US9255818B2 - Arrangement comprising an inductive proximity sensor, and method implementing such a sensor - Google Patents

Arrangement comprising an inductive proximity sensor, and method implementing such a sensor Download PDF

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US9255818B2
US9255818B2 US13/495,636 US201213495636A US9255818B2 US 9255818 B2 US9255818 B2 US 9255818B2 US 201213495636 A US201213495636 A US 201213495636A US 9255818 B2 US9255818 B2 US 9255818B2
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target
differential
coils
detection coils
inductive signal
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US20120303305A1 (en
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Johan Bergqvist
Sietse Wouters
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POSIC SA
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/225—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils

Definitions

  • the present invention concerns proximity sensors, in particular inductive type proximity sensors.
  • Position sensors for measuring the position of an object or of a target in a horizontal and/or vertical (orthogonal) plane are known in the prior art.
  • One variant of position sensors is constituted by proximity sensors, where the aim is more simply, but often in more difficult conditions, to detect the presence or the absence of a target in front of the sensor.
  • Proximity sensors often use inductive measuring and typically comprise one or several excitation coils generating an inductive field and one or several detection coils generating a current depending on the received inductive field.
  • a metallic object called a target
  • the magnetic coupling between the excitation coil and the detection coil or coils is modified, which generates a variation of induced tension in the detection coils. This variation enables the presence of a target or of any other discontinuity in an object that affects the electromagnetic coupling between the coils to be detected.
  • FIG. 1 illustrates diagrammatically one application of such a sensor 1 used for detecting the proximity of targets 20 .
  • the targets are constituted by the successive teeth 20 of a piece 2 rotating in front of the sensor; the inductive sensor 1 generates a signal that is modified at each discontinuity of the piece 2 , i.e. at each rising flank 21 or falling flank 22 of the teeth 20 .
  • the inductive sensor 1 can be made from excitation and detection coils made in a same plane on a same silicon substrate; this substrate can be encapsulated into an integrated circuit and then mounted onto a printed circuit.
  • EP805339 describes a position and movement detection device comprising an excitation coil and two secondary coils on the same integrated circuit.
  • the magnetic field received by a secondary winding is modified by the presence of a piece (target) of low or strong permeability in front of this winding.
  • This device enables the position or the speed of a structured mobile piece moving in front of the device to be detected.
  • US2009021248 describes another inductive proximity detector comprising an excitation coil and a detection coil receiving a magnetic field altered by the presence of a ferromagnetic piece close to these two coils.
  • EP871012 describes a micro-machined inductive sensor enabling the position or the movement of an object to be detected.
  • the sensor comprises an emitter coil and two differential pairs of receptor coils detecting a magnetic field altered by the presence of a discontinuity in the object in front of the sensor.
  • proximity sensors are based on pairs of differential coils that detect only the discontinuities of the target.
  • the absence of target and the presence of a large-size target covering both coils of each pair generate identical output signals, so that these two states cannot be distinguished.
  • Another aim is to propose an arrangement and a method for distinguishing between the presence of a target and the absence of a target.
  • the inductive sensor implemented in this method thus comprises two pairs of inductive detection coils generating signals that are phase-shifted one relative to the other.
  • the invention is based notably on the observation that the difference between the differential output signals s 0 , s 1 supplied by two phase-shifted differential pairs is less sensitive to variations in amplitude of the excitation signal and to variations in the distance between the sensor and the target. In particular, the position of the points of equality between the two signals is largely unaffected by these variations.
  • a transition is detected only when both signals s 0 and s 1 are equal to one another and when they are both different from zero, in order to avoid detecting a transition in the trivial case where the two signals s 0 and s 1 are both equal to zero.
  • the transition detection is limited to within a window within which at least one of the two signals s 0 or s 1 is greater than a predetermined threshold V Thresh . In another embodiment, this detection is limited to within a window within which the signals s 0 and s 1 are both greater than a predetermined threshold V Thresh . In all cases, this makes it possible to strengthen the reliability of the transition detection by checking that the two signals s 0 and s 1 are equal only within a relatively narrow window and thus to avoid false detections in case of accidental equality outside of these windows.
  • the inventive arrangement includes a stationary target placed in front of at least one of the detection coils in order to introduce in at least one of the inductive signals at the outlet of the differential pairs an offset that enables a distinction between the presence and the absence of target to be made.
