US6816636B2 - Tunable optical filter - Google Patents

Tunable optical filter Download PDF

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Publication number
US6816636B2
US6816636B2 US09/953,506 US95350601A US6816636B2 US 6816636 B2 US6816636 B2 US 6816636B2 US 95350601 A US95350601 A US 95350601A US 6816636 B2 US6816636 B2 US 6816636B2
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Prior art keywords
tunable filter
layer
filter according
wavelength
tunable
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US09/953,506
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US20030048970A1 (en
Inventor
Barrett E. Cole
Subash Krishnankutty
Robert D. Horning
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Honeywell International Inc
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Honeywell International Inc
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Assigned to BAY VIEW FINANCIAL CORPORATION reassignment BAY VIEW FINANCIAL CORPORATION SECURITY AGREEMENT Assignors: TECHNOLOGY CREATIONS, INC.
Priority to EP02761646A priority patent/EP1428053A2/de
Priority to JP2003527471A priority patent/JP2005502906A/ja
Priority to AU2002326893A priority patent/AU2002326893A1/en
Priority to PCT/US2002/029137 priority patent/WO2003023463A2/en
Publication of US20030048970A1 publication Critical patent/US20030048970A1/en
Assigned to TECHNOLOGY CREATIONS, INC. reassignment TECHNOLOGY CREATIONS, INC. RELEASE OF SECURITY INTEREST Assignors: STANDARD FEDERAL BANK, NATIONAL ASSOCIATION SUCCESSOR IN INTEREST TO BAY VIEW FINANCIAL CORPORATION
Priority to US10/953,174 priority patent/US7145165B2/en
Publication of US6816636B2 publication Critical patent/US6816636B2/en
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Priority to US11/633,872 priority patent/US20070133001A1/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/05—Function characteristic wavelength dependent
    • G02F2203/055—Function characteristic wavelength dependent wavelength filtering

Definitions

  • the present invention generally relates to optical filters, and more particularly to wavelength-selective optical filters.
  • wavelength-division multiplexing WDM
  • WDD wavelength-division demultiplexing
  • a single optical fiber can be configured to simultaneously transmit several optical data streams, e.g., ten optical data streams, that each might not exceed, say, 10 Gb/s, but that together represent an aggregate optical fiber transmission bandwidth of more than, say, 100 Gb/s.
  • the spacing of simultaneously transmitted optical data streams, or optical data “channels,” be closely packed, to accommodate a larger number of channels.
  • the difference in wavelength between two adjacent channels is preferably minimized.
  • wavelength-selective WDM and WDD systems There are a number of optical devices presently available for constructing wavelength-selective WDM and WDD systems. Some of these devices include, for example, thin film filters that reflects a very narrow band of wavelengths. Such filters are often constructed from several hundred layers of stacked narrow band filters, and are designed to reflect a single narrow band of wavelengths. Arrayed waveguide gratings are also available. A limitation of many of these devices is that they are not wavelength tunable. That is, the operative wavelength cannot be dynamically changed during operation in order to select a different optical data channel during use. This can have negative implications for many wavelength-selective WDM, WDD and routing applications.
  • one such device includes a substrate with a diffraction grating.
  • the diffraction grating is provided in the path of an incoming light beam.
  • the diffraction grating is rotated, which causes the incoming light beam to strike the diffraction grating at a different incident angle. The change in incident angle alters the selected wavelength of the grating.
  • a Fabry-Perot cavity is provided with two mirrors separated by an intervening space.
  • the mirrors are moved either toward or away from each other to vary the intervening space, which changes the selected wavelength of the Fabry-Perot cavity.
  • a limitation of many of these devices is that the required physical movement tends to limit the resolution that can be achieved, and may reduce the reliability and/or stability of such devices.
  • a Fabry-Perot cavity structure that has a top mirror spaced from a bottom mirror, with one or more intervening layers therebetween.
  • the one or more intervening layer preferably has a refractive index that changes with temperature.
  • the one or more intervening layer is preferably heated by passing a current through the intervening layer, or by passing a current through a separate resistive layer that is thermally coupled to the one or more intervening layer. It has been found that such a filter can provide a high degree of wavelength selectivity in a robust and stable manner.
  • the one or more intervening layer is mechanically suspended in a cavity by a patterned support layer.
  • the patterned support layer preferably has a low coefficient of thermal conductivity, and may be patterned to have a relatively small lateral cross sectional area. Both of these reduce the amount of heat lost laterally through the device.
