US6181864B1 - Optical fiber array module using soldering and fabrication method thereof - Google Patents
Optical fiber array module using soldering and fabrication method thereof Download PDFInfo
- Publication number
- US6181864B1 US6181864B1 US09/133,370 US13337098A US6181864B1 US 6181864 B1 US6181864 B1 US 6181864B1 US 13337098 A US13337098 A US 13337098A US 6181864 B1 US6181864 B1 US 6181864B1
- Authority
- US
- United States
- Prior art keywords
- substrate
- holes
- optical fibers
- fiber array
- array module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
- G02B6/3855—Details of mounting fibres in ferrules; Assembly methods; Manufacture characterised by the method of anchoring or fixing the fibre within the ferrule
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
- G02B6/3834—Means for centering or aligning the light guide within the ferrule
Definitions
- the present invention relates to an optical fiber array module, and more particularly, to a method of making an accurate optical fiber array by arraying and fixing single-core and multi-core optical fibers to make it easy to connect an optical waveguide device to the single-core and multi-core optical fibers, and a fiber array module.
- the optical fibers are arranged by forming grooves in a plane substrate such as a silicon wafer or a metal plate and fixing the optical fibers in the grooves.
- an object of the present invention to provide an optical fiber array module using soldering and a fabrication method thereof, whereby an optical waveguide device can be effectively packaged by accurately arraying optical fibers using the surface tension of solder, facilitating a process for polishing the ends of loaded fibers while simplifying a process for forming a device for fixing the optical fibers, and improving the attachment strength of the surfaces of the optical fibers, arrayed to be attached to the waveguide device, by enlarging the cross-sections of the an arrayed fibers.
- a method of manufacturing an optical fiber array module using soldering comprising the steps of: forming holes into which optical fibers can be inserted, in a silicon wafer substrate or a ceramic substrate at predetermined intervals; forming a metal layer on the walls of the holes and the entire surface of the substrate, to allow the walls of the holes and the entire surface of the substrate to be plated with a solder alloy material; plating the walls of the holes and the entire surface of the substrate with the solder alloy material; inserting metal-coated optical fibers into the holes plated with the solder alloy material; positioning the optical fibers at the centers of the holes using the surface tension of the solder alloy material, by heating the resultant structure; fixing the optical fibers, inserted into the holes of the substrate, to the substrate by pouring epoxy curable by heat or ultraviolet light, to fabricate a fiber array module capable of being accurately attached to an optical waveguide device; and polishing the end of the optical fiber module formed of optical fibers protruding through the holes, to
- a method of manufacturing a fiber array module using soldering comprising the steps of: forming holes into which arrayed optical fibers can be inserted, in a metal substrate at predetennined intervals; processing the walls of the holes in the metal substrate; plating the walls of the holes and the entire surface of the substrate with solder alloy material; inserting metal-coated fibers into the holes plated with the solder alloy material; positioning the optical fibers at the centers of the holes using the surface tension of the solder alloy material, by heating the resultant structure, fixing the optical fibers, inserted into the holes of the substrate, to the substrate by pouring epoxy curable by heat or ultraviolet light, to fabricate a fiber array module capable of being accurately attached to an optical waveguide device; and polishing the end of the optical fiber module formed of optical fibers protruding through the holes, to provide optical luminance.
- the walls of the holes and the entire substrate are plated with the solder alloy material by either electrolytic plating or electroless plating.
- the optical fibers inserted into the holes in the substrate are prepared by peeling all coatings off the optical fibers and depositing metal on cladding layers of the optical fibers or by depositing metal on external glass layers of the optical fibers.
- the holes in the substrate are perpendicular to the surface of an arranging device or at an angle of 0.1° to 20° with respect to the surface of the arranging device. Also, the holes in the substrate each have a shape selected from the group consisting of a rectangle, a circle, and a polygon.
- the optical fibers inserted into the holes in the substrate are fibers selected from the group consisting of single-core fibers, multi-core fibers, and ribbon fibers.
