US7446439B2 - Linear motor armature and linear motor using the same - Google Patents

Linear motor armature and linear motor using the same Download PDF

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Publication number
US7446439B2
US7446439B2 US10/557,411 US55741104A US7446439B2 US 7446439 B2 US7446439 B2 US 7446439B2 US 55741104 A US55741104 A US 55741104A US 7446439 B2 US7446439 B2 US 7446439B2
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US
United States
Prior art keywords
armature
linear motor
frame
board
brace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US10/557,411
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English (en)
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US20070040453A1 (en
Inventor
Teruhiko Aoki
JianPing Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
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Yaskawa Electric Corp
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Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Assigned to KABUSHIKI KAISHA YASKAWA DENKI reassignment KABUSHIKI KAISHA YASKAWA DENKI ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AOKI, TERUHIKO, YU, JIANPING
Publication of US20070040453A1 publication Critical patent/US20070040453A1/en
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Publication of US7446439B2 publication Critical patent/US7446439B2/en
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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2706—Inner rotors
    • H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
    • H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H02K15/03—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies having permanent magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/14—Casings; Enclosures; Supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/14—Arrangements for cooling or ventilating wherein gaseous cooling medium circulates between the machine casing and a surrounding mantle
    • H02K9/16—Arrangements for cooling or ventilating wherein gaseous cooling medium circulates between the machine casing and a surrounding mantle wherein the cooling medium circulates through ducts or tubes within the casing

