US7859649B2 - Laser range sensor system optics adapter and method - Google Patents

Laser range sensor system optics adapter and method Download PDF

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Publication number
US7859649B2
US7859649B2 US11/741,129 US74112907A US7859649B2 US 7859649 B2 US7859649 B2 US 7859649B2 US 74112907 A US74112907 A US 74112907A US 7859649 B2 US7859649 B2 US 7859649B2
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lens
adapter
radiation
providing
extra
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US11/741,129
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US20070258709A1 (en
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Eric G. Gesner
David B. Kay
Mehdi N. Araghi
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Quality Vision International Inc
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Quality Vision International Inc
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Priority to US11/741,129 priority Critical patent/US7859649B2/en
Priority to PCT/US2007/067644 priority patent/WO2007130866A2/fr
Priority to EP07761467A priority patent/EP1934554A4/fr
Priority to JP2009509973A priority patent/JP2009535645A/ja
Publication of US20070258709A1 publication Critical patent/US20070258709A1/en
Assigned to QUALITY VISION INTERNATIONAL, INC. reassignment QUALITY VISION INTERNATIONAL, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KAY, DAVID B., MR., ARAGHI, MEHDI, GESNER, ERIC G, MR.
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only

Definitions

  • Embodiments relate to the field of optical metrology, which uses video based inspection systems, coordinate measuring machines, and multisensor coordinate metrology in the measurement of form, size, and location in production and quality control.
  • An example of such a video inspection system is described in U.S. Pat. No. 6,518,996, the disclosure of which is hereby incorporated by reference.
  • the '996 patent discloses a video inspection apparatus including a compact Y-Z-X measurement axes system with imaging optics and a video camera mounted to the vertical Z translation axis.
  • This vertical imaging system can take the form of a shared objective lens above the X-Y stage, followed by a zoom optical system, followed by a CCD video camera.
  • the objective lens can be shared with a laser range sensor system to provide a Through the Lens (TTL) laser range measurement capability on the same object being viewed by the video camera.
  • TTL Through the Lens
  • Two examples of laser range sensor systems that can be deployed through the lens include triangulation laser range sensors based on the principles contained in U.S. Pat. No. 4,595,829 and conoscopic holographic sensors taught in U.S. Pat. No. 5,953,137, the disclosures of which are hereby incorporated by reference.
  • a TTL triangulation sensor product is manufactured by Quality Vision International, Inc., Rochester, N.Y., for their inspection and measurement systems and their subsidiaries' equipment.
  • laser light is directed to the object or surface through one half of the objective lens' entrance pupil.
  • the objective lens' “entrance” pupil since light is entering from the laser range sensor.
  • the same pupil can also function as the “exit” pupil as will be seen below.
  • the objective lens entrance pupil is the image of the objective lens aperture stop as “seen” by light that is entering from the laser range sensor. Neither the laser range sensor radiation beam diameter nor the reflected and scattered return beam diameters necessarily represent the exact diameter of the pupil, as the degree to which the beam should be filling the pupil depends on the particular TTL sensor used. It should also be noted that not all TTL sensor systems collimate the radiation they employ.
  • TTL laser probes are typically designed to be used with a specific objective lens entrance pupil size, as light enters from the laser range sensor.
  • a typical inspection and/or measuring system 100 using a TTL laser probe arrangement 110 is shown in FIG. 1 .
  • the measuring system 100 typically includes an illumination source 105 that provides illuminating radiation to the system 100 via a beam splitter or the like 106 .
  • the probe system 110 emits a laser beam 111 toward the optical system 120 , which can include a beam splitter 121 , a zoom lens system 122 , and an objective lens 123 that focuses radiation on an object or surface to be examined 124 .
  • the measuring system can further include an image sensor lens 125 that focuses light reflected from the object or surface to be examined 124 onto a sensor 130 .
  • the sensor 130 can be the sensor of a CCD camera 140 .
  • the beam 111 of diameter d is preferably equal to an exit pupil size of the TTL laser probe 110 , and is preferably designed to fill the objective lens entrance pupil of diameter D, which must be properly filled by the radiation from the probe and the returning reflected and scattered light for optimum performance.
