US9082523B2 - Transparent conductor - Google Patents

Transparent conductor Download PDF

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US9082523B2
US9082523B2 US13/882,451 US201113882451A US9082523B2 US 9082523 B2 US9082523 B2 US 9082523B2 US 201113882451 A US201113882451 A US 201113882451A US 9082523 B2 US9082523 B2 US 9082523B2
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layer
graphene
transparent conductor
permanent dipole
permanent
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US20140193626A1 (en
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Barbaros Özyilmaz
Guang Xin Ni
Yi Zheng
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National University of Singapore
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National University of Singapore
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/04—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of carbon-silicon compounds, carbon or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C01B31/0438—
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0033—Apparatus or processes specially adapted for manufacturing conductors or cables by electrostatic coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01L51/442—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80—Constructional details
    • H10K30/81—Electrodes
    • H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2204/00—Structure or properties of graphene
    • H01L51/5206—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/81—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/81—Anodes
    • H10K50/816—Multilayers, e.g. transparent multilayers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8051—Anodes
    • H10K59/80517—Multilayers, e.g. transparent multilayers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2911—Mica flake
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Definitions

  • the present invention relates generally to a transparent conductor and methods of fabricating a transparent conductor.
  • the present invention relates to a graphene-permanent dipole layer hybrid structure based transparent conductor and methods of fabrication thereof.
  • Transparent conductors are used in high-performance displays, photovoltaic, touchscreens, organic light emitting diodes (OLED), smart windows and solar cells where high transparency and conductivity are required.
  • OLED organic light emitting diodes
  • the market for such transparent conductors may reach $5.6 billion by 2015.
  • ITO is the dominant transparent conductor, providing the best known combination of transparency (80%) and sheet resistance (10 ⁇ / ⁇ ).
  • ITO has several crucial drawbacks. Namely:
  • ITO The possible replacements of ITO include metal grids, metallic nanowires, metal oxides and nanotubes, while none of them provides performance as good as ITO.
  • Graphene is novel type of two-dimensional material arranged in a hexagonal honeycomb structure.
  • graphene is highly transparent (97.3%) over wide wavelengths ranging from visible to near infrared (IR).
  • IR near infrared
  • graphene is also one of the stiffest materials with a remarkably high Young's modulus of ⁇ 1 TPa, yet stretchable and bendable at the same time, with a maximum stretchability of up 20%.
  • the combination of its high transparency, wide-band optical tunability and excellent mechanical properties make graphene a very promising candidate for flexible electronics, optoelectronics and phonotics.
  • the technical breakthrough of large-scale graphene synthesis has further accelerated the employment of graphene films as transparent electrodes.
  • the key challenge is to reduce the sheet resistance to values comparable with indium tin oxide (ITO), which provides the best known combination of transparency (90%) and sheet resistance ( ⁇ 100 ⁇ / ⁇ ).
  • ITO indium tin oxide
  • the typical prior art approach is by heavily doping graphene. This is because sheet resistance follows the Drude model as shown in the following:
  • the present invention relates to a transparent conductor using wafer scale graphene non-volatile electrostatically doped by a permanent dipole layer. This may have advantages of graphene such as high optical transparency, mechanical flexibility and/or impermeability together with an ultra low sheet resistance.
  • a transparent conductor comprising a graphene layer, a permanent dipole layer on the graphene layer configured to electrostatically dope the graphene layer.
  • the permanent dipole layer may be a substantially polarised ferroelectric layer.
  • the graphene layer may be a single layer graphene, bilayer graphene or few layer graphene.
  • the transparent conductor may further comprise a substrate of Hexagonal Boron Nitride or Mica.
  • the permanent dipole layer may be substantially transparent.
  • the transmittance may be between 90-98%.
  • the Young's modulus may be between 4 Gpa and 1 Tpa.
  • the transparent conductor may be wafer scale or large scale.
  • the wafer scale or large scale transparent conductor may be between 1 mm 2 to 10 m 2 in area.
  • the sheet resistance per sheet may be less than 125 ⁇ / ⁇ at transparency of >97%.
  • the sheet resistance may be substantially 10 ⁇ / ⁇ at transparency of >90%.
  • the permanent dipole layer may alternatively be a self assembling molecule layer.
