US4470370A - Means for loading vapor coating materials into an evaporator - Google Patents

Means for loading vapor coating materials into an evaporator Download PDF

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Publication number
US4470370A
US4470370A US06/435,601 US43560182A US4470370A US 4470370 A US4470370 A US 4470370A US 43560182 A US43560182 A US 43560182A US 4470370 A US4470370 A US 4470370A
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US
United States
Prior art keywords
shaft
loading
vapor coating
evaporator
evaporators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US06/435,601
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English (en)
Inventor
Lothar Rachor
Erwin Eichinger
Peter Scheyrer
Rudolf Seif
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GFO- GESELLSCHAFT fur OBERFLACHENTECHNIK MBH
GFO GESELLSCHAFT fur OBERFLACHENTECHNIK mbH
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GFO GESELLSCHAFT fur OBERFLACHENTECHNIK mbH
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Assigned to GFO- GESELLSCHAFT FUR OBERFLACHENTECHNIK M.B.H. reassignment GFO- GESELLSCHAFT FUR OBERFLACHENTECHNIK M.B.H. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: SEIF, RUDOLF, EICHINGER, ERWIN, SCHEYRER, PETER, RACHOR, LOTHAR
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Definitions

  • the invention is directed to an apparatus for the loading of evaporators (vaporizers) in vapor coating plants with shaped pieces of vapor coating materials.
  • Thin layers of materials, especially metals can be obtained in a relatively simple manner by vaporizing the corresponding materials in a vacuum and depositing the vapors formed on the corresponding substrates. Thereby the vaporization of the materials to be applied takes place in so-called evaporators by heating or also by means of electron beams.
  • the vapor coating of thin layers on limited surfaces with a homogeneous vapor coating materials is relatively simple. Complicated apparatuses are necessary in the vapor deposition of continuous belts, in the vapor coating of alloy layers or several layers of different materials, above all on account of the continuous loading of the evaporator with the vapor coating materials without breaking the vacuum, which would lead to deterioration of the quality of the layer. In breaking the vacuum for the purpose of new loading of the evaporator there is the difficulty that a multiple pumping out of the vapor coating plant is uneconomical.
  • This problem is solved according to the invention by providing an apparatus for receiving shaped pieces having rolls with indentations for receiving the shaped pieces, said rolls being centered on a rotatable shaft and surrounded by a closely fitting housing, a moving part having gradual feed fastened on the shaft and by a swivelable shaft moveable into a resting position and into a loading position, on which there is mounted the shaft having rolls via fastening elements, whereby the housing of the rolls is provided with a recess corresponding to the shaped pieces, which is located in the loading position directly above the evaporator.
  • molded articles there can be used for example, platelets, spheres or preferably wire segments whereby these at times can consist of the same materials or in the production of different coatings of several vapor coating materials.
  • each evaporator its own loading roll which either rest on the same or on different shafts.
  • the moving part is preferably constructed as a ratchet wheel which in swiveling the swivelable shaft into the loading position locks into a stationary ratchet and the shaft with the loading roll at times further moves around one position.
  • the apparatus can comprise, consist essentially of, or consist of the stated parts.
  • FIGURE of the drawings schematically shows an illustrative form of the apparatus of the drawing.
  • rolls 2 rest on a rotatable shaft 4, which rolls are provided on their periphery with indentations 10 for receiving the shaped pieces 1 made of the corresponding vapor coating materials and are surrounded by a housing 3.
  • the rotatable shaft 4 and in a given case, also the housing 3 are connected via fastening elements 5 with a swivelable shaft 6, which is led into bearings 12 and by means of a mechanical drive for example, a lever 13 outside the plant can be swiveled into a resting position (A) and a loading position (B).
  • a gear 8 having gradual feed in the present case, a ratchet wheel, which upon swiveling of the shaft 6 into the loading position (B), is engaged by a stationary ratchet 9 whereby the rotatable shaft 4 corresponding to the tooth interval of the ratchet wheel 8 turns around one position as shaft 4 moves in position 3.
  • a shaped article falls through the recess 11 in the housing 3 of the rolls from the indentation 10 of the rolls 2 into the evaporator 7.
  • the swivelable shaft 6 is brought again into the resting position (A) where it cannot impair the vapor coating by the "shadow” effect and also there is no exposure to extreme heating action which would make necessary a cooling.
  • the loading with heated evaporators 7 can take place because of the only short time stay of the rolls 2 on the evaporators 7.
  • German priority application P 3200848.1 is hereby incorporated by reference.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Processing Of Solid Wastes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
US06/435,601 1982-01-14 1982-10-20 Means for loading vapor coating materials into an evaporator Expired - Lifetime US4470370A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3200848A DE3200848C2 (de) 1982-01-14 1982-01-14 Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen
DE3200848 1982-01-14

Publications (1)

Publication Number Publication Date
US4470370A true US4470370A (en) 1984-09-11

Family

ID=6152998

Family Applications (1)

Application Number Title Priority Date Filing Date
US06/435,601 Expired - Lifetime US4470370A (en) 1982-01-14 1982-10-20 Means for loading vapor coating materials into an evaporator

Country Status (10)

