US3652821A - Electron gun for heating materials in an evacuated container - Google Patents

Electron gun for heating materials in an evacuated container Download PDF

Info

Publication number
US3652821A
US3652821A US14008A US3652821DA US3652821A US 3652821 A US3652821 A US 3652821A US 14008 A US14008 A US 14008A US 3652821D A US3652821D A US 3652821DA US 3652821 A US3652821 A US 3652821A
Authority
US
United States
Prior art keywords
tube
container
yoke
vacuum
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US14008A
Other languages
English (en)
Inventor
Walter A Dietrich
Helmut G M V Dellery
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Application granted granted Critical
Publication of US3652821A publication Critical patent/US3652821A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Definitions

  • ABSTRACT An electron gun for heating materials in vacuo, includin electron beam source, an electron lens, a deflector, means connecting the deflector and winding means.
  • the invention relates to an electron gun for heating materials inan evacuated container.
  • Said gun consists of a source of abeam of electrons, at least one electron lens, and at least one deflector unit arranged substantially symmetrically relative to the beam for deflecting the beam in the interior of the container, a vacuum-tight beam guiding tube being interposed between the axis of the beam on the one hand and the electron lens, the winding and the yoke of the deflector unit on the other hand, the tube being adapted to be connected with the container, and the free end of the tube being closed by the source of the electron beam.
  • An electron gun of the aforedescribed type is known, for example, from published German Pat. application No. 1,248,175.
  • the known gun when in the assembled condition, has an electron lens and a deflector unit which project into the interior of a container capable of being evacuated in which a heating process is to be performed. Materials of all kinds may be molten, welded or evaporated thereby.
  • the portion of the gun extending into the container is equipped with a cooling jacket for protecting the heat sensitive coils of the electron lens and of the deflector unit.
  • the known gun is only of limited applicability to containers in which an extremely high vacuum is to be generated and to be maintained during the operation of the gun. However, an extremely high vacuum is needed particularly for many coating processes by vacuum evaporation.
  • the internal face of the vacuum container must be degassed thermally if the required low pressure is to be achieved, that is, the container walls must be brought to a temperature high enough so that the residual gas molecules are released from the wall portions and can thereafter be pumped off.
  • the necessary temperatures frequently are in the range up to 400 C. and sometimes even higher.
  • the known guns are not suitable for such high temperatures for the following reasons: When water cooled, the surfaces of the gun projecting into the container cannot be thermally degassed. In the absence of water cooling, the electrical insulation of the magnet coils would be destroyed. It is not permissible to remove the gun, because the vacuum in the container would be destroyed.
  • the pole pieces and the yoke with the winding of the deflector unit constitute separate sub-assemblies, the pole pieces being adapted to be fixedly connected with the vacuum container, and the yoke with the winding being adapted to be slipped from the beam guiding tube.
  • FIG. 1 is a vertical sectional view of an electron gun of the invention attached to a partly illustrated vacuum container in elevational section;
  • FIG. 2 shows the embodiment of FIG. 1 in an elevational, partly exploded view on a smaller scale
  • FIG. 3 is a perspective exploded view of the deflector unit of the apparatus of FIG. 1.
  • an electron gun 1 whose principal elements are a source 20f an electron beam, an electron lens 3, and a deflector unit 4 fordeflecting the electron beam 5 in the interior of a container 6 at an angle from its original axis.
  • the electron source consists essentially of a thermal emission cathode 7 partly shielded by an apertured cap 8 or Wehnelt cylinder and an acceleratoranode 18 which is at ground potential, a high potential being established between the electrodes during operation of the gun.
  • the electrodes are connected to a nonillustrated high-voltage line by two plugs 9,10 cooperating with contacts (not shown) in a socket 1 1 of insulating material mounted on a flange 12 on a tubular, ceramic, high-voltage insulator 13 in vacuum-sealing relationship.
  • the plugs 9,10 also supply filament current for the cathode 7.
  • the end of the insulator 13 remote from theflange 12 carries another flange 14.
  • a counter flange 15 is connected to the flange 14 by nonillustrated bolts and nuts, and the two flanges 14,15 are sealed to each other by interposed spacer rings 16,17 which envelop the accelerator anode 18 having the shape of a hollow conefFlange 15 is connected to a beam guiding tube 19 which provides a vacuum-tight connection between the electron source 2 and the vacuum container 6.
  • the end of the tube 19 remote from the source 2 is provided with a radial flange 20 of nonferrous metal sealed to a cooperating flange 22 on the container 6 by means of an O- ring 21, of asbestos or soft copper.
  • deflector unit 4 includes an approximately U-shaped magnet core of iron consisting of two leg portions 23 carrying respective pole pieces 24 and a yoke 25.
  • the two leg portions 23 and the yoke 25 are three separate structural units whose faces 26 are abuttingly engaged in the assembled condition of the gun for transmitting magnetic flux.
  • the leg portions 23 are fixedly fastened to the flange 20 in vacuum-tight engagement.
  • the yoke 25 is a flat ring whose principal plane is perpendicular to the axis of the straight tube 19.
  • Diametrically opposite parts of the yoke carry integral axial abutment lugs 27 of the same cross section as the respective, abuttingly engaged leg portions 23, and each carrying a coil 28 of the magnet winding.
  • the coils 28 When the coils 28 are energized through nonillustrated conventional leads, a magnetic field is generated between the pole pieces 24 having lines of flux approximately perpendicular to the axis of the electron beam and therefore deflecting the latter, the magnitude of the deflection being a function of the exciting current under otherwise identical conditions.
  • the yoke 25, the coils 28 and the electron lens are mounted in a shell 29 of generally cylindrical shape, as shown.
  • a spacer non-ferromagnetic ring 38 such as insulating material separates the lens 3 from the deflector unit 4 to avoid interference with the magnetic fields.
  • the shell 29 and the elements mounted thereon may be slipped from the tube 19 in an axially upward direction, as viewed in the drawing. This normally rests on a collar 30 on the tube 19.
  • the radial bottom wall of the shell 29 is apertured for passage of the tube 19 and of the leg portions 23.
  • Electron lens 3 is equipped with an iron sleeve 32 with an opening of the same dimensions as the central opening 37 of yoke 25 to permit the shell 29 with the attached devices to be slipped over the electron beam source 2.
  • the top end of the shell 29 is covered with an annular plate 33 which supports a protective cap 34 for electron source 2. It is provided with an external, grounded, metallic coating too thin to be shown in FIG. 1.
  • the central opening 35 of plate 33 is wide enough for passage of the electron source 2 therethrough.
  • Plate 33 is normally connected with the counter flange by a nonillustrated bayonet closure which holds the shell 29 axially against the collar 30 when engaged.
  • the central portion of plate 33 is axially enlarged for coaxially securing the top end of the shell 29.
  • Deflector unit 4 shown in the drawing permits beam 5 to be deflected in one plane only. It will be appreciated that the illustrated apparatus may be equipped with a second analogous unit offset 90 from the unit 4 so that beam 5 may scan all portions of a plane in the container 6 which is horizontal in the view ofFlG. 1.
  • leg portions have respective free abutment faces
  • fastening means for fixedly fastening said leg portions to said container
  • said yoke means including two abutment portions, said abutment portions respectively engaging said abutment faces for passage of magnetic flux therebetween when said yoke means are mounted on said tube by said mounting means, and said tube is sealed to said container by said sealing means.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Particle Accelerators (AREA)
US14008A 1969-11-06 1970-02-25 Electron gun for heating materials in an evacuated container Expired - Lifetime US3652821A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1955846A DE1955846C3 (de) 1969-11-06 1969-11-06 Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter

Publications (1)

Publication Number Publication Date
US3652821A true US3652821A (en) 1972-03-28

Family

ID=5750306

Family Applications (1)

Application Number Title Priority Date Filing Date
US14008A Expired - Lifetime US3652821A (en) 1969-11-06 1970-02-25 Electron gun for heating materials in an evacuated container

Country Status (4)

Country Link
US (1) US3652821A (de)
JP (1) JPS5022280B1 (de)
DE (1) DE1955846C3 (de)
GB (1) GB1236891A (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
FR2188255A1 (en) * 1972-06-05 1974-01-18 Commissariat Energie Atomique Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit
FR2309972A1 (fr) * 1975-05-02 1976-11-26 Leybold Heraeus Gmbh & Co Kg Canon a electrons a systeme de deviation, destine a etre utilise a des fins de chauffage, de fusion et d'evaporation
FR2550379A1 (fr) * 1983-08-04 1985-02-08 Leybold Heraeus Gmbh & Co Kg Canon a electrons destine a etre monte sur une chambre de travail notamment pour le traitement de pieces par vaporisation sous vide
EP0196710A1 (de) * 1985-03-28 1986-10-08 Koninklijke Philips Electronics N.V. Elektronenstrahlgerät dessen Anode in der Kathode-/Wehnelt-Zylindereinheit eingeschlossen ist
US5185530A (en) * 1990-11-05 1993-02-09 Jeol Ltd. Electron beam instrument
EP2911181A1 (de) * 2014-02-14 2015-08-26 JEOL Ltd. Elektronenkanone, Steuerungsverfahren dafür und Maschine zur schichtweisen Herstellung mittels Elektronenstrahlen
RU2709793C1 (ru) * 2018-07-09 2019-12-20 Публичное акционерное общество "Электромеханика" Электронно-лучевая пушка с повышенным ресурсом эксплуатации

