US3914633A - X-ray tube comprising a liquid-cooled anode - Google Patents
X-ray tube comprising a liquid-cooled anode Download PDFInfo
- Publication number
- US3914633A US3914633A US406902A US40690273A US3914633A US 3914633 A US3914633 A US 3914633A US 406902 A US406902 A US 406902A US 40690273 A US40690273 A US 40690273A US 3914633 A US3914633 A US 3914633A
- Authority
- US
- United States
- Prior art keywords
- anode
- cooling
- cooling medium
- wall
- projections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 claims abstract description 66
- 239000002826 coolant Substances 0.000 claims description 23
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 2
- 239000000110 cooling liquid Substances 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 6
- 229910052709 silver Inorganic materials 0.000 abstract description 5
- 239000004332 silver Substances 0.000 abstract description 5
- 238000002347 injection Methods 0.000 abstract description 4
- 239000007924 injection Substances 0.000 abstract description 4
- 238000005260 corrosion Methods 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
- H01J35/13—Active cooling, e.g. fluid flow, heat pipes
Definitions
- ABSTRACT The cooling side of the anode target plate of an X-ray tube is provided with a surface-increasing cooling structure.
- An injection device for'a cooling liquid is mounted against the cooling structure such that the cooling liquid is forced to flow through ducts present in the cooling structure.
- At least the material of the surface of the cooling structure is preferably silver.
- the invention relates to an X-ray tube provided with an anode comprising an anode target plate which comprises, arranged opposite to each other, a target for an electron beam to be directed thereon and a cooling surface for giving off heat to a flowing cooling medium.
- US. Pat. No. 2,886,723 describes an X-ray tube in which a longitudinally injected liquid flow is forced to a higher degree of turbulence by projections on the boundary walls of the flow duct.
- Netherlands Pat. No. 77,920 describes an X-ray tube in which, for the same reasons, a rotating disc is arranged in a transverse injected liquid flow near the cooling surface.
- Netherlands Pat. No. 74,278 describes an X-ray tube incorporating a transverse multiduct injection device for the cooling medium.
- improved heat transfer between the cooling medium and the cooling surface is indeed realized. As a result, the anode target plate becomes less hot and the service life is prolonged.
- the anode target plate is still comparatively quickly damaged. It was found that this damage consists mainly in the local roughing of the target in and near the target spot. In addition to a reduced service life of the tube, this also causes a continuous reduction of the radiation efficiency of the tube.
- the invention has for its object to provide an X-ray tube in which the target plate is substantially less readily damaged, also in the case of comparatively high local loading.
- an X-ray tube of the kind set forth according to the invention is characterized in that the anode target plate is comparatively thin, measured between the target and the cooling surface, and is provided with surface-increasing recesses at the area of the cooling surface, the flow path for the cooling medium being limited at least mainly to these recesses at these areas.
- an X-ray tube is obtained having a substantially smaller reduction in radiation efficiency and a longer service life.
- a contribution in this respect is made by the improved thermal contact between the anode target plate and the cooling medium, the larger cooling surface, the higher flow rate of the cooling medium at the area of the cooling surface as well as by the shorter heat-leakage path.
- the anode target plate may be thinner, so that it becomes less hot again. Because the anode target plate becomes less hot at the area of the target, the temperature gradients occurring at this area cause less roughening of the surface.
- the recesses consist of adjoining isosceles pyramids which extend approximately halfway the thickness of the anode target plate.
- a flat boundary of an injection tube for the cooling medium which is directed towards the cooling surface is mounted against the peaks of the remaining raised portions, which are again isosceles pyramids.
- the cooling side of the anode target 7 plate is provided with a corrosion-resistant material.
- a corrosion-resistant material To this end in a closed cooling system use can alternatively be made of a liquid having a comparatively slight-corrosion effect on the material of the cooling surface.
- FIG. 1 is a diagrammatic representation of a preferred embodiment of an X-ray tube according to the invention.
- FIG. 2 is a diagrammatic representation of a part of the X-ray tube shown in FIG. 1 which comprises the anode target,
- FIG. 3 is a diagrammatic representation of a preferred embodiment of an anode construction according to the invention.
- the X-ray tube shown in FIG. 1 comprises an envelope, consisting of a glass portion 1 and a metal portion 2 which are vacuumtight connected to each other by means of the connection ring 3.
- the metal portion 2 comprises windows such as 4 and 5 which are vacuumtight contained in support rings 6 and 7.
- the portion 2 furthermore comprises a cap 8, an anode 9 with an anode target plate 10 forming part thereof.
- Mounted in the anode 9 is a cooling sleeve 11 with an inlet line 12 and an outlet line 13.
- an opening 14 for directing a cooling liquid transverse to the anode target plate 10.
- a sealing plate 38 is provided with a guide sleeve 39 which projects into the cooling space.