  • the permanent dipole layer may be substantially polarised and substantially maintains its dipole orientations without any substantial applied electric field.
  • the transparent conductor may be substantially flexible.
  • the flexibility may comprise that the original resistance state can be recovered after 20% tensile strain or 6% stretching force.
  • the transparent conductor may alternatively be substantially non-flexible.
  • a solar cell, organic light emitting diode, touch panel or display comprising a transparent conductor sheet according to any paragraph above configured as an electrode and/or a diffusion barrier.
  • a method of fabricating a transparent conductor comprising forming a wafer or sheet of graphene, and electrostatically doping the graphene with a layer of permanent dipoles.
  • Doping may comprise forming a layer of polarisable material onto the graphene wafer.
  • the method may further comprise substantially polarising the layer of polarisable material.
  • the polarising may comprise applying a voltage pulse to, or corona polling, the polarisable material.
  • Doping may alternatively comprise forming a layer of self-assembled molecules (SAM) on the graphene layer.
  • SAM self-assembled molecules
  • the method may further comprise forming the graphene by CVD on copper, epitaxial growth or chemically modifying graphene.
  • the method may be in a roll to roll process.
  • FIG. 1 shows the diagram of a graphene-permanent dipole layer (PDL) hybrid structure as a transparent conductor.
  • PDL graphene-permanent dipole layer
  • FIGS. 2( a ) to 2 ( d ) are cross sections of various embodiments of graphene-ferroelectric devices according to the present invention.
  • FIGS. 3( a ) and 3 ( b ) are chemical structure diagrams of doping graphene using a permanent dipole layer (PDL).
  • PDL permanent dipole layer
  • FIGS. 4( a ) to 4 ( d ) are graphs showing the relationship between polarization and sheet resistance.
  • FIGS. 5( a ) to 5 ( c ) show the transparency of the Free-standing of graphene-P(VDF-TrFE) hybrid structure.
  • FIG. 6 is a graph of sheet resistance at different charge carrier mobility and carrier density.
  • FIGS. 7( a ) to 7 ( c ) are schematics of methods of fabrication with the graphene on the ferroelectric polymer.
  • FIGS. 1( a ) and 1 ( b ) a transparent conductor using graphene-permanent dipole layer hybrid structure is illustrated.
  • the graphene layer is the working media for flexible transparent conductor, while the permanent dipole layer (PDL) provides non-volatile high doping of the graphene, without comprising the high optical transparency.
  • the PDL also simultaneously functions as a flexible mechanical supporting layer for the graphene. Preserving the flexibility of graphene is important as it allows the transparent conductor to be fabricated using roll to roll processing and to be used in a wider range of applications.
  • the transparent conductor sheet 100 includes a graphene layer 102 and a permanent dipole layer 104 on the graphene layer 102 .
  • the permanent dipole layer 104 may be under or over the graphene layer 102 or sandwiched on either side.
  • a solar cell 106 is shown.
  • the cell 106 includes a gated transparent conductor electrode 100 covering a p layer 108 , an intrinsic layer 110 and n layer 112 and a back reflector electrode 114 .
  • the cell 106 requires sheet resistance of ⁇ 10 ⁇ / ⁇ and transparency of >90%.
  • the configuration of graphene layer 102 , the type of permanent dipole layer 104 and the fabrication technique can be modified to achieve those cell characteristics.
  • a touch screen 116 is shown.
  • the screen 116 includes a gated transparent conductor electrode 100 covering a capacitive or resistive sensing circuit 118 , a glass/polymer substrate 120 and a liquid crystal display 122 .
  • the screen 116 requires sheet resistance of 500-2 k ⁇ / ⁇ and transparency of >90%.
  • the configuration of graphene layer 102 the type of permanent dipole layer 104 and the fabrication technique can be modified to achieve those screen characteristics.
  • an organic light emitting diode OLED 126 is shown.
  • the OLED 126 includes a cathode 128 covering organic light emitting layers 130 , 132 and a gated transparent conductor electrode 100 .
  • the OLED 126 requires sheet resistance of ⁇ 20 ⁇ / ⁇ and transparency of >90%.
  • the configuration of graphene layer 102 the type of permanent dipole layer 104 and the fabrication technique can be modified to achieve those OLED characteristics.
  • FIG. 2( d ) a smart window 136 is shown.
  • a flexible transparent polymer support 138 covers a polymer-dispersed liquid crystal layer 140 and a gated transparent conductor electrode 100 .
  • the window 136 requires sheet resistance of 100-1 k ⁇ / ⁇ and transparency of 60-90%.
  • the configuration of graphene layer 102 the type of permanent dipole layer 104 and the fabrication technique can be modified to achieve those window characteristics.
  • the graphene-Permanent Dipole Layer hybrid structure may also have excellent flexibility, foldability and stretchability.
  • the original resistance state can be recovered even after 20% tensile strain or 6% stretching force are applied.
  • this is desirable for the photovoltaic applications, such as displays, solar cell etc.
  • the graphene layer 102 may be single layer graphene SLG, bilayer graphene BLG or few layer graphene FLG.