  • the device may be mounted in a vacuum package, if desired.
  • a controller is preferably provided for controlling the current that is applied to heat the one or more intervening layer.
  • the controller may be an open loop controller, which provides a specific amount of current or power to select a desired wavelength.
  • the controller may be a closed loop controller, which uses a temperature sensor to provide feedback to the controller so that a desired temperature can be maintained at the layer of intervening material.
  • a substrate is first provided.
  • a heater film is then provided adjacent the substrate, such that the heater film is thermally coupled to at least a portion of a predefined filter region of the substrate.
  • a support film is also provided, such that the support film is mechanically coupled to the filter region and to a support region of the substrate.
  • the support region preferably is spaced from and encircles the filter region, but this is not necessary.
  • An upper multi-layer mirror is preferably provided adjacent at least a portion of the filter region.
  • the substrate around the periphery of the filter region is selectively removed, leaving a space between the support region of the substrate and the filter region of the substrate.
  • a lower multi-layer mirror may then be provided below the filter region.
  • a Silicon-On-Insulator (SOI) substrate is used.
  • the SOI substrate has a lower silicon layer, an intermediate insulating layer, and an upper silicon layer.
  • the filter region is preferably formed in the upper silicon layer, and the lower silicon layer is removed below the filter region.
  • the intermediate insulating layer can be used as an etch stop when removing the lower silicon layer.
  • the intermediate insulating layer can also be removed, or left in position to provide additional support to the filter region if desired.
  • the thermal mass of the filter region may be minimized. This reduces the power required to heat the layer of intervening material in the filter region.
  • a lower multi-layer mirror can be provided adjacent the upper silicon layer in the filter region. In the above illustrative embodiments, the order of the steps may be changed without deviating from the scope of the present invention.
  • the tunable filter of the present invention may have a wide range of applications, including telecommunications applications such as WDM, WDD, and routing applications.
  • the tunable filter of the present invention may be used in a signal drop application where a particular wavelength signal or “channel” is dropped from a multiple channel data stream.
  • a multiple channel data stream is provided to the tunable filter.
  • the tunable filter is heated such that the tunable filter passes a desired drop signal or channel to a first collector location, and reflects the remaining signals or channels to a second collector location.
  • a second tunable filter may be provided at the second collector location.
  • the second tunable filter may be heated such that the tunable filter passes another desired drop signal or channel to a third collector location.
  • the second tunable filter may reflect the remaining signals or channels to a fourth collector location. This may continue, dropping as many of the signals or channels from the multiple channel data stream as desired.
  • the multiple channel data stream may be provided to a first side of the tunable filter.
  • the signal or channel to be added is provided to the opposite side of the tunable filter.
  • the tunable filter is heated such that the tunable filter passes the signal or channel to be added to a first collector location.
  • the tunable filter also reflects the multiple channel data stream to the first collector location.
  • a second tunable filter may be provided at the first collector location.
  • the signals or channels that are present at the first collector location are provided to a first side of the second tunable filter.
  • Another signal or channel to be added is provided to the opposite side of the second tunable filter.
  • the second tunable filter is heated such that the tunable filter passes the second signal or channel to be added to a second collector location.
  • the second tunable filter also preferably reflects the signals provided by the first tunable filter to the second collector location. This may continue to add as many signals or channels to the multiple channel data stream as desired.
  • the tunable filter of the present invention may be positioned between the laser and a detector.
  • the detector preferably is capable of detecting a relatively wide range of wavelengths, while the tunable filter only passes a relatively narrow band of wavelengths.
  • the tunable filter is heated until the filter passes the current operating wavelength of the laser to the detector.
  • a controller is notified. By noting the heat applied to the tunable filter, the controller may determine the current operating wavelength of the laser.
  • Such a system may be used to, for example, control the wavelength of a laser. For example, if the current operating wavelength of the laser, as determined by the controller, is not within a predefined range of wavelengths, the controller may adjust the power that is applied to the laser to change the emission wavelength of the laser until it falls within the predefined range of wavelengths. It is contemplated that the laser emission may be directly applied to the tunable filter. Alternatively, only a portion of the laser emission may be applied to the tunable filter by using a beam splitter or the like.
  • FIG. 1 is a plan view of an illustrative tunable optical filter in accordance with the present invention
  • FIG. 2 is an illustrative cross-sectional side view of the tunable optical filter of FIG. 1, taken along line 2 — 2 ;
  • FIGS. 3A-3H are cross-sectional side views showing an illustrative method for forming the tunable optical filter of FIG. 1 and FIG. 2;
  • FIGS. 4A-4F are cross-sectional side views showing another illustrative method for forming a tunable optical filter in accordance with the present invention.
