US8780406B2 - Method for creating drive pattern for galvano-scanner system - Google Patents

Method for creating drive pattern for galvano-scanner system Download PDF

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Publication number
US8780406B2
US8780406B2 US12/992,937 US99293708A US8780406B2 US 8780406 B2 US8780406 B2 US 8780406B2 US 99293708 A US99293708 A US 99293708A US 8780406 B2 US8780406 B2 US 8780406B2
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galvano
laser beam
scanner
movement
drive pattern
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US20110304836A1 (en
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Nozomu Tanioka
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Harmonic Drive Systems Inc
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Harmonic Drive Systems Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/02—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only
    • H04N3/08—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only having a moving reflector
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/10—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical

Definitions

  • the present invention relates to a method for creating a drive pattern for a galvano-scanner system, wherein a visible laser beam is scanned via each positioning point on a surface of a work, and a drive pattern for scanning a main laser beam is thereby created.
  • a galvano-scanner system is used to scan a laser beam according to a predetermined drive pattern in a laser processing device or a similar device.
  • a galvano-scanner system comprising an x-axis galvano-scanner and a y-axis galvano-scanner, a laser beam emitted from a laser beam source is two-dimensionally scanned by the scanners along a surface of a work according to a predetermined drive pattern, and a predetermined marking is applied to the work surface.
  • a drive pattern input command for a conventional galvano-scanner system is created by entering, in a manner similar to that for a timing chart, coordinates data representing a plurality of positioning points for defining the drive pattern, a sequence of each of the positioning points, and the speed of scan between each of the positioning points, using an higher-level device provided with a PC for controlling the galvano-scanner system; then adding a large amount of information that has been designed in advance, including the distance to a work surface, data for correcting distortion by an optics system, and response characteristics of the galvano-scanner. Therefore, in order to create a drive pattern input command, it is necessary to enter a large amount of information, and to set the information in advance. Therefore, creation of a drive pattern input command is time-consuming and requires a certain amount of preparation time and relevant expertise.
  • a laser marking device provided with a function of projecting, using a guide laser beam, a guide image onto a work via a galvano-mirror, the guide image following a required pattern of printing.
  • the galvano-mirror is caused to turn according to the same coordinates data as that used during a printing operation, a point of irradiation of the guide laser beam is thereby scanned on the work, and the print pattern guide image is projected on a surface of the work.
  • An error between a position of guide image projection and a desired position on the work is thereby identified, making it possible to perform print position correction before printing commences. Therefore, in contrast to an instance in which actual printing is performed on a sample work and print position correction is performed, there is no need to make a sample work available, and print position correction can be performed with relative ease.
  • An object of the present invention is to propose a method for creating a drive pattern for a galvano-scanner system, wherein a surface of a work is scanned using a visible laser beam (i.e., a guide laser beam), and a drive pattern for scanning a main laser beam, such as a laser beam for marking, is thereby created with ease.
  • a visible laser beam i.e., a guide laser beam
  • a drive pattern for scanning a main laser beam such as a laser beam for marking
  • the present invention is a method for creating a drive pattern for a galvano-scanner system comprising a galvano-scanner capable of scanning a main laser beam and a visible laser beam in a predetermined direction, a scanner driver for driving the galvano-scanner, and a controller for controlling the scanner driver, the method for creating a drive pattern for a galvano-scanner system characterized in comprising:
  • the visible laser beam scanned by the galvano-scanner system is irradiated onto the surface of the master work, and the galvano-scanner position information is recorded at a position at which a positioning point and a spot of irradiation of the visible laser beam coincide.