  • the graphene layer can also be functionalized graphene or graphene encapsulated with ultrathin flat insulator layer, i.e., h-BN layer. Or graphene may be combined with one layer of BN.
  • a large scale or wafer scale graphene sheet is typically between 1 mm 2 to 1 m 2 .
  • the permanent dipole layer 104 may be formed from polar molecules or ions with permanent electric dipole orientation, either beneath or above the graphene. For example:
  • FIG. 3 shows a diagram of electrostatic doping graphene using a permanent dipole layer (PDL).
  • the permanent dipole layer is ferroelectric polymer (P(VDF-TrFE)) as an example.
  • P(VDF-TrFE) ferroelectric polymer
  • the large-scale graphene can be heavily electrostatically doped by the well aligned dipoles, thus providing a low sheet resistance value.
  • the heavily doped graphene layer can be either p-type or n-type, depending on the polarity of PDL.
  • Such simple and elegant work function tunability of graphene is highly desirable for solar cell and light emitting diode applications, where the efficiency of these multilayer stacked devices is largely determined via the reducing the potential barriers through proper band alignment.
  • FIG. 4 shows the experimental results of low sheet resistance in large-scale graphene by introducing PDL using P(VDF-TrFE) thin film.
  • FIG. 4( a ) shows the typical hysteresis polarization loops of P(VDF-TrFE) thin film as a function of the applied electric field. The loops are generated as a result of increasing applied voltage and therefore increasing electric field.
  • the key parameters relating to the value of sheet resistance are the so-called spontaneous polarization (P s ) and remnant polarization (P r ).
  • the solid balls represent low 400 , medium 402 and high 404 levels of P r .
  • the hollow balls represent low 406 , medium 408 and high 408 levels of P s .
  • FIG. 4( b ) shows the systematic gate sweeping of sheet resistance (R S ) as a function of ⁇ P s .
  • FIG. 5 The graphene-P(VDF-TrFE) hybrid structure for optical experiments is shown in FIG. 5 .
  • the P(VDF-TrFE) film used here is 1 ⁇ m thickness, which may provide mechanical support for graphene, as shown in FIG. 5( a ) against the background of the National University of Singapore logo.
  • FIG. 5( b ) shows the graphene-P(VDF-TrFE) hybrid structure on flexible PET substrate, showing the flexibility of the device.
  • the transmission spectrums of hybrid graphene-P(VDF-TrFE) device as a function of wavelength from the visible to near IR are further recorded, as shown in FIG. 5( c ). At visible wavelength regime, the optical transparency of graphene-P(VDF-TrFE) hybrid structure is more than 95%.
  • FIG. 6 shows both the experimental results with theoretical estimation of the sheet resistance of graphene at different charge carrier mobility and carrier density.
  • the sheet resistance is limited to be 30 ⁇ / ⁇ even if carrier mobility is enhanced to be 10,000 cm 2 /Vs or beyond. This is due to the intrinsic acoustic and flexural phonon scattering.
  • the nanoripple induced flexural phonon scattering its negative impact can be largely suppressed through electrostatic high doping owing to its reverse relationship with charge density n.
  • n reaches 5 ⁇ 10 13 cm ⁇ 2
  • the flexural phonon scattering contributed resistivity is less than 2 ⁇ / ⁇ .
  • the elimination can be achieved by stacking bilayer or few layer graphene together.
  • the acoustic phonon scattering in bilayer graphene is roughly half of single layer graphene, thus making 15 ⁇ / ⁇ sheet resistance and 95% transmittance achievable.
  • the sheet resistance will be much reduced and sub-10 ⁇ / ⁇ with 90% transmittance is expectable.
  • the transparent conductors mentioned can advantageously be fabricated by roll to roll or other continuous processes as shown in FIG. 7 .
  • FIG. 7( a ) shows the fabrication of graphene-permanent dipole layer where graphene is underneath permanent dipole layer.
  • the PVDF support is laminated to the graphene on Cu foil (a). Then the copper foil is removed (b).
  • the graphene-permanent dipole layer hybrid can be simultaneously polarized through either the roll-to-roll compatible poling (d) or corona poling (c).
  • FIG. 7( b ) shows the fabrication of graphene-permanent dipole layer where graphene is on top of permanent dipole layer.
  • a PVDF layer is roll-to-roll coated by passing the graphene on Cu foil through a bath of PVDF solution (a). Then the Cu foil is removed (b).
  • the graphene-permanent dipole layer hybrid is then polarised through roll to roll compatible polling or contact polarization (c).
  • FIG. 7( c ) shows the encapsulated graphene using permanent dipole layers.
  • the PVDF support is laminated to the graphene on Cu foil (a). Then the Cu foil is removed (b). Then a further layer of PVDF is formed by passing the graphene layer through a bath of PVDF solution (c). The sandwiched graphene is then polarised through roll to roll compatible polling (d).
  • the graphene layer can be formed using a number of methods. For example, Cu-CVD graphene, epitaxial grown graphene, or chemical modified graphene.
  • the ultra low sheet resistance is further enhanced by ultra high charge carrier mobility by transferring or preparing CVD graphene on atomically-flat, ultra-thin substrates.
  • Atomically-flat, ultra-thin substrates may include:

