US3689798A - Device for automatically controlling electrical conditions of an electron beam unit - Google Patents

Device for automatically controlling electrical conditions of an electron beam unit Download PDF

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Publication number
US3689798A
US3689798A US163028A US3689798DA US3689798A US 3689798 A US3689798 A US 3689798A US 163028 A US163028 A US 163028A US 3689798D A US3689798D A US 3689798DA US 3689798 A US3689798 A US 3689798A
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United States
Prior art keywords
cathode
heating
main
unit
main cathode
Prior art date
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Expired - Lifetime
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US163028A
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English (en)
Inventor
Igor Pavlovich Brukovsky
Pavel Borisovich Yakovlev
Kirill Davidovich Gutterman
Alexandr Vasilievich Perov
Vladimir Fedorovich Zhukov
Larisa Petrovna Nekrasova
Jury Dmitrievich Ivanovsky
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Moskovsky Energetichesky Institut
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Moskovsky Energetichesky Institut
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
    • G05F1/40—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices
    • G05F1/44—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only

Definitions

  • ABSTRACT A device for automatically controlling electrical conditions ofean electron bearnunit having an electron gun wherein a main cathode is heated by a current of electrons emitted by an auxiliary cathode, the main cathode of. the electron gun is supplied from a main 1969. cathode heating unit, the auxiliary cathode is supplied from an auxiliary cathode heating unit and a heating Foreign Application Priority D t correction unit of said main cathode is connected to at l f (1 ts. July 17, 1968 ussa. ..l257961 east Sal 1 Claim, 2 Drawing Figures [1.8. Cl....L .315/1116, 219/121 EB, 315/107,
  • the present invention relates to electrothermics, more particularly, to devices for automatically controlling electrical conditions of electron beam units having electron guns.
  • a disadvantage of these devices is that they do not provide the required stability of the electrical conditions of an electron beam unit having an electron gun when the vapors of the metal'being heated condense on the surface of the cathode or when the cathode temperature changes under the influence of positive ions which bombard the cathode surface or under the influence of a thermal flux resulting from radiation of heat from the surface of the body being heated.
  • An object of the present invention is to obviate the above disadvantages by providing a device for automatically controlling electrical conditions of an electron beam unit having an electron gun which would increase the stability of the electrical conditions when the cathode emission decreases due to condensation on its surface of the vapors of the material being heated or when the cathode temperature changes due to the bombardment of the cathode surface by a current of positive ions or due to the appearance of a thermal flux resulting from radiation of heat from the surface of the article being heated.
  • the main cathode heating correction unit must be preferably connected both to the main cathode heating unit and to the auxiliary cathode heating unit which must be made adjustable.
  • the device described herein makes the electrical operating conditions of the electron beam unit more stable, increases the efficiency of the unit and improves the quality of the finished article.
  • FIG. 1 is a block diagram of a device for automatically controlling electrical conditions of an electron beam unit
  • FIG. 2 is a diagram of one specific embodiment of the invention.
  • the temperature of the emitting cathode surface depends on both on the power which is consumed from the cathode power source for heating the cathode and on the radiation flux from the surface of the article being heated.
  • the emitting surface of the main cathode of an electron gun and the surface of the article being heated are located with in the zone of mutual irradiation.
  • Another factor which affects the temperature of the emitting surface of the cathode and, consequently, the power of the unit is the varying intensity of the ion current to the cathode caused by fluctuation of the pressure and composition of the gases in the working chamber.
  • an electron gun I is supplied from an electron gun source 2.
  • a main cathode of the electron gun I is'supplied from a main cathode heating unit 3 which comprises a means 4' (FIG. 2) controlling the operating conditions of the heating unit.
  • An auxiliary cathode of the electron gun I is supplied from an auxiliary cathode heating unit 5 which comprises a means 6 controlling its operating conditions.
  • a main cathode heating correction unit 7 is connected to the output of the source 2 supplying the electron gun 1.
  • the supply source 2 of the electron gun 1 comprising a rectifier 8 and a transformer 9 connected through terminals 10, 11 and 12 to a supply line, is connected to the electrodes of the electron gun I.
  • the main cathode heating unit 3 comprising a rectifier 13, a transformer 14 connected through terminal 15 and 16 to the supply line of series-parallel thyristors 17 and 18, and a means 4 controlling the operating conditions is connected to the main and auxiliary cathode of the electron gun 1.
  • the auxiliary cathode heating unit 5 comprising a transformer 19, a series-parallel thyristors 20 and 21 and a system 6 controlling the operating conditions is connected to the supply line through terminals 22 and 23.
  • the device operates as follows.
  • a signal is applied from the output of the source 2 supplying the electron gun I to the main cathode heating correction unit 7 from which a correction signal is furnished to the main cathode heating unit 3 and the auxiliary cathode heating unit 5.
  • the means 4 and 6 controlling the operating conditions operate the final control elements of the main cathode heating unit 3 and the auxiliary cathode heating unit in such a way that the power of the main cathode supply source and, consequently, the cathode temperature will keep changing until the current or voltage of the electron gun settles at the preassigned level.
  • the signal from the main cathode heating correction unit 7 may be applied only to the auxiliary cathode heating unit 5 which remainsadjustable.
  • main cathode heating correction unit 7 in the device described herein makes it possible automatically to vary the power of the main cathode supply source and, consequently, the temperature of the emitting surface of the main cathode depending on the signal applied from the output of the power supply source 2.
  • a device for automatically controlling electrical conditions of an electron beam unit heating an element the electron beam unit having an electron gun supply having an electron gun wherein a main cathode is heated by a current of electrons emitted by an auxiliary cathode
  • the improvement comprising a main cathode heating unit supplying said main cathode, an auxiliary cathode heating unit supplying said auxiliary cathode, and a main cathode heating correction means coupled between the electron gun supply and at least one of said heating units, said heating correction means detecting deviations of the current flowing between the main cathode and the element to be heated, said correction means varying the heating conditions of the main cathode in response to said deviations to stabilize the current by varying the power output of said at least one heating unit.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)
US163028A 1968-07-17 1971-07-16 Device for automatically controlling electrical conditions of an electron beam unit Expired - Lifetime US3689798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1257961A SU490099A1 (ru) 1968-07-17 1968-07-17 Устройство дл автоматического регулировани электрического режима электротермической установки с электронной пушкой