- the cooling sleeve 11 is preferably mounted 15 cm into the anode sleeve 9 with insertion of one or more O-rings.
- the glass envelope 1 comprises a passage element 18 with passages 19 for connections 20 of current or voltage sources not shown.
- FIG. 2 shows an electron beam 22 and an X-ray beam 23.
- the cooling structure 21 consists of isosceles pyramids 24 which are impressed in the anode target plate.
- the raised portions 25 also constitute isosceles pyramids.
- the target plate including the pyramids has a thickness of, for example, 2 mm and the pyramids have a depth of 1 mm.
- An end face 26 of the cooling sleeve 11 engages the peaks of the raised portions. In this preferred embodiment, the pressure of the cooling liquid ensures that this engagement is maintained during operation.
- the cooling sleeve can alternatively be mounted against the anode target plate under spring pressure, or can form one assembly therewith.
- the cooling structure consists of a duct system which is arranged between a cooling part and a target plate part.
- the duct system should permit lateral passage of and be in open communication with an inlet opening for the cooling medium.
- a cooling liquid which is pressed through the opening 14 is thus forced to flow between the raised portions.
- proper thermal contact between the cooling liquid and the target plate is ensured. If isosceles pyramids are used in the cooling structure, the cooling area of the cooling surface is increased exactly by a factor 2, the transverse dimension of the target being the same.
- the cooling structure consists of a system of preferably zigzag-extending ducts which are provided in the anode target plate, for example, by etching.
- an X-ray tube incorporates a known closed cooling system.
- the heat taken up from the anode is given off in a heat exchanger.
- the choice of the cooling medium in such a system is free to a high degree.
- a binary mixture can be used, such as water with alcohol, one component of which is subjected to an alternating phase transition during the cooling process.
- the attack of the cooling structure is reduced by a suitable choice of the materials of the anode target plate at the area of the cooling surface.
- the materials of the anode target plate at the area of the cooling surface In addition to copper, silver is suitable material for this purpose in view of its favourable heat-conductivity and high corrosion-resistance.
- the cooling structure can be provided with a silver layer, for example by vapour-deposition or in a galvanic manner.
- the anode target plate comprises, as is shown in FIG. 2, a comparatively thin target disc 30 and a cooling disc 31 which also serves as a support for the target disc.
- the cooling disc is made, for example, of silver or copper, whilst the target disc is made of one of the metals known to be used for this purpose, for example, copper molybdenum, tungsten, cobalt and the like.
- the target disc can be provided on the cooling disc by diffusion, but any other method is also feasible, provided that the necessary proper thermal contact between the two discs is realized.
- FIG. 3 The mutual orientation of a cooling disc 33, a cooling sleeve opening 34 and a line-like target spot 35 of a further preferred embodiment are shown in FIG. 3.
- Linefocus tubes of this kind are frequently used for diffraction examinations.
- the line-like target spot or the line focus has a width of, for example, 0.4 mm and a length of 8 mm.
- the cooling disc is now mounted such that the line focus encloses an angle of approximately 45 with straight lines 36 along which the pyramids are arranged.
- the cooling sleeve opening 34 is arranged directly opposite to the line focus, with the result that the cooling medium is injected against the line focus on the cooling side.
- the cooling disc is provided with areas 37 in which no cooling structure is present.
- smooth areas are arranged in the longitudinal direction of the line focus, but are situated at least a few times the width of the line focus outside the line focus. As a result of the smooth areas 37, the flow direction of the cooling medium is forced more transverse to the longitudinal direction of the line focus.
- An X-ray tube according to the invention is furthermore particularly suitable for use in an X-ray fluorescopy apparatus which is equipped with a so-termed end-window tube.
- the target plate is arranged at a small distance from an end face of the envelope. So as to prevent damage by dispersed electrons, the anode is positive with respect to the surroundings. Consequently, the anode target plate must be cooled with de-ionized water. This would cause additionally fast corrosion of the cooling surface. In these tubes usually no space is available for a complex cooling system at this area.
- the use of an X-ray tube comprising an anode target plate provided with a cooling structure according to the invention offers a favourable solution in such a case.