Definitions

  • the present invention relates to a linear motor armature to be used, for example, in a semiconductor exposure device, a liquid-crystal exposure device or the like, as demanded to have a low temperature rise, and a linear motor using the armature.
  • a higher speed and a higher output have been demanded year after year by a high-precision positioning device such as the semiconductor exposure device or the liquid-crystal exposure device.
  • a high-precision positioning device such as the semiconductor exposure device or the liquid-crystal exposure device.
  • a low temperature rise is demanded by the linear motor or the component of that device.
  • This linear motor is constructed, for example, as shown in FIG. 4 . The following description is made by taking up a voice coil type for driving a stage device.
  • FIG. 4 is a perspective view showing the entire appearance common to the linear motors of the prior art.
  • Numeral 1 designates an armature
  • numeral 2 a can can
  • numeral 3 a frame
  • numeral 4 a coolant outlet
  • numeral 5 permanent magnets
  • numeral 6 a yoke numeral 7 a base
  • numeral 8 a field system
  • numeral 10 a coolant inlet.
  • FIG. 5 is an exploded perspective view of an armature of the first prior art.
  • the linear motor is composed of the armature 1 as a moving element and the field system 8 as a stator. At the same time, the armature 1 moves the moving element in the directions, as indicated by arrows, while being supported by the not-shown linear guide, air slider or slide guide.
  • the field system 8 is constructed to include: the yoke 6 of a flat plate shape; the permanent magnets 5 arranged so adjacent to each other as to have the different polarities alternately; and the base 7 for mounting the yoke 6 .
  • the permanent magnets 5 are fixed by adhering them to the yoke 6 and are arranged through a gap on the two sides of the later-described armature 1 .
  • the armature 1 is constructed to include: the armature coil 11 shaped by winding a copper wire concentratedly; the board 12 for arranging and fixing the armature coil 11 in position; the frame 3 for fixing the four corners of the board 12 with the screws 13 ; and the can 2 for covering and sealing the outer side of the armature coil 11 , as fixed on the two side faces of the board 12 , in the frame 3 .
  • the can 2 is basically made of a non-magnetic material such as a sheet of stainless steel, a resin or ceramics.
  • the frame 3 is cast of stainless steel and is holed at its central portion to have a hole portion 3 A for housing the armature coil 11 and the board 12 .
  • the portion (i.e., the bottom portion), as opposed to the can 2 , of the hole portion 3 A is given a thickness corresponding to that of the can 2 .
  • the frame 3 is provided, at one end and at the other end in the longitudinal direction, with the coolant inlet 10 and the coolant outlet 4 , respectively, for passing a coolant therethrough.
  • the can 2 is jointed by welding its joint face to the frame 3 so that the can 2 and the frame 3 construct a sealed body.
  • the board 2 is frequently made of stainless steel because it is demanded to have its own strength.
  • FIG. 6 is a front elevation of the armature of FIG. 5
  • FIG. 7 is a sectional view along line A-A of FIG. 6 .
  • numeral 14 designates a coolant passage.
  • the motor is provided therein with the coolant passage 14 .
  • the coolant is caused to flow through the coolant passage 14 between the armature coil 11 and the can 2 by feeding it from the coolant inlet 10 and discharging it from the coolant outlet 4 .
  • FIG. 8 is an exploded perspective view of an armature according to the second prior art
  • FIG. 9 is a front elevation of the armature shown in FIG. 8
  • FIG. 10 is a sectional view along line A-A of FIG. 9 .
  • the description of the second prior art is made only on components different from those of the first prior art while omitting the common components.
  • Patent Publication 1
  • Patent Publication 2
  • the present invention has been achieved to solve the aforementioned problems and has an object to provide a linear motor armature which can simplify the motor structure and reduce the size while reducing the deformations of the board, the can and the frame, and a linear motor using that armature.
  • a linear motor armature including: an armature coil fixed on the two side faces of a board, and a sealed body including a can and a frame and disposed to cover the armature coil, to feed a coolant around the armature coil to cool the same, wherein a brace is so disposed between the can and the frame opposed to each other as to reduce the deformations of the can and the frame caused by the pressure of the coolant, and the brace is jointed by welding.
  • At least one groove is formed in the board perpendicularly of the longitudinal direction.
  • the invention of claim 3 relates to a linear motor including: the linear motor armature as set forth in claim 1 or 2 , and a field system arranged to confront the armature through a gap, wherein the field system includes: a yoke and a plurality of permanent magnets so arranged adjacent to each other on the yoke as to have different polarities alternately, and one of the armature and the field system is a relatively movable moving element, and the other is a stator.
  • FIG. 1 is a front elevation of an armature of a linear motor and shows a first embodiment of the invention.
  • FIG. 2 is a sectional view along lien B-B of FIG. 1 .
  • the description of the invention is made only on components different from those of the prior art while omitting the common components.
  • an armature coil 11 is adhered and fixed on a board 12 and is assembled with a frame 3 , in that a brace 9 is then arranged between a can 2 and the frame 3 opposed to each other, and in that the can 2 and the brace 9 , and the frame 3 and the brace 9 are jointed by welding them individually.
  • a brace 9 is then arranged between a can 2 and the frame 3 opposed to each other, and in that the can 2 and the brace 9 , and the frame 3 and the brace 9 are jointed by welding them individually.
  • the brace 9 is disposed between the can 2 and the frame 3 opposed to each other, and the brace 9 is jointed by welding it, so as to reduce the deformations, as might otherwise be caused by the pressure of the coolant, of the can 2 and the frame 3 .
  • the can 2 and the frame 3 are not reduced due to the deformations but kept in the reductions.
  • the O-rings 17 and the counter-sunk screw 16 used in the prior art can be dispensed with to reduce the parts number and to simplify the assembly.
  • the thickness, as required for sinking the head of the counter-sunk screw 16 in the prior art, of the can 2 can be eliminated to make the can 2 thinner.
  • the fastening by the counter-sunk screw can be eliminated to thin the brace 9 thereby to realize the size reduction and the high thrust of the motor.
  • FIG. 3 is a front elevation of a board to be used in an armature of a linear motor and shows a second embodiment of the invention.
  • two grooves 2 A are formed in the board 12 perpendicularly of the longitudinal direction.
  • the grooves 12 A are formed in the board 12 perpendicularly of the longitudinal direction.
  • the thermal stress if occurs in the board 12 , can be relaxed by the extension/contraction of the portions of the grooves 12 A thereby to reduce the deformation.
  • the present invention is useful in the field of providing a canned linear motor demanded to have a low temperature rise, when it is applied to the linear motor armature to be used, for example, in the semiconductor exposure device, the liquid-crystal exposure device or the like, and to the linear motor using the armature.
  • FIG. 1 A front elevation of an armature of a linear motor and shows a first embodiment of the invention.
  • FIG. 2 A sectional view along line B-B of FIG. 1 .
  • FIG. 3 A front elevation of a board to be used in an armature of a linear motor and shows a second embodiment of the invention.
  • FIG. 4 A perspective view showing the entire appearance common to the linear motors of the prior art.
  • FIG. 5 An exploded perspective view of an armature a first prior art.
  • FIG. 6 A front elevation of the armature of FIG. 5 .
  • FIG. 7 A sectional view along line A-A of FIG. 6 .
  • FIG. 8 An exploded perspective view of an armature according to a second prior art.
  • FIG. 9 A front elevation of the armature shown in FIG. 8 .
  • FIG. 10 A sectional view along line A-A of FIG. 9 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Motor Or Generator Frames (AREA)
US10/557,411 2003-05-20 2004-05-13 Linear motor armature and linear motor using the same Expired - Fee Related US7446439B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003141389A JP4415567B2 (ja) 2003-05-20 2003-05-20 リニアモータ電機子およびこれを用いたリニアモータ
JP2003-141389 2003-05-20
PCT/JP2004/006446 WO2004105219A1 (ja) 2003-05-20 2004-05-13 リニアモータ電機子およびこれを用いたリニアモータ