  • Operation of the galvano-scanner system at this time is performed by a teaching operation by the controller, and therefore does not require a drive pattern entered in advance.
  • Alignment of the visible laser beam irradiation spot is repeated a required number of times, and the position and sequence of each of the positioning points are recorded.
  • Position information thus obtained contains the effect of distortion by an optics system.
  • errors originating from optics system error causes including focus error (pin cushion error) and attachment error, scale, offset, and other causes of error are already removed from the input command for a drive pattern created according to the obtained position information.
  • focus error pin cushion error
  • attachment error scale, offset, and other causes of error
  • the scan speed of the main laser beam can be made constant to create a drive pattern for a galvano-scanner system without a need for an operation in which a numerical value is entered and the scan speed is set.
  • an operation of setting the scan speed by entering a numerical value may be performed.
  • the galvano-scanner system generally has an x-axis galvano-scanner and a y-axis galvano-scanner, each of which scanners being capable of scanning the main laser beam and the visible laser beam in an x-axis direction and a y-axis direction respectively; an x-axis scanner driver for driving the x-axis galvano-scanner; a y-axis scanner driver for driving the y-axis galvano-scanner; and a controller for controlling the x-axis scanner driver and the y-axis scanner driver.
  • a drive pattern can also be created in this instance in a similar manner.
  • a master work having a plurality of positioning points for defining a scan trajectory of the main laser beam displayed on a surface, is made available.
  • a positioning point teaching operation is performed, in which the visible laser beam is irradiated onto the surface of the master work, the x-axis galvano-scanner and the y-axis galvano-scanner are operated by manual operation via each of the x-axis scanner driver and the y-axis scanner driver to align a position of irradiation of the visible laser beam on the surface at one of the positioning points by visual observation, x-axis position information and y-axis position information of the x-axis galvano-scanner and the y-axis galvano-scanner in an aligned state are respectively obtained from an x-axis position sensor and a y-axis position sensor respectively attached to the x-axis galvano-scanner and the
  • the x-axis position information and the y-axis position information obtained for each of the positioning points are deployed in x-y coordinates in a sequence in which each of the types of position information is obtained; a movement trajectory of the visible laser beam is determined; a duration of movement within each section of movement on the movement trajectory is set individually or as a whole, and an on/off state of the main laser beam at each position of movement on the movement trajectory is set. Then, an input command for a pattern for driving the main laser beam is set based on the movement trajectory, the duration of movement, and the on/off state information of the main laser beam.
  • the method for creating a drive pattern for a galvano-scanner system is characterized in comprising:
  • the teaching operation is performed using the master work to obtain the correction map or the correction formula, which is used to perform correction on a design input value for driving, and an error is removed. Therefore, in an instance where scanning of laser beam is performed on various works, it is possible to eliminate the trouble of performing the teaching operation each time, for example, the laser beam is scanned according to a different drive pattern. In an instance where distortion by the optics system is complex, e.g., in an instance where a large number of causes of error are present, the number of teaching iterations performed on the positioning points can be increased to perform error correction on the design input value with a high degree of accuracy.
  • the method for creating a drive pattern for a galvano-scanner system is characterized in comprising:
  • the drive pattern can thus be amended to minimize overshooting of the galvano-scanner at the positioning completion point and associated vibration.
  • a visible laser beam is scanned along each of the positioning points displayed on the surface of the master work, positional information of the galvano-scanner in a state of being aligned at each of the positioning points is obtained, and a drive pattern for scanning the main laser beam is created based on the positional information.
