US3088219A - High-vacuum plants - Google Patents

High-vacuum plants Download PDF

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Publication number
US3088219A
US3088219A US20790A US2079060A US3088219A US 3088219 A US3088219 A US 3088219A US 20790 A US20790 A US 20790A US 2079060 A US2079060 A US 2079060A US 3088219 A US3088219 A US 3088219A
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United States
Prior art keywords
recipient
gas
casing
articles
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US20790A
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English (en)
Inventor
Kraus Thaddaus Josef
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
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Balzers Patent und Beteiligungs AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/04—Diffusion pumps in combination with fore pumps, e.g. use of isolating valves

Definitions

  • the present invention relates to a high vacuum plant comprising a recipient having an access aperture to be opened for the insertion of the articles to be treated in vacuo and for the withdrawal of said articles after treatment.
  • the invention has the main object of providing a high vacuum plant of the kind referred to and a method of its operation capable of substantially reducing the pumping time required for evacuating said recipient after the same has been opened for the insertion or withdrawal of the articles treated therein, and more particularly for shortening the pumping time for establishing a high vacuum after a previous part-evacuation to a preliminary vacuum.
  • a thin reflexion-reducing layer may be deposited on a lens from the vapor phase easily within a minute, while it takes at least half an hour or longer to reach the high vacuum required for the operation after preliminary evacuation by previous pumping.
  • the aforesaid sluice devices which accordingly serve for saving pumping time, are however costly in construction, and are at present not sufiiciently developed for many articles to be treated in vacuo, for example for lenses, so as to find use in industrial production. Accordingly the use of high vacuum plants, the recipient of which can be opened for the insertion and the withdrawal of the articles to be treated, has been continued and the losses in time involved thereby have been accepted.
  • I provide a method for the operation of a high vacuum plant comprising the steps of opening the recipient, inserting the articles to be treated in vacuo into the said recipient and introducing simultaneously into same a flow of dried gas of a humidity below that of the surrounding space, closing said recipient, evacuating said recipient, carrying out the treatment of the articles in vacuo, re-opening said recipient while introducing simultaneously into the same a flow of said dried gas, and withdrawing the treated articles.
  • a high vacuum plant comprises in combination: a recipient having an access aperture, a closure member capable of closing said aperture, evacuating means operatively connected to said recipient, and at least one dry gas introducing orifice arranged inside said recipient and directed towards said access aperture, said orifice being connected to an exter- 3,088,219 Patented May 7., 1963 nal source of dried gas while said closure member is open.
  • a metal vacuum recipient having a capacity of about litres required a regular high vacuum pumping time of 88 minutes with existing pumps, in order to reach a vacuum of 4 l0- mm. Hg after preliminary evacuation to 10' mm. Hg.
  • the new method constitutes a big jump forward in the technical progress. Its application is recommended everywhere, where articles giving off comparatively little gas, such as glass or metal components, are to be treated for short periods of time under a high vacuum, and subsequently the plant has at once to be charged anew. In these cases of application the efliciency and availability of an existing high vacuum plant is enormously improved by the new method.
  • the blowing in of the dry gas is conveniently effected from a point in the interior of the recipient in the direction towards the aperture, through which the recipient in the opened condition is in communication with the external atmosphere. It appears that thereby the ingress of moist ambient air is prevented more effectively.
  • Such obstacles which can be readily provided as a make-shift arrangement on existing plants may be constituted e.g. by curtains, which close the means of access to the recipient from all sides except for small slots serving for the insertion, the withdrawal and other manipulations required when the recipient is opened.
  • dry gas in principle naturally all sufiiciently dry gases may be utilised insofar as they are chemically compatible with the articles to be treated and with the components of the plant. It suifices, to use previously dried air. Dry CO has the advantage that it is readily compressible so that even large quantities require only relatively small, handy containers for storage.
  • the choice of the rinsing gas is often determined by the technological process being performed. For example dry 0 may be blown into plants wherein oxidizing processes are to be carried out. In other plants, dry N argon or other known inert gases will be used.
  • dry 0 may be blown into plants wherein oxidizing processes are to be carried out.
  • dry N argon or other known inert gases will be used.
  • the use of an inert gas for the protection of articles treated, for example in furnaces, is known in itself, but for protecting the articles from high temperatures or from chem ical activity, while the use of such gases in the dried state for the purpose of shortening the evacuation periods has been proposed for the first time by the'present invention.
  • the method according to the invention may also be carried out in several stages, i.e'. the recipient may be surrounded'by an outer shell, and the atmosphere in the enclosed-space may be kept at a lower humidity than that corresponding to the external atmosphere. This may be done in that the enclosed-space is supplied with dry gas .(e.g. by constantly blowing in dry air), or by setting up conventional drying agents therein or by building-in .a drying apparatus. Drying agents and drying apparatus may naturally also be arranged in the recipient proper, if desired.
  • the method according to the invention may be carried out by surrounding the recipient with a 1st, 2nd, etc. enclosed space, and by supplying all or some of said enclosed spaces with dry gas while the recipient is in the opened state.
  • the dry gas which is blown into the recipient proper, is made to flow through the consecutive enclosed spaces in succession.
