AT293564B - Einrichtung zur automatischen Regelung des Betriebszustandes einer elektrothermischen Anlage - Google Patents

Einrichtung zur automatischen Regelung des Betriebszustandes einer elektrothermischen Anlage

Info

Publication number
AT293564B
AT293564B AT684369A AT684369A AT293564B AT 293564 B AT293564 B AT 293564B AT 684369 A AT684369 A AT 684369A AT 684369 A AT684369 A AT 684369A AT 293564 B AT293564 B AT 293564B
Authority
AT
Austria
Prior art keywords
automatic control
operating status
electrothermal system
electrothermal
status
Prior art date
Application number
AT684369A
Other languages
English (en)
Inventor
Igor Pavlovich Brukovsky
Pavel Borisovich Yakovlev
Kirill Davidovich Guttermann
Alexandr Vasilievich Perov
Vladimir Fedorovich Zhukov
Larisa Petrovna Nekrasova
Jury Dmitrievich Ivanovsky
Original Assignee
Mo Energeticheskij Institut
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mo Energeticheskij Institut filed Critical Mo Energeticheskij Institut
Application granted granted Critical
Publication of AT293564B publication Critical patent/AT293564B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
    • G05F1/40—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices
    • G05F1/44—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)
AT684369A 1968-07-17 1969-07-16 Einrichtung zur automatischen Regelung des Betriebszustandes einer elektrothermischen Anlage AT293564B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1257961A SU490099A1 (ru) 1968-07-17 1968-07-17 Устройство дл автоматического регулировани электрического режима электротермической установки с электронной пушкой

Publications (1)

Publication Number Publication Date
AT293564B true AT293564B (de) 1971-10-11

Family

ID=20443009

Family Applications (1)

Application Number Title Priority Date Filing Date
AT684369A AT293564B (de) 1968-07-17 1969-07-16 Einrichtung zur automatischen Regelung des Betriebszustandes einer elektrothermischen Anlage

Country Status (9)

Country Link
US (1) US3689798A (de)
AT (1) AT293564B (de)
BE (1) BE736167A (de)
CH (1) CH497106A (de)
CS (1) CS160802B1 (de)
DE (1) DE1935710A1 (de)
FR (1) FR2013155A1 (de)
GB (1) GB1270339A (de)
SU (1) SU490099A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (de) * 1971-04-30
NL7107749A (de) * 1971-06-05 1972-12-07
DE2325808C2 (de) * 1973-05-22 1983-07-14 Leybold-Heraeus GmbH, 5000 Köln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
DE2325786C2 (de) * 1973-05-22 1983-10-06 Leybold-Heraeus Gmbh, 5000 Koeln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
DE2514805C3 (de) * 1975-04-04 1978-05-18 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Anordnung zur Leistungssteuerung von Hochspannungs-EIektronenstrahlerzeugern
DE2918426A1 (de) * 1979-05-08 1980-11-20 Leybold Heraeus Gmbh & Co Kg Hochspannungsversorgungseinrichtung fuer leistungs-elektronenstrahlkanonen
DE2928301C2 (de) * 1979-07-13 1983-12-29 Leybold-Heraeus GmbH, 5000 Köln Anordnung zur Leistungssteuerung eines Hochspannungs-Elektronenstrahlerzeugers
US6847164B2 (en) * 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
DE102005020815B4 (de) 2005-05-04 2007-05-10 Applied Materials Gmbh & Co. Kg Anordnung für die Regelung der Elektronenstrahlleistung einer Elektronenstrahlkanone
US20100263590A1 (en) * 2008-12-01 2010-10-21 United Technologies Corporation Vapor Deposition Electron Beam Current Control

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2953701A (en) * 1957-09-05 1960-09-20 High Voltage Engineering Corp Sealed-off diode with electron emitting anode
US3072822A (en) * 1961-05-19 1963-01-08 Julian C Holmes Emission current regulator
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating
US3250893A (en) * 1963-10-01 1966-05-10 Union Carbide Corp Method for providing a source of heat

Also Published As

Publication number Publication date
US3689798A (en) 1972-09-05
DE1935710A1 (de) 1970-02-26
FR2013155A1 (de) 1970-03-27
GB1270339A (en) 1972-04-12
BE736167A (de) 1970-01-16
CH497106A (de) 1970-09-30
SU490099A1 (ru) 1975-10-30
CS160802B1 (de) 1975-05-04

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee