US3607138A - Method and device for crucible-free floating-zone melting using a variable-diameter heating coil - Google Patents

Method and device for crucible-free floating-zone melting using a variable-diameter heating coil Download PDF

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Publication number
US3607138A
US3607138A US722600A US3607138DA US3607138A US 3607138 A US3607138 A US 3607138A US 722600 A US722600 A US 722600A US 3607138D A US3607138D A US 3607138DA US 3607138 A US3607138 A US 3607138A
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United States
Prior art keywords
rod
coil
seed crystal
heating coil
diameter
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Expired - Lifetime
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US722600A
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English (en)
Inventor
Wolfgang Keller
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Siemens AG
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Siemens AG
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Publication date
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Definitions

  • Device for B01 j 17/18 carrying out the foregoing method includes an induction coil [50] Field 01 Search 23/273; of flexible material and a mechanical adjusting device actuable for varying the diameter of the coil.
  • My invention relates to method and device for the cruciblefree floating-zone melting of a crystalline rod, particularly a semiconductor rod, to an end of which a seed crystal, having a considerably smaller thickness than that of the rod, is fused by means of an annular induction heating coil surrounding the rod.
  • a seed crystal having a considerably smaller thickness than that of the rod is that the seed crystal has a cross section that is onetenth or less of the cross section of the crystalline rod.
  • the production of crystalline rods, for example silicon rods, with very great thicknesses of 30 to 50 mm. or more requires a seed crystal having the foregoing relative dimensions.
  • the monocrystalline seed crystal is accordingly fused to the crystalline rod of relatively much greater cross section, various difficulties occur, because the induction heating coil, whose inner diameter is accommodated to the cylindrical part of the crystalline rod, is then very poorly coupled with the considerably thinner seed crystal. The poor coupling causes an increased scattering of the magnetic field. Consequently, a relatively long and accordingly unstable molten zone is formed when melting the seed crystal.
  • FIG. 1 is a top plan view of the device of my invention showing an induction heating coil whose ends are secured to a suitable device for adjusting the diameter of the coil to the cross section of a crystalline rod;
  • FIG. 2 is a front elevational view, reduced in size, of the device of FIG. 1 showing therein a fused crystalline rod and seed crystal supported by end holders.
  • annular induction heating coil 1 surrounding a crystalline rod R of semiconductor material, such as silicon, for example, fused to a monocrystalline seed crystal, respectively supported vertically in end holders RH and SH.
  • the coil 1 consists of a single winding whose ends 2 and 3 cross one another and are secured to a tentering frame 4.
  • the coil 1 consists of a flexible tubular material, for example an alloy of beryllium and copper, and is cooled by a fluid such as water, for example, which is passed through the hollow interior thereof.
  • the tentering frame 4 is formed of material that is not ferromagnetic, such as brass for example, or of a nonmagnetic stainless steel.
  • the tentering frame 4 can be fluid-cooled in a manner similar to the induction heating coil 1 by providing suitable passages therein transversible by a fluid coolant such as water for example.
  • the tentering frame 4 is formed of a pair of balanced bow members 6a and 6b pivotable about a common pivot axis 5.
  • the ends 2 and 3 of the induction heating coil 1 are fastened by straps 12a and 12b to insulating members 7a and 7b of ceramic material for example, such as aluminum oxide, which are mounted for example by screws, as illustrated, on each of the bow members 6a and 6b of the tentering frame 4.
  • a pair of spreading jaws 8a and 8b are also turnably mounted on the pivot axis 5 and are respectively connected to the bow members 6a and 6b.
  • the spreading jaws 8a and 8b can be more or less sharply spread apart and turned about the pivot axis 5 by means of a conical adjusting pin 9 insertable therebetween.
  • the adjusting pin 9 can, as illustrated in FIG. 1, be constructed as a shaft passing through a shaft bearing 10.
  • the tentering frame 4 is spread more or less, thereby applying tension to the ends 2 and 3 of the coil 1 so as to vary thereby correspondingly the inner diameter of the coil winding.
  • the composition of the aforementioned beryllium-copper alloy was 2 percent to 3 percent Be and the remainder Cu.
  • the diameter of the crystalline rod and seed crystal were respectively 35 mm. and 5 mm.
  • the largest inner diameter of the induction heating coil was 38 mm. and the smallest was 25 mm.
  • the diameter of the induction heating coil 1 can be varied by means of any suitable mechanical adjusting device other than the device actually illustrated and described. It is of importance only that the induction heating coil 1 be made of a material that has the required flexibility even in the stressed condition thereof or while subjected to current flow therethrough. This requirement is satisfied to a great extent by the aforementioned beryllium-copper alloy.
  • a tension spring 13 is connected between the jaws 8a and 8b.
  • Method of floating-zone melting a crystalline rod which comprises surrounding the crystalline rod with a winding of an annular induction heating coil of given reduced diameter at an end of the rod having a transition portion tapering outwardly from a seed crystal of considerably smaller thickness than that of the rod, electrically energizing the coil so as to inductively heat the end of the rod to molten temperature, and relatively displacing the rod and the coil in the direction of the rod axis along the tapering transition portion and simultaneously gradually increasing the diameter and circumferential length of the coil winding in accordance with the increasing diameter of the transition portion.
  • the rod has a substantially rounded portion at the end thereof and which includes aligning the seed crystal with the rod adjacent the substantially rounded end thereof, melting the end of the rod so as to fuse the pod to the seed crystal and simultaneously form the i tapering transition in the rod by energizing the heating coil winding surrounding the end of the rod.
  • Device for carrying out a method of floating-zone melting a crystalline rod comprising an induction heating coil-consisting of flexible material, and a mechanical-adjusting device connected to said coil and actuable for applying varying stress to a winding of said coil so as to vary the diameter and circumferential length thereof.
  • said mechanical adjusting device is a tentering frame, and the ends of said coil winding extend across one another and are secured to said tentering frame.
  • said tentering frame comprises a pair of bow members pivotable about a common axis, said ends of said coil winding being respectively c0nnected to said bow members.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • General Induction Heating (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
US722600A 1967-04-21 1968-04-19 Method and device for crucible-free floating-zone melting using a variable-diameter heating coil Expired - Lifetime US3607138A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0109450 1967-04-21

Publications (1)

Publication Number Publication Date
US3607138A true US3607138A (en) 1971-09-21

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US722600A Expired - Lifetime US3607138A (en) 1967-04-21 1968-04-19 Method and device for crucible-free floating-zone melting using a variable-diameter heating coil

Country Status (6)

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US (1) US3607138A (xx)
BE (1) BE713935A (xx)
DE (1) DE1644004A1 (xx)
DK (1) DK120125B (xx)
GB (1) GB1150697A (xx)
NL (1) NL6805560A (xx)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3892938A (en) * 1972-11-13 1975-07-01 Elphiac Sa System for adjusting the position of a coil
US4119825A (en) * 1974-12-03 1978-10-10 Rolls-Royce (1971) Limited Induction heating apparatus
US4522790A (en) * 1982-03-25 1985-06-11 Olin Corporation Flux concentrator
US4561489A (en) * 1982-03-25 1985-12-31 Olin Corporation Flux concentrator
US4833287A (en) * 1987-04-27 1989-05-23 Shin-Etsu Handotai Co., Ltd. Single-turn induction heating coil for floating-zone melting process
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
US5009860A (en) * 1987-05-25 1991-04-23 Shin-Etsu Handotai Co., Ltd. Semiconductor rod zone melting apparatus
US5126113A (en) * 1990-03-30 1992-06-30 Shin-Etsu Handotai Co., Ltd. Apparatus for producing czochralski-grown single crystals
US9924567B2 (en) 2013-05-14 2018-03-20 Thermatool Corp. Induction coil with dynamically variable coil geometry

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2538854B2 (de) * 1975-09-01 1979-02-15 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Einwindige Induktionsheizspule zum tiegelfreien Zonenschmelzen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB650184A (en) * 1948-05-24 1951-02-14 Gen Electric Co Ltd Improvements in or relating to electric inductor constructions for use in high frequency electric induction heating
US2905798A (en) * 1958-09-15 1959-09-22 Lindberg Eng Co Induction heating apparatus
US3101165A (en) * 1960-05-13 1963-08-20 Atlas Crankshaft Corp Method and apparatus for heat-treating
US3331938A (en) * 1965-03-02 1967-07-18 Ohio Crankshaft Co Conductor with an adjustable workpiece centering arrangement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB650184A (en) * 1948-05-24 1951-02-14 Gen Electric Co Ltd Improvements in or relating to electric inductor constructions for use in high frequency electric induction heating
US2905798A (en) * 1958-09-15 1959-09-22 Lindberg Eng Co Induction heating apparatus
US3101165A (en) * 1960-05-13 1963-08-20 Atlas Crankshaft Corp Method and apparatus for heat-treating
US3331938A (en) * 1965-03-02 1967-07-18 Ohio Crankshaft Co Conductor with an adjustable workpiece centering arrangement

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3892938A (en) * 1972-11-13 1975-07-01 Elphiac Sa System for adjusting the position of a coil
US4119825A (en) * 1974-12-03 1978-10-10 Rolls-Royce (1971) Limited Induction heating apparatus
US4522790A (en) * 1982-03-25 1985-06-11 Olin Corporation Flux concentrator
US4561489A (en) * 1982-03-25 1985-12-31 Olin Corporation Flux concentrator
US4833287A (en) * 1987-04-27 1989-05-23 Shin-Etsu Handotai Co., Ltd. Single-turn induction heating coil for floating-zone melting process
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
US5009860A (en) * 1987-05-25 1991-04-23 Shin-Etsu Handotai Co., Ltd. Semiconductor rod zone melting apparatus
US5126113A (en) * 1990-03-30 1992-06-30 Shin-Etsu Handotai Co., Ltd. Apparatus for producing czochralski-grown single crystals
US9924567B2 (en) 2013-05-14 2018-03-20 Thermatool Corp. Induction coil with dynamically variable coil geometry

Also Published As

Publication number Publication date
DE1644004A1 (de) 1970-04-02
NL6805560A (xx) 1968-10-22
DK120125B (da) 1971-04-13
GB1150697A (en) 1969-04-30
BE713935A (xx) 1968-10-21

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