BE736167A - - Google Patents
Info
- Publication number
- BE736167A BE736167A BE736167DA BE736167A BE 736167 A BE736167 A BE 736167A BE 736167D A BE736167D A BE 736167DA BE 736167 A BE736167 A BE 736167A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/242—Filament heating power supply or regulation circuits
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
- G05F1/40—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices
- G05F1/44—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Automation & Control Theory (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1257961A SU490099A1 (ru) | 1968-07-17 | 1968-07-17 | Устройство дл автоматического регулировани электрического режима электротермической установки с электронной пушкой |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE736167A true BE736167A (ru) | 1970-01-16 |
Family
ID=20443009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE736167D BE736167A (ru) | 1968-07-17 | 1969-07-16 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3689798A (ru) |
| AT (1) | AT293564B (ru) |
| BE (1) | BE736167A (ru) |
| CH (1) | CH497106A (ru) |
| CS (1) | CS160802B1 (ru) |
| DE (1) | DE1935710A1 (ru) |
| FR (1) | FR2013155A1 (ru) |
| GB (1) | GB1270339A (ru) |
| SU (1) | SU490099A1 (ru) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE221138C (ru) * | 1971-04-30 | |||
| NL7107749A (ru) * | 1971-06-05 | 1972-12-07 | ||
| DE2325808C2 (de) * | 1973-05-22 | 1983-07-14 | Leybold-Heraeus GmbH, 5000 Köln | Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers |
| DE2325786C2 (de) * | 1973-05-22 | 1983-10-06 | Leybold-Heraeus Gmbh, 5000 Koeln | Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers |
| DE2514805C3 (de) * | 1975-04-04 | 1978-05-18 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Anordnung zur Leistungssteuerung von Hochspannungs-EIektronenstrahlerzeugern |
| DE2918426A1 (de) * | 1979-05-08 | 1980-11-20 | Leybold Heraeus Gmbh & Co Kg | Hochspannungsversorgungseinrichtung fuer leistungs-elektronenstrahlkanonen |
| DE2928301C2 (de) * | 1979-07-13 | 1983-12-29 | Leybold-Heraeus GmbH, 5000 Köln | Anordnung zur Leistungssteuerung eines Hochspannungs-Elektronenstrahlerzeugers |
| US6847164B2 (en) * | 2002-12-10 | 2005-01-25 | Applied Matrials, Inc. | Current-stabilizing illumination of photocathode electron beam source |
| DE102005020815B4 (de) | 2005-05-04 | 2007-05-10 | Applied Materials Gmbh & Co. Kg | Anordnung für die Regelung der Elektronenstrahlleistung einer Elektronenstrahlkanone |
| US20100263590A1 (en) * | 2008-12-01 | 2010-10-21 | United Technologies Corporation | Vapor Deposition Electron Beam Current Control |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2953701A (en) * | 1957-09-05 | 1960-09-20 | High Voltage Engineering Corp | Sealed-off diode with electron emitting anode |
| US3072822A (en) * | 1961-05-19 | 1963-01-08 | Julian C Holmes | Emission current regulator |
| US3158733A (en) * | 1962-09-12 | 1964-11-24 | Nat Res Corp | Focus control for electron beam heating |
| US3250893A (en) * | 1963-10-01 | 1966-05-10 | Union Carbide Corp | Method for providing a source of heat |
-
1968
- 1968-07-17 SU SU1257961A patent/SU490099A1/ru active
-
1969
- 1969-07-14 DE DE19691935710 patent/DE1935710A1/de active Pending
- 1969-07-15 CS CS4999A patent/CS160802B1/cs unknown
- 1969-07-15 CH CH1081969A patent/CH497106A/de not_active IP Right Cessation
- 1969-07-16 GB GB35812/69A patent/GB1270339A/en not_active Expired
- 1969-07-16 AT AT684369A patent/AT293564B/de not_active IP Right Cessation
- 1969-07-16 BE BE736167D patent/BE736167A/xx unknown
- 1969-07-17 FR FR6924438A patent/FR2013155A1/fr not_active Withdrawn
-
1971
- 1971-07-16 US US163028A patent/US3689798A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3689798A (en) | 1972-09-05 |
| AT293564B (de) | 1971-10-11 |
| DE1935710A1 (de) | 1970-02-26 |
| FR2013155A1 (ru) | 1970-03-27 |
| GB1270339A (en) | 1972-04-12 |
| CH497106A (de) | 1970-09-30 |
| SU490099A1 (ru) | 1975-10-30 |
| CS160802B1 (ru) | 1975-05-04 |