a high hole mobility may be referred to as a hole transport layer, or HTL.
- an acceptor material may be an ETL and a donor material may be an HTL.
- Such a process can be induced by the built-in electric field, but the efficiency at the electric fields typically found in organic devices (F ⁇ 10 6 V/cm) is low.
- the most efficient exciton dissociation in organic materials occurs at a D-A interface.
- the donor material with a low ionization potential forms a heterojunction with an acceptor material with a high electron affinity.
- the dissociation of the exciton can become energetically favorable at such an interface, leading to a free electron polaron in the acceptor material and a free hole polaron in the donor material.
- Organic PV cells have many potential advantages when compared to traditional silicon-based devices.
- Organic PV cells are light weight, economical in materials use, and can be deposited on low cost substrates, such as flexible plastic foils.
- organic PV devices typically have relatively low quantum yield (the ratio of photons absorbed to carrier pairs generated, or electromagnetic radiation to electricity conversion efficiency), being on the order of 1% or less. This is, in part, thought to be due to the second order nature of the intrinsic photoconductive process. That is, carrier generation requires exciton generation, diffusion and ionization or collection.
- ⁇ associated with each of these processes.
- the diffusion length (L D ) of an exciton is typically much less (L D ⁇ 50 ⁇ ) than the optical absorption length ( ⁇ 500 ⁇ ), requiring a trade off between using a thick, and therefore resistive, cell with multiple or highly folded interfaces, or a thin cell with a low optical absorption efficiency.
- Inverted organic PV cells utilize a reflective substrate and a transparent top contact. This architecture eliminates the need for comparatively high-cost transparent substrates and allows for fabrication on arbitrary surfaces. This design significantly extends the application of organic PV cells, such as allowing for power-generating coatings or growth on flexible and inexpensive opaque substrates, such as, for example, metal foil. Accordingly, there exists a need to develop more efficient inverted organic photosensitive structures.
- the present disclosure relates to organic photosensitive optoelectronic devices, such as organic PV devices, grown in an inverted manner.
- growth in an inverted manner means starting with a reflective electrode and using a transparent top electrode.
- the inverted organic PV devices described herein comprise:
- the reflective electrode may comprise an substrate, such as a metal anode.
- the electrode may comprise a low work function metal selected from steel, Ni, Ag, Al, Mg, In, and mixtures or alloys thereof.
- the inverted organic PV devices described herein comprise: a surface-treated reflective electrode; an organic donor-acceptor heterojunction over said reflective electrode; and a transparent electrode over said donor-acceptor heterojunction.
- the donor of the organic donor-acceptor heterojunction may be selected from phthalocyanines, porphyrins, subphthalocyanines, and derivatives or transition metal complexes thereof.
- the donor comprises copper phthalocyanine (CuPc).
- the acceptor of the organic donor-acceptor heterojunction is chosen from polymeric or non-polymeric perylenes, polymeric or non-polymeric naphthalenes, and polymeric or non-polymeric fullerenes.
- the acceptor comprises 3,4,9,10-perylenetetracarboxylic bis-benzimidazole (PTCBI).
- the transparent electrode is chosen from transparent oxides and metal or metal substitutes having a thickness sufficient to render them transparent or semi-transparent.
- the transparent electrode is selected from transparent conducting oxides such as indium tin oxide (ITO), gallium indium tin oxide (GITO), and zinc indium tin oxide (ZITO).
- the inverted organic PV devices described herein may optionally comprise one or more blocking layers, such as an exciton blocking layer (EBL), between the reflective electrode and the transparent electrode.
- EBL exciton blocking layer
- the EBL may be selected from N,N′-diphenyl-N,N′-bis-alpha-naphthylbenzidine (NPD), aluminum tris (8-hydroxyquinoline) (Alq3), carbazole biphenyl (CBP), bathocuproine (BCP), and tris(acetylacetonato) ruthenium (III) (Ru(acac) 3 ).
- power-generating devices comprising at least one organic PV device which comprises:
- the power-generating devices are formed on a substrate film or a foil. In some embodiments, the power generating device is formed directly on the enclosure of a device, wherein the device enclosure functions as a substrate and the reflective electrode is formed over the substrate.
- a method for producing an organic PV device comprising:
- the method comprises:
- the substrate is reflective, such as, for example, a metal foil, and the electrode closest to said reflective substrate is formed from suitable transparent or semitransparent materials defined herein.
- FIG. 1 shows an inverted organic PV device comprising a reflective electrode formed over a substrate, an organic donor-acceptor heterojunction on top of said reflective electrode, and a transparent electrode on top of said donor-acceptor heterojunction.
- FIG. 2 a is a plot of PTCBI thicknesses versus eta ( ⁇ P —power conversion efficiency) and responsivity (J SC /P 0 ), wherein A/W connotes Amps per Watt and “sim” connotes “simulated.”
- FIG. 2 b is a plot of PTCBI versus V OC and FF.
- FIG. 2 c is a plot of PTCBI thickness versus series resistance (R S ) and n.
- FIG. 2 d is a plot of PTCBI thickness versus reverse saturation current (J S ).
- FIG. 3 a is a plot of CuPc thicknesses versus eta and J SC /P 0 .
- FIG. 3 b is a plot of CuPc versus V OC and FF.
- FIG. 3 c is a plot of CuPc thickness versus R S and.
- FIG. 3 d is a plot of CuPc thickness versus J S .
- FIG. 4 a shows calculations from a standard transfer-matrix simulation performed on a control PV device grown on glass: ITO (1550 ⁇ )/CuPc (200 ⁇ )/PTCBI (250 ⁇ )/BCP (100 ⁇ )/Ag (1000 ⁇ ). The optical fields at peak absorption of CuPc at 625 nm (squares) and of PTCBI at 540 nm (stars) are shown.
- FIG. 4 b shows calculations from a standard transfer-matrix simulation performed on an inverted PV device consistent with the embodiments described herein: quartz/Ag (1000 ⁇ )/BCP (100 ⁇ )/PTCBI (300 ⁇ )/CuPc (150 ⁇ )/ITO (400 ⁇ ). The optical fields at peak absorption of CuPc at 625 nm (squares) and of PTCBI at 540 nm (stars) are shown.
- FIG. 4 c shows calculations from a standard transfer-matrix simulation performed on an inverted PV device consistent with the embodiments described herein: quartz/Ni (1000 ⁇ )/CuPc (400 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ). The optical fields at peak absorption of CuPc at 625 nm (squares) and of PTCBI at 540 nm (stars) are shown.
- FIG. 5 a shows current-voltage curves for a control PV device grown on glass: ITO (1550 ⁇ )/CuPc (200 ⁇ )/PTCBI (250 ⁇ )/BCP (100 ⁇ )/Ag (1000 ⁇ ) in the dark (filled squares) and under simulated 1-sun illumination (open circles).
- FIG. 5 a also shows current-voltage curves for an inverted PV device consistent with the embodiments described herein: quartz/Ni (1000 ⁇ )/CuPc (400 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ) in the dark (filled triangles) and under simulated 1-sun illumination (open triangles). The lines are fit to the dark current curves.