  • This stationary target modifies in a permanent manner the coupling between the excitation coil and the detection coil or coils covered by the stationary target, and thus enables an imbalance to be created between at least one of the pairs of detection coils, even in the absence of a movable target.
  • the stationary target can be made either of ferromagnetic material (Fe, FeNi etc.) or of a non-ferromagnetic yet conductive material (Cu, Al, brass etc.). Ferromagnetic materials obviously also exhibit a certain electric conductivity which is however normally negligible.
  • the movable target can be constituted by a tooth of a toothed wheel, often of ferromagnetic material, or by a conductor track (for example of copper) on a PCB printed circuit.
  • a fixed or movable target of ferromagnetic material will increase the coupling between primary and secondary coils; conversely, a target of conductive material will decrease this coupling. Without target, there is usually also a coupling, which will be modified in a permanent manner by the presence of a stationary target or in a temporary manner when a movable target passes in front of it.
  • the stationary target is arranged so as to modify permanently the coupling between the emission coil and one of the detection coils of each pair of differential coils. As only one of the two coils of each pair is affected, the signal at the outlet of the differential coil pair is thus affected by an offset, even in the absence of movable target.
  • the coupling with the two coils is increased (in the case of a target made of a ferromagnetic material) or decreased (in the case of a target of conductive material), generating a signal at the outlet of the pair that can be distinguished from the signal existing when a movable target is absent. This configuration thus makes it possible to distinguish between the absence of target and the presence of a long target, generating different induced signals.
  • FIG. 1 already described, illustrates an example of application of an arrangement comprising a proximity sensor according to the invention.
  • FIG. 2 illustrates a particular example of proximity detection circuits comprising an excitation coil and four phase-shifted detection coils, arranged in two differential pairs.
  • FIG. 3 a illustrates the signals s 0 , s 1 at the outlet of both differential pairs when a small-width target is moved in front of the sensor.
  • FIG. 3 b illustrates the signals s 0 , s 1 at the outlet of both differential pairs when a large-size target is moved in front of the sensor.
  • FIG. 4 is a top view of an arrangement comprising an inductive proximity sensor, a stationary target and a movable target.
  • FIG. 5 illustrates the signals s 0 , s 1 at the outlet of both differential pairs when a large-size target is moved in front of the arrangement of FIG. 4 , wherein the stationary target is made of a ferromagnetic material.
  • FIG. 2 illustrates an arrangement of coils in an inductive proximity sensor 1 according to one embodiment of the invention.
  • the sensor includes a single excitation coil 10 having a large diameter and four detection coils 11 , 12 , 13 , 14 arranged in two differential pairs 11 - 12 and 13 - 14 .
  • the two serially connected coils in each differential pair have opposite phases, which makes it possible to supply at the outlet of each pair 11 - 12 respectively 13 - 14 a differential signal in which the common mode is eliminated and which is thus less sensitive to disturbances due to variations in amplitude of the excitation signal or to variations in the distance to the piece 2 .
  • the two “positive” coils 11 , 13 marked with a plus sign are connected so that the induced signal at the outlet of the pair increases when the coupling with the excitation coil 10 whilst the two “negative” coils 12 , 14 are connected in the other direction so as to cause a decrease of this induced signal when the coupling increases.
  • the excitation signal is typically a high-frequency (HF) signal of approximately 1 MHz and generates an induced voltage in the detection coils.
  • HF high-frequency
  • the intensity of the induced voltage depends on the electromagnetic coupling between the excitation coil and the detection coils and is thus modified by the presence of a target close to the sensor.
  • the coils 10 to 14 as well as the interface and signal processing electronic circuit are advantageously integrated onto a semiconductor substrate, for example of silicon, with the whole unit typically occupying a surface less than 10 mm 2 .
  • An analog and digital signal processing electronic circuit can be made on the same substrate.
  • the thus formed integrated circuit can then be encapsulated and subsequently mounted onto a rigid or flexible printed circuit, for example using chip-on-board or flip-chip type technology.
  • the invention can however also be applied to discrete coils mounted for example onto a printed circuit and connected to an electronic circuit on the same printed circuit or elsewhere.
  • the coils are made from tracks printed onto a monolayer or multilayer printed circuit, onto which the electronic circuit can also be mounted.
  • the piece 2 that moves linearly above the sensor 1 comprises a periodic succession of teeth (targets) 20 .
  • the pitch L of the teeth 20 of the piece 2 correspond in this example to the diameter of the detection coils 11 to 14 . It is however also possible to use different spaces between two metallic teeth of the target, for example ferromagnetic teeth whose width corresponds to one third of the period, or targets constituted of copper tracks whose width corresponds for example to two thirds or more of the period.
  • the signals at the outlet of both pairs of differential coils 11 - 12 and 13 - 14 are approximately sinusoidal and phase-shifted by 90° one relative to the other, with a period equal to the time during which the piece travels by the length 2 L along the axis x.