- a fiber array module manufactured using soldering comprising: a metal substrate having holes into which optical fibers can be inserted, wherein the walls of the holes and the entire surface of the metal substrate are plated with a metal material; arrayed optical fibers inserted into the holes in the metal substrate and prepared by depositing metal layers on cladding layers or external glass layers exposed by removing all coatings from the optical fibers; and a fixing unit for fixing the arrayed optical fibers to the metal substrate, after the arrayed optical fibers are inserted into the holes in the metal substrate and aligned by heat.
- FIGS. 1A and 1B are respectively a cross-sectional view and a plan view of a device in which holes for arraying optical fibers are formed through a substrate, according to a preferred embodiment of the present invention
- FIGS. 2A and 2B are respectively a cross-sectional view and a plan view of the device of FIG. 1A whose surface and holes are plated with a solder material, according to the preferred embodiment of the present invention
- FIGS. 3A and 3B are cross-sectional views of a metal deposited fiber and a copper coated fiber, respectively, according to a preferred embodiment of the present invention
- FIG. 4 shows the optical fiber array module in which metal or copper coated optical fibers are inserted through holes in a plated arranging substrate, and the solder material reflows by heat, according to the preferred embodiment of the present invention
- FIGS. 5A and 5B respectively show nonreflowing and reflowing solder materials in a hole
- FIG. 6 shows the optical fiber array module according to the preferred embodiment of the present invention and optical fibers, sealed with molding compounds
- FIGS. 7A and 7B are respectively a plan view and a cross-sectional view of the optical fiber array having optical illuminance provided by polishing its end.
- the present invention roughly involves providing a device for fixing optical fibers, and arraying optical fibers and fixing them to the device, thereby constituting an accurate optical fiber array module.
- the fiber array module according to the present invention includes, as shown in FIG. 7A, a metal substrate 150 having plated holes, a metal-coated fiber array 180 , and a fixing unit 190 for fixing the metal substrate 150 to the fiber array 180 whose fibers are inserted into the holes of the metal substrate 150 .
- the metal substrate 150 has holes 160 into which optical fibers can be inserted, at predetennined intervals, and the walls of the holes 160 and the entire surface of the metal substrate 150 are plated with a metal material.
- a metal layer is deposited on a cladding layer or an external glass layer, exposed by peeling off a first coating, of the fibers of the fiber array 180 , which are inserted into the holes 160 formed through the metal substrate 150 plated with metal.
- the fixing unit 190 fixes the fiber array 180 to the metal substrate 150 with molding compounds, when the optical fibers are arrayed by being inserted into the holes of the metal substrate 150 and heated.
- FIG. 1 a plane substrate such as a flat silicon wafer, a ceramic board or a metal plate is prepared. Holes are formed at regular intervals in the plane substrate, to array optical fibers. The holes are accurately formed in the substrate by mechanical processing, a laser, a semiconductor exposure and etching process, or a dry etch method using a solution or reactive gas. The holes formed through the substrate are rectangular, circular or polygonal.
- FIGS. 1A and 1B show holes for arraying optical fibers, formed in a substrate, according to a preferred embodiment of the present invention, wherein FIG. 1A shows the cross-section of the substrate and FIG. 1B is a plan view.
- Reference numeral 150 is a substrate
- reference numeral 160 is a hole.
- FIGS. 2A and 2B are respectively a cross-sectional view and a plan view of the device of FIG. 1A whose surface and holes are plated with a solder material, according to the preferred embodiment of the present invention.
- Reference numeral 170 denotes the solder material with which the substrate 150 is plated.
- the optical fibers used in the present invention are formed by peeling all coatings off optical fibers and depositing a metal layer such as chrome/gold (Cr/Au), titanium/gold (Ti/Au) or titanium nitride/gold (TiN/Au) on cladding layers of the optical fibers.
- the optical fibers can be copper coated.
