US3662522A - Getter pump cartridge - Google Patents

Getter pump cartridge Download PDF

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Publication number
US3662522A
US3662522A US55029A US3662522DA US3662522A US 3662522 A US3662522 A US 3662522A US 55029 A US55029 A US 55029A US 3662522D A US3662522D A US 3662522DA US 3662522 A US3662522 A US 3662522A
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US
United States
Prior art keywords
segments
getter
cartridge
elevations
substrate
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US55029A
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English (en)
Inventor
Paolo Della Porta
Bruno Ferrario
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SAES Getters SpA
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SAES Getters SpA
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Application filed by SAES Getters SpA filed Critical SAES Getters SpA
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Publication of US3662522A publication Critical patent/US3662522A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Definitions

  • Getter pumps are well known in vacuum technology and are useful for removing residual gases from closed vessels such as electron tubes in order to produce and maintain within these vessels a high degree of vacuum. Such getter pumps are described in references (a) through (d). These getter pumps employ a finely divided non-evaporable getter metal on a substrate. In operation the surfaces of the getter metal particles sorb residual gases in the vessel thus reducing the quantity of gases present and producing a high degree of vacuum. The surface of the getter metal will continue to sorb gases until the surface becomes saturated with sorbed gases and reaction products of sorbed gases with the getter metal.
  • alpha should generally be between 1 and 15 and should preferably be between 2 and 10. While prior getter pumps such as those described in reference (a) can be manufactured having the desired initial value of alpha this value can be changed for individual adjacent surfaces by mechanical deformation with the undesirable result of a reduction in the pumping speed of the pump.
  • Another object is to provide an improved getter pump cartridge which is not easily deformed.
  • a further object is to provide an improved getter pump cartridge wherein alpha is constant.
  • a still further object is to provide an improved getter pump cartridge which exhibits a maximum pumping rate for a given quantity of getter metal.
  • FIG. 1 comprising FIGS. la and 1b constitute an exploded view of a getter pump of the present invention employing in FIG. la an improved getter pump cartridge;
  • FIG. 2 is a top view of the getter pump cartridge of FIG. 1a;
  • FIG. 3 is a graph of pumping rate versus alpha for three commonly pumped gases
  • FIG. 4 is a top view of a strip useful in the present invention.
  • FIG. 5 is a sectional view taken along line 5-5 of FIG. 4;
  • FIG. 6 is an enlarged sectional view taken along line 6-6 of FIG. 4;
  • F IG. 7 is an enlarged sectional view taken along line 77 of FIG. 4;
  • FIG. 8 is an enlarged sectional view similar to that of FIG. 7 but showing a modified form of a portion of a strip useful in the present invention
  • FIG. 9 is an enlarged sectional view similar to that of FIG. 7 but showing another modified form of a portion of a strip useful in the present invention.
  • FIG. 10 is a view illustrating the manner in which the strip of FIG. 4 is pleated in order to produce a cartridge element useful in the getter pumps of the present invention.
  • an improved cartridge for a getter pump wherein adjacent surfaces of the strip are held at a predetermined angle by spacer means between the adjacent surfaces.
  • the spacer means can be attached to any part of the getter pump. However, it is preferably carried by a segment of the strip and is preferably arranged such that the angle alpha between adjacent outwardly opening segments is maintained at a constant value.
  • the cartridge 10 comprises an upper ring 11 and a lower ring 12 with a circular screen 13 therebetween. Within the screen 13 are a number of cartridge elements of which only elements 14 and 15 can be seen through the cutaway section.
  • the substrate of the elements has a non-evaporable getter metal 16 thereon. The remaining structure of the elements is described more completely below.
  • a flange 20 having a supporting ring 21 adapted to receive the lower ring 12 of the cartridge 10.
  • a heater 22 comprising an insulator 23 carried by the flange 20 and having thereon a wire 24 of high ohmic resistance.
  • the cartridge 10 is moved downwardly until the ring 12 fits within the ring 21. These parts are then held together by means not shown.
  • the entire getter pump is then inserted into a vessel to be evacuated and connected thereto in a gas-tight manner by means of the flange 20. A current is passed through the wire 24 causing it to radiate heat to the getter metal 16, heating and activating it and thereby causing it to become gas sorptive.
  • FIG. 2 illustrates the means by which the angle alpha is measured.
  • FIG. 3 illustrates the variation in pumping rate for three gases as a function of alpha.
  • Curve 31 is for nitrogen and illustrates that pumping rate is a maximum when alpha is equal to approvimately 3.
  • Curve 32 is for hydrogen and illustrates that pumping rate is a maximum when alpha is equal to approximately 4".
  • Curve 33 is for carbon monoxide and illustrates that pumping rate is a maximum when alpha is approximately 6.