- FIG. 5 b shows ⁇ P (squares), V OC (stars) and FF (triangles) as a function of incident power density for an inverted PV device consistent with the embodiments described herein: quartz/Ni (1000 ⁇ )/CuPc (400 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ) treated with Ar plasma.
- FIG. 6 a shows the current-voltage characteristics for a control device (glass/ITO (1550 ⁇ )/CuPc (200 ⁇ )/PTCBI (250 ⁇ )/BCP (100 ⁇ )/Ag (1000 ⁇ )) in the dark (squares) and under simulated 1 sun, AM1.5G illumination (dashed lines), and for inverted PV device consistent with the embodiments described herein: quartz/Ni (1000 ⁇ )/CuPc (350 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ) in the dark (triangles) and under illumination (dashed-dotted line).
- FIG. 6 b shows the ⁇ P (circles), V OC (triangles), and FF (squares) for an inverted PV device comprising quartz/Ni (1000 ⁇ )/CuPc (350 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ).
- FIG. 9 a shows a simulated contour plot for J SC as a function of CuPc and PTCBI thicknesses.
- FIG. 9 b shows a simulated contour plot for ⁇ P as a function of CuPc and PTCBI thicknesses.
- Inverted organic photosensitive optoelectronic devices are described herein.
- the organic devices described may be used, for example, to generate a usable electrical current from incident electromagnetic radiation (e.g., PV devices) or may be used to detect incident electromagnetic radiation.
- Some embodiments may comprise an anode, a cathode, and a photoactive region between the anode and the cathode.
- the photoactive region is the portion of the photosensitive device that absorbs electromagnetic radiation to generate excitons that may dissociate in order to generate an electrical current.
- the devices described herein may also include at least one transparent electrode to allow incident radiation to be absorbed within the device.
- PV device materials and configurations are described in U.S. Pat. Nos. 6,657,378, 6,580,027, and 6,352,777, which are incorporated herein by reference for their disclosure of PV device materials and configurations.
- the term “layer” refers to a member or component of a photosensitive device whose primary dimension is X-Y, i.e., along its length and width. It should be understood that the term layer is not necessarily limited to single layers or sheets of materials. In addition, it should be understood that the surfaces of certain layers, including the interface(s) of such layers with other material(s) or layers(s), may be imperfect, wherein said surfaces represent an interpenetrating, entangled or convoluted network with other material(s) or layer(s). Similarly, it should also be understood that a layer may be discontinuous, such that the continuity of said layer along the X-Y dimension may be disturbed or otherwise interrupted by other layer(s) or material(s).
- electrode and “contact” are used herein to refer to a layer that provides a medium for delivering photo-generated current to an external circuit or providing a bias current or voltage to the device. That is, an electrode, or contact, provides the interface between the active regions of an organic photosensitive optoelectronic device and a wire, lead, trace or other means for transporting the charge carriers to or from the external circuit.
- Anodes and cathodes are examples.
- a photosensitive optoelectronic device it may be desirable to allow the maximum amount of ambient electromagnetic radiation from the device exterior to be admitted to the photoconductively active interior region. That is, the electromagnetic radiation must reach a photoconductive layer(s), where it can be converted to electricity by photoconductive absorption. This often dictates that at least one of the electrical contacts should be minimally absorbing and minimally reflecting of the incident electromagnetic radiation. In some cases, such a contact should be substantially transparent.
- the opposing electrode may be a reflective material so that light which has passed through the cell without being absorbed is reflected back through the cell.
- a layer of material or a sequence of several layers of different materials is said to be “transparent” when the layer or layers permit at least about 50% of the ambient electromagnetic radiation in relevant wavelengths to be transmitted through the layer or layers.
- layers which permit some, but less than about 50% transmission of ambient electromagnetic radiation in relevant wavelengths are said to be “semi-transparent.”
- cathode is used in the following manner. In a non-stacked PV device or a single unit of a stacked PV device under ambient irradiation and connected with a resistive load and with no externally applied voltage, e.g., a PV device, electrons move to the cathode from the photo-conducting material.
- anode is used herein such that in a PV device under illumination, holes move to the anode from the photoconducting material, which is equivalent to electrons moving in the opposite manner. It will be noted that as the terms are used herein, anodes and cathodes may be electrodes or charge transfer layers.
- top means furthest away from the substrate structure (if present), while “bottom” means closest to the substrate structure. If the device does not include a substrate structure, then “top” means furthest away from the reflective electrode.
- the bottom electrode is the electrode closest to the substrate structure, and is generally the first electrode fabricated.
- the bottom electrode has two surfaces, a bottom side closest to the substrate, and a top side further away from the substrate.
- a first layer is described as “disposed over” or “on top of” a second layer
- the first layer is disposed further away from substrate.
- a cathode may be described as “disposed over” or “on top of” an anode, even though there are various organic layers in between.
- FIG. 1 shows inverted organic photosensitive optoelectronic device 100 .
- Device 100 may include reflective substrate 110 , donor layer 115 , acceptor layer 120 , optional blocking layer 125 , and transparent electrode 130 .
- Device 100 may be fabricated by depositing the layers described, in order.
- the device described in FIG. 1 may optionally include a very thin, damage inducing metal layer between blocking layer 125 and transparent electrode 130 such that transparency is not impacted.
- Device 100 may also optionally include substrate structure 135 .
- the substrate structure may directly support reflective electrode 110 .
- the organic PV device may exist as a tandem device comprising one or more additional donor-acceptor layers.
- a tandem device may have charge transfer layers, electrodes, or charge recombination layers between the tandem donor-acceptor layers.
- the substrate and reflective electrode may be combined, the substrate may be reflective and the electrode transparent.
- Substrate 135 onto which the device may be grown or placed, may be any suitable material that provides the desired structural properties.
- the substrate may be flexible or rigid, planar or non-planar.
- the substrate may be transparent, translucent or opaque.
- Plastic, glass, and quartz are examples of rigid substrate materials.
- Plastic and metal foils are examples of flexible substrate materials.
- the material and thickness of the substrate may be chosen to obtain the desired structural and optical properties.
- reflective electrode 110 may comprise an electrode, such as a metal anode.
- reflective electrode 110 may comprise a low work function metal selected from steel, Ni, Ag, Al, Mg, In, and mixtures or alloys thereof.
- the electrode may comprise one metal as the base and one as the electrode material, such as Ti, stainless steel, or Al sheets, with or without Ag on top.
- reflective electrode 110 and substrate material 135 may be combined or formed of two metals.
- substrate 135 is reflective and electrode 110 is transparent.
- the “electrodes” described herein may be composed of “metal” or “metal substitutes.”
- metal is used to embrace both materials composed of an elementally pure metal, e.g., Mg, and also metal alloys which are materials composed of two or more elementally pure metals, e.g., Mg and Ag together, denoted Mg:Ag.
- metal substitute refers to a material that is not a metal within the normal definition, but which has the metal-like properties that are desired in certain appropriate applications.
- ITO indium tin oxide
- GITO gallium indium tin oxide
- ZITO zinc indium tin oxide
- ITO is a highly doped degenerate n+ semiconductor with an optical bandgap of approximately 3.2 eV, rendering it transparent to wavelengths greater than approximately 3900 ⁇ .
