US3732426A - X-ray source for generating an x-ray beam having selectable sectional shapes - Google Patents

X-ray source for generating an x-ray beam having selectable sectional shapes Download PDF

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Publication number
US3732426A
US3732426A US00167373A US3732426DA US3732426A US 3732426 A US3732426 A US 3732426A US 00167373 A US00167373 A US 00167373A US 3732426D A US3732426D A US 3732426DA US 3732426 A US3732426 A US 3732426A
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US
United States
Prior art keywords
electron beam
ray
astigmator
nozzle
condenser lens
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US00167373A
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English (en)
Inventor
T Shimizu
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NIHONA DENSHI KK
NIHONA DENSHI KK JA
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NIHONA DENSHI KK
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Definitions

  • the X-ray source comprises an electron gun, a condenser lens and a target.
  • the elec trons emanating from the gun are focused on the target by the condenser lens.
  • the resultant impingement causes an X-ray to be generated from the target.
  • a point X-ray source is used.
  • the incorporated filament is of the hairpin type so as to form a very small circular image of the electron beam on the target.
  • a line X-ray source is used.
  • a line filament is incorporated so as to form a long, narrow image of the electron beam on the target.
  • a single X-ray source capable of generating a multiplicity of X-rays. This is effected by placing an electrostatic or electromagnetic astigmator between the electron gun and the electromagnetic condenser lens and by varying the voltage or current applied to said astigmator so as to change the shape of the electron image on the target according to the purpose of analysis.
  • FIG. 1 shows an embodiment of this invention in which an electrostatic astigmator is provided
  • FIG. 2 is a diagram of an electrostatic astigmator showing the cross section of the electron beam after passing through the astigmator;
  • FIG. 3 is a diagram of an electromagnetic astigmator
  • FIG. 4 shows an apparatus for generating an X-ray according to this invention.
  • an electron gun 1 comprises a hairpin filament 2 and an anode 3. Filament heating current and high voltage for energizing the anode are applied to the gun from a power supply source (not shown) via a high tension cable 4.
  • the accelerated electrons pass through an electrostatic astigmator 5 comprising four electrodes 5a, 5b, 5c and 5d, and are focused on a target 6 such as Fe or M by a condenser lens 7 suitably energized by a power supply source 8.
  • a control voltage is supplied to the astigmator from a power supply source 10 (see FIG. 2). Electrodes 5a and 5b are maintained at a positive potential and electrodes 5c and 5d at a negative potential.
  • cross section A becomes orientated as shown by cross section B. Further, when the voltage applied to the four electrodes is zero, the electron beam cross section remains unchanged and the X-ray source functions as a point source.
  • the condenser lens 7 comprises two coils 12 and 13 and three pole pieces l4, l5 and 16.
  • the polarities of pole pieces 14 and 16 are arranged so as to be opposite that of pole piece 15.
  • an electrostatic astigmator is used for adjusting the sectional shape of the electron beam.
  • an electromagnetic astigmator in lieu as shown in FIG. 3.
  • four electromagnets 20a, 20b, 20c and 20d replace the four electrodes 5a, 5b, 5c and 5d shown in FIG. 2.
  • the magnets are energized by a power supply 21 via a switch 22, in order to produce a magnetic field, said field serving to control the shape of the electron beam.
  • an electron beam irradiates a specimen 31 placed in the atmosphere so as to cause the specimen to generate an X-ray.
  • the electron beam is produced by an electron gun 32 positioned in a chamber 33 which is connected to a vacuum pump (notshown) via a tube 34.
  • the beam passes through an electrostatic astigmator 35, a nonrotating electromagnetic condenser lens 36 and a nozzle 37 having a small opening 38.
  • the air entering the nozzle 36 through the opening 38 is exhausted by a vacuum pump 40 via a tube 39.
  • the sectional shape of the beam is adjusted by the astigmator 35 and then focused in the neighborhood of the opening 38 by the condenser lens 36.
  • the electronbeam passed through the opening 38 is irradiated on the specimen 31, the resultant impingement causing an X-ray to be generated from the specimen.
  • the generated X-ray is dispersed according to its wavelength and detected by a monochromator comprising slits 41 and 42, a crystal 43 and a detector 44. As a result, the specimen is quantitatively and qualitatively analyzed.
  • An X-ray source for generating an X-ray pattern having a plurality of selectable sectional shapes com- PI'lSIl'lgZ
  • An electron gun for producing an electron beam
  • C. means including an astigmator lens placed between said gun and condenser lens for shaping the electron beam into at least two distinct shapes;
  • An apparatus for generating an Xray pattern having a plurality of selectable sectional shapes comprising:
  • a condenser lens forfocusing said beam so as to pass through thevopening of said nozzle, comprising two coils, first, second and third pole pieces, the polarity of said first and third pole pieces being arranged opposite that of the second such that the electron beam is not substantially rotated;
  • F. means including an astigmator lens placed between said gun and said lens, for varying the sectional shape of the electron beam passed through the opening of said nozzle, such that said beammay irradiate a specimen to generate an Xray relating to the shape of the electron beam.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US00167373A 1970-07-30 1971-07-30 X-ray source for generating an x-ray beam having selectable sectional shapes Expired - Lifetime US3732426A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6686770A JPS5435078B1 (enrdf_load_stackoverflow) 1970-07-30 1970-07-30

Publications (1)

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US3732426A true US3732426A (en) 1973-05-08

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US00167373A Expired - Lifetime US3732426A (en) 1970-07-30 1971-07-30 X-ray source for generating an x-ray beam having selectable sectional shapes

