US8631710B2 - Sensor - Google Patents

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Publication number
US8631710B2
US8631710B2 US13/309,031 US201113309031A US8631710B2 US 8631710 B2 US8631710 B2 US 8631710B2 US 201113309031 A US201113309031 A US 201113309031A US 8631710 B2 US8631710 B2 US 8631710B2
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United States
Prior art keywords
elastic element
diaphragm
measuring apparatus
signal transmitter
housing
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Application number
US13/309,031
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English (en)
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US20120125116A1 (en
Inventor
Dietmar Weisser
Benjamin SCHULLCKE
Heinrich Müller
Markus SCHEITER
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Marquardt GmbH
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Marquardt Mechatronik GmbH
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Assigned to MARQUARDT MECHATRONIK GMBH reassignment MARQUARDT MECHATRONIK GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: WEISSER, DIETMAR, MULLER, HEINRICH, SCHEITER, MARKUS, SCHULLCKE, BENJAMIN
Publication of US20120125116A1 publication Critical patent/US20120125116A1/en
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Publication of US8631710B2 publication Critical patent/US8631710B2/en
Assigned to MARQUARDT GMBH reassignment MARQUARDT GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MARQUARDT MECHATRONIK GMBH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/007—Transmitting or indicating the displacement of flexible diaphragms using variations in inductance