- PANI transparent conductive polymer polyaniline
- Metal substitutes may be further selected from a wide range of non-metallic materials, wherein the term “non-metallic” is meant to embrace a wide range of materials, provided that the material is free of metal in its chemically uncombined form.
- the metal When a metal is present in its chemically uncombined form, either alone or in combination with one or more other metals as an alloy, the metal may alternatively be referred to as being present in its metallic form or as being a “free metal”.
- the metal substitute electrodes described herein may sometimes be referred to as “metal-free,” wherein the term “metal-free” is expressly meant to embrace a material free of metal in its chemically uncombined form.
- Free metals typically have a form of metallic bonding that results from a sea of valence electrons which are free to move in an electronic conduction band throughout the metal lattice. While metal substitutes may contain metal constituents, they are “non-metallic” on several bases. They are not pure free-metals nor are they alloys of free-metals. When metals are present in their metallic form, the electronic conduction band tends to provide, among other metallic properties, a high electrical conductivity as well as a high reflectivity for optical radiation.
- Transparent electrode 130 may be chosen from transparent oxides and metal or metal substitutes having a thickness sufficient to render them transparent. Commonly used metal substitutes for electrodes and charge transfer layers would include doped wide-bandgap semiconductors, for example, transparent conducting oxides. In some embodiments, transparent electrode 130 may be selected from ITO, GITO, and ZITO. Other exemplary electrodes include highly transparent, non-metallic, low resistance cathodes such as those disclosed in U.S. Pat. No. 6,420,031, to Parthasarathy et al., or a highly efficient, low resistance metallic/non-metallic compound cathode such as those disclosed in U.S. Pat. No.
- Each type of cathode is typically prepared in a fabrication process that includes the step of sputter depositing an ITO layer onto either an organic material, such as CuPc, to form a highly transparent, non-metallic, low resistance cathode or onto a thin Mg:Ag layer to form a highly efficient, low resistance metallic/non-metallic compound cathode.
- an organic material such as CuPc
- the devices described herein will comprise at least one “photoactive region” in which light is absorbed to form an excited state, or “exciton”, which may subsequently dissociate in to an electron and a hole.
- the dissociation of the exciton will typically occur at the “heterojunction” formed by the juxtaposition of an donor layer and an acceptor layer.
- the “photoactive region” may include donor layer 115 and acceptor layer 120 . Charge separation may occur predominantly at the organic heterojunction between donor layer 115 and acceptor layer 120 .
- the built-in potential at the heterojunction is determined by the HOMO-LUMO energy level difference between the two materials contacting to form the heterojunction.
- the HOMO-LUMO gap offset between the donor and acceptor materials produces an electric field at the donor-acceptor interface that facilitates dissociation of excitons created within an exciton diffusion length of the interface into opposite signed carriers (holes and electrons).
- Suitable materials comprising acceptor layer 120 may include, for example, polymeric or non-polymeric perylenes, naphthalenes, fullerenes or nanotubules.
- acceptor layer 120 may comprise 3,4,9,10-perylenetetracarboxylic bis-benzimidazole (PTCBI).
- acceptor layer 120 may comprise a fullerene material as described in U.S. Pat. No. 6,580,027, the description of fullerene material which is incorporated herein by reference in its entirety.
- donor layer 115 may comprise squaraines, phthalocyanine, porphyrin, subphthalocyanine (SubPc), copper phthalocyanine (CuPc), or a derivative or transition metal complex thereof such as aluminum phthalocyanine chloride (AlClPc).
- organometallic as used herein is as generally understood by one of ordinary skill in the art and as given, for example, in “Inorganic Chemistry” (2nd Edition) by Gary L. Miessler and Donald A. Tarr, Prentice Hall (1998).
- organometallic may refer to compounds which have an organic group bonded to a metal through a carbon-metal bond.
- Organometallic compounds may comprise, in addition to one or more carbon-metal bonds to an organic species, one or more donor bonds from a heteroatom.
- the carbon-metal bond to an organic species may refer, for example, to a direct bond between a metal and a carbon atom of an organic group, such as phenyl, alkyl, alkenyl, etc.
- the term cyclometallated refers to compounds that comprise a bidentate organometallic ligand so that, upon bonding to a metal, a ring structure is formed that includes the metal as one of the ring members.
- acceptor layer 120 and donor layer 115 may be imperfect, discontinuous, and/or otherwise represent an interpenetrating, entangled or convoluted network of donor and acceptor materials.
- the organic donor-acceptor heterojunction may form a planar heterojunction, in others it may form a bulk heterojunction, nanocrystalline bulk heterojunction, hybrid planar-mixed heterojunction, or mixed heterojunction.
- two or more organic donor-acceptor heterojunctions may be used to create a tandem inverted PV device.
- Organic layers may be fabricated using vacuum deposition, spin coating, organic vapor-phase deposition, inkjet printing, and other methods known in the art.
- Organic photosensitive optoelectronic devices of the embodiments described herein may function as a PV device, photodetector or photoconductor.
- the materials used in the photoconductive organic layers and the thicknesses thereof may be selected, for example, to optimize the external quantum efficiency of the device.
- the materials used in the photoconductive organic layers and the thicknesses thereof may be selected, for example, to maximize the sensitivity of the device to desired spectral regions.
- the desired result may be achieved by considering several guidelines that may be used in the selection of layer thicknesses. It may be desirable for the layer thickness, L, to be less than or on the order of an exciton diffusion length, L D , since it is believed that most exciton dissociation will occur within a diffusion length of a donor-acceptor interface. In this description, L is the distance from the exciton formation site and a donor-acceptor interface. If L is greater than L D , then many excitons may recombine before dissociation. It is further desirable for the total photoconductive layer thickness to be of the order of the electromagnetic radiation absorption length, 1/ ⁇ (where ⁇ is the absorption coefficient), so that nearly all of the radiation incident on the PV device is absorbed to produce excitons. Furthermore, the photoconductive layer thickness should be as thin as possible to avoid excess series resistance due to the high bulk resistivity of organic semiconductors.
- a thickness that is comparable or larger than the absorption length may be desirable in order to absorb the maximum amount of incident radiation.
- two undesirable effects may be increased. One may be due to the high series resistance of organic semiconductors, as an increased organic layer thickness may increase device resistance and reduce efficiency. Another undesirable effect is that increasing the photoconductive layer thickness may increase the likelihood that excitons will be generated far from the charge-separating interface, resulting in enhanced probability of geminate recombination and, again, reduced efficiency. Therefore, it may be desirable to have a device configuration that balances between such competing effects, in a manner that produces a high external quantum efficiency for the overall device.
- the device of FIG. 1 may further include one or more of blocking layer 125 , such as the exciton blocking layers (EBLs) described in U.S. Pat. No. 6,097,147, Peumans et al., Applied Physics Letters 2000, 76, 2650-52, and U.S. Pat. No. 6,451,415, Forrest et al., all of which are incorporated herein by reference for their disclosure of blocking layers.