Publications (1)

Publication Number Publication Date
US3689798A true US3689798A (en) 1972-09-05

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US163028A Expired - Lifetime US3689798A (en) 1968-07-17 1971-07-16 Device for automatically controlling electrical conditions of an electron beam unit

Country Status (9)

Country Link
US (1) US3689798A (ru)
AT (1) AT293564B (ru)
BE (1) BE736167A (ru)
CH (1) CH497106A (ru)
CS (1) CS160802B1 (ru)
DE (1) DE1935710A1 (ru)
FR (1) FR2013155A1 (ru)
GB (1) GB1270339A (ru)
SU (1) SU490099A1 (ru)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3825839A (en) * 1971-04-30 1974-07-23 Jeol Ltd Constant current field emission electron gun
US3868541A (en) * 1971-06-05 1975-02-25 Philips Corp Filament-current control unit in electron-beam apparatus
US3909663A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
US3909662A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
US4045707A (en) * 1975-04-04 1977-08-30 Leybold-Heraeus Gmbh & Co. Kg System for the power control of high voltage electron beam generators
FR2456384A1 (fr) * 1979-05-08 1980-12-05 Leybold Heraeus Gmbh & Co Kg Dispositif d'alimentation haute tension pour canons electroniques de puissance
FR2461354A1 (fr) * 1979-07-13 1981-01-30 Leybold Heraeus Gmbh & Co Kg Montage pour la commande de puissance d'un canon electronique haute tension
US20040108812A1 (en) * 2002-12-10 2004-06-10 Applied Materials, Inc. Current-stabilizing illumination of photocathode electron beam source
EP1720193A1 (de) * 2005-05-04 2006-11-08 Applied Films GmbH & Co. KG Anordnung für die Regelung der Elektronenstrahlleistung einer Elektronenstrahlkanone
US20100263590A1 (en) * 2008-12-01 2010-10-21 United Technologies Corporation Vapor Deposition Electron Beam Current Control

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2953701A (en) * 1957-09-05 1960-09-20 High Voltage Engineering Corp Sealed-off diode with electron emitting anode
US3072822A (en) * 1961-05-19 1963-01-08 Julian C Holmes Emission current regulator
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating
US3250893A (en) * 1963-10-01 1966-05-10 Union Carbide Corp Method for providing a source of heat

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2953701A (en) * 1957-09-05 1960-09-20 High Voltage Engineering Corp Sealed-off diode with electron emitting anode
US3072822A (en) * 1961-05-19 1963-01-08 Julian C Holmes Emission current regulator
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating
US3250893A (en) * 1963-10-01 1966-05-10 Union Carbide Corp Method for providing a source of heat

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3825839A (en) * 1971-04-30 1974-07-23 Jeol Ltd Constant current field emission electron gun
US3868541A (en) * 1971-06-05 1975-02-25 Philips Corp Filament-current control unit in electron-beam apparatus
US3909663A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
US3909662A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
US4045707A (en) * 1975-04-04 1977-08-30 Leybold-Heraeus Gmbh & Co. Kg System for the power control of high voltage electron beam generators
US4315195A (en) * 1979-05-08 1982-02-09 Leybold Heraeus Gmbh High-voltage supply for power electron-beam guns
FR2456384A1 (fr) * 1979-05-08 1980-12-05 Leybold Heraeus Gmbh & Co Kg Dispositif d'alimentation haute tension pour canons electroniques de puissance
FR2461354A1 (fr) * 1979-07-13 1981-01-30 Leybold Heraeus Gmbh & Co Kg Montage pour la commande de puissance d'un canon electronique haute tension
US4314182A (en) * 1979-07-13 1982-02-02 Leybold-Heraeus Gmbh System for controlling the power of a high-voltage electron beam generator
US20040108812A1 (en) * 2002-12-10 2004-06-10 Applied Materials, Inc. Current-stabilizing illumination of photocathode electron beam source
US6847164B2 (en) 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
EP1720193A1 (de) * 2005-05-04 2006-11-08 Applied Films GmbH & Co. KG Anordnung für die Regelung der Elektronenstrahlleistung einer Elektronenstrahlkanone
US20060250092A1 (en) * 2005-05-04 2006-11-09 Gunter Klemm Arrangement for the regulation of the electron beam power of an electron gun
US7808183B2 (en) 2005-05-04 2010-10-05 Applied Materials Gmbh & Co. Kg Arrangement for the regulation of the electron beam power of an electron gun
US20100263590A1 (en) * 2008-12-01 2010-10-21 United Technologies Corporation Vapor Deposition Electron Beam Current Control

Also Published As

Publication number Publication date
CH497106A (de) 1970-09-30
SU490099A1 (ru) 1975-10-30
BE736167A (ru) 1970-01-16
DE1935710A1 (de) 1970-02-26
FR2013155A1 (ru) 1970-03-27
GB1270339A (en) 1972-04-12
CS160802B1 (ru) 1975-05-04
AT293564B (de) 1971-10-11

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