  • FIG. 1 is a schematic galvano-scanner system in which the present invention is applied;
  • FIG. 2 is an illustrative drawing showing a master work
  • FIG. 3( a ) is a table showing recorded data loaded by a teaching operation
  • FIG. 3( b ) is an illustrative drawing showing a deployed movement trajectory
  • FIG. 4 is a table showing a created drive pattern
  • FIG. 5( a ) is an illustrative drawing showing an x-axis movement trajectory of the drive pattern shown in FIG. 4 ;
  • FIG. 5( b ) is an illustrative drawing showing a y-axis movement trajectory of the same
  • FIG. 5( c ) is an illustrative drawing showing a drive pattern of laser on/off states of the same;
  • FIG. 6 is an illustrative drawing showing a master work for reading a correction value, an illustrative drawing showing a state in which a rectangular input command is distorted as a result of an error, a graph showing coordinates data obtained by the teaching operation, a graph showing design coordinates data, a graph showing a calculated error correction amount, and an illustrative drawing showing a rectangle formed without distortion by an input command that takes the error into account;
  • FIG. 7 is a graph showing a drive state in which no overshooting occurs and a drive state in which overshooting occurs;
  • FIG. 8 is a table showing a drive pattern containing a section of movement in which overshooting occurs, a graph showing a corresponding X-axis drive pattern, and a graph showing a corresponding Y-axis drive pattern;
  • FIG. 9 is a table showing a drive pattern for an instance in which a section of movement is added forward of a positioning completion point of each section of movement in which overshooting occurs, a graph showing a corresponding X-axis drive pattern, and a graph showing a corresponding Y-axis drive pattern.
  • FIG. 1 is a schematic diagram of a galvano-scanner system according to a first embodiment.
  • a galvano-scanner system 1 comprises an x-axis galvano-scanner 2 ; a y-axis galvano-scanner 3 ; an x-axis scanner driver 4 and a y-axis scanner driver 5 for driving the galvano-scanners; and a command generator 8 , the command generator 8 having an analog controller 6 and a personal computer 7 or a similar device, for controlling the x-axis and y-axis scanner drivers 4 , 5 .
  • the galvano-scanner system 1 used as, for example, a laser marking device, comprises a marking laser beam source 11 and a visible laser beam source 12 .
  • the marking laser beam source 11 is driven via a driver 10 to generate a marking laser beam L ( 11 ), which is irradiated onto an x-axis scanning mirror 21 of the x-axis galvano-scanner 2 via a half mirror 13 used as a beam path combining element.
  • the marking laser beam L ( 11 ) is reflected by the x-axis scanning mirror 21 , then irradiated onto a y-axis scanning mirror 31 of the y-axis galvano-scanner 3 .
  • the marking laser beam L ( 11 ) After being reflected by the y-axis scanning mirror 31 , the marking laser beam L ( 11 ) is irradiated, via an f ⁇ lens 14 or another collecting lens, onto a surface 16 a of a work 16 installed on a work table 15 .
  • a visible laser beam L( 12 ) emitted from a visible laser beam source 12 is reflected at a right angle by the half mirror 13 , then guided through a beam path identical to that of the marking laser beam L ( 11 ), and again irradiated onto the surface 16 a of the work 16 .
  • the x-axis and y-axis scanner drivers 4 , 5 generate a scanner drive voltage based on the command voltage, apply the scanner drive voltage on the x-axis and y-axis galvano-scanners 2 , 3 , and drive the x-axis and y-axis galvano-scanners 2 , 3 to a designated position.
  • An input control part 6 a is connected to the analog controller 6 , and a command for driving the x-axis and y-axis galvano-scanners 2 , 3 can be manually entered from the input control part 6 a.
  • the x-axis and y-axis galvano-scanners 2 , 3 are respectively provided with, for example, a finite rotation-type motor 20 , 30 , as well as an x-axis and y-axis scanning mirror 21 , 31 mounted on a motor rotation shaft 20 a , 30 a of the respective motor.
  • a position sensor 22 , 32 for detecting the rotation angle position of the motor rotation shaft 20 a , 30 a is attached to each of the x-axis and y-axis galvano-scanners 2 , 3 respectively.
  • An analog position detection output from the position sensor 22 , 32 is fed to the analog controller 6 via the x-axis and y-axis scanner driver 4 , 5 respectively.
  • the analog controller 6 performs an analog-to-digital conversion to convert the analog position detection output to a digital position information.
  • the digital position information is fed to the personal computer 7 .