- Optical fibers to be inserted into the holes in the substrate can be single-core, multi-core and ribbon optical fibers.
- FIGS. 3A and 3B are cross-sectional views of a metal coated fiber and a copper coated fiber, respectively, according to a preferred embodiment of the present invention.
- Reference numeral 100 is a core
- reference numeral 110 is a cladding layer
- reference numerals 120 and 130 are first and second metal layers
- reference numeral 140 is a copper layer.
- FIG. 4 shows a plated arranging substrate 150 according to the preferred embodiment of the present invention in which metal or copper coated optical fibers are inserted through holes 160 and the solder material is heated to reflow.
- reference numeral 180 is the optical fiber coated with metal.
- FIGS. 5A and 5B show nonreflowing and reflowing solder materials in the hole 160 , respectively.
- the holes in the fiber arranging substrate can be perpendicular to the surface of the arranging substrate. Alternatively, they can be angled by 0.1° to 20° to reduce reflection loss or the like occurring, when connecting to an optical waveguide device.
- FIG. 6 shows the fiber arranging device according to the preferred embodiment of the present invention, and optical fibers, which are sealed by molding compounds 190 .
- FIGS. 7A and 7B are a plan view and a cross-sectional view of the fiber array of FIG. 6 after the ends of the arrayed fibers are polished to give optical illuminance.
- the area of attached section is enlarged, thus improving is environmental characteristics and reliability of a device package upon the connection of the optical fibers.
- the fiber array module is simply manufactured, and the ends of loaded optical fibers are easily polished.
- a cheap connection module can be fabricated by the simple manufacturing process.
- the optical fibers are accurately arrayed by self-alignment using the surface tension of the solder material.
- the reflection loss can be reduced when the arrayed optical fibers are connected to the optical waveguide device.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Mechanical Coupling Of Light Guides (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR97-38925 | 1997-08-14 | ||
KR1019970038925A KR100248054B1 (ko) | 1997-08-14 | 1997-08-14 | 솔더링을 이용한 광섬유어레이 모듈 및 그 제작방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
US6181864B1 true US6181864B1 (en) | 2001-01-30 |
Family
ID=19517542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/133,370 Expired - Fee Related US6181864B1 (en) | 1997-08-14 | 1998-08-13 | Optical fiber array module using soldering and fabrication method thereof |
Country Status (7)
Country | Link |
---|---|
US (1) | US6181864B1 (fr) |
JP (1) | JP3126344B2 (fr) |
KR (1) | KR100248054B1 (fr) |
CN (1) | CN1131445C (fr) |
CA (1) | CA2244633C (fr) |
FR (1) | FR2767388B1 (fr) |
GB (1) | GB2328293B (fr) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002097500A2 (fr) * | 2001-05-25 | 2002-12-05 | Intel Corporation | Reseau de fibres optiques a haute densite |
US6526191B1 (en) * | 1998-02-26 | 2003-02-25 | Micron Technology, Inc. | Integrated circuits using optical fiber interconnects formed through a semiconductor wafer and methods for forming same |
US6584270B2 (en) * | 2000-01-20 | 2003-06-24 | The Furukawa Electric Co., Ltd. | Fixed component and optical component employing the same |
US20030142945A1 (en) * | 2002-01-28 | 2003-07-31 | Dallas Joseph L. | Method and system for attaching one or more optical fibers to a retaining device |
US20030161594A1 (en) * | 2002-01-29 | 2003-08-28 | The Furukawa Electric Co., Ltd. | Optical fiber module |