  • the degree of performance sensitivity to filling of the entrance pupil depends on the particular laser probe employed. If a different objective lens with a different entrance pupil, as entered from the laser range sensor, is to be used, the laser sensor wilt operate at less than its optimum performance, particularly in height measurement sensitivity, range, resolution, and accuracy. To achieve optimum performance for a given objective lens, the laser range sensor should be redesigned to match the new diameter of the objective lens and the resulting new entrance pupil size. Redesigning the laser probe every time the objective lens' entrance pupil, as entered from the laser range sensor, is changed is costly and cumbersome. There thus exists a need for a more flexible TTL laser probe that can be used with more than one objective lens pupil size.
  • Embodiments provide a method of changing TTL sensor radiation exit pupil size using an expansion/contraction optical system as an adapter to properly fill an objective lens entrance pupil for which the TTL sensor was not designed.
  • the preferred adapter is based on a Galilean optical system, though a Keplerian optical arrangement can be employed. With the adapter installed, optimum performance of the laser probe in height sensitivity, range, resolution, and accuracy can be achieved without changing the laser probe's optical system design, saving time and money.
  • Embodiments will expand or contract the TTL sensor system radiation as desired for TTL sensor system radiation that is collimated or non-collimated.
  • FIG. 1 shows a schematic representation of a typical inspection and measuring system using a TTL laser range sensor and an optical zoom imaging system sharing an objective lens.
  • FIG. 2 shows a schematic representation of a inspection and measuring system using a TTL laser range sensor and an optical zoom imaging system sharing an objective lens with the laser range sensor optics adaptor according to embodiments.
  • FIG. 3 shows a schematic representation of a beam expander according to embodiments.
  • FIG. 4 shows a schematic representation of a beam contractor according to embodiments.
  • FIG. 5 shows a schematic representation of a beam expander according to embodiments.
  • FIG. 6 shows a schematic representation of a beam contractor according to embodiments.
  • FIG. 7 shows a schematic representation of a beam expander according to embodiments as it works with non collimated beams.
  • FIG. 8 shows a schematic representation of an adapter according to embodiments and including mirrors to “fold” the adapter into a more compact form.
  • FIG. 9 shows a schematic representation of a metrology system using a TTL laser range sensor and the folded adapter of FIG. 8 .
  • FIG. 10 shows a schematic representation of an adjustable adapter according to embodiments.
  • FIG. 11 shows a schematic representation of an adjustable adapter usable with non-collimated radiation according to embodiments.
  • FIG. 12 is a schematic representation of a method of adapting the output of a TTL laser range sensor probe to an objective of a zoom lens system for which the probe was not designed according to embodiments.
  • a portion of the reflected and scattered illumination light from the object or surface 224 passes through the beam splitter 221 and on to a zoom lens 222 , which sends the radiation through sensor lens 225 to the image sensor 230 , such as the sensor of a CCD camera 240 .
  • Another portion of the reflected and scattered illumination light returns to the TTL probe 210 .
  • the objective lens 223 has an entrance pupil diameter D′ that must be properly filled by the radiation beam 211 emanating from the laser in the TTL probe system 210 for optimum resolution and accuracy of measurement.
  • the probe 210 emits and collects radiation 211 of sensor radiation diameter d′ that is not properly sized for the entrance pupil diameter D′.
  • the entrance objective lens pupil for the light emanating from the TTL probe becomes the exit pupil for the return beam of radiation reflected and scattered from the object 224 .
  • the return beam is conveyed through what “to it” is the objective lens exit pupil for detection in the laser range sensor.
  • the first lens 252 can be a diverging lens, defined as a negative focal length lens, that can expand the TTL system radiation 211 to match a larger objective lens 223 , such as that seen in FIG. 2 .
  • the first lens 252 can be a converging lens, defined as a positive focal length lens
  • the second, resolving lens 253 can be a diverging lens, defined as a negative focal length lens, thus contracting the TTL radiation to match a smaller objective lens entrance pupil diameter.
  • embodiments can employ a Keplerian type beam expander or contactor, as seen, for example, in FIGS. 5 and 6 .
  • two converging lenses 252 ′, 253 ′ are employed with an intermediate focus therebetween. While the Keplerian arrangement eliminates the need for diverging lenses in the adapter optics 251 , the intermediate focus usually undesirably lengthens the optics. Thus, a Galileo arrangement as shown in FIGS. 3 and 4 should be used when shorter or more compact optics are desired. It should be noted that embodiments are fully functional with non collimating variations of TTL laser range sensors as shown, for example, in FIG. 7 .
  • mirrors can be employed to create a folded adapter 850 as seen, for example, in FIGS. 8 and 9 .
  • the first, lens 852 sends radiation to a first mirror 854 , which directs radiation to a second mirror 855 , which sends the radiation through the second, resolving lens 853 and out of the adapter 850 .
  • the volume and length of the adapter can be reduced.
  • the folded adapter 850 can be used to allow a more compact arrangement of the TTL sensor system 210 since the adapter 850 can effectively bend the radiation 211 of the TTL system 210 at a right angle, as seen in FIG. 9 .
  • More or fewer mirrors can be employed to alter the size of the adapter and the angle between entry and exit of the radiation as desired or appropriate for a given TTL sensor system and metrology hardware.
  • embodiments can include an adjustable adapter 1050 with an adjustable optics system 1051 , which is preferably an afocal zoom system, a very simple example of which is shown in FIG. 10 .
  • an adjustable system 1051 can expand or contract a collimated beam using first and second positive lenses 1052 , 1053 , but includes at least one extra lens 1054 between the first and second lenses 1052 , 1053 .
  • the simple example of FIG. 10 includes a single moving doublet lens
  • the at least one extra lens 1054 can be a single central lens, such as a doublet diverging lens, or a group of lenses. More than one lens could be used to increase the expansion or contraction ratio and/or balance monochromatic and/or chromatic aberrations.
  • An actuator 1055 is arranged to move the movable elements of the at least one extra lens 1054 , enabling movement of the at least one extra lens 1054 along the optical path of the adapter, as indicated by the z axis in FIG. 10 .
  • the actuator 1055 can be manual or powered, mechanical or electromechanical.
  • the actuator could be a slide system, a rack and pinion system, a rotated cam system, or another suitable system to change the position of the moving elements of the at least one extra lens 1054 .
  • Radiation 211 thus enters the adapter 1050 and optics 1051 and is focused by the first lens 1052 , enters the at least one extra lens 1054 , which diverges the radiation before it enters and passes through the second lens 1053 .
  • the second lens 1053 resolve the radiation into the desired size before it exits the optics 1051 and adapter 1050 .
  • a negative or positive lens, respectively, of the proper focal length can be added after the afocal zoom lens to modify the output of the afocal zoom lens.
  • the exemplary system of FIG. 11 includes a divergent lens 1157 that diverges the radiation exiting the second lens 1153 .
  • the positive lens 1156 could be replaced with a negative lens to condition converging radiation.
  • the negative lens 1157 could be replaced with a positive lens to condition the exit beam from the second lens 1153 into a converging beam.
  • the adjustable optics system 1051 can be folded in a fashion similar to the example shown in FIG. 8 , but it will take up more volume than the system of FIG. 8 .
  • Embodiments thus comprise a method of using a TTL probe having an original exit pupil size with an optical system employing an objective requiring a different, desired entrance pupil size as entered from the laser range sensor, the TTL probe emitting, and receiving, radiation through the original diameter of the exit pupil.
  • the method as shown schematically in FIG. 12 , can comprise providing a first lens that changes the original diameter of the radiation transmitted by the TTL probe (block 1210 ) and/or providing a second lens that resolves the radiation with a desired diameter substantially equal to a desired objective lens entrance pupil diameter (block 1220 ). Either or both of these can be employed.
  • providing at least one conditioning lens prior to the entrance of or after the exit of the adapter (block 1230 ) can be included in the method before block 1210 , before block 1220 , or on its own.
  • providing a first lens (block 1210 ) can additionally comprise providing at least one mirror (block 1211 ), providing at least one extra lens (block 1212 ), and/or including at least one movable element (block 1213 ). Again, any, any combination, or all of these can be included.
  • providing at least one mirror (block 1211 ) preferably includes providing two mirrors (block 1214 ).
  • Providing a first lens can, for example, include providing a diverging lens, and providing a second lens can, for example, include providing a converging lens, the adapter thus expanding the radiation as seen in FIGS. 3 and 7 .
  • providing a first lens can include providing a converging lens and providing a second lens can include providing a diverging lens, the adapter thus contracting the radiation as seen in FIG. 4 .
  • providing a first lens can include providing a converging lens and providing a second lens can include providing a converging lens beyond an intermediate focus between the first and second lenses as seen, for example, in FIGS. 5 and 6 .
  • Providing at least one extra lens between the first and second lenses preferably includes at least one movable element to enable adjustment of the output of the adapter, as seen in FIGS. 10 and 11 .
  • An actuator can be provided for the at least one movable element.
  • Providing a first conditioning lens can include placing the first conditioning lens between an entrance of the adapter and the at least one extra lens that receives non-collimated radiation and alters the radiation for the at least one extra lens.
  • providing a first or second conditioning lens can include placing the conditioning lens between the at least one extra lens and the exit of the adapter that receives radiation from the at least one extra lens and alters the radiation for exit from the adapter. Both a first and a second conditioning lens are shown as an example in FIG. 11 .