- EBLs exciton blocking layers
- higher internal and external quantum efficiencies have been achieved by the inclusion of an EBL to confine photogenerated excitons to the region near the dissociating interface and to prevent parasitic exciton quenching at a photosensitive organic/electrode interface.
- an EBL can also act as a diffusion barrier to substances introduced during deposition of the electrodes.
- an EBL can be made thick enough to fill pinholes or shorting defects which could otherwise render an organic PV device non-functional. An EBL can therefore help protect fragile organic layers from damage produced when electrodes are deposited onto the organic materials.
- an EBL derive their exciton blocking property from having a LUMO-HOMO energy gap substantially larger than that of the adjacent organic semiconductor from which excitons are being blocked.
- the confined excitons are prohibited from existing in the EBL due to energy considerations.
- it is desirable for the EBL to block excitons it is not desirable for the EBL to block all charge.
- an EBL may block one sign of charge carrier.
- an EBL will exist between two other layers, usually an organic photosensitive semiconductor layer and an electrode, a charge transfer layer or a charge recombination layer.
- the adjacent electrode or charge transfer layer will be in context either a cathode or an anode.
- the material for an EBL in a given position in a device will be chosen so that the desired sign of carrier will not be impeded in its transport to the electrode or charge transfer layer. Proper energy level alignment ensures that no barrier to charge transport exists, preventing an increase in series resistance. In certain embodiments, it may be desirable for a material used as a cathode side EBL to have a LUMO energy level closely matching the LUMO energy level of the adjacent acceptor material so that any undesired barrier to electrons is minimized.
- exciton blocking nature of a material is not necessarily an intrinsic property of its HOMO-LUMO energy gap. Whether a given material will act as an exciton blocker depends upon the relative HOMO and LUMO energy levels of the adjacent organic photosensitive material. Therefore, it may not be possible to identify a class of compounds in isolation as exciton blockers without regard to the device context in which they may be used. However, with the teachings herein, one of ordinary skill in the art may identify whether a given material will function as an exciton blocking layer when used with a selected set of materials to construct an organic PV device.
- blocking layer 125 may comprise an EBL situated between acceptor layer 120 and transparent electrode 130 .
- EBL materials include, but are not limited to, 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline (also called bathocuproin or BCP), which is believed to have a LUMO-HOMO energy level separation of about 3.5 eV, or bis(2-methyl-8-hydroxyquinolinoato)-aluminum(III)phenolate (Alq 2 OPH).
- BCP may be an effective exciton blocker which can easily transport electrons to the cathode from an acceptor layer.
- the EBL may be selected from N,N′-diphenyl-N,N′-bis-alpha-naphthylbenzidine (NPD), aluminum tris (8-hydroxyquinoline) (Alq3), carbazole biphenyl (CBP), and tris(acetylacetonato) ruthenium (III) (Ru(acac) 3 ).
- NPD N,N′-diphenyl-N,N′-bis-alpha-naphthylbenzidine
- Alq3 aluminum tris (8-hydroxyquinoline)
- CBP carbazole biphenyl
- Ru(acac) 3 tris(acetylacetonato)
- blocking layer 125 may comprise an EBL doped with a suitable dopant, including but not limited to 3,4,9,10-perylenetracarboxylic dianhydride (PTCDA), 3,4,9,10-perylenetracarboxylic diimide (PTCDI), 3,4,9,10-perylenetetracarboxylic-bis-benzimidazole (PTCBI), 1,4,5,8-naphthalenetetracarboxylic dianhydride (NTCDA), and derivatives thereof.
- PTCDA 3,4,9,10-perylenetracarboxylic dianhydride
- PTCDI 3,4,9,10-perylenetracarboxylic diimide
- PTCBI 3,4,9,10-perylenetetracarboxylic-bis-benzimidazole
- NTCDA 1,4,5,8-naphthalenetetracarboxylic dianhydride
- BCP as deposited in the devices described herein, may be amorphous.
- the resulting morphology change to polycrystalline material results in a lower quality film with possible defects such as shorts, voids or intrusion of electrode material. Accordingly, it has been found that doping of some EBL materials, such as BCP, that exhibit this effect with a suitable, relatively large and stable molecule can stabilize the EBL structure to prevent performance degrading morphology changes. It should be further appreciated that doping of an EBL which is transporting electrons in a given device with a material having a LUMO energy level close to that of the EBL may help to insure that electron traps are not formed which might produce space charge build-up and reduce performance. Additionally, it should be appreciated that relatively low doping densities should minimize exciton generation at isolated dopant sites. Since such excitons are effectively prohibited from diffusing by the surrounding EBL material, such absorptions reduce device photoconversion efficiency.
- the device of FIG. 1 may further comprise one or more transparent charge transfer layers or charge recombination layers.
- charge transfer layers are distinguished from acceptor and donor layers by the fact that charge transfer layers are frequently, but not necessarily, inorganic (often metals) and they may be chosen not to be photoconductively active.
- charge transfer layer is used herein to refer to layers similar to but different from electrodes in that a charge transfer layer only delivers charge carriers from one subsection of an optoelectronic device to the adjacent subsection.
- charge recombination layer is used herein to refer to layers similar to but different from electrodes in that a charge recombination layer allows for the recombination of electrons and holes between tandem photosensitive devices and may also enhance internal optical field strength near one or more active layers.
- a charge recombination layer can be constructed of semi-transparent metal nanoclusters, nanoparticles or nanorods as described in U.S. Pat. No. 6,657,378, the disclosure of which is incorporated herein by reference.
- a smoothing layer may be situated between reflective electrode 110 (e.g., anode) and donor layer 115 .
- a exemplary material for this layer comprises a film of 3,4-polyethylenedioxythiophene:polystyrenesulfonate (PEDOT:PSS).
- PEDOT:PSS 3,4-polyethylenedioxythiophene:polystyrenesulfonate
- the introduction of the PEDOT:PSS layer between reflective electrode 110 (e.g., anode comprising ITO) and donor layer 115 (e.g., CuPc) may lead to greatly improved fabrication yields.
- the improved fabrication yields may be a result of the ability of the spin-coated PEDOT:PSS film to planarize the ITO, whose rough surface could otherwise result in shorts through the thin molecular layers.
- one or more of the layers of the FIG. 1 device may undergo surface treatments.
- one or more of the layers may be treated with plasma prior to depositing the next layer.
- the layers may be treated, for example, with a mild argon or oxygen plasma. This treatment may be beneficial in reducing the series resistance. It may be advantageous to subject an optional PEDOT:PSS layer to a mild plasma treatment prior to deposition of the next layer.
- one or more of the layers may be exposed to ultra-violet ozone (UV-O 3 ) treatment.
- the reflective electrode e.g., anode layer
- a surface treatment is exposed to a surface treatment.
- the embodiments described herein also include a method for producing the organic PV device of FIG. 1 , comprising: providing reflective electrode 110 , performing at least one surface treatment on reflective electrode 110 , forming an organic donor-acceptor heterojunction (e.g., donor layer 115 and acceptor layer 120 ) over reflective electrode 110 , and forming transparent electrode 130 over said organic donor-acceptor heterojunction.