Publications (2)

Publication Number Publication Date
US20070040453A1 US20070040453A1 (en) 2007-02-22
US7446439B2 true US7446439B2 (en) 2008-11-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
US10/557,411 Expired - Fee Related US7446439B2 (en) 2003-05-20 2004-05-13 Linear motor armature and linear motor using the same

Country Status (5)

Country Link
US (1) US7446439B2 (ja)
JP (1) JP4415567B2 (ja)
KR (1) KR101001799B1 (ja)
TW (1) TWI277271B (ja)
WO (1) WO2004105219A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080129128A1 (en) * 2005-01-18 2008-06-05 Koninklijke Philips Electronics, N.V. Coil Assembly for Use with an Electric Motor
US20080218004A1 (en) * 2007-03-06 2008-09-11 Jtekt Corporation Moving-magnet type linear motor

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007159286A (ja) * 2005-12-06 2007-06-21 Yaskawa Electric Corp リニアモータ
KR100870738B1 (ko) * 2007-01-25 2008-11-26 태창엔이티 주식회사 에이에프피엠 코어리스형 멀티 발전기 및 모터
JP4819744B2 (ja) * 2007-05-08 2011-11-24 住友重機械工業株式会社 リニアモータ冷却構造
JP5481064B2 (ja) * 2008-12-25 2014-04-23 Ｔｈｋ株式会社 リニアモータ
JP5347596B2 (ja) * 2009-03-12 2013-11-20 株式会社安川電機 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP2020517939A (ja) 2017-04-19 2020-06-18 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 測定装置カウンターバランス
US10646883B2 (en) 2017-04-19 2020-05-12 Renishaw Plc Contamination trap
US11060836B2 (en) 2017-04-19 2021-07-13 Renishaw Plc Bearing arrangement
EP3393023A1 (en) * 2017-04-19 2018-10-24 Renishaw PLC Linear motor mounts
EP3392610B1 (en) 2017-04-19 2022-02-23 Renishaw PLC Bearing mount

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5300846A (en) * 1992-10-08 1994-04-05 Otis Elevator Company Lamination support for a linear motor
JP2000175434A (ja) 1998-12-04 2000-06-23 Nikon Corp 平面モータ装置及び露光装置
JP2001025227A (ja) 1999-07-08 2001-01-26 Canon Inc リニアモータ並びにこれを有するステージ装置および露光装置
JP2001231246A (ja) 2000-02-18 2001-08-24 Yaskawa Electric Corp キャンド・リニアモータ
JP2002027730A (ja) 2001-04-09 2002-01-25 Yaskawa Electric Corp キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP2002272087A (ja) 2001-03-15 2002-09-20 Nikon Corp 電機子ユニット、モータ、ステージ装置、露光装置、および、デバイスの製造方法
US20080157607A1 (en) * 2006-11-29 2008-07-03 Hubert Scheich Linear unit

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5300846A (en) * 1992-10-08 1994-04-05 Otis Elevator Company Lamination support for a linear motor
JP2000175434A (ja) 1998-12-04 2000-06-23 Nikon Corp 平面モータ装置及び露光装置
JP2001025227A (ja) 1999-07-08 2001-01-26 Canon Inc リニアモータ並びにこれを有するステージ装置および露光装置
JP2001231246A (ja) 2000-02-18 2001-08-24 Yaskawa Electric Corp キャンド・リニアモータ
JP2002272087A (ja) 2001-03-15 2002-09-20 Nikon Corp 電機子ユニット、モータ、ステージ装置、露光装置、および、デバイスの製造方法
JP2002027730A (ja) 2001-04-09 2002-01-25 Yaskawa Electric Corp キャンド・リニアモータ電機子およびキャンド・リニアモータ
US20080157607A1 (en) * 2006-11-29 2008-07-03 Hubert Scheich Linear unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080129128A1 (en) * 2005-01-18 2008-06-05 Koninklijke Philips Electronics, N.V. Coil Assembly for Use with an Electric Motor
US20080218004A1 (en) * 2007-03-06 2008-09-11 Jtekt Corporation Moving-magnet type linear motor
US7732951B2 (en) * 2007-03-06 2010-06-08 Jtekt Corporation Moving-magnet type linear motor

Also Published As

Publication number Publication date
KR20060024778A (ko) 2006-03-17
TWI277271B (en) 2007-03-21
WO2004105219A1 (ja) 2004-12-02
JP2004350339A (ja) 2004-12-09
US20070040453A1 (en) 2007-02-22
KR101001799B1 (ko) 2010-12-15
TW200505133A (en) 2005-02-01
JP4415567B2 (ja) 2010-02-17

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