US20030161595A1 (en) * | 2002-02-27 | 2003-08-28 | Dallas Joseph L. | Method of bonding optical devices |
US20030197186A1 (en) * | 1998-02-26 | 2003-10-23 | Micron Technology, Inc. | Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same |
US20030206685A1 (en) * | 2001-10-24 | 2003-11-06 | Cheng-Chung Huang | Optical configuration for optical fiber switch |
US6676305B2 (en) | 2002-01-28 | 2004-01-13 | Coviant, Inc. | Apparatus and method of aligning optical fibers to optical devices |
US6709978B2 (en) | 1998-01-20 | 2004-03-23 | Micron Technology, Inc. | Method for forming integrated circuits using high aspect ratio vias through a semiconductor wafer |
US20040208425A1 (en) * | 2001-10-24 | 2004-10-21 | Jacek Maitan | Control system for an optical fiber switch |
US20050156263A1 (en) * | 2004-01-20 | 2005-07-21 | Harris Corporation | Fabrication process for embedding optical band gap structures in a low temperature co-fired ceramic substrate |
EP1619528A1 (fr) * | 2004-07-23 | 2006-01-25 | Shinko Electric Industries Co., Ltd. | Dispositif semi-conducteur avec un élément de monatage comprenant guide d'ondes et son procédé de fabrication |
US11256049B2 (en) | 2020-04-22 | 2022-02-22 | Nokia Solutions And Networks Oy | Optical-to-electric-to-optical routing engine |
US11460637B2 (en) * | 2019-05-15 | 2022-10-04 | Corning Research & Development Corporation | Optical connection substrates for passive fiber to waveguide coupling |
US11506838B2 (en) | 2020-04-22 | 2022-11-22 | Nokia Solutions And Networks Oy | Photonic integrated circuit for a plurality of optical transmitters and receivers |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6595698B2 (en) * | 2000-06-13 | 2003-07-22 | Siwave, Inc. | High density fiber terminator/connector |
JP6354131B2 (ja) * | 2013-10-02 | 2018-07-11 | 富士通株式会社 | 光導波路部品、その製造方法及び光導波路デバイス |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4307935A (en) * | 1978-11-02 | 1981-12-29 | U.S. Philips Corporation | Coupling device between optical fibers and electro-optical elements |
WO1984002582A1 (fr) | 1982-12-23 | 1984-07-05 | United Technologies Corp | Tete de fibre optique |
US4774122A (en) * | 1986-10-14 | 1988-09-27 | Edward Adler | Resinous product provided with surface coatable with metal layer bonded through an array of microdendrites and metal-clad resinous product thereof |
EP0645651A1 (fr) | 1993-03-31 | 1995-03-29 | Sumitomo Electric Industries, Ltd | Groupement de fibres optiques |
US5430819A (en) * | 1993-12-21 | 1995-07-04 | At&T Corp. | Multiple optical fiber connector and method of making same |
US5500917A (en) * | 1994-04-18 | 1996-03-19 | Gould Electronics Inc. | Optical assembly/housing for securing optical fiber components, devices and fibers to the same or to mounting fixtures |
WO1996037794A1 (fr) | 1995-05-25 | 1996-11-28 | Eastman Chemical Company | Sonde optique spectroscopique robuste |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS61156104A (ja) * | 1984-12-28 | 1986-07-15 | Fujitsu Ltd | 光コネクタフエル−ル構造 |
JPS62267710A (ja) * | 1986-05-15 | 1987-11-20 | Nec Corp | 光コネクタのフエル−ル |
-
1997
- 1997-08-14 KR KR1019970038925A patent/KR100248054B1/ko not_active IP Right Cessation
-
1998
- 1998-08-10 CA CA002244633A patent/CA2244633C/fr not_active Expired - Fee Related
- 1998-08-12 JP JP10227873A patent/JP3126344B2/ja not_active Expired - Fee Related
- 1998-08-13 US US09/133,370 patent/US6181864B1/en not_active Expired - Fee Related
- 1998-08-13 CN CN98117318A patent/CN1131445C/zh not_active Expired - Fee Related