  • FIG. 5 is a schematic diagram showing the tunable optical filter of FIG. 1 positioned inside of a vacuum package
  • FIG. 6 is a graph showing the reflectance of the tunable filter of FIGS. 1-2 versus wavelength for three different temperatures of the filter region;
  • FIG. 7 is a schematic diagram showing an illustrative method for using a tunable filter of the present invention to add a selected wavelength signal or “channel” to a multiple channel data stream;
  • FIG. 8 is a schematic diagram showing an illustrative method for using a tunable filter of the present invention to drop a selected wavelength signal or “channel” from a multiple channel data stream;
  • FIG. 9 is a schematic diagram showing an illustrative method for using several tunable filters of the present invention to drop several selected signals or “channels” from a multiple channel data stream;
  • FIG. 10 is a schematic diagram showing an illustrative method for using the tunable filter of the present invention to drop a selected wavelength signal or “channel” from a multiple channel data stream, modify the dropped signal or channel, and add the modified signal or channel back into the multiple channel data stream;
  • FIG. 11 is a schematic diagram showing an illustrative method for monitoring the emission wavelength of a light source such as a laser;
  • FIG. 12 is a schematic diagram showing another illustrative method for monitoring the emission wavelength of a light source such as a laser.
  • FIG. 13 is a schematic diagram showing yet another illustrative method for monitoring the emission wavelength of a light source such as a laser.
  • FIG. 1 is a plan view of an illustrative tunable optical filter 10 in accordance with the present invention.
  • the illustrative tunable optical filter includes a filter region 12 , a support body 14 , and one or more support legs 16 a - 16 d .
  • the support legs 16 a - 16 d preferably suspend the filter region 12 away from the support region 14 .
  • the filter region 12 is preferably spaced from the support body 14 by air gaps 18 a - 18 d , which help thermally isolated the filter region from the support body 14 .
  • the support legs 16 a - 16 d are preferably formed from a material that has a low coefficient of thermal conductivity, such as Si 3 N 4 , Polyimide, or any other suitable material. Silicon and/or polycrystalline silicon are other example materials that can readily be used.
  • the support legs 16 a - 16 d may have a relatively small cross-sectional area, to even further reduce the thermal conduction between the filter region 12 and the support body 14 .
  • the filter region 12 is preferably configured to pass a selected wavelength or band of wavelengths, and reflect all other wavelengths of interest. This may be accomplished by providing a Fabry-Perot cavity structure that has at least one layer with a refractive index that changes with temperature.
  • the Fabry-Perot cavity structure has a first (e.g. top) mirror 20 spaced from a second (e.g. bottom) mirror 22 (see FIG. 2 ).
  • the refractive index of the at least one layer may change, which changes the wavelength selected by the Fabry-Perot cavity. This provides the wavelength tunibility or selectivity for the illustrative optical filter of FIG. 1 .
  • the Fabry-Perot cavity structure can be heated in any suitable manner.
  • One illustrative method is to pass a current through a resistive layer that is thermally coupled to the Fabry-Perot cavity structure.
  • resistive layer 24 is provided under the first (e.g. top) mirror 20 in the filter region 12 .
  • the resistive layer 24 extends across support legs 16 b and 16 d , although this is not necessary.
  • the resistive layer 24 may have a refractive index that changes with temperature, or alternatively, may be thermally coupled to a layer that has a refractive index that changes with temperature.
  • a controller 30 is preferably provided for controlling the current or power provided to the resistive layer 24 via lines 36 and 38 .
  • the controller 30 may be an open loop controller, which provides a specific amount of current or power to the resistive layer 24 to produce a desired temperature. The desired temperature is calibrated to select a desired wavelength.
  • the controller 30 may be a closed loop controller, which may use a temperature sensor 40 to provide feedback to the controller 30 so that a desired temperature can be selected and maintained at the resistive layer 24 . The selected temperature is calibrated to select a desired wavelength.
  • the resistive layer 24 may be made from a material that has a resistance with a relatively high temperature coefficient.
  • One illustrative material may be polycrystalline silicon.
  • the temperature of the resistive layer can be determined by monitoring the resistance of the resistor layer 24 .
  • a separate layer having a resistance with a relatively high temperature coefficient may be provided in thermal communication with the resistive layer 24 . Then, the temperature of the resistive layer 24 can be determined by monitoring the resistance of this other layer.