- anode comprising:
- an anode target plate of heat conductive material having on one side thereof a target area for an electron beam and having the opposite side thereof facing said wall with an array of heat conductive projections substantially increasing the heat radiation surface thereof and extending from said plate to said wall effectively forming an interconnected system of ducts around said projections;
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- X-Ray Techniques (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7214642A NL7214642A (enrdf_load_stackoverflow) | 1972-10-28 | 1972-10-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3914633A true US3914633A (en) | 1975-10-21 |
Family
ID=19817256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US406902A Expired - Lifetime US3914633A (en) | 1972-10-28 | 1973-10-16 | X-ray tube comprising a liquid-cooled anode |
Country Status (9)
Country | Link |
---|---|
US (1) | US3914633A (enrdf_load_stackoverflow) |
JP (2) | JPS4980985A (enrdf_load_stackoverflow) |
BE (1) | BE806601A (enrdf_load_stackoverflow) |
CA (1) | CA993492A (enrdf_load_stackoverflow) |
DE (1) | DE2350807C3 (enrdf_load_stackoverflow) |
FR (1) | FR2204883B1 (enrdf_load_stackoverflow) |
GB (1) | GB1429066A (enrdf_load_stackoverflow) |
IT (1) | IT996888B (enrdf_load_stackoverflow) |
NL (1) | NL7214642A (enrdf_load_stackoverflow) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4205251A (en) * | 1976-10-04 | 1980-05-27 | U.S. Philips Corporation | X-ray tube for the examination of fine structures |
WO1982003522A1 (en) * | 1981-04-02 | 1982-10-14 | Arthur H Iversen | Liquid cooled anode x-ray tubes |
US4455504A (en) * | 1981-04-02 | 1984-06-19 | Iversen Arthur H | Liquid cooled anode x-ray tubes |
US4572982A (en) * | 1983-12-05 | 1986-02-25 | General Electric Company | Apparatus for reducing the effects of thermal stresses on breakdown voltage in high voltage vacuum devices |
US4953191A (en) * | 1989-07-24 | 1990-08-28 | The United States Of America As Represented By The United States Department Of Energy | High intensity x-ray source using liquid gallium target |
WO1992020090A1 (de) * | 1991-04-30 | 1992-11-12 | Jules Hendrix | Röntgenröhre |
WO1995006952A1 (en) * | 1993-09-02 | 1995-03-09 | Medical Research Council | X-ray tubes |
EP0767967A4 (en) * | 1995-04-28 | 1997-10-01 | Varian Associates | HIGH FLOW STATIONARY X-RAY TARGET WITH FLEXIBLE SUPPORT STRUCTURE |
US5737387A (en) * | 1994-03-11 | 1998-04-07 | Arch Development Corporation | Cooling for a rotating anode X-ray tube |
WO1999027557A1 (en) * | 1997-11-21 | 1999-06-03 | Koninklijke Philips Electronics N.V. | X-ray tube having a cooling profile adapted to the shape of the focal spot |
KR20010087942A (ko) * | 2000-03-09 | 2001-09-26 | 김성헌 | 고정양극형 엑스선관 장치 |
US20100243216A1 (en) * | 2009-03-25 | 2010-09-30 | Fu Zhun Precision Industry (Shen Zhen) Co., Ltd. | Liquid-cooling device |
US20130259207A1 (en) * | 2012-03-27 | 2013-10-03 | Rigaku Corporation | Target for x-ray generator, method of manufacturing the same and x-ray generator |
US20150306620A1 (en) * | 2014-04-25 | 2015-10-29 | Microliquids GmbH | Jet-generation apparatus and method for generating a liquid jet |
DE102017217181B3 (de) | 2017-09-27 | 2018-10-11 | Siemens Healthcare Gmbh | Stehanode für einen Röntgenstrahler und Röntgenstrahler |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4238682A (en) * | 1979-05-03 | 1980-12-09 | Bell Telephone Laboratories, Incorporated | High-power X-ray source |
DE2934870A1 (de) * | 1979-08-29 | 1981-03-19 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Roentgenroehre |
DE19929655B4 (de) | 1998-07-09 | 2012-02-16 | Siemens Ag | Röntgenstrahler |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2886723A (en) * | 1956-09-04 | 1959-05-12 | Machlett Lab Inc | X-ray tubes |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE362763A (enrdf_load_stackoverflow) * | 1928-07-16 | |||
US1994140A (en) * | 1931-11-20 | 1935-03-12 | Meeuen Harry Bernard | Internal radiator for anodes |
US2100742A (en) * | 1934-09-01 | 1937-11-30 | E J W Keagy | Process and apparatus for beverage dispensing |
DE718031C (de) * | 1939-03-10 | 1942-02-28 | Siemens Reiniger Werke Ag | Roentgenroehrenanode mit Umlaufkuehlung fuer hohe Leistung |