- a method for producing the organic PV device of FIG. 1 comprising: providing reflective electrode 110 , performing at least one surface treatment on reflective electrode 110 , forming an organic donor-acceptor heterojunction (e.g., donor layer 115 and acceptor layer 120 ) over reflective electrode 110 , and forming transparent electrode 130 over said organic donor-acceptor heterojunction.
- an organic donor-acceptor heterojunction e.g., donor layer 115 and acceptor layer 120
- the embodiments described herein also include methods for generating and/or measuring electricity.
- that method comprises: providing light to the device of FIG. 1 , which comprises reflective electrode 110 , organic donor-acceptor heterojunction on top of said reflective electrode (e.g., donor layer 115 and acceptor layer 120 ), and transparent electrode 130 on top of said donor-acceptor heterojunction.
- a power-generating device may include at least one device of FIG. 1 , comprising: a reflective electrode 110 ; organic donor-acceptor heterojunction on top of said reflective electrode (e.g., donor layer 115 and acceptor layer 120 ); and transparent electrode 130 on top of said donor-acceptor heterojunction.
- the device may be in the form of a paint, film, or foil.
- device 100 can be formed on substrate structure 135 , which comprises a film, foil, or the like, or formed directly on the enclosure of a device, such as applying paint.
- the device displays a ⁇ P in a range from about 0.3 to about 0.4.
- the device displays a V OC in a range from about 0.2 to about 1.5, such as about 0.4 to about 0.5. In some embodiments, the device displays a FF in the range of about 0.4 to about 0.85, such as about 0.5. In some embodiments, the device displays J SC /P 0 in the range of about 0.002 to about 0.025 A/W, such as 0.02. In some embodiments, the device displays a R SA in a range from about 5 to about 12. In some embodiments, the device displays a J S in a range from about 2 ⁇ 10 ⁇ 7 to about 7 ⁇ 10 ⁇ 7 . In some embodiments, the device displays an ⁇ of less than about 2, such as approaching about 1.
- the organic photosensitive optoelectronic devices described herein may function as photodetectors.
- device 100 may be a multilayer organic device, for example, as described in U.S. Pat. No. 6,972,431, the disclosure of which is incorporated herein by reference.
- an external electric field may be generally applied to facilitate extraction of the separated charges.
- Coatings may be used to focus optical energy into desired regions of device 100 . See, e.g., U.S. Pat. No. 7,196,835; U.S. patent application Ser. No. 10/915,410, which is incorporated by reference to provide examples of such a coating.
- the simple layered structure illustrated in FIG. 1 is provided by way of non-limiting example, and it is understood that embodiments described herein may be used in connection with a wide variety of other structures.
- the specific materials and structures described are exemplary in nature, and other materials and structures may be used.
- Functional organic photosensitive optoelectronic devices may be achieved by combining the various layers described in different ways, or layers may be omitted entirely, based on design, performance, and cost factors. Other layers not specifically described may also be included. Materials other than those specifically described may be used. Although many of the examples provided herein describe various layers as comprising a single material, it is understood that combinations of materials, such as a mixture of host and dopant, or more generally a mixture, may be used. Also, the layers may have various sublayers.
- Non-photoactive layers Organic layers that are not a part of the photoactive region, i.e., organic layers that generally do not absorb photons that make a significant contribution to photocurrent, may be referred to as “non-photoactive layers.” Examples of non-photoactive layers include EBLs and anode-smoothing layers. Other types of non-photoactive layers may also be used.
- the control PV device was glass/ITO (1550 ⁇ )/CuPc (200 ⁇ )/PTCBI (250 ⁇ )/BCP (100 ⁇ )/Ag (1000 ⁇ ). Results for this control PV can be seen in FIG. 4 a .
- the first inverted PV device was quartz/Ag (1000 ⁇ )/BCP (100 ⁇ )/PTCBI (300 ⁇ )/CuPc (150 ⁇ )/ITO (400 ⁇ ). Results for this control PV can be seen in FIG. 4 b .
- the second inverted PV device was quartz/Ni (1000 ⁇ )/CuPc (400 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ). Results for this control PV can be seen in FIG. 4 c.
- Three different types of the second inverted PV device (quartz/Ni (1000 ⁇ )/CuPc (400 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ )) were formed by preparing a quartz substrate by solvent cleaning. See, e.g., Organic Electron 6, 242 (2005), which is incorporated herein by references for this purpose.
- the quartz base structures were loaded into an electron beam evaporator where 1000 ⁇ Ni were deposited at a rate of 10 ⁇ /s. See, e.g., Appl. Phys. Lett. 86, 263502 (2005), which is incorporated herein by references for this purpose.
- the Ni anodes were exposed to three different surface treatments.
- the first was exposed to 30 minutes of ultra-violet ozone (UV-O 3 ) treatment.
- the second was exposed to O 2 plasma at a power of 120 W for 80 s.
- the third was exposed to Ar plasma at a power of 70 W for 2 minutes, followed by 30 minutes of UV-O 3 treatment.
- the structures were then loaded in a high vacuum thermal deposition chamber having base pressure of 5 ⁇ 10 ⁇ 7 Torr. Purified organic sources were grown at a pressure of 1 ⁇ 10 ⁇ 6 Torr and a rate of 2 ⁇ /s. See, e.g., Organic Electron 6, 242 (2005), which is incorporated herein by reference for this purpose.
- the planar double heterojunction solar cell PV structure grown consisted of a 400 ⁇ thick CuPc donor layer, a 100 ⁇ thick PTCBI acceptor layer, and a 1000 ⁇ thick BCP exciton blocking (see, e.g., Appl. Phys. Lett. 76, 2650 (2000), which is incorporated herein by reference for this purpose) and damage absorbing layer.
- a vacuum break and exposure to air was necessary before attaching a shadow mask in a nitrogen ambient atmosphere.
- the top contact was formed by a 400 ⁇ thick ITO cathode layer sputter-deposited at 15 W and 13.56 MHz through the shadow mask defining 1 mm diameter holes.
- the control PV was grown under similar conditions, in the same chamber and using the same organic materials, on solvent-cleaned, 10 minute UV-O 3 treated ITO-coated glass, comprising: ITO (1550 ⁇ )/CuPc (200 ⁇ )/PTCBI (250 ⁇ )/BCP (100 ⁇ )/Ag (1000 ⁇ ).
- ITO 1550 ⁇
- CuPc 200 ⁇
- PTCBI 250 ⁇
- BCP 100 ⁇ )/Ag (1000 ⁇ ).
- AM1.5G 1 sun solar illumination the control device displayed a V OC of 0.44 V, a FF of 0.64, a J SC /P 0 of 0.44 A/W, leading to a ⁇ P of 1.2 ⁇ 0.1%.
- the dark current-voltage current curve was fit to the modified ideal diode equation:
- FIG. 5 a shows the device current in the dark (filled squares) and under 1 sun illumination (open circles). The line represents the fit to the dark current.
- Table 1 (below) lists dark curve fit parameters and AM1.5G 1 sun performance data for devices grown on substrates exposed to the three different surface treatments discussed above.