  • a feedback control is performed on the x-axis and y-axis galvano-scanners 2 , 3 according to a drive pattern set and entered in advance, based on the position of each of the x-axis and y-axis galvano-scanners 2 , 3 .
  • a master work 17 having a plurality of positioning points defining a scan trajectory of the marking laser beam L ( 11 ), such as positioning points P 1 through P 14 , displayed on a surface 17 a , as shown in FIG. 2 .
  • the master work 17 is installed on the work table 15 .
  • the command generator 8 is set to teaching operation mode.
  • the visible laser beam source 12 is thereby driven, the visible laser beam L( 12 ) is emitted, and the visible laser beam L( 12 ) is irradiated onto the surface 17 a of the master work 17 .
  • An operator drives the x-axis galvano-scanner 2 and the y-axis galvano-scanner 3 from the input control part 6 a of the analog controller 6 by manual operation while visually monitoring a beam spot of the visible laser beam L( 12 ) formed on the surface 17 a of the master work 17 and aligns the beam spot at a positioning point P 1 .
  • the input control part 6 a When an aligned state is created, the input control part 6 a is operated, a sensor signal value from each of the position sensors 22 , 32 of the x-axis and y-axis galvano-scanners 2 , 3 is read, and the sensor signal value is recorded onto an internal memory device 6 b or an externally provided external memory device 6 c along with a reading sequence. Reading of the sensor signal value is only performed in an instance in which the input control part 6 a is operated and a read command is entered; position information, elapsed time, and other information representing a movement trajectory during the aligning process are not recorded.
  • Information representing an on/off state of the marking laser beam between each of the positioning points, i.e., in each section of movement, is entered by operating the input control part 6 a and recorded onto the memory device 6 b or 6 c .
  • Setting of the on/off state information can also be performed after the position information has been recorded.
  • the recorded information is recorded in a form of a digital signal.
  • a sensor signal value is read and recorded onto the memory device 6 b or 6 c .
  • Information regarding an on/off state of the marking laser beam is also recorded.
  • a similar recording operation is sequentially performed for positioning points P 3 through P 14 . Positions at which the recording is commenced and terminated are indicated by performing an entry operation.
  • the recorded information is loaded into the personal computer 7 of the command generator 8 , and a drive pattern is created based on the loaded information.
  • FIG. 3( a ) is a table showing the loaded record data
  • FIG. 3( b ) shows the deployed movement trajectory. Trajectory coordinates of the movement trajectory can be amended at this point.
  • FIG. 4 is a table showing the data after the duration of movement has been set.
  • FIGS. 5( a ) through 5 ( c ) are illustrative drawings respectively showing an x-axis drive pattern, a y-axis drive pattern, and an on/off state drive pattern of the marking laser beam.
  • Errors originating from effects of optics system error causes including focus error (pin cushion error) and attachment error, scale, offset, distance to the work surface and other causes of error are already removed from a drive pattern thus created. Therefore, a beam spot of the marking laser beam can be scanned along each positioning points on the surface 16 a of the work 16 with a high degree of accuracy.
  • the teaching operation for the positioning points using a master work is performed once only, thereby creating an error correction map or an error correction function, and correcting a design coordinates data based on the error correction map or the error correction function.
  • a master work is made available, the master work having positioning points, each of which being provided at a representative position on a surface.
  • a beam spot of a visible laser beam is aligned by manual operation at each of the positioning points of the master work, a sensor position signal from a position sensor is obtained, the obtained sensor position signal is loaded into the personal computer 7 , and a measurement coordinates position data for aligning a marking laser beam to each of the positioning points is calculated. Then, an error between design coordinates position data representing each of the positioning points and the measurement coordinates position data actually obtained is calculated.
  • a correction map in which the calculated error is allocated to each of the positioning points, or an error correction function that can eliminate the error at each of the positioning points, is created.