- 1998-08-13 FR FR9810400A patent/FR2767388B1/fr not_active Expired - Fee Related
- 1998-08-14 GB GB9817649A patent/GB2328293B/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4307935A (en) * | 1978-11-02 | 1981-12-29 | U.S. Philips Corporation | Coupling device between optical fibers and electro-optical elements |
WO1984002582A1 (fr) | 1982-12-23 | 1984-07-05 | United Technologies Corp | Tete de fibre optique |
US4774122A (en) * | 1986-10-14 | 1988-09-27 | Edward Adler | Resinous product provided with surface coatable with metal layer bonded through an array of microdendrites and metal-clad resinous product thereof |
EP0645651A1 (fr) | 1993-03-31 | 1995-03-29 | Sumitomo Electric Industries, Ltd | Groupement de fibres optiques |
US5430819A (en) * | 1993-12-21 | 1995-07-04 | At&T Corp. | Multiple optical fiber connector and method of making same |
US5500917A (en) * | 1994-04-18 | 1996-03-19 | Gould Electronics Inc. | Optical assembly/housing for securing optical fiber components, devices and fibers to the same or to mounting fixtures |
WO1996037794A1 (fr) | 1995-05-25 | 1996-11-28 | Eastman Chemical Company | Sonde optique spectroscopique robuste |
Non-Patent Citations (2)
Title |
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English Abstract of Reference JP 61-156,104. |
English Abstract of Reference JP 62-267,710. |
Cited By (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6709978B2 (en) | 1998-01-20 | 2004-03-23 | Micron Technology, Inc. | Method for forming integrated circuits using high aspect ratio vias through a semiconductor wafer |
US6995441B2 (en) * | 1998-02-26 | 2006-02-07 | Micron Technology, Inc. | Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same |
US7547954B2 (en) | 1998-02-26 | 2009-06-16 | Micron Technology, Inc. | Electronic systems using optical waveguide interconnects formed through a semiconductor wafer |
US20070114543A1 (en) * | 1998-02-26 | 2007-05-24 | Micron Technology, Inc. | Electronic systems using optical waveguide interconnects formed through a semiconductor wafer |
US7164156B2 (en) | 1998-02-26 | 2007-01-16 | Micron Technology, Inc. | Electronic systems using optical waveguide interconnects formed throught a semiconductor wafer |
US20060131684A1 (en) * | 1998-02-26 | 2006-06-22 | Micron Technology, Inc. | Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same |
US20030197186A1 (en) * | 1998-02-26 | 2003-10-23 | Micron Technology, Inc. | Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same |
US6995443B2 (en) | 1998-02-26 | 2006-02-07 | Micron Technology, Inc. | Integrated circuits using optical fiber interconnects formed through a semiconductor wafer |
US20040156578A1 (en) * | 1998-02-26 | 2004-08-12 | Micron Technology, Inc. | Integrated circuits using optical fiber interconnects formed through a semiconductor wafer |
US6777715B1 (en) | 1998-02-26 | 2004-08-17 | Micron Technology, Inc. | Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same |
US6526191B1 (en) * | 1998-02-26 | 2003-02-25 | Micron Technology, Inc. | Integrated circuits using optical fiber interconnects formed through a semiconductor wafer and methods for forming same |
US6723577B1 (en) | 1998-02-26 | 2004-04-20 | Micron Technology, Inc. | Method of forming an optical fiber interconnect through a semiconductor wafer |
US6584270B2 (en) * | 2000-01-20 | 2003-06-24 | The Furukawa Electric Co., Ltd. | Fixed component and optical component employing the same |
US20030202768A1 (en) * | 2001-05-25 | 2003-10-30 | Steven Nasiri | High density optical fiber array |
WO2002097500A3 (fr) * | 2001-05-25 | 2003-05-08 | Transparent Networks Inc | Reseau de fibres optiques a haute densite |