- Inverted PV devices having CuPc and PTCBI layers of varying thickness were prepared as follows. Quartz substrates were solvent cleaned, then loaded into an electron beam evaporator where a 1000 ⁇ thick layer of Ni was deposited at a rate of 5 ⁇ /s. The Ni anodes were exposed to ultraviolet ozone treatment for 30 min, then loaded into a high vacuum thermal deposition chamber with a base pressure of 5 ⁇ 10 ⁇ 7 Torr. Purified organic sources were grown at a pressure of 1 ⁇ 10 ⁇ 6 Torr, and a rate of 2 ⁇ /s. A vacuum break occurred before attaching a shadow mask to the deposited layers and substrate in a high purity ( ⁇ 1 ppm H 2 O and O 2 ) N 2 ambient.
- the top contact consisted of a 400 ⁇ thick ITO layer sputter deposited at 20 W with a rate of 0.1 ⁇ /s through the shadow mask defining an array of 1 mm diameter circular cathodes. Performance data for the devices prepared by this method are disclosed below.
- FIG. 6 shows the performance of an inverted PV device comprising quartz/Ni (1000 ⁇ )/CuPc (350 ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ) in the dark (squares) and under simulated 1 sun, AM1.5G illumination (dashed lines), and for the inverted device in the dark (triangles) and under illumination (dashed-dotted line).
- FIG. 6 b shows the power conversion efficiency (circles), open-circuit voltage (triangles), and fill factor (squares) for the inverted device.
- the structures of FIG. 7 comprise quartz/Ni (1000 ⁇ )/CuPc (x ⁇ )/PTCBI (100 ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ).
- FIG. 7 a shows the simulated (line) and measured (filled squares) photocurrent of such devices at one sun intensity.
- FIG. 7 b shows ⁇ P (squares), V OC (triangles), and FF at one sun AM1.5G illumination.
- FIG. 8 comprise quartz/Ni(1000 ⁇ )/CuPc (400 ⁇ )/PTCBI (y ⁇ )/BCP (100 ⁇ )/ITO (400 ⁇ ).
- FIG. 8 a shows the simulated (line) and measured (filled squares) photocurrent of such devices at one sun intensity.
- FIG. 8 b shows ⁇ P (squares), V OC (triangles), and FF at one sun AM1.5G illumination.
- FIG. 9 shows a simulated contour plot for a devices having varying CuPc and PTCBI thicknesses.
- FIG. 9 a shows a simulated contour plot for J SC
- FIG. 9 b shows a simulated contour plot for ⁇ P .
- the diffusion lengths of CuPc and PTCBI were taken as 80 ⁇ 20 and 30 ⁇ 5 ⁇ , with a lifetime of 2 ns.
- Values of Ni anode, ITO cathode. and BCP layers thicknesses were 1000, 400, and 100 ⁇ , respectively, for these simulations.
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photovoltaic Devices (AREA)
- Light Receiving Elements (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/605,958 US9515275B2 (en) | 2008-10-27 | 2009-10-26 | Inverted organic photosensitive devices |
TW098136337A TWI528607B (zh) | 2008-10-27 | 2009-10-27 | 反向有機感光裝置 |
US15/332,062 US10770670B2 (en) | 2008-10-27 | 2016-10-24 | Inverted organic photosensitive devices |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10881708P | 2008-10-27 | 2008-10-27 | |
US10930508P | 2008-10-29 | 2008-10-29 | |
US12/605,958 US9515275B2 (en) | 2008-10-27 | 2009-10-26 | Inverted organic photosensitive devices |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US15/332,062 Division US10770670B2 (en) | 2008-10-27 | 2016-10-24 | Inverted organic photosensitive devices |
Publications (2)
Publication Number | Publication Date |
---|---|
US20100102304A1 US20100102304A1 (en) | 2010-04-29 |
US9515275B2 true US9515275B2 (en) | 2016-12-06 |
Family
ID=41395619
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/605,958 Active US9515275B2 (en) | 2008-10-27 | 2009-10-26 | Inverted organic photosensitive devices |
US15/332,062 Active US10770670B2 (en) | 2008-10-27 | 2016-10-24 | Inverted organic photosensitive devices |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US15/332,062 Active US10770670B2 (en) | 2008-10-27 | 2016-10-24 | Inverted organic photosensitive devices |
Country Status (10)
Country | Link |
---|---|
US (2) | US9515275B2 (ja) |
EP (2) | EP2342770A1 (ja) |
JP (2) | JP6211244B2 (ja) |
KR (2) | KR20160142888A (ja) |
CN (2) | CN102282694B (ja) |
AU (1) | AU2009309004B2 (ja) |
CA (1) | CA2738505A1 (ja) |
HK (1) | HK1161423A1 (ja) |
TW (1) | TWI528607B (ja) |
WO (1) | WO2010051258A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102282694B (zh) | 2008-10-27 | 2015-02-25 | 密歇根大学董事会 | 倒置有机光敏器件 |
JP2012109365A (ja) * | 2010-11-17 | 2012-06-07 | Konica Minolta Holdings Inc | 有機光電変換素子および太陽電池 |
JP2015501226A (ja) * | 2011-11-01 | 2015-01-15 | ザ リージェンツ オブ ザ ユニヴァシティ オブ ミシガン | 有機感光性デバイスのための金属基板表面の調製方法 |
US20150311444A9 (en) * | 2012-02-13 | 2015-10-29 | Massachusetts Institute Of Technology | Electrodes formed by oxidative chemical vapor deposition and related methods and devices |
FR2988906B1 (fr) * | 2012-03-29 | 2016-05-13 | Centre Nat De La Rech Scient - Cnrs - | Structure de cellule photovoltaique en couches minces avec une couche miroir. |
WO2014025435A2 (en) | 2012-05-15 | 2014-02-13 | Forrest Stephen R | Dipyrrin based materials for photovoltaics, compounds capable of undergoing symmetry breaking intramolecular charge transfer in a polarizing medium and organic photovoltaic devices comprising the same |
AU2013326799A1 (en) | 2012-10-05 | 2015-04-30 | University Of Southern California | Energy sensitization of acceptors and donors in organic photovoltaics |
JP6323457B2 (ja) | 2012-10-11 | 2018-05-16 | ザ リージェンツ オブ ザ ユニヴァシティ オブ ミシガン | 反射体を備えた有機光電性デバイス |
EP2907171A2 (en) | 2012-10-11 | 2015-08-19 | The Regents of The University of Michigan | Polymer photovoltaics employing a squaraine donor additive |
CN103824950A (zh) * | 2012-11-19 | 2014-05-28 | 海洋王照明科技股份有限公司 | 太阳能电池器件及其制备方法 |
JP2015103735A (ja) * | 2013-11-27 | 2015-06-04 | ソニー株式会社 | 固体撮像素子および電子機器 |