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522679U (de) * 1975-06-24 1977-01-10
DE2528032C2 (de) * 1975-06-24 1983-06-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke
DE3532888A1 (de) * 1985-09-14 1987-04-02 Leybold Heraeus Gmbh & Co Kg Anordnung zur regelung der ablenkung eines elektronenstrahls
DE9411676U1 (de) * 1994-07-08 1994-10-13 Bestec Gmbh Elektronenstrahlquelle

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2840740A (en) * 1955-08-24 1958-06-24 Gen Electric Combination yoke clamp and terminal cover
US3247411A (en) * 1962-07-09 1966-04-19 Rca Corp Post-deflection color purity correcting magnet system for a color tv cathode ray tube
DE1248175B (de) * 1961-08-31 1967-08-24 Heraeus Gmbh W C Elektronenstrahlerzeugungssystem
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2840740A (en) * 1955-08-24 1958-06-24 Gen Electric Combination yoke clamp and terminal cover
DE1248175B (de) * 1961-08-31 1967-08-24 Heraeus Gmbh W C Elektronenstrahlerzeugungssystem
US3247411A (en) * 1962-07-09 1966-04-19 Rca Corp Post-deflection color purity correcting magnet system for a color tv cathode ray tube
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
FR2188255A1 (en) * 1972-06-05 1974-01-18 Commissariat Energie Atomique Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit
FR2309972A1 (fr) * 1975-05-02 1976-11-26 Leybold Heraeus Gmbh & Co Kg Canon a electrons a systeme de deviation, destine a etre utilise a des fins de chauffage, de fusion et d'evaporation
US4061871A (en) * 1975-05-02 1977-12-06 Leybold-Heraeus Gmbh & Co. Kg Electron gun for heating, melting and vaporizing purposes, with deflection systems
FR2550379A1 (fr) * 1983-08-04 1985-02-08 Leybold Heraeus Gmbh & Co Kg Canon a electrons destine a etre monte sur une chambre de travail notamment pour le traitement de pieces par vaporisation sous vide
US4622453A (en) * 1983-08-04 1986-11-11 Leybold-Heraeus Gmbh Electron beam gun mounting on a work chamber
EP0196710A1 (de) * 1985-03-28 1986-10-08 Koninklijke Philips Electronics N.V. Elektronenstrahlgerät dessen Anode in der Kathode-/Wehnelt-Zylindereinheit eingeschlossen ist
US4798957A (en) * 1985-03-28 1989-01-17 U.S. Philips Corporation Electron beam apparatus comprising an anode which is included in the cathode/Wehnelt unit
US5185530A (en) * 1990-11-05 1993-02-09 Jeol Ltd. Electron beam instrument
EP2911181A1 (de) * 2014-02-14 2015-08-26 JEOL Ltd. Elektronenkanone, Steuerungsverfahren dafür und Maschine zur schichtweisen Herstellung mittels Elektronenstrahlen
RU2709793C1 (ru) * 2018-07-09 2019-12-20 Публичное акционерное общество "Электромеханика" Электронно-лучевая пушка с повышенным ресурсом эксплуатации

Also Published As

Publication number Publication date
JPS5022280B1 (de) 1975-07-29
DE1955846C3 (de) 1973-10-31
DE1955846A1 (de) 1972-01-05
DE1955846B2 (de) 1973-04-12
GB1236891A (en) 1971-06-23

Similar Documents

Publication Publication Date Title
US3652821A (en) Electron gun for heating materials in an evacuated container
US4385979A (en) Target assemblies of special materials for use in sputter coating apparatus
US4060470A (en) Sputtering apparatus and method
JPH07192674A (ja) 磁界界浸型電子銃
US2565533A (en) Cathode-ray tube
US4453078A (en) Ion source
US4302063A (en) Method for vaporizing getter material in a vacuum electron tube
US3124680A (en) Agent
US4057746A (en) Demountable high power electron beam gun
US3560779A (en) Shadow mask type color picture tube with a fine mesh flexible particle shield between the gun and target portions
US3178604A (en) Positive ion source
US3458743A (en) Positive ion source for use with a duoplasmatron
US4084076A (en) Electron beam welding gun
US3286187A (en) Ion source utilizing a spherically converging electric field
US4034256A (en) Electron gun for heating, fusing and vaporizing
US3337676A (en) Electron beam melting apparatus
US3080626A (en) Electron-beam furnace with magnetic guidance and flux concentrator
GB899268A (en) Improvements in and relating to cathode ray tube apparatus
GB1013403A (en) Improvements in or relating to electron beam generating and deflecting systems
US4622453A (en) Electron beam gun mounting on a work chamber
US3078387A (en) Magnetron
KR101626516B1 (ko) 컨케이브 캐소드 및 홀더가 구비되는 전자빔 방출장치
US4894007A (en) Apparatus for providing fluid to a rotatable member
US4416642A (en) Method for preventing blocked apertures in a cathode ray tube caused by charged particles
US3472999A (en) Electron beam generating device