WO2002097500A2 (fr) * | 2001-05-25 | 2002-12-05 | Intel Corporation | Reseau de fibres optiques a haute densite |
US20040208425A1 (en) * | 2001-10-24 | 2004-10-21 | Jacek Maitan | Control system for an optical fiber switch |
US6922500B2 (en) | 2001-10-24 | 2005-07-26 | Intel Corporation | Optical configuration for optical fiber switch |
US6925221B2 (en) | 2001-10-24 | 2005-08-02 | Intel Corporation | Control system for an optical fiber switch |
US20030206685A1 (en) * | 2001-10-24 | 2003-11-06 | Cheng-Chung Huang | Optical configuration for optical fiber switch |
US6676305B2 (en) | 2002-01-28 | 2004-01-13 | Coviant, Inc. | Apparatus and method of aligning optical fibers to optical devices |
US20030142945A1 (en) * | 2002-01-28 | 2003-07-31 | Dallas Joseph L. | Method and system for attaching one or more optical fibers to a retaining device |
US6830384B2 (en) * | 2002-01-29 | 2004-12-14 | The Furukawa Electric Co., Ltd. | Optical fiber module |
US20030161594A1 (en) * | 2002-01-29 | 2003-08-28 | The Furukawa Electric Co., Ltd. | Optical fiber module |
US20030161595A1 (en) * | 2002-02-27 | 2003-08-28 | Dallas Joseph L. | Method of bonding optical devices |
US20070056677A1 (en) * | 2004-01-20 | 2007-03-15 | Harris Corporation | Fabrication Process for Embedding Optical Band Gap Structures in a Low Temperature Co-Fired Ceramic Substrate |
US7199437B2 (en) * | 2004-01-20 | 2007-04-03 | Harris Corporation | Fabrication process for embedding optical band gap structures in a low temperature co-fired ceramic substrate |
US7390371B2 (en) | 2004-01-20 | 2008-06-24 | Harris Corporation | Fabrication process for embedding optical band gap structures in a low temperature co-fired ceramic substrate |
US20050156263A1 (en) * | 2004-01-20 | 2005-07-21 | Harris Corporation | Fabrication process for embedding optical band gap structures in a low temperature co-fired ceramic substrate |
US20060018590A1 (en) * | 2004-07-23 | 2006-01-26 | Kei Murayama | Optical waveguide mounting member, substrate, semiconductor device, method of manufacturing optical waveguide mounting member, and method of manufacturing substrate |
EP1619528A1 (fr) * | 2004-07-23 | 2006-01-25 | Shinko Electric Industries Co., Ltd. | Dispositif semi-conducteur avec un élément de monatage comprenant guide d'ondes et son procédé de fabrication |
US7251391B2 (en) | 2004-07-23 | 2007-07-31 | Shinko Electric Industries Co., Ltd. | Optical waveguide mounting member, substrate, semiconductor device, method of manufacturing optical waveguide mounting member, and method of manufacturing substrate |
US11460637B2 (en) * | 2019-05-15 | 2022-10-04 | Corning Research & Development Corporation | Optical connection substrates for passive fiber to waveguide coupling |
US11256049B2 (en) | 2020-04-22 | 2022-02-22 | Nokia Solutions And Networks Oy | Optical-to-electric-to-optical routing engine |
US11506838B2 (en) | 2020-04-22 | 2022-11-22 | Nokia Solutions And Networks Oy | Photonic integrated circuit for a plurality of optical transmitters and receivers |
Also Published As
Publication number | Publication date |
---|---|
JPH11119048A (ja) | 1999-04-30 |
CA2244633C (fr) | 2004-09-14 |
GB9817649D0 (en) | 1998-10-07 |
KR19990016395A (ko) | 1999-03-05 |
GB2328293A (en) | 1999-02-17 |
GB2328293B (en) | 2000-01-26 |
JP3126344B2 (ja) | 2001-01-22 |
CN1131445C (zh) | 2003-12-17 |
CN1209557A (zh) | 1999-03-03 |
CA2244633A1 (fr) | 1999-02-14 |
FR2767388A1 (fr) | 1999-02-19 |
KR100248054B1 (ko) | 2000-03-15 |
FR2767388B1 (fr) | 2000-06-16 |
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