Definitions

  • the invention relates to a measuring apparatus for measuring a measurement variable of a fluid, in particular sensor, such as a pressure sensor or a travel sensor.
  • the measuring apparatus may be a sensor, such as a pressure sensor, a travel sensor or the like.
  • Measuring apparatuses of this kind serve primarily for measuring a measurement variable of a fluid, for example for measuring a water level in washing machines, dishwashers, wet and/or dry vacuum devices or in other water-bearing parts of domestic appliances.
  • These measuring apparatuses are, in particular, pressure sensors for low pressures, specifically of less than 3500 Pa (Pascals) for example.
  • Such measuring apparatuses having a housing and having a diaphragm which is arranged in and/or on the housing are known.
  • An elastic element for restoring the diaphragm is located in the housing.
  • a signal transmitter is operatively connected to the diaphragm and/or to the elastic element.
  • a signal receiver interacts with the signal transmitter in order to generate the measurement signal.
  • a certain hysteresis is observed in these sensors when the pressure and/or the temperature of the fluid to be measured changes, and this, in turn, can lead to corruption of the measurement signal.
  • the invention is based on the object of designing the measuring apparatus in such a way that the quality of the measurement signal is improved in respect of such changes in temperature and/or pressure.
  • the intention is, in particular, to provide a spring/diaphragm system as a measuring apparatus for a small mechanical pressure sensor in the low-pressure range, said spring/diaphragm system requiring little installation space and exhibiting very low hysteresis in respect of the pressure and/or the temperature.
  • the elastic element has a structure for providing reinforcement.
  • structures are introduced into the geometry of the elastic element in certain regions for the purpose of reinforcing said elastic element. This creates a space-saving and low-hysteresis spring/diaphragm system of a pressure sensor which is primarily suitable for low pressures.
  • the elastic element In order to reduce the installation space of the measuring apparatus, provision is made for the elastic element to be designed in the manner of a disk-like leaf spring.
  • the leaf spring expediently has a circular shape which substantially corresponds to the shape of the diaphragm.
  • a particularly high restoring force can be achieved in the elastic element by the leaf spring having a spring element which runs from the center to the edge region of the leaf spring in the manner of a spiral. This ensures a compact design with a high spring force.
  • the structures for providing reinforcement can be arranged in the edge region and/or in the center of the elastic element.
  • structures for providing reinforcement are then introduced in the edge region and/or in the center.
  • the structure for providing reinforcement can be designed as a bead in a simple manner.
  • the bead can, once again for the sake of simple producibility, have an approximately U-shaped cross section.
  • the elastic element can be produced as a stamped metal part, it being possible to impress the structure into the elastic element.
  • the signal transmitter consists of a magnet.
  • the signal receiver consists of a position sensor which detects the magnetic field which is generated by the magnet.
  • the position sensor can be a Hall sensor.
  • the signal transmitter is expediently adhesively bonded to the elastic element.
  • the diaphragm and the elastic element and also the signal transmitter and the signal receiver can be arranged in the interior of the housing.
  • the housing then has a connection nozzle for supplying the fluid which is to be measured to the diaphragm.
  • the spring/diaphragm system has a low pressure hysteresis on account of the reinforcements. Owing to the temperature-dependent friction between the diaphragm, which is composed of silicone for example, and the metal of the spring, conventional, unreinforced spring bowls in the edge region. In contrast, the spring/diaphragm system according to the invention has a low temperature hysteresis. Furthermore, the spring is mechanically stiff in the edge region and is therefore easier to handle in terms of manufacturing during production of the sensor.
  • the reinforced edge region moreover counteracts a distortion in the edge region of the spring, for example if the sensor falls down, as a result of which the corruption of the behavior of the sensor which otherwise occurs in this case is counteracted.
  • the overall height of the spring/diaphragm system according to the invention is also extremely low, as a result of which the sensor is particularly suitable for cramped installation areas.
  • FIG. 1 shows a perspective view of a pressure sensor
  • FIG. 2 shows a section through the pressure sensor along line 2 - 2 in FIG. 1 ;
  • FIG. 3 shows an enlarged illustration of the spring/diaphragm system from FIG. 2 ;
  • FIG. 4 shows a perspective illustration of the spring/diaphragm system from FIG. 3 ;
  • FIG. 5 shows a section, like that in FIG. 2 , of a further exemplary embodiment
  • FIG. 6 shows the spring/diaphragm system according to the further exemplary embodiment in an illustration like that in FIG. 3 ;
  • FIG. 7 shows the spring/diaphragm system according to the further exemplary embodiment in an illustration like that in FIG. 4 .
  • FIG. 1 shows a pressure sensor 1 which serves as a measuring apparatus for measuring a measurement variable of a fluid, specifically the pressure of a liquid in a domestic appliance in the present case.
  • the pressure sensor 1 has a housing 2 , on which a connection nozzle 3 for supplying the liquid to be measured is arranged, and also a connection plug 4 for connecting the electrical supply lines.
  • the pressure sensor 1 can be installed in the domestic appliance by means of a latching system 5 which is located on the housing 2 .
  • the housing 2 finally comprises, according to FIG. 2 , a base 6 and a cover 7 .
  • a diaphragm 8 is arranged in and/or on the housing 2 , the liquid acting on said diaphragm by means of the connection nozzle 3 .
  • the diaphragm 8 is distorted in accordance with the pressure prevailing in the liquid.
  • An elastic element 9 which is located in the housing 2 acts on the diaphragm 8 as a spring for restoring the diaphragm 8 .
  • a signal transmitter 10 is operatively connected to the diaphragm 8 and/or to the elastic element 9 , as a result of which the signal transmitter 10 is adjusted in accordance with the distortion of the diaphragm 8 .
  • a signal receiver 11 interacts in turn with the signal transmitter 10 , said signal receiver generating a signal which corresponds to the adjustment of the signal transmitter 10 .
  • the signal transmitter 10 and the signal receiver 11 are arranged in the interior of the housing 2 .
  • the signal transmitter 10 consists of a magnet, specifically a permanent magnet.
  • the magnet 10 is attached to the elastic element 9 , specifically adhesively bonded to the elastic element 9 in the center 15 of said elastic element (see FIG. 4 ).
  • the signal receiver 11 consists of a position sensor which is arranged on a printed circuit board 12 in the housing 2 on that side of the signal transmitter 10 which is opposite the diaphragm 8 .
  • a Hall sensor is provided as the position sensor 11 which detects the magnetic field which is generated by the magnet 10 in accordance with the adjustment of said magnet.
  • the position sensor 11 is designed as an integrated circuit which contains the evaluation electronics, so that the signal which corresponds to the adjustment of the signal transmitter 10 is available in correspondingly converted form at the plug connection 4 as a measurement signal for the pressure prevailing in the liquid.
  • the circular diaphragm 8 consists of an elastomer, which is composed of silicone for example.
  • the spring 9 is composed of metal, for example a spring steel.
  • the similarly circular spring 9 is designed in the manner of a disk-like leaf spring, as can be seen with reference to FIG. 4 , and has a spring element 17 which runs from the center 15 to the edge region 16 of the leaf spring 9 in the manner of a spiral.
  • a structure 13 for providing reinforcement is arranged in the edge region 16 of the elastic element 9 .
  • a further structure 14 for providing reinforcement is located in the center 15 of the elastic element 9 .
  • the structures 13 , 14 are designed as a bead which has an approximately U-shaped cross section and serve to reinforce the elastic element 9 .
  • the reinforcement of the elastic element 9 in turn reduces the hysteresis for the spring 9 in respect of changes in the temperature and/or in the pressure.
  • the elastic element 9 can be produced as a stamped part.
  • the structures 13 , 14 are introduced into the elastic element 9 in the manner of deep-drawn impressions.
  • the structure 14 which is located in the center 15 of the leaf spring 9 also serves as a receptacle for the magnet 10 which is fitted on the elastic element 9 .
  • the magnet 10 is adhesively bonded to the elastic element 9 in the structure 14 .
  • FIG. 5 shows a pressure sensor 1 according to a further exemplary embodiment.
  • the leaf spring 9 has a smaller diameter than the diaphragm 8 .
  • the leaf spring 9 is thus situated substantially within the diaphragm 8 , with the beading 18 which is located on the edge of the diaphragm 8 projecting beyond the leaf spring 9 in the direction of the diameter, as can be seen in FIG. 6 .
  • the leaf spring 9 once again has a bead-like structure 13 in the edge region 16 and a further bead-like structure 14 in the center 15 .
  • FIG. 6 shows a pressure sensor 1 according to a further exemplary embodiment.
  • an elongating lug 19 adjoins a point of the edge region 16 of the leaf spring 9 .
  • a point of the beading 18 rests against this lug 19 .
  • the lug 19 serves to fasten the leaf spring 9 between the base 6 and the cover 7 of the housing 2 .
  • the leaf spring 9 can be handled in a simple manner by means of the lug 19 during installation into the housing 2 .
  • a measuring apparatus of this kind can also be used as another sensor, such as a filling level sensor, travel sensor or the like, specifically both for domestic appliances and in other applications, for example in laboratory technology and in chemical process technology.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
US13/309,031 2009-06-03 2011-12-01 Sensor Active US8631710B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102009023734.8 2009-06-03
DE102009023734 2009-06-03
DE102009023734 2009-06-03
PCT/DE2010/000614 WO2010139308A1 (de) 2009-06-03 2010-06-02 Sensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2010/000614 Continuation WO2010139308A1 (de) 2009-06-03 2010-06-02 Sensor