  • Such a device may be included in a vacuum package to reduce the thermal loss due to convection and conduction heating, which may reduce the power consumed by the device.
  • FIG. 2 is an illustrative cross-sectional side view of the tunable optical filter of FIG. 1, taken along line 2 — 2 .
  • the optional temperature sensor 40 is not shown for clarity.
  • the tunable optical filter 10 includes a filter region generally shown at 12 .
  • the filter region includes a Fabry-Perot cavity structure with a top mirror 20 spaced from a bottom mirror 22 .
  • the top mirror 20 includes two or more mirror layers, such as mirror layers 50 and 52 , to collectively form a reflector.
  • the two or more mirror layers 50 and 52 may be any type of mirror layers that provide reflectivity at or near a desired wavelength spectrum.
  • the mirror layers 50 and 52 are Silicon and Silicon Oxide, respectively, but may be any high or low index films, preferably with low infrared absorption. Other material systems may also be used, as desired. While only two mirror layers are shown in FIG. 2, more layers may be provided for increased wavelength discrimination.
  • the bottom mirror 22 may also include two or more mirror layers, such as mirror layers 54 and 56 , to collectively form a reflector.
  • the two or more mirror layers 54 and 56 may be any type of mirror layers that provide reflectivity at or near a desired wavelength spectrum.
  • the mirror layers 54 and 55 are Silicon and Silicon Oxide, respectively, but may be any high or low index films, preferably with low infrared absorption. Other material systems may also be used, as desired. While only two mirror layers are shown in FIG. 2, more layers may be provided for increased wavelength discrimination.
  • the top mirror 20 and the bottom mirror 22 preferably collectively form a Fabry-Perot cavity structure.
  • Intervening layer 60 preferably has a refractive index that changes with temperature.
  • layer 60 is silicon. By heating the silicon layer 60 , the refractive index of the silicon layer 60 changes. This changes the resonant wavelength of the Fabry-Perot cavity structure, causing the transmission wavelength of the filter region to change.
  • high wavelength resolution can be achieved, such as 0.2 nm, which is highly desirable in many applications including Dense-Wavelength-Division Multiplexing (DWDM) applications.
  • DWDM Dense-Wavelength-Division Multiplexing
  • the silicon layer 60 may be heated in any suitable manner.
  • the silicon layer 60 is heated via a resistive layer 24 , which is thermally coupled to the silicon layer 60 .
  • resistive layer 24 is provided between the top mirror 20 and the silicon layer 60 .
  • the resistive layer 24 is preferably Vanadium Oxide, Platinum or some other resistive material.
  • the resistive layer 24 is heated by passing current therethrough. The heat is transferred from the resistive layer 24 to the silicon layer 60 , which changes the resonant wavelength of the Fabry-Perot cavity structure as described above.
  • a current may be applied through the silicon layer 60 itself, if desired.
  • the silicon layer 60 may be suitable doped to provide the desired resistivity.
  • the filter region 12 is preferably thermally isolated from the support body 14 . In a preferred embodiment, this is accomplished by suspending the filter region 12 from the body region 14 using one or more support legs, such as support legs 16 a and 16 c .
  • the support legs 16 a - 16 d are preferably made from a material with a low coefficient of thermally conductivity, such as Silicon Nitride.
  • the support legs 16 a - 16 d may also be patterned to have a relatively small lateral cross sectional area, to further reduce the thermal conductivity between the filter region 12 and the support base 14 . It is contemplated that the entire device may be mounted in a vacuum package to further reduce the thermal loss due to convection and conduction heating, as shown in schematic form in FIG. 5 .
  • FIGS. 3A-3H are cross-sectional side views showing one illustrative method for forming a tunable optical filter of FIG. 1 and FIG. 2 .
  • a Silicon-On-Insulator (SOI) wafer is the starting point, as shown in FIG. 3 A.
  • the SOI wafer preferably has a lower silicon substrate layer 70 , an intermediate insulating layer 72 , and an upper silicon layer 74 .
  • the upper silicon layer 74 is preferably about 20 um thick.
  • a resistive film 24 is provided over the top of upper silicon layer 74 as shown, and subsequently patterned.
  • a support layer 76 is applied and patterned so as to not cover at least the center of the filter region 12 .
  • the support layer 76 is preferably patterned to form the support legs 16 a - 16 d of FIGS. 1-2.
  • alternating layers of Silicon 50 and Silicon Dioxide 52 are deposited and patterned over the resistive layer 24 in the filter region 12 , as shown.
  • the alternating layers of Silicon 50 and Silicon Dioxide 52 form the top multi-layer mirror 20 .
  • a protective layer 80 is provided over the top multi-layer mirror 20 , as shown in FIG. 3 E.
  • the filter region 12 is released by etching the wafer using a KOH, EDP or some other suitable selective etch.
  • This etch step removes the lower silicon substrate layer 70 up to the intermediate insulating layer 72 , leaving a cavity 82 in the SOI wafer.
  • the insulating layer 72 may act as an etch stop in some embodiments.
  • the etch may also remove the upper silicon layer 74 around the filter region 12 , as shown at 84 and 86 .
  • the remaining portion of the upper silicon layer 70 in the filter region 12 corresponds to the silicon layer 60 shown in FIG. 2 .
  • the silicon layer 60 overlaps the support layer 76 , and is bonded thereto along interface 90 .
  • the intermediate insulating layer 72 is removed using another etch step. In some embodiments, the intermediate insulating layer 72 is not removed to provide additional support between the support body 14 and the filter region 12 .
  • alternating layers of Silicon 54 and Silicon Dioxide 56 are deposited and patterned on the back side of the silicon layer 60 , as shown. These layers form the bottom multi-layer mirror 22 .
  • FIGS. 4A-4F show yet another illustrative method for making a tunable optical filter in accordance with the present invention.
  • a substrate 100 is provided.
  • a sacrificial layer 102 is then provided over the substrate 100 , as shown in FIG. 4 A.
  • the sacrificial layer 102 is patterned to define an eventual cavity.
  • support members 104 a and 104 b are formed.
  • a support layer 106 is applied and patterned, followed by a resistive layer 108 .
  • the support layer 106 is preferably patterned to form support legs, like support legs 16 a - 16 d of FIGS.
  • alternating layers of Silicon and Silicon Dioxide are deposited and patterned over the resistive layer 24 in the filter region 12 , as shown.
  • the alternating layers of Silicon and Silicon Dioxide 110 form a bottom multi-layer mirror.
  • a silicon layer 112 is provided over the alternating layers of Silicon and Silicon Dioxide 110 , and subsequently patterned. Finally, alternating layers of Silicon and Silicon Dioxide, generally shown at 114 , are deposited and patterned over the silicon layer 112 .
  • the alternating layers of Silicon and Silicon Dioxide 112 form a top multi-layer mirror.
  • the silicon layer 112 is heated indirectly from the resistive layer 108 through the alternating layers of Silicon and Silicon Dioxide 110 .
  • the sacrificial layer 102 is removed to release the structure. Finally, a hole may be cut through the substrate 100 , as shown by dotted lines 120 a and 120 b , if desired.
  • FIGS. 3A-3H and 4 A- 4 F show two illustrative methods for making a tunable optical filter in accordance with the present invention
  • numerous other methods are contemplated.
  • the filter region may be released by etching a cavity or pit beneath the filter region into a supporting substrate. This may be accomplished in any number of ways, including for example, using an anisotropic etch.
  • FIG. 6 is a graph showing the reflectance of the tunable filter of FIGS. 1-2 versus wavelength for three different temperatures of the filter region. The transmission, or one minus the reflectance, is shown along the right of the graph.
  • the intervening layer that is positioned between the top mirror and bottom mirror of the Fabry-Perot cavity structure has a refractive index that changes with temperature. By heating this layer, the refractive index changes, which changes the resonant wavelength of the Fabry-Perot cavity structure. In the illustrative embodiment, this causes the transmission wavelength of the filter region to change. As shown in FIG.
  • the tunable filter of the present invention has a wide range of applications, including, for example, telecommunications applications such as WDM, DWDM, WDD, and routing applications.
  • the tunable filter of the present invention may be used in a signal add application where a particular wavelength signal or “channel” is added to a multiple channel data stream.
  • FIG. 7 shows such an application.
  • a multiple channel data stream 126 is provided to a first side 128 of the tunable filter 130 .
  • the signal or channel to be added which is generally shown at 132 , is provided to the opposite side 134 of the tunable filter 130 .
  • the tunable filter 130 is heated such that the tunable filter passes the signal or channel 132 to be added to a first collector location 136 .
  • the tunable filter also reflects the multiple channel data stream 126 to the first collector location 136 , as shown at 138 .
  • a second tunable filter may be provided at the first collector location 136 .