DE902061C (de) * | 1940-02-28 | 1954-01-18 | Aeg | Kuehlvorrichtung fuer Hochleistungsroentgenroehren |
FR1060761A (fr) * | 1950-07-07 | 1954-04-06 | Thomson Houston Comp Francaise | Perfectionnement aux structures anodiques de tubes électroniques |
US2790102A (en) * | 1955-10-04 | 1957-04-23 | Dunlee Corp | X-ray tube anode |
-
1972
- 1972-10-28 NL NL7214642A patent/NL7214642A/xx unknown
-
1973
- 1973-10-10 DE DE2350807A patent/DE2350807C3/de not_active Expired
- 1973-10-16 US US406902A patent/US3914633A/en not_active Expired - Lifetime
- 1973-10-25 FR FR7338070A patent/FR2204883B1/fr not_active Expired
- 1973-10-25 JP JP11950673A patent/JPS4980985A/ja active Pending
- 1973-10-25 IT IT70160/73A patent/IT996888B/it active
- 1973-10-25 CA CA184,215A patent/CA993492A/en not_active Expired
- 1973-10-25 GB GB4972673A patent/GB1429066A/en not_active Expired
- 1973-10-26 BE BE137141A patent/BE806601A/xx not_active IP Right Cessation
-
1978
- 1978-04-05 JP JP1978043761U patent/JPS5913742Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2886723A (en) * | 1956-09-04 | 1959-05-12 | Machlett Lab Inc | X-ray tubes |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4205251A (en) * | 1976-10-04 | 1980-05-27 | U.S. Philips Corporation | X-ray tube for the examination of fine structures |
WO1982003522A1 (en) * | 1981-04-02 | 1982-10-14 | Arthur H Iversen | Liquid cooled anode x-ray tubes |
US4405876A (en) * | 1981-04-02 | 1983-09-20 | Iversen Arthur H | Liquid cooled anode x-ray tubes |
US4455504A (en) * | 1981-04-02 | 1984-06-19 | Iversen Arthur H | Liquid cooled anode x-ray tubes |
US4572982A (en) * | 1983-12-05 | 1986-02-25 | General Electric Company | Apparatus for reducing the effects of thermal stresses on breakdown voltage in high voltage vacuum devices |
US4953191A (en) * | 1989-07-24 | 1990-08-28 | The United States Of America As Represented By The United States Department Of Energy | High intensity x-ray source using liquid gallium target |
WO1992020090A1 (de) * | 1991-04-30 | 1992-11-12 | Jules Hendrix | Röntgenröhre |
WO1995006952A1 (en) * | 1993-09-02 | 1995-03-09 | Medical Research Council | X-ray tubes |
US5737387A (en) * | 1994-03-11 | 1998-04-07 | Arch Development Corporation | Cooling for a rotating anode X-ray tube |
EP0767967A4 (en) * | 1995-04-28 | 1997-10-01 | Varian Associates | HIGH FLOW STATIONARY X-RAY TARGET WITH FLEXIBLE SUPPORT STRUCTURE |
WO1999027557A1 (en) * | 1997-11-21 | 1999-06-03 | Koninklijke Philips Electronics N.V. | X-ray tube having a cooling profile adapted to the shape of the focal spot |
KR20010087942A (ko) * | 2000-03-09 | 2001-09-26 | 김성헌 | 고정양극형 엑스선관 장치 |
US20100243216A1 (en) * | 2009-03-25 | 2010-09-30 | Fu Zhun Precision Industry (Shen Zhen) Co., Ltd. | Liquid-cooling device |
US20130259207A1 (en) * | 2012-03-27 | 2013-10-03 | Rigaku Corporation | Target for x-ray generator, method of manufacturing the same and x-ray generator |
US9020101B2 (en) * | 2012-03-27 | 2015-04-28 | Rigaku Corporation | Target for X-ray generator, method of manufacturing the same and X-ray generator |
US20150306620A1 (en) * | 2014-04-25 | 2015-10-29 | Microliquids GmbH | Jet-generation apparatus and method for generating a liquid jet |
DE102017217181B3 (de) | 2017-09-27 | 2018-10-11 | Siemens Healthcare Gmbh | Stehanode für einen Röntgenstrahler und Röntgenstrahler |
US20190096625A1 (en) * | 2017-09-27 | 2019-03-28 | Siemens Healthcare Gmbh | Stationary anode for an x-ray generator, and x-ray generator |
US10714300B2 (en) * | 2017-09-27 | 2020-07-14 | Siemens Healthcare Gmbh | Stationary anode for an X-ray generator, and X-ray generator |
Also Published As
Publication number | Publication date |
---|---|
DE2350807A1 (de) | 1974-05-09 |
FR2204883A1 (enrdf_load_stackoverflow) | 1974-05-24 |
CA993492A (en) | 1976-07-20 |
JPS4980985A (enrdf_load_stackoverflow) | 1974-08-05 |
DE2350807B2 (de) | 1978-11-02 |
FR2204883B1 (enrdf_load_stackoverflow) | 1978-11-17 |
JPS5446277U (enrdf_load_stackoverflow) | 1979-03-30 |
GB1429066A (en) | 1976-03-24 |
NL7214642A (enrdf_load_stackoverflow) | 1974-05-01 |
IT996888B (it) | 1975-12-10 |
JPS5913742Y2 (ja) | 1984-04-23 |
BE806601A (fr) | 1974-04-26 |
DE2350807C3 (de) | 1985-02-21 |
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