  • the strip 40 comprises rectangular segments 41, 42, 43, and 44. Each segment 41, 42, 43, and 44 has a substrate 45 which is common to all segments. The central portion of each segment 41, 42, 43, and 44 is coated with particles 46, 47, 48, and 49 of a non-evaporable getter metal. Each segment 41, 42, 43, and 44 has a first getter free margin 50 common to all and a second getter free margin 51 common to all. The getter free margins 50, 51 are parallel to the running length of the strip 40.
  • segments 41, 42, 43, and 44 are each connected to the respective i next adjacent two segments by foldable bridging attachments.
  • segment 42 is attached to segment 41 by attachments 52 and 53, and is attached to segment 43 by attachments 54 and 55.
  • the bridging attachments 52, 53, 54, and 55 are defined by slots 56 and 57 which extend across the strip 40 transverse to the running length thereof and extend into the getter metal free margins 50 and 51.
  • each of the bridging attachments 52, 53, 54, and 55 has a line of weakness about which the adjacent segments 41 and 43 can be most easily folded.
  • Each of the odd numbered segments are provided with two elevations.
  • segment 41 is provided with elevations 58 and 59
  • segment 43 is provided with elevations 60 and 61.
  • FIGS. 6 and 7 illustrate the preferred structure by which the elevations are attached to the substrate.
  • the elevation 59 constitutes an integral deformation of the metallic substrate 45 inthe getter metal free margin 51 of the segment 41.
  • the structure shown in FIG. 6 is most easily produced by simply pressing the substrate 45 into a mold, not shown, having a depth equal to h,.
  • the elevation 59 is preferably located in the getter metal free margin in order to preclude the possibility of releasing particles of getter metal concurrently with the pressing operation.
  • the elevation 59 comprises an upwardly extending segment 62, a horizontally extending segment 63, having a planar upper surface 64, and a downwardly extending segment 65.
  • the planar upper surface 64 is parallel to the plane of the substrate 45 and provides a larger area of contact between the surface 64 and the back of the surface of the next adjacent segment 42 when the substrate 45 is pleated.
  • FIGS. 8 and 9 there are shown modified forms of elevations also useful in the present invention. These figures represent enlarged sectional views taken through the elevations in a manner analogous to that of FIG. 7.
  • the elevation 67 shown in FIG. 8 has a rounded upper surface 68.
  • the elevation 69 shown in FIG. 9 is designed to contact the back of the surface of the next adjacent segment with its edge 70.
  • the most preferred form of elevation is the elevation 59, the next preferred is the elevation 67, the least preferred being the elevation 69.
  • each of the bridging attachments illustratively shown by attachments 53 and 55 are bent in alternate directions in order to pleat the strip 40 and cause the elevations 59 and 61 to contact that portion of the getter free margin 51 present on the next adjacent even numbered segments 42 and 44. Since the height h of the elevation and its distance I from the fold line determines alpha, it can be seen that It must be substantially equal the tangent of alpha. In that preferred embodiment of the present invention wherein the attachment 53 is sharply bent h/l is exactly equal to the tangent of alpha.
  • non-evaporable getter metal can be employed in the present invention.
  • non-evaporable getter metal metals which are sorptive to gases and which have a vapor pressure less than torr at 1,000" C.
  • suitable getter metals include among others niobium, tantalum, vanadium, zirconium, titanium, mixtures thereof and alloys thereof with one another and with other metals such as aluminum which do not materially reduce the gas sorptive capacity of these metals.
  • the preferred getter metal is an alloy of l to 40 and preferably 13 to 18 weight percent aluminum balance zirconium.
  • the preferred specific alloy is that of 16 percent aluminum and 84 percent zirconium available from SAES Getters S.p.A. under the tradename St 101.
  • the finely divided getter metal can have widely varying particle sizes such that it passes through a U.S. standard screen of IO mesh/inch and preferably passes through a screen of mesh/inch and is retained on a screen of 600 mesh/inch.
  • the substrate 45 can be of any metal but is preferably of a metal which is softer than the getter metal. Suitable substrate metals include among others iron and stainless steel.
  • the getter cartridges of the present invention can be employed in getter pumps with or without heat shields as described in reference (c).
  • the heater 22 can be eliminated by employing a substrate 45 of high ohmic resistance in the manner described in reference (d).
  • a cartridge for a getter pump having at least one cartridge element comprising a circularly formed pleated strip of segments comprising a substrate carrying a non-evaporable getter metal, each segment being joined to the next adjacent segments wherein the angle between adjacent outwardly opening segments is maintained at 1 to 15 by at least one elevation attached to one of the segments such that the elevation lies between the adjacent outwardly opening segments.
  • a cartridge for a getter pump having at least one cartridge element comprising a circularly formed pleated strip of segments comprising a metallic substrate the central portion of which is coated with a non-evaporable getter metal leaving a getter metal free margin, each segment being joined to the next adjacent segments by folded bridging attachments wherein the angle between adjacent outwardly opening segments is maintained at 2 to 10 by two elevations, one each in the getter metal free margins of alternate segments.
  • A. rectangular segments each comprising:
US55029A 1969-07-24 1970-07-15 Getter pump cartridge Expired - Lifetime US3662522A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2004869 1969-07-24