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US (1) US3732426A (enrdf_load_stackoverflow)
JP (1) JPS5435078B1 (enrdf_load_stackoverflow)
DE (1) DE2136460A1 (enrdf_load_stackoverflow)
FR (1) FR2099373A5 (enrdf_load_stackoverflow)
GB (1) GB1354177A (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3962583A (en) * 1974-12-30 1976-06-08 The Machlett Laboratories, Incorporated X-ray tube focusing means
US4344181A (en) * 1978-06-21 1982-08-10 Baecklund Nils J Method and apparatus for measuring the content or quantity of a given element by means of X-ray radiation
EP0150364A3 (en) * 1984-01-19 1985-09-04 Siemens Aktiengesellschaft X-ray diagnostic installation with an x-ray tube
US4675890A (en) * 1982-10-05 1987-06-23 Thomson-Csf X-ray tube for producing a high-efficiency beam and especially a pencil beam
WO1998013853A1 (en) * 1996-09-27 1998-04-02 Bede Scientific Instruments Limited X-ray generator
DE19639920A1 (de) * 1996-09-27 1998-04-30 Siemens Ag Röntgenröhre mit variablem Fokus
WO2000025342A1 (en) * 1998-10-27 2000-05-04 Litton Systems, Inc. X-ray tube providing variable imaging spot size
US20080043920A1 (en) * 2000-10-06 2008-02-21 The University Of North Carolina At Chapel Hill Micro-focus field emission x-ray sources and related methods
CN102884606A (zh) * 2010-04-09 2013-01-16 Ge传感与检测技术有限公司 微焦x射线管的阴极元件
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4954525B2 (ja) * 2005-10-07 2012-06-20 浜松ホトニクス株式会社 Ｘ線管
JP7048396B2 (ja) 2018-04-12 2022-04-05 浜松ホトニクス株式会社 Ｘ線管

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US2849634A (en) * 1956-07-09 1958-08-26 Vickers Electrical Co Ltd Linear electron accelerators
US2866902A (en) * 1955-07-05 1958-12-30 High Voltage Engineering Corp Method of and apparatus for irradiating matter with high energy electrons
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US2944175A (en) * 1959-03-26 1960-07-05 Motorola Inc Television receiver
US3028491A (en) * 1958-06-20 1962-04-03 Zeiss Carl Apparatus for producing and shaping a beam of charged particles
US3376449A (en) * 1967-01-20 1968-04-02 Ion Physics Corp Electrostatic quadrapole lens assembly with transverse intermediate termination elements of resistive material joining together the quadrapole electrodes for preventing beam aberration

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2866902A (en) * 1955-07-05 1958-12-30 High Voltage Engineering Corp Method of and apparatus for irradiating matter with high energy electrons
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US2849634A (en) * 1956-07-09 1958-08-26 Vickers Electrical Co Ltd Linear electron accelerators
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US3028491A (en) * 1958-06-20 1962-04-03 Zeiss Carl Apparatus for producing and shaping a beam of charged particles
US2944175A (en) * 1959-03-26 1960-07-05 Motorola Inc Television receiver
US3376449A (en) * 1967-01-20 1968-04-02 Ion Physics Corp Electrostatic quadrapole lens assembly with transverse intermediate termination elements of resistive material joining together the quadrapole electrodes for preventing beam aberration

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3962583A (en) * 1974-12-30 1976-06-08 The Machlett Laboratories, Incorporated X-ray tube focusing means
US4344181A (en) * 1978-06-21 1982-08-10 Baecklund Nils J Method and apparatus for measuring the content or quantity of a given element by means of X-ray radiation
US4675890A (en) * 1982-10-05 1987-06-23 Thomson-Csf X-ray tube for producing a high-efficiency beam and especially a pencil beam
EP0150364A3 (en) * 1984-01-19 1985-09-04 Siemens Aktiengesellschaft X-ray diagnostic installation with an x-ray tube
US6282263B1 (en) 1996-09-27 2001-08-28 Bede Scientific Instruments Limited X-ray generator
WO1998013853A1 (en) * 1996-09-27 1998-04-02 Bede Scientific Instruments Limited X-ray generator
DE19639920A1 (de) * 1996-09-27 1998-04-30 Siemens Ag Röntgenröhre mit variablem Fokus
US5812632A (en) * 1996-09-27 1998-09-22 Siemens Aktiengesellschaft X-ray tube with variable focus
DE19639920C2 (de) * 1996-09-27 1999-08-26 Siemens Ag Röntgenröhre mit variablem Fokus
WO2000025342A1 (en) * 1998-10-27 2000-05-04 Litton Systems, Inc. X-ray tube providing variable imaging spot size
US6236713B1 (en) 1998-10-27 2001-05-22 Litton Systems, Inc. X-ray tube providing variable imaging spot size
US20080043920A1 (en) * 2000-10-06 2008-02-21 The University Of North Carolina At Chapel Hill Micro-focus field emission x-ray sources and related methods
US7826595B2 (en) * 2000-10-06 2010-11-02 The University Of North Carolina Micro-focus field emission x-ray sources and related methods
CN102884606A (zh) * 2010-04-09 2013-01-16 Ge传感与检测技术有限公司 微焦x射线管的阴极元件
US20130039475A1 (en) * 2010-04-09 2013-02-14 Ge Sensing & Inspection Technologies Gmbh Cathode element for a microfocus x-ray tube
US9601300B2 (en) * 2010-04-09 2017-03-21 Ge Sensing And Inspection Technologies Gmbh Cathode element for a microfocus x-ray tube
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube

Also Published As

Publication number Publication date
FR2099373A5 (enrdf_load_stackoverflow) 1972-03-10
GB1354177A (en) 1974-06-05
JPS5435078B1 (enrdf_load_stackoverflow) 1979-10-31
DE2136460A1 (de) 1972-03-09

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