KR102243553B1 (ko) * | 2014-07-16 | 2021-04-22 | 삼성전자주식회사 | 유기 광전 소자 및 이미지 센서 |
CN105529345A (zh) * | 2016-01-29 | 2016-04-27 | 中国计量学院 | 一种以双异质结为光敏层的有机近红外光上转换器 |
CN107026238A (zh) * | 2016-01-30 | 2017-08-08 | 兰州大学 | 一种以平面异质结为光敏层的有机近红外上转换器件 |
CN114966360B (zh) * | 2022-07-27 | 2022-10-25 | 成都光创联科技有限公司 | 一种光器件雪崩电压测试系统及方法 |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5600131A (en) * | 1995-04-28 | 1997-02-04 | Nec Corporation | Photodetecting device with simple interconnection between a photodetector and a flexible printed wiring board |
WO2000011725A1 (en) | 1998-08-19 | 2000-03-02 | The Trustees Of Princeton University | Organic photosensitive optoelectronic device |
WO2001039276A1 (en) | 1999-11-26 | 2001-05-31 | The Trustees Of Princeton University | Organic photosensitive optoelectronic device with an exciton blocking layer |
US6297495B1 (en) | 1998-08-19 | 2001-10-02 | The Trustees Of Princeton University | Organic photosensitive optoelectronic devices with a top transparent electrode |
US20040265630A1 (en) * | 2003-06-24 | 2004-12-30 | Samsung Sdi Co., Ltd. | Organic light-emitting device employing doped hole transporting layer and/or hole injecting layer |
US20050058009A1 (en) | 2003-09-03 | 2005-03-17 | Yang Yang | Memory devices based on electric field programmable films |
US20050227406A1 (en) * | 2004-04-13 | 2005-10-13 | Max Shtein | Method of fabricating an optoelectronic device having a bulk heterojunction |
WO2005101524A2 (en) | 2004-04-13 | 2005-10-27 | The Trustees Of Princeton University | Method of fabricating an optoelectronic device having a bulk heterojunction |
US20060060239A1 (en) | 2004-09-22 | 2006-03-23 | Peter Peumans | Organic photosensitive devices |
US20060180810A1 (en) | 2005-02-14 | 2006-08-17 | Lee Tae-Woo | Composition of conducting polymer and organic opto-electronic device employing the same |
US20060278944A1 (en) | 2005-06-13 | 2006-12-14 | Rand Barry P | Organic photosensitive cells having a reciprocal-carrier exciton blocking layer |
US20070044836A1 (en) | 1998-08-19 | 2007-03-01 | Forrest Stephen R | Organic Photosensitive Optoelectronic Devices With Transparent Electrodes |
US20070215868A1 (en) | 2005-11-02 | 2007-09-20 | Forrest Stephen R | Organic Photovoltaic Cells Utilizing Ultrathin Sensitizing Layer |
US20090103310A1 (en) * | 2007-10-22 | 2009-04-23 | Sung-Nan Chen | Light Emitting Diode Illumination Device Capable of Providing Uniformly Polarized Light |
US20110114921A1 (en) * | 2006-07-11 | 2011-05-19 | Fan Yang | Organic photosensitive cells grown on rough electrode with nano-scale morphology control |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4469715A (en) * | 1981-02-13 | 1984-09-04 | Energy Conversion Devices, Inc. | P-type semiconductor material having a wide band gap |
KR0163526B1 (ko) * | 1995-05-17 | 1999-02-01 | 김광호 | 자외선/오존을 조사하여 접속패드에 보호막을 형성하는 단계를 포함하는 반도체소자 제조방법 |
US6303082B1 (en) * | 1999-12-15 | 2001-10-16 | Nanogen, Inc. | Permeation layer attachment chemistry and method |
EP2631014A3 (en) | 2003-06-25 | 2014-01-01 | The Trustees of Princeton University | Improved solar cells |
JP2005158775A (ja) * | 2003-11-20 | 2005-06-16 | Hiroyuki Okada | 有機薄膜電界効果型トランジスタの製造方法 |
US20050224905A1 (en) * | 2004-04-13 | 2005-10-13 | Forrest Stephen R | High efficiency organic photovoltaic cells employing hybridized mixed-planar heterojunctions |
JP2005310473A (ja) * | 2004-04-20 | 2005-11-04 | Canon Inc | 有機el素子の製造方法 |
JP2005310470A (ja) * | 2004-04-20 | 2005-11-04 | Canon Inc | 有機el素子 |
JP4341529B2 (ja) * | 2004-11-05 | 2009-10-07 | セイコーエプソン株式会社 | 電子デバイス、電子デバイスの製造方法および電子機器 |
JP5339725B2 (ja) | 2004-11-24 | 2013-11-13 | ザ、トラスティーズ オブ プリンストン ユニバーシティ | フェナントロリン励起子阻止層を有する有機感光性オプトエレクトロニックデバイス |
JP4496948B2 (ja) * | 2004-12-13 | 2010-07-07 | 株式会社豊田自動織機 | 有機el素子 |
CN1645641B (zh) * | 2005-02-08 | 2010-07-14 | 友达光电股份有限公司 | 光电元件 |
CN100593357C (zh) * | 2005-12-21 | 2010-03-03 | 友达光电股份有限公司 | 有机电致发光器件 |
JP4887781B2 (ja) * | 2005-12-28 | 2012-02-29 | セイコーエプソン株式会社 | 電子デバイス、電子デバイスの製造方法および電子機器 |
US7521710B2 (en) * | 2006-02-16 | 2009-04-21 | Idemitsu Kosan Co., Ltd. | Organic thin film transistor |
KR101386216B1 (ko) * | 2006-06-07 | 2014-04-18 | 삼성디스플레이 주식회사 | 유기 발광 소자 |
JP2008108706A (ja) * | 2006-09-28 | 2008-05-08 | Canon Inc | 表示装置 |
CN101215468A (zh) * | 2007-01-04 | 2008-07-09 | 奇美电子股份有限公司 | 发光元件以及铱络合物 |
US8802965B2 (en) * | 2008-09-19 | 2014-08-12 | Regents Of The University Of Minnesota | Plasmonic nanocavity devices and methods for enhanced efficiency in organic photovoltaic cells |
CN102282694B (zh) | 2008-10-27 | 2015-02-25 | 密歇根大学董事会 | 倒置有机光敏器件 |
-
2009
- 2009-10-26 CN CN200980141147.XA patent/CN102282694B/zh not_active Expired - Fee Related
- 2009-10-26 AU AU2009309004A patent/AU2009309004B2/en not_active Ceased
- 2009-10-26 CN CN201410562541.3A patent/CN104393176B/zh not_active Expired - Fee Related
- 2009-10-26 KR KR1020167033197A patent/KR20160142888A/ko not_active Application Discontinuation
- 2009-10-26 KR KR1020117012209A patent/KR20110090971A/ko active Application Filing
- 2009-10-26 JP JP2011533411A patent/JP6211244B2/ja active Active
- 2009-10-26 WO PCT/US2009/062097 patent/WO2010051258A1/en active Application Filing
- 2009-10-26 EP EP09748609A patent/EP2342770A1/en not_active Ceased
- 2009-10-26 EP EP16000660.7A patent/EP3065191A1/en not_active Ceased
- 2009-10-26 US US12/605,958 patent/US9515275B2/en active Active
- 2009-10-26 CA CA2738505A patent/CA2738505A1/en not_active Abandoned
- 2009-10-27 TW TW098136337A patent/TWI528607B/zh active
-
2012
- 2012-02-24 HK HK12101896.9A patent/HK1161423A1/xx not_active IP Right Cessation
-
2015
- 2015-07-10 JP JP2015139084A patent/JP6327625B2/ja active Active
-
2016
- 2016-10-24 US US15/332,062 patent/US10770670B2/en active Active