Publications (2)

Publication Number Publication Date
US20120125116A1 US20120125116A1 (en) 2012-05-24
US8631710B2 true US8631710B2 (en) 2014-01-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
US13/309,031 Active US8631710B2 (en) 2009-06-03 2011-12-01 Sensor

Country Status (5)

Country Link
US (1) US8631710B2 (de)
EP (1) EP2438417B1 (de)
CN (1) CN102803915B (de)
DE (1) DE102010022428A1 (de)
WO (1) WO2010139308A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130291646A1 (en) * 2010-11-29 2013-11-07 Marquardt Mechatronik Gmbh Sensor

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9291177B2 (en) 2010-06-01 2016-03-22 Esg Mbh Duct having flow conducting surfaces
DE102011012039A1 (de) 2011-02-22 2012-08-23 Esg Mbh Kanal mit Strömungsleitfläche
DE102012016395A1 (de) * 2011-08-24 2013-02-28 Marquardt Mechatronik Gmbh Sensor
EP2931334B1 (de) * 2012-12-14 2017-08-09 Gambro Lundia AB Membranneupositionierung für einen druckbehälter mit positionserkennung
WO2014151819A2 (en) * 2013-03-15 2014-09-25 Beldon Technologies, Inc. Roof monitoring method and system
DE102022128021A1 (de) 2022-10-24 2024-04-25 Marquardt Gmbh Blattfeder

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2290612A1 (fr) 1974-11-08 1976-06-04 Kistler Instrumente Ag Membrane pour capteurs de pression
DE3133057A1 (de) 1980-08-29 1982-06-16 Aisin Seiki K.K., Kariya, Aichi Druckfuehler
EP0194937A1 (de) 1985-03-12 1986-09-17 Sedeme Kolbentyp-Drucksensor
US5025667A (en) 1989-06-15 1991-06-25 Texas Instruments Incorporated Hermetic pressure sensor
US5140733A (en) * 1988-05-25 1992-08-25 Tatsuta Electric Wire & Cable Co., Ltd. Method of fixing flange to peripheral edge of a disc spring
DE9306961U1 (de) 1992-05-08 1993-07-08 Elbi International S.P.A., Turin/Torino, It
DE68908697T2 (de) 1989-01-20 1993-12-09 Tatsuta Densen Kk Feder mit konischer platte.
DE4444167A1 (de) * 1993-12-30 1995-07-06 Elbi Int Spa Elektrischer Druckwandler
DE19745858A1 (de) 1996-10-25 1998-04-30 Elbi Int Spa Elektronischer Druckdifferenz-Wandler
US20050000291A1 (en) 2003-07-02 2005-01-06 Susumu Shirai Pressure sensor
DE10329159A1 (de) 2003-06-27 2005-01-27 Bytec Hard- Und Softwareentwicklungen Gmbh Verfahren zur Bestimmung des Drucks in einem potenziell mit Eiweißstoffen kontaminierten Fluid, Einweg-Messdose und Umsetzer
DE102008022465A1 (de) 2007-05-12 2008-11-13 Marquardt Gmbh Sensor
DE102008025045A1 (de) 2007-06-02 2008-12-04 Marquardt Gmbh Sensor
US20100043563A1 (en) * 2007-01-30 2010-02-25 Komatsu Ltd. Differential pressure sensor
US20120198940A1 (en) * 2011-02-08 2012-08-09 San-Chuan Yu Oil pressure sensor
US8312775B2 (en) * 2008-06-11 2012-11-20 Seiko Epson Corporation Diaphragm for pressure sensor and pressure sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531929A (en) * 1978-08-30 1980-03-06 Agency Of Ind Science & Technol Displacement oscillation sensor
US6581436B2 (en) * 2001-05-16 2003-06-24 Esec Trading Sa Pressure sensor with means for re-calibration
DE102007013691A1 (de) * 2007-03-19 2008-09-25 Tyco Electronics Amp Gmbh Berührungsloser Positionssensor für pneumatische Steuerdosen