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US13/882,451 2010-11-10 2011-11-10 Transparent conductor Active US9082523B2 (en)

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US41197110P 2010-11-10 2010-11-10
PCT/SG2011/000399 WO2012064285A1 (fr) 2010-11-10 2011-11-10 Conducteur transparent au graphène à couche dipolaire permanente
US13/882,451 US9082523B2 (en) 2010-11-10 2011-11-10 Transparent conductor

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US (1) US9082523B2 (fr)
EP (1) EP2637862B1 (fr)
JP (2) JP6285717B2 (fr)
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CN (1) CN103201106B (fr)
SG (1) SG189922A1 (fr)
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US9793214B1 (en) 2017-02-21 2017-10-17 Texas Instruments Incorporated Heterostructure interconnects for high frequency applications
US10181521B2 (en) 2017-02-21 2019-01-15 Texas Instruments Incorporated Graphene heterolayers for electronic applications

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CN103702259B (zh) 2013-12-31 2017-12-12 北京智谷睿拓技术服务有限公司 交互装置及交互方法
CN103747409B (zh) 2013-12-31 2017-02-08 北京智谷睿拓技术服务有限公司 扬声装置、扬声方法及交互设备
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EP2637862A1 (fr) 2013-09-18
JP2013544421A (ja) 2013-12-12
SG189922A1 (en) 2013-06-28
WO2012064285A1 (fr) 2012-05-18
JP6285717B2 (ja) 2018-02-28
US20140193626A1 (en) 2014-07-10
EP2637862A4 (fr) 2015-03-25
KR101771282B1 (ko) 2017-08-24
KR20140031170A (ko) 2014-03-12

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