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5600131A (en) * | 1995-04-28 | 1997-02-04 | Nec Corporation | Photodetecting device with simple interconnection between a photodetector and a flexible printed wiring board |
US20070044836A1 (en) | 1998-08-19 | 2007-03-01 | Forrest Stephen R | Organic Photosensitive Optoelectronic Devices With Transparent Electrodes |
WO2000011725A1 (en) | 1998-08-19 | 2000-03-02 | The Trustees Of Princeton University | Organic photosensitive optoelectronic device |
US6297495B1 (en) | 1998-08-19 | 2001-10-02 | The Trustees Of Princeton University | Organic photosensitive optoelectronic devices with a top transparent electrode |
WO2001039276A1 (en) | 1999-11-26 | 2001-05-31 | The Trustees Of Princeton University | Organic photosensitive optoelectronic device with an exciton blocking layer |
US20040265630A1 (en) * | 2003-06-24 | 2004-12-30 | Samsung Sdi Co., Ltd. | Organic light-emitting device employing doped hole transporting layer and/or hole injecting layer |
US20050058009A1 (en) | 2003-09-03 | 2005-03-17 | Yang Yang | Memory devices based on electric field programmable films |
US20050227406A1 (en) * | 2004-04-13 | 2005-10-13 | Max Shtein | Method of fabricating an optoelectronic device having a bulk heterojunction |
WO2005101524A2 (en) | 2004-04-13 | 2005-10-27 | The Trustees Of Princeton University | Method of fabricating an optoelectronic device having a bulk heterojunction |
US20060060239A1 (en) | 2004-09-22 | 2006-03-23 | Peter Peumans | Organic photosensitive devices |
US20060180810A1 (en) | 2005-02-14 | 2006-08-17 | Lee Tae-Woo | Composition of conducting polymer and organic opto-electronic device employing the same |
US20060278944A1 (en) | 2005-06-13 | 2006-12-14 | Rand Barry P | Organic photosensitive cells having a reciprocal-carrier exciton blocking layer |
US20070215868A1 (en) | 2005-11-02 | 2007-09-20 | Forrest Stephen R | Organic Photovoltaic Cells Utilizing Ultrathin Sensitizing Layer |
US20110114921A1 (en) * | 2006-07-11 | 2011-05-19 | Fan Yang | Organic photosensitive cells grown on rough electrode with nano-scale morphology control |
US20090103310A1 (en) * | 2007-10-22 | 2009-04-23 | Sung-Nan Chen | Light Emitting Diode Illumination Device Capable of Providing Uniformly Polarized Light |
Non-Patent Citations (3)
Title |
---|
International Search Report mailed Dec. 28, 2009, in International Application No. PCT/US2009/062097, 4 pages. |
Kwong, C.Y. et al., "Improvement of the efficiency of phthalocyanine organic Schottky solar cells with ITO electrode treatment," Appl. Phys. A. 77, 555-560 (2003). |
Tong, X. et al., "Inverted Small Molecule Organic Photovoltaic Cells on Reflective Substrates," Applied Physics Letters, vol. 93, No. 17, pp. 173304-1-173304-3. |
Also Published As
Publication number | Publication date |
---|---|
JP6211244B2 (ja) | 2017-10-11 |
TWI528607B (zh) | 2016-04-01 |
HK1161423A1 (en) | 2012-08-24 |
US20170040558A1 (en) | 2017-02-09 |
US10770670B2 (en) | 2020-09-08 |
KR20110090971A (ko) | 2011-08-10 |
CN104393176A (zh) | 2015-03-04 |
JP2016001742A (ja) | 2016-01-07 |
AU2009309004B2 (en) | 2015-08-06 |
CN102282694A (zh) | 2011-12-14 |
KR20160142888A (ko) | 2016-12-13 |
CN104393176B (zh) | 2018-03-16 |
TW201031041A (en) | 2010-08-16 |
JP6327625B2 (ja) | 2018-05-23 |
CA2738505A1 (en) | 2010-05-06 |
EP3065191A1 (en) | 2016-09-07 |
EP2342770A1 (en) | 2011-07-13 |
US20100102304A1 (en) | 2010-04-29 |
AU2009309004A1 (en) | 2010-05-06 |
JP2012507152A (ja) | 2012-03-22 |
CN102282694B (zh) | 2015-02-25 |
WO2010051258A1 (en) | 2010-05-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10770670B2 (en) | Inverted organic photosensitive devices | |
US7230269B2 (en) | Organic photosensitive cells having a reciprocal-carrier exciton blocking layer | |
JP5313422B2 (ja) | 励起子阻止層をもつ有機感光性オプトエレクトロニクス素子 | |
EP1978561B1 (en) | Stacked organic photosensitive devices | |
US10374164B2 (en) | Organic photosensitive devices comprising a squaraine containing organoheterojunction and methods of making same | |
US7326955B2 (en) | Stacked organic photosensitive devices | |
JP2015079971A (ja) | 電子/正孔励起阻止層を用いた有機太陽電池の開路電圧の向上 | |
CA2580865A1 (en) | Organic photosensitive devices | |
AU2016201795A1 (en) | Method of preparing the surface of metal substrates for organic photosensitive devices |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: THE REGENTS OF THE UNIVERSITY OF MICHIGAN, MICHIGA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FORREST, STEPHEN R.;BAILEY-SALZMAN, RHONDA F.;REEL/FRAME:023690/0621 Effective date: 20091118 Owner name: THE REGENTS OF THE UNIVERSITY OF MICHIGAN,MICHIGAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FORREST, STEPHEN R.;BAILEY-SALZMAN, RHONDA F.;REEL/FRAME:023690/0621 Effective date: 20091118 |
|
AS | Assignment |
Owner name: ENERGY, UNITED STATES DEPARTMENT OF, DISTRICT OF C Free format text: CONFIRMATORY LICENSE;ASSIGNOR:MICHIGAN, UNIVERSITY OF;REEL/FRAME:024443/0265 Effective date: 20091029 Owner name: ENERGY, UNITED STATES DEPARTMENT OF,DISTRICT OF CO Free format text: CONFIRMATORY LICENSE;ASSIGNOR:MICHIGAN, UNIVERSITY OF;REEL/FRAME:024443/0265 Effective date: 20091029 |
|
AS | Assignment |
Owner name: ENERGY, UNITED STATES DEPARTMENT OF, DISTRICT OF C Free format text: CONFIRMATORY LICENSE;ASSIGNOR:MICHIGAN, UNIVERSITY OF;REEL/FRAME:025099/0495 Effective date: 20091029 |
|
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
AS | Assignment |
Owner name: UNITED STATES DEPARTMENT OF ENERGY, DISTRICT OF CO Free format text: CONFIRMATORY LICENSE;ASSIGNOR:UNIVERSITY OF MICHIGAN;REEL/FRAME:048963/0650 Effective date: 20091029 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 4 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 8 |