  • This proximity sensor can also be used for detecting rotation movements.
  • Another possible application of this type of sensor concerns the detection of spaced targets or even of unique objects.
  • One example is the detection of teeth on a wheel comprising a single tooth, or a limited number of spaced teeth or even the detection of moving parts in a machine or a vehicle.
  • the diameter of the coils is thus not necessarily limited to the dimensions of the target or targets.
  • FIG. 3 a illustrates the output signals s 0 respectively s 1 generated by the first differential pair 11 - 12 respectively by the second differential pair 13 - 14 when an isolated target, for example a tooth, is displaced in front of the sensor 1 of FIG. 2 .
  • the width L 1 of the tooth 20 corresponds to the diameter of the detection coils 11 to 14 , whose longitudinal position along the axis x is illustrated diagrammatically at the top of the figure.
  • the lines A to G illustrate 6 successive longitudinal positions of the tooth 20 in front of the two pairs of coils.
  • the front flank 21 of the ferromagnetic target 20 arrives in front of the detection coil 11 ; the coupling with the excitation coil 10 then increases progressively until the instant C when the tooth 20 is perfectly centered in front of this coil, so that the voltage s 0 increases.
  • the front part of the target 20 progressively leaves the coil 11 to cover the opposite coil 12 , so that the differential signal s 0 decreases very rapidly until the instant D when the tooth straddles, and is centered in front of, the two coils mounted opposite to one another 11 and 12 ; the difference signal s 0 is then zero.
  • the target 20 continues to move towards the detection coil 13 , until the instant E when the coupling with this coil is at its maximum; the signal s 0 is then minimal.
  • the target then continues to move along the axis x, so that the coupling with 12 decreases until the instant G where the rear flank of the tooth leaves the coil 12 ; s 0 is then again zero.
  • the signal s 1 at the outlet of the second differential pair is identical to s 0 but phase-shifted by 90° (L 1 /2).
  • FIG. 3B illustrates a situation wherein the width L 2 of the moving ferromagnetic target 20 is much greater than the diameter L 1 of the coils 11 to 14 .
  • the situation is identical to the one commented further above in relation to FIG. 3A .
  • the front flank 21 reaches the second coil 12 , so that the signal s 0 decreases.
  • the rear 22 of the target 22 however does not yet reach the coil 11 and the decrease is thus slower than in the example of FIG. 3A ; it continues until the instant E, from when onwards the two coils 11 and 12 of the first pair are entirely covered by the target 20 .
  • the signal at the outlet of the differential pair 10 - 11 is then zero until the instant G (departure of the target), when the rear flank 22 reaches the first coil 11 .
  • the signal s 0 between the instants G and K then evolves in opposite manner to the instants A to E, as the tooth 20 continues to free the two coils 11 and 12 .
  • the FIG. 3B also illustrates the signal s 1 at the outlet of the second differential pair 13 - 14 , which corresponds to the signal s 0 phase-shifted by 90°.
  • a first problem of conventional sensors and of the sensor described so far relates to the accuracy in detecting the lateral position of the target.
  • the signals s 0 and s 1 go away from zero at a very shallow gradient, which is not favorable for setting a comparator threshold and detecting in an accurate and reliable manner the transitions of the target (flanks 21 and 22 ) and the instant at which the target arrives or departs.
  • the necessary threshold level depends on the amplitude of the detection signal and the distance between the sensor and the target, which can very according to the applications and according to the type of target.
  • the difference between the two differential output signals s 0 , s 1 supplied by both pairs is largely unaffected by variations in the amplitude of the excitation signal and by variations in the distance between the sensor and the target.
  • the temporal position of the intersection point i between the two signals s 0 and s 1 is not very sensitive to these variations; it corresponds to a phase of 45° in the positive case, respectively of 225° in the negative case.
  • the detection circuit thus advantageously includes means of a comparator type for computing the difference between the signals s 0 and s 1 and for generating a signal indicating a transition at the instant i when this difference is zero or when it reaches a predetermined threshold.
  • the measurement is thus of a double differential type and performs a difference between the output signal of two differential pairs.
  • a transition is detected only when the two signals s 0 and s 1 are both different from zero (or greater than a threshold V Thresh ) and equal to one another, in order to avoid detecting a transition in the trivial case where the two signals s 0 and s 1 are both equal to zero.
  • a comparator can thus be used to compare each of the two signals s 0 , s 1 with a threshold value and determine whether they are equal to zero or not.
  • a transition is detected when s 0 and s 1 are equal only if at least one of the two signals s 0 and s 1 is greater to a threshold V Thresh .
  • the sign of one of the differential inductive signals s 0 , s 1 or of both signals can also be determined in order to distinguish between rising transitions 21 (arrival of a new movable target 2 or increase of the coupling in the case of a ferromagnetic target) and falling transitions 22 (decrease of the coupling when the ferromagnetic target moves away).
  • rising transitions 21 arrival of a new movable target 2 or increase of the coupling in the case of a ferromagnetic target