Publications (1)

Publication Number Publication Date
US3662522A true US3662522A (en) 1972-05-16

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US55029A Expired - Lifetime US3662522A (en) 1969-07-24 1970-07-15 Getter pump cartridge

Country Status (6)

Country Link
US (1) US3662522A (ja)
JP (1) JPS5027603B1 (ja)
DE (1) DE2034633C3 (ja)
FR (1) FR2055487A5 (ja)
GB (1) GB1323888A (ja)
NL (1) NL172499C (ja)

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961897A (en) * 1973-10-01 1976-06-08 S.A.E.S. Getters S.P.A. Getter pump
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles
DE2747186A1 (de) * 1976-11-03 1978-05-18 Getters Spa Modulare getter-pumpe
EP0144522A2 (de) * 1983-09-09 1985-06-19 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
EP0146685A2 (de) * 1983-09-09 1985-07-03 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
US4938667A (en) * 1988-09-30 1990-07-03 Saes Getters Spa Method for the manufacture of a vacuum insulating structure and an insulating structure so produced
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5320496A (en) * 1992-07-17 1994-06-14 Saes Getters Spa High-capacity getter pump
WO1996017171A2 (en) * 1994-12-02 1996-06-06 Saes Pure Gas, Inc. Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5772404A (en) * 1995-07-10 1998-06-30 Saes Getters S.P.A. Compact getter pump with nested thermally insulating shields
WO1998058173A1 (en) * 1997-06-17 1998-12-23 Saes Getters S.P.A Getter pump especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
WO2008003724A2 (de) * 2006-07-05 2008-01-10 Von Ardenne Anlagentechnik Gmbh Getterpumpe und vakuumbeschichtungsanlage mit einer getterpumpe
US20090275710A1 (en) * 2008-04-30 2009-11-05 Mcdaniel Max P Methods of preparing a polymerization catalyst
WO2015150974A1 (en) * 2014-04-03 2015-10-08 Saes Getters S.P.A. Getter pump
US20160069338A1 (en) * 2014-08-08 2016-03-10 Vaclab Inc. Non-evaporable getter and non-evaporable getter pump
US20160141160A1 (en) * 2014-11-19 2016-05-19 Hamilton Sundstrand Corporation Ion pumps and ion pump elements
US20170076925A1 (en) * 2014-06-26 2017-03-16 Saes Getters S.P.A. Getter pumping system
US9638183B2 (en) 2012-10-15 2017-05-02 Saes Getters S.P.A. Getter pump
WO2024028240A1 (en) 2022-08-01 2024-02-08 Saes Getters S.P.A. Snap-on getter pump assembly and its use