Country Link
US (1) US4470370A (enrdf_load_stackoverflow)
EP (1) EP0084126B1 (enrdf_load_stackoverflow)
JP (1) JPS58123871A (enrdf_load_stackoverflow)
AT (1) ATE15233T1 (enrdf_load_stackoverflow)
CA (1) CA1195489A (enrdf_load_stackoverflow)
DE (2) DE3200848C2 (enrdf_load_stackoverflow)
DK (1) DK154350C (enrdf_load_stackoverflow)
ES (1) ES8400496A1 (enrdf_load_stackoverflow)
NO (1) NO161627C (enrdf_load_stackoverflow)
YU (1) YU43110B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050186340A1 (en) * 2004-02-23 2005-08-25 Eastman Kodak Company Device and method for vaporizing temperature sensitive materials
US20060099344A1 (en) * 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4125350A1 (de) * 1991-07-31 1993-02-04 Leybold Ag Vorrichtung zum beschichten von werkstueckflaechen
DE4209428C1 (en) * 1992-03-24 1993-04-15 Degussa Ag, 6000 Frankfurt, De Automatic evapn. of large amts. of material without breaking vacuum - by charging moulded evapn. material from containers into recesses in rollers which then move mouldings to evaporators
DE19547650A1 (de) * 1995-12-20 1997-06-26 Henkel Kgaa Verfahren zum Desinfizieren von Flächen
KR200465407Y1 (ko) * 2011-06-14 2013-02-18 임지홍 냉장유지보조품 보관부가 분리구획된 공기튜브식 보조용기

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2635579A (en) * 1949-12-01 1953-04-21 Nat Res Corp Coating by evaporating metal under vacuum
DE1032998B (de) * 1954-04-03 1958-06-26 Standard Elektrik Ag Vorrichtung zur Herstellung von duennen Schichten aus mehreren Komponenten
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
US3227133A (en) * 1962-04-13 1966-01-04 Temescal Metallurgical Corp Multiple layer coating and cleaning
DE1910332A1 (de) * 1969-02-28 1970-09-10 Siemens Ag Hochvakuum-Bedampfungsapparatur
US4226208A (en) * 1977-08-04 1980-10-07 Canon Kabushiki Kaisha Vapor deposition apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE973280C (de) * 1948-10-02 1960-01-07 Siemens Ag Durch unmittelbaren Stromdurchgang beheizter, stabfoermiger Verdampfer
US3488214A (en) * 1967-03-15 1970-01-06 Sperry Rand Corp Evaporant material control for vapor deposition apparatus
DE1621361A1 (de) * 1967-08-01 1971-05-13 Telefunken Patent Aufdampfvorrichtung
JPS5814874B2 (ja) * 1978-06-01 1983-03-22 キヤノン株式会社 真空処理装置の蒸発材供給装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2635579A (en) * 1949-12-01 1953-04-21 Nat Res Corp Coating by evaporating metal under vacuum
DE1032998B (de) * 1954-04-03 1958-06-26 Standard Elektrik Ag Vorrichtung zur Herstellung von duennen Schichten aus mehreren Komponenten
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
US3227133A (en) * 1962-04-13 1966-01-04 Temescal Metallurgical Corp Multiple layer coating and cleaning
DE1298833B (de) * 1962-04-13 1969-07-03 Air Reduction Vorrichtung zum Vakuumaufdampfen einer Vielzahl von festhaftenden Schichten bestimmter Dicke aus verschiedenen Materialien auf eine Unterlage mittels Elektronenbeschuss
DE1910332A1 (de) * 1969-02-28 1970-09-10 Siemens Ag Hochvakuum-Bedampfungsapparatur
US4226208A (en) * 1977-08-04 1980-10-07 Canon Kabushiki Kaisha Vapor deposition apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050186340A1 (en) * 2004-02-23 2005-08-25 Eastman Kodak Company Device and method for vaporizing temperature sensitive materials
US7232588B2 (en) * 2004-02-23 2007-06-19 Eastman Kodak Company Device and method for vaporizing temperature sensitive materials
US20070207261A1 (en) * 2004-02-23 2007-09-06 Michael Long Device and method for vaporizing temperature sensitive materials
US7704554B2 (en) 2004-02-23 2010-04-27 Global Oled Technology Llc Device and method for vaporizing temperature sensitive materials
US20060099344A1 (en) * 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material
US8012537B2 (en) 2004-11-09 2011-09-06 Global Oled Technology Llc Controlling the vaporization of organic material

Also Published As

Publication number Publication date
DK2883A (da) 1983-07-15
DK154350C (da) 1989-04-10
DK154350B (da) 1988-11-07
EP0084126B1 (de) 1985-08-28
DE3200848A1 (de) 1983-07-21
JPH032946B2 (enrdf_load_stackoverflow) 1991-01-17
YU287582A (en) 1985-10-31
DK2883D0 (da) 1983-01-06
ATE15233T1 (de) 1985-09-15
ES518945A0 (es) 1983-10-16
DE3200848C2 (de) 1984-09-27
NO824403L (no) 1983-07-15
YU43110B (en) 1989-02-28
DE3265909D1 (en) 1985-10-03
NO161627B (no) 1989-05-29
CA1195489A (en) 1985-10-22
NO161627C (no) 1989-09-06
ES8400496A1 (es) 1983-10-16
EP0084126A1 (de) 1983-07-27
JPS58123871A (ja) 1983-07-23

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