  • the signals or channels that are present at the first collector location 136 which in the illustrative embodiment include the multiple channel data stream 126 and the signal or channel 132 , are provided to a first side of the second tunable filter.
  • Another signal or channel to be added may be provided to the opposite side of the second tunable filter, similar to that described above.
  • the second tunable filter is then heated such that the tunable filter passes the second signal or channel to be added to a second collector location.
  • the second tunable filter also preferably reflects the signals provided by the first tunable filter 130 to the second collector location. This may continue, adding as many signals or channels to the multiple channel data stream as desired.
  • FIG. 8 is a schematic diagram showing an illustrative method for using the tunable filter of the present invention to drop a selected wavelength signal or “channel” from a multiple channel data stream.
  • a multiple channel data stream 150 is provided to a tunable filter 152 .
  • the tunable filter 152 is heated such that the tunable filter 152 passes a desired drop signal or channel 154 to a first collector location 156 , and reflects the remaining signals or channels to a second collector location 158 .
  • a second tunable filter 160 may be provided at the second collector location 158 .
  • the second tunable filter 160 may be heated such that the tunable filter 160 passes another desired drop signal or channel 162 to a third collector location 164 .
  • the second tunable filter 160 may reflect the remaining signals or channels 166 to a fourth collector location 168 . This may continue, dropping as many of the signals or channels from the multiple channel data stream 150 as desired.
  • FIG. 10 shows another illustrative application for the tunable filter of the present invention.
  • a selected wavelength signal or “channel” is dropped from a multiple channel data stream, modified, and then added back into the multiple channel data stream.
  • the multiple channel data stream 150 is provided to a tunable filter 152 .
  • the tunable filter 152 is heated such that the tunable filter 152 passes a desired drop signal or channel 154 to a controller 170 , and reflects the remaining signals or channels to the second collector location 158 .
  • the controller 170 modifies the dropped signal or channel 154 , and provides a modified signal or channel 172 back to the tunable filter 152 as shown.
  • the controller 170 may, for example, amplify, delay or otherwise change the dropped signal or channel 154 to provide the modified signal or channel 172 .
  • the modified signal or channel 172 then travels through the tunable filter 152 and is received at the second collector location 158 .
  • a tunable filter 178 of the present invention may be positioned between a laser 180 and a detector 182 , as shown in FIG. 11 .
  • the detector 182 preferably is capable of detecting a relatively wide range of wavelengths, while the tunable filter 178 only passes a relatively narrow band of wavelengths, such as shown in FIG. 6 .
  • the tunable filter 178 With the laser 180 turned on, the tunable filter 178 is heated until the filter passes the operating wavelength of the laser 180 to the detector 182 .
  • a controller (not shown) is notified. By noting the heat and/or power that was applied to the tunable filter, the controller may determine the operating wavelength of the laser 180 .
  • Such a system may be used to, for example, control the wavelength of a laser. For example, if the operating wavelength of the laser 180 , as determined by the controller, is not within a predefined range of wavelengths, the controller may adjust the power that is applied to the laser 180 to change the emission wavelength of the laser until it falls within the predefined range of wavelengths.
  • the laser emission may be directly applied to the tunable filter 178 .
  • only a portion of the laser emission may be applied to the tunable filter 178 by using a beam splitter 190 or the like.
  • the detector 182 may be mounted on the tunable filter 178 , as shown in FIG. 13 .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Filters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
US09/953,506 2001-09-12 2001-09-12 Tunable optical filter Expired - Lifetime US6816636B2 (en)

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US09/953,506 US6816636B2 (en) 2001-09-12 2001-09-12 Tunable optical filter
PCT/US2002/029137 WO2003023463A2 (en) 2001-09-12 2002-09-12 Tunable optical filter
JP2003527471A JP2005502906A (ja) 2001-09-12 2002-09-12 波長可変光フィルタ
AU2002326893A AU2002326893A1 (en) 2001-09-12 2002-09-12 Tunable optical filter
EP02761646A EP1428053A2 (de) 2001-09-12 2002-09-12 Abstimmbarer optischer filter
US10/953,174 US7145165B2 (en) 2001-09-12 2004-09-28 Tunable laser fluid sensor
US11/633,872 US20070133001A1 (en) 2001-09-12 2006-12-04 Laser sensor having a block ring activity

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WO2003023463A2 (en) 2003-03-20
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WO2003023463A3 (en) 2003-11-13
JP2005502906A (ja) 2005-01-27

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