  • the design coordinates data entered from an input part of the personal computer 7 are corrected using the correction map or the error correction function, and the design coordinates data after correction are fed to the analog controller 6 as an input command.
  • the number of teaching operations performed on the positioning points is increased.
  • the measurement coordinates data calculated according to the sensor position signal representing each of the positioning points that are linearly arranged include the effect of distortion by the optics system such as that described above, and therefore curves in a reverse direction as shown in FIG. 6( c ).
  • a difference between the measurement coordinates data shown in FIG. 6( c ), and the design coordinates data shown in FIG. 6( d ) that does not take an error into account, represents an amount of error. The error amount is shown in FIG. 6( e ).
  • the galvano-scanner system 1 is driven according to a drive pattern that is in accordance with adjustment conditions that have been set in advance, and a maximum degree of responsiveness and positional accuracy can thereby be obtained.
  • a driving operation i.e., actual movement
  • a drive pattern i.e., command input value
  • FIG. 7( b ) shows an example of a driving operation due to a drive pattern having a large vibration width exceeding the adjustment conditions.
  • correction is performed on the created drive pattern, and the duration of movement is shortened while a decrease in the alignment accuracy is minimized, as described below.
  • a method of creating a drive pattern is similar to that according to the first embodiment described above, and a description is therefore omitted.
  • a driving operation is performed along positioning points (i.e., steps 1 through 14 ) shown in FIG. 8 .
  • a high speed driving operation of 400 rad/s is performed in a laser-off state in a section of movement A between the positioning point 1 and the positioning point 2 .
  • a similar driving operation is performed in a section of movement B between the positioning point 8 and the positioning point 9 , and a section of movement C between the positioning point 11 and the positioning point 12 .
  • vibration due to overshooting is generated at respective positioning completion points of each of the sections of movement, i.e., at positioning points 2 , 9 , and 12 .
  • a portion corresponding to the section of movement C is shown with an expanded time axis on the right-hand side of FIG. 8 .
  • a section of movement A 1 representing a very small amount of movement between a positioning point 1 a and the positioning point 2 is added forward of the positioning point 2 on the section of movement A.
  • the movement within the section of movement A 1 is set so that the movement speed is at a low speed of 10 rad/s and the movement distance is also very small.
  • a section of movement B 1 between a positioning point 8 a and the positioning point 9 is added forward of the positioning point 9 on the section of movement B, and a section of movement C 1 between a positioning point 11 a and the positioning point 12 is added.
  • Sections of movement that are newly inserted are imparted with conditions according to vibration width, speed, responsiveness, and similar parameters, and may comprise a straight line or a continuation of straight lines having different speeds.
  • Vibration at the positioning points 2 , 9 , 12 can thereby be minimized without establishing unnecessary standby times. Movement while the laser is in an off state can be controlled as conventionally performed without problems, since there is no need to account for the energy density of the laser.

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  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
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US12/992,937 2008-05-16 2008-05-16 Method for creating drive pattern for galvano-scanner system Active 2030-11-13 US8780406B2 (en)

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PCT/JP2008/001237 WO2009139026A1 (ja) 2008-05-16 2008-05-16 ガルバノスキャナシステムの駆動パターン作成方法

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JP5715113B2 (ja) * 2012-12-14 2015-05-07 株式会社片岡製作所 レーザ加工機
US20170014945A1 (en) * 2015-07-17 2017-01-19 Laserax Inc. Methods and systems for laser marking an identifier on an industrial product
JP6575350B2 (ja) * 2015-12-24 2019-09-18 ブラザー工業株式会社 レーザ加工装置
JP7201534B2 (ja) * 2019-05-27 2023-01-10 ファナック株式会社 実測装置及びプログラム
DE102019119270A1 (de) * 2019-07-16 2021-01-21 Smart Move Gmbh Vorrichtung zum Bearbeiten eines Werkstücks mit UV-Licht

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JPWO2009139026A1 (ja) 2011-09-08
DE112008003863T5 (de) 2011-04-28
DE112008003863B4 (de) 2017-04-13
US20110304836A1 (en) 2011-12-15

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