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4874339A (en) * 1985-08-09 1989-10-17 Saes Getters S.P.A. Pumping tubulation getter

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2154131A (en) * 1937-10-30 1939-04-11 Rca Corp Getter
US2831549A (en) * 1954-08-31 1958-04-22 Westinghouse Electric Corp Isolation trap
US2968361A (en) * 1958-05-12 1961-01-17 Gen Motors Corp Filters for gases
US2984314A (en) * 1957-11-22 1961-05-16 New York Air Brake Co Trapping device
US3144200A (en) * 1962-10-17 1964-08-11 Clyde E Taylor Process and device for cryogenic adsorption pumping
US3309844A (en) * 1963-11-29 1967-03-21 Union Carbide Corp Process for adsorbing gases
US3490211A (en) * 1967-07-31 1970-01-20 Keystone Filter Media Co High efficiency particulate air filter

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2154131A (en) * 1937-10-30 1939-04-11 Rca Corp Getter
US2831549A (en) * 1954-08-31 1958-04-22 Westinghouse Electric Corp Isolation trap
US2984314A (en) * 1957-11-22 1961-05-16 New York Air Brake Co Trapping device
US2968361A (en) * 1958-05-12 1961-01-17 Gen Motors Corp Filters for gases
US3144200A (en) * 1962-10-17 1964-08-11 Clyde E Taylor Process and device for cryogenic adsorption pumping
US3309844A (en) * 1963-11-29 1967-03-21 Union Carbide Corp Process for adsorbing gases
US3490211A (en) * 1967-07-31 1970-01-20 Keystone Filter Media Co High efficiency particulate air filter