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Multimedia (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
US11/741,129 2006-05-02 2007-04-27 Laser range sensor system optics adapter and method Active 2028-06-21 US7859649B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US11/741,129 US7859649B2 (en) 2006-05-02 2007-04-27 Laser range sensor system optics adapter and method
PCT/US2007/067644 WO2007130866A2 (fr) 2006-05-02 2007-04-27 Adaptateur a elements optiques pour systeme detecteur par telemetrie a laser et procede
EP07761467A EP1934554A4 (fr) 2006-05-02 2007-04-27 Adaptateur a elements optiques pour systeme detecteur par telemetrie a laser et procede
JP2009509973A JP2009535645A (ja) 2006-05-02 2007-04-27 レーザーレンジセンサシステムの光学アダプタおよび方法

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US74626006P 2006-05-02 2006-05-02
US11/741,129 US7859649B2 (en) 2006-05-02 2007-04-27 Laser range sensor system optics adapter and method

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US7859649B2 true US7859649B2 (en) 2010-12-28

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EP (1) EP1934554A4 (fr)
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8072581B1 (en) * 2007-01-19 2011-12-06 Rockwell Collins, Inc. Laser range finding system using variable field of illumination flash lidar
US8248591B2 (en) 2010-11-18 2012-08-21 Quality Vision International, Inc. Through-the-lens illuminator for optical comparator

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US7791731B2 (en) * 2007-12-18 2010-09-07 Quality Vision International, Inc. Partial coherence interferometer with measurement ambiguity resolution
NL2004483A (nl) * 2009-05-26 2010-11-30 Asml Holding Nv Pulse stretcher with reduced energy density on optical components.
CN102278943B (zh) * 2011-05-06 2012-10-10 华东师范大学 非接触式数字微镜器件微镜片一致性检测仪
JP7094683B2 (ja) * 2017-10-06 2022-07-04 住友電気工業株式会社 光受信モジュール
KR102103825B1 (ko) * 2019-05-21 2020-04-24 한화시스템 주식회사 개인전투체계용 소형 피아식별 장치
KR102103826B1 (ko) * 2019-05-22 2020-04-24 한화시스템 주식회사 개인전투체계용 소형 피아식별 장치 구동 방법
KR102103827B1 (ko) * 2019-06-28 2020-04-24 한화시스템 주식회사 개인전투체계용 피아식별 장치
KR102103828B1 (ko) * 2019-06-28 2020-04-24 한화시스템 주식회사 개인전투체계용 피아식별 장치의 구동 방법
CN111708045B (zh) * 2020-06-15 2023-06-02 湖北三江航天万峰科技发展有限公司 一种激光测角光学镜头及光学接收系统
CN114442293B (zh) * 2021-12-29 2023-09-12 河南中光学集团有限公司 一种激光照明扩束变焦光学系统

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8072581B1 (en) * 2007-01-19 2011-12-06 Rockwell Collins, Inc. Laser range finding system using variable field of illumination flash lidar
US8248591B2 (en) 2010-11-18 2012-08-21 Quality Vision International, Inc. Through-the-lens illuminator for optical comparator

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US20070258709A1 (en) 2007-11-08
WO2007130866A3 (fr) 2008-04-24
EP1934554A2 (fr) 2008-06-25
JP2009535645A (ja) 2009-10-01
EP1934554A4 (fr) 2010-07-14
WO2007130866A2 (fr) 2007-11-15

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