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2290612A1 (fr) 1974-11-08 1976-06-04 Kistler Instrumente Ag Membrane pour capteurs de pression
US4056009A (en) 1974-11-08 1977-11-01 Kistler Instrumente Ag Diaphragm arrangement for pressure transducers
DE3133057A1 (de) 1980-08-29 1982-06-16 Aisin Seiki K.K., Kariya, Aichi Druckfuehler
US4351191A (en) 1980-08-29 1982-09-28 Aisin Seiki Company, Limited Pressure sensor
EP0194937A1 (de) 1985-03-12 1986-09-17 Sedeme Kolbentyp-Drucksensor
US5140733A (en) * 1988-05-25 1992-08-25 Tatsuta Electric Wire & Cable Co., Ltd. Method of fixing flange to peripheral edge of a disc spring
DE68908697T2 (de) 1989-01-20 1993-12-09 Tatsuta Densen Kk Feder mit konischer platte.
US5025667A (en) 1989-06-15 1991-06-25 Texas Instruments Incorporated Hermetic pressure sensor
DE69015704T2 (de) 1989-06-15 1995-05-24 Texas Instruments Inc Hermetischer Druckwandler.
DE9306961U1 (de) 1992-05-08 1993-07-08 Elbi International S.P.A., Turin/Torino, It
DE4444167A1 (de) * 1993-12-30 1995-07-06 Elbi Int Spa Elektrischer Druckwandler
DE4444167B4 (de) 1993-12-30 2005-03-24 Elbi International S.P.A. Elektrischer Druckwandler
DE19745858A1 (de) 1996-10-25 1998-04-30 Elbi Int Spa Elektronischer Druckdifferenz-Wandler
DE10329159A1 (de) 2003-06-27 2005-01-27 Bytec Hard- Und Softwareentwicklungen Gmbh Verfahren zur Bestimmung des Drucks in einem potenziell mit Eiweißstoffen kontaminierten Fluid, Einweg-Messdose und Umsetzer
US20050000291A1 (en) 2003-07-02 2005-01-06 Susumu Shirai Pressure sensor
US20100043563A1 (en) * 2007-01-30 2010-02-25 Komatsu Ltd. Differential pressure sensor
DE102008022465A1 (de) 2007-05-12 2008-11-13 Marquardt Gmbh Sensor
DE102008025045A1 (de) 2007-06-02 2008-12-04 Marquardt Gmbh Sensor
US8312775B2 (en) * 2008-06-11 2012-11-20 Seiko Epson Corporation Diaphragm for pressure sensor and pressure sensor
US20120198940A1 (en) * 2011-02-08 2012-08-09 San-Chuan Yu Oil pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130291646A1 (en) * 2010-11-29 2013-11-07 Marquardt Mechatronik Gmbh Sensor
US9267859B2 (en) * 2010-11-29 2016-02-23 Marquardt Mechatronik Gmbh Mechanical fluid sensor

Also Published As

Publication number Publication date
CN102803915B (zh) 2016-01-13
US20120125116A1 (en) 2012-05-24
EP2438417A1 (de) 2012-04-11
EP2438417B1 (de) 2013-07-24
DE102010022428A1 (de) 2010-12-09
CN102803915A (zh) 2012-11-28
WO2010139308A1 (de) 2010-12-09

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