Cited By (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961897A (en) * 1973-10-01 1976-06-08 S.A.E.S. Getters S.P.A. Getter pump
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles
DE2747186A1 (de) * 1976-11-03 1978-05-18 Getters Spa Modulare getter-pumpe
FR2370357A1 (fr) * 1976-11-03 1978-06-02 Getters Spa Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
EP0144522A2 (de) * 1983-09-09 1985-06-19 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
EP0146685A2 (de) * 1983-09-09 1985-07-03 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
US4571158A (en) * 1983-09-09 1986-02-18 Siemens Aktiengesellschaft Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems
EP0146685A3 (de) * 1983-09-09 1986-10-01 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
EP0144522A3 (de) * 1983-09-09 1986-10-15 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
US4938667A (en) * 1988-09-30 1990-07-03 Saes Getters Spa Method for the manufacture of a vacuum insulating structure and an insulating structure so produced
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5320496A (en) * 1992-07-17 1994-06-14 Saes Getters Spa High-capacity getter pump
US5324172A (en) * 1992-07-17 1994-06-28 Saes Getters S.P.A. High-capacity getter pump
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5879134A (en) * 1994-10-31 1999-03-09 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5980213A (en) * 1994-10-31 1999-11-09 Saes Getters S.P.A. Getter pump module and system
US5993165A (en) * 1994-10-31 1999-11-30 Saes Pure Gas, Inc. In Situ getter pump system and method
US5997255A (en) * 1994-10-31 1999-12-07 Saes Getters S.P.A. Method for pumping a chamber using an in situ getter pump
US6043137A (en) * 1994-10-31 2000-03-28 Saes Getters S.P.A. Getter pump module and system
US6165328A (en) * 1994-10-31 2000-12-26 Saes Getters S.P.A. Method for processing wafers with in situ gettering
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
WO1996017171A3 (en) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Getter pump module and system
WO1996017171A2 (en) * 1994-12-02 1996-06-06 Saes Pure Gas, Inc. Getter pump module and system
US5772404A (en) * 1995-07-10 1998-06-30 Saes Getters S.P.A. Compact getter pump with nested thermally insulating shields
US6074171A (en) * 1997-06-17 2000-06-13 Saes Getters S.P.A. Getter pump especially suitable for the use upstream, in proximity coaxially with respect to a turbomolecular pump
WO1998058173A1 (en) * 1997-06-17 1998-12-23 Saes Getters S.P.A Getter pump especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump
WO2008003724A2 (de) * 2006-07-05 2008-01-10 Von Ardenne Anlagentechnik Gmbh Getterpumpe und vakuumbeschichtungsanlage mit einer getterpumpe
WO2008003724A3 (de) * 2006-07-05 2008-02-28 Ardenne Anlagentech Gmbh Getterpumpe und vakuumbeschichtungsanlage mit einer getterpumpe
US20090202362A1 (en) * 2006-07-05 2009-08-13 Von Ardenne Anlagentechnik Gmbh Getter pump and vacuum coating installation comprising a getter pump
US8197222B2 (en) 2006-07-05 2012-06-12 Von Ardenne Anlagentechnik Gmbh Getter pump and vacuum coating installation comprising a getter pump
US20090275710A1 (en) * 2008-04-30 2009-11-05 Mcdaniel Max P Methods of preparing a polymerization catalyst
US8211988B2 (en) 2008-04-30 2012-07-03 Chevron Phillips Chemical Company Lp Methods of preparing a polymerization catalyst
US9638183B2 (en) 2012-10-15 2017-05-02 Saes Getters S.P.A. Getter pump
WO2015150974A1 (en) * 2014-04-03 2015-10-08 Saes Getters S.P.A. Getter pump
CN106133314B (zh) * 2014-04-03 2017-09-22 工程吸气公司 吸气剂泵
JP2017510748A (ja) * 2014-04-03 2017-04-13 サエス・ゲッターズ・エッセ・ピ・ア ゲッターポンプ
CN106133314A (zh) * 2014-04-03 2016-11-16 工程吸气公司 吸气剂泵
US9541078B2 (en) 2014-04-03 2017-01-10 Saes Getters S.P.A. Getter pump
US9685308B2 (en) * 2014-06-26 2017-06-20 Saes Getters S.P.A. Getter pumping system
US20170076925A1 (en) * 2014-06-26 2017-03-16 Saes Getters S.P.A. Getter pumping system
US20160069338A1 (en) * 2014-08-08 2016-03-10 Vaclab Inc. Non-evaporable getter and non-evaporable getter pump
US9945368B2 (en) * 2014-08-08 2018-04-17 Vaclab Inc. Non-evaporable getter and non-evaporable getter pump
US10107277B2 (en) 2014-08-08 2018-10-23 Vaclab Inc. Non-evaporable getter and non-evaporable getter pump
US20160141160A1 (en) * 2014-11-19 2016-05-19 Hamilton Sundstrand Corporation Ion pumps and ion pump elements
US11508564B2 (en) * 2014-11-19 2022-11-22 Hamilton Sundstrand Corporation Ion pumps and ion pump elements
WO2024028240A1 (en) 2022-08-01 2024-02-08 Saes Getters S.P.A. Snap-on getter pump assembly and its use

Also Published As

Publication number Publication date
NL7010992A (ja) 1971-01-26
NL172499C (nl) 1983-09-01
FR2055487A5 (ja) 1971-05-07
DE2034633A1 (de) 1971-02-04
DE2034633B2 (de) 1979-02-22
JPS5027603B1 (ja) 1975-09-09
GB1323888A (en) 1973-07-18
DE2034633C3 (de) 1979-10-25
NL172499B (nl) 1983-04-05

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