  • falling transitions 22 decrease of the coupling when the ferromagnetic target moves away.
  • the coupling decreases when a new movable target arrives and increases again when this target departs.
  • the means for detecting the difference between the two signals s 0 and s 1 can include an analog and digital electronic circuit. In one embodiment, this difference is computed in real time by a computer program executed by a microcontroller in the same integrated circuit as the detection coils 11 - 14 or by an external microprocessor or microcontroller.
  • Another problem with the sensor of FIG. 2 relates to the difficulty in detecting the presence of a target.
  • the output signals s 0 and s 1 are only modified during a transition or discontinuity of the target 2 , for example during rising flanks 21 and falling flanks 22 .
  • the value of these two signals is however equal to zero both in the absence of target (before the instant A) and when the target covers simultaneously all the coils of each differential pair (between the instants E and G9. It is thus not possible to distinguish between the absence of tooth and the presence of a “long” tooth, notably when the sensor is started.
  • the inventive circuit advantageously includes a stationary target whose position is determined in a fixed manner relative to the detection coils.
  • An example of stationary target 5 is illustrated in FIG. 4 .
  • the stationary target covers partly and permanently one of the detection coils 11 respectively 13 of each differential pair, so as to modify the magnetic coupling between these coils 11 , 13 and the excitation coil 10 .
  • FIG. 5 illustrates this offset voltage in conditions equivalent to those of FIG. 3B , i.e. when a large-size target passes in front of the sensor of FIG. 4 .
  • the stationary target 5 is made of a ferromagnetic material, for example of steel, and thus increases the coupling of the excitation coil 10 with the two relevant detection coils 11 , 13 —notably before the instant A.
  • the stationary target thus creates a positive offset V 0 in this example.
  • the movable target 2 is also made of a ferromagnetic material in this example and moves in front of the sensor until it completely covers the four detection coils 11 to 14 (instants E to G). Between the instant A and the instant E, the voltage s 0 , s 1 at the outlet of each pair increases progressively as the ferromagnetic target progresses by covering the “positive” coils of each pair, then decreases again as soon as the movable target reaches the place in front of the “negative” coils of each pair.
  • the movable target 2 completely covers the four detection coils, so that the voltages induced in the two coils of each differential pair compensate each other at least partially.
  • the offset V 0 ′ is thus reduced and the voltages s 0 and then s 1 get closer to zero.
  • the signals s 0 and s 1 thus make it possible to distinguish between the absence of movable target (period before the instant A, characterized by an offset V 0 ) and the presence of a movable target covering all the coils (period from F to G, with a reduced offset V 0 ′).
  • the movable target 2 is always made of a ferromagnetic material, but the stationary target 5 is constituted of a non-ferromagnetic electrically conductive material, for example of copper, aluminum, brass etc.; the Foucault currents generated by this stationary target 5 have the effect of decreasing the coupling between the excitation coil 10 and the coils 11 , 13 partly covered by this stationary target.
  • a conducting stationary target can advantageously be made by a conductor track on the printed circuit onto which the coils are mounted or printed.
  • the two stationary and movable targets are both made of conductive material, which has the effect of decreasing the coupling between coils.
  • a movable target 2 made of a conductive material and a stationary target 5 made of a ferromagnetic material.
  • the stationary target 5 can advantageously be made by means of a layer of ferromagnetic or non ferromagnetic material deposited for example onto the printed circuit onto which the sensor is mounted.
  • the stationary target is for example advantageously achieved by a metallic layer on a track or layer of said printed circuit that is not the same as the track or layer onto which the integrated circuit is mounted. This variant enables a stationary target to be made without modifying the integrated circuit.
  • the invention can also be implemented with sensors or systems comprising any number whatsoever of differential inductive pairs, for example 1, 2 or N pairs.
US13/495,636 2009-12-15 2012-06-13 Arrangement comprising an inductive proximity sensor, and method implementing such a sensor Active 2031-08-22 US9255818B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH01922/09A CH702340A2 (fr) 2009-12-15 2009-12-15 Arrangement comportant un capteur de proximité inductif, et procédé mettant en oeuvre un tel capteur.
CH1922/09 2009-12-15
CH01922/09 2009-12-15
PCT/EP2010/069242 WO2011080040A2 (fr) 2009-12-15 2010-12-09 Arrangement comportant un capteur de proximité inductif, et procédé mettant en œuvre un tel capteur

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PCT/EP2010/069242 Continuation WO2011080040A2 (fr) 2009-12-15 2010-12-09 Arrangement comportant un capteur de proximité inductif, et procédé mettant en œuvre un tel capteur

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US9255818B2 true US9255818B2 (en) 2016-02-09

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EP (1) EP2513609B1 (fr)
JP (1) JP5300164B2 (fr)
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JP5300164B2 (ja) 2013-09-25
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EP2513609A2 (fr) 2012-10-24
CH702340A2 (fr) 2011-06-15

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