  • FIGURE 1 is a diagrammatic longitudinal part section of a first embodiment of a vacuum recipient with a device for blowing a dried gas into the surrounding enclosed space;
  • FIGURE 2 is a diagrammatic representation on a smaller scale of a first modification
  • FIGURE 4 is a diagrammatic representation of another embodiment.
  • FIGURE 1 the vacuum recipient 1 is formed by the bell 2 and the platform 3.
  • This recipient 1 can be evacuated through the pipe 4 by means of a pump 5.
  • 6 denotes an annular seal
  • 7 denotes a hydraulic hoisting device, by means of which the bell 2 can be raised and the recipient can be opened. The position of the raised bell is indicated in this figure in dotted lines.
  • the recipient described which rests on a base 8, is totally enclosed in a casing 9, which may be formed either of rigid walls or of a gas-tight synthetic plastic material, e.g. a thin sheet of synthetic material.
  • the casing 9 is connected in a gas-tight manner, to the base 8 by means of the flange 10 with annular seal 11, buthas one or several flaps or movable resilient sleeves 13, through which articles can be inserted into the recipient 1 (when the same is opened) or any other manipulations can be carried out.
  • the recipient contains a device for the deposition from the vapor phase of thin layers on lenses, the lenses may be introduced by hand through the sleeve 13.
  • FIGURE 1 moreover shows a blower 14 for aspirating atmospheric air, a drying device 15 for this aspirated air adjoining downstream of the blower and a pipe 16 leading into the interior 17 of the casing 9. Moreover a valve 18 is provided on the bell 2, through which air can be let into the recipient from the interspace between the casing 9 and the bell 2.
  • the device described can be used in the following manner according to the method of the invention:
  • the hell 2 is assumed to be raised and the recipient to be charged with the articles to be treated in vacuo. Then the bell 2 is closed, evacuated through the components 4 and 5, until the working vacuum is attained,
  • the recipient After the vacuum treatment in the recipient has been terminated the recipient has to be opened in order to be able to take out the articles treated, and to introduce new ones.
  • the valve -18 is opened, so that the dry air from the enclosed space 17 flows into the recipient.
  • the bell 2 is raised, the articles are taken out of the bell 2 and casing '9 through the flap 12 or sleeve 13, and any other manipulations which may become necessary, such as the exchange of evaporation sources or the like, are carried out in the recipient.
  • dry air constantly flows from the pipe 16 into the spaces 1 and 17, and flows oil? outward through the flap 12 and servicing sleeve 13, which are temporarily opened during the manipulations described. Any penetration of moist air from the external atmosphere and accordingly any condensation on the walls of the bell and casing are prevented by the flow of dry air or gas from pipe v16.
  • the advantage of the method according to the invention makes itself noted by substantially shortened pumping periods.
  • Any further evacuation cycle is carried out in a similar manner as described; it is essential that the moist air is kept away from the inner wall surface of the recipient and the apparatus components contained therein as well as from those parts outside thereof which are in gas interchange with the inner wall surface when the recipient is opened. It has been found that for example even cm. of an area which had been in contact for a prolonged period with the external atmosphere (relative humidity about 50%) and then came into communication with the recipient, might prolong the pumping period by about 10 to 20 minutes.
  • the articles to be treated in the next consecutive charge may be deposited already in the enclosed space 17 so that they are previously dried there in the air'current.
  • the tip 19 of the casing 9 may have a restricted vent through which air can escape outward.
  • FIGURES 2 to 4 Modified embodiments for carrying out the method according to the invention are diagrammatically illustrated in FIGURES 2 to 4.
  • 21 and 2-1 denote the recipient, 22 and 22' a casing surrounding the recipient, and 23 and 23' a cflap, sleeve or similar means of access for the same purpose.
  • 24 and 124' denote the evacuating line, 25 and 25' the vacuum pump, and 26 and 26 a line, which is in communication with a source 27 and 27' of dried gas.
  • This source may be a drying appliance (like of FIGURE 1) or for example a pressure gas container for extremely dry oxygen, nitrogen or any other suitable gas.
  • FIGURES 2 and 3 difler from that of FIGURE 1 primarily in that the introduction of the dry gas into the recipient 21 or 21 and into the casing 22 and 22, respectively, takes place partly at difierent points.
  • the line 26 is directly connected with the recipient 21 through a valve 28.
  • dry air flows through the enclosed space 2.9 only when the recipient 21 is opened. While the same is closed, the atmosphere in the enclosed space 29 is at rest; if desired, however, a fan may be used for circulating the air therein, which is convenient when in this enclosed space 29 a drying appliance charged for example with phosphorous pentoxide is set up.
  • the casing 22 (particularly its means of access 23) should be capable of being closed so tightly that no appreciable quantity of the external air can penetrate into it during the treatment period. During the charging and discharging of this plant the danger of penetration of moist air through the means of access 23 is obviated by the outward flow of dry gas through it.
  • FIGURE 3 additionally a line provided with a valve 39 is arranged.
  • dry air may be introduced simultaneously into the recipient 2.1 and into the enclosed space 29'.
  • FIGURE 4 a design is illustrated in which part only of the outside of the wall of the recipient is protected from the moist atmosphere.
  • 31 denotes a bell forming the recipient, 32 a vertical closure wall of this bell, 33 the evacuation line, 34 the vacuum pump, 35 a rail on which the bell 31 is suspended by means of rollers 36 and can be moved horizontally away from the wall 32 in order to open the recipient.
  • the bell 31 is here not fully enclosed by a casing (such as 9, 22, 22 in the other figures), but only over a short stretch at the left hand side margin of the bell 31.
  • This envelope has here the form of an expansible folded bellows 37, which is attached on the one hand to the closure wall 32 (along a circle 38) and on the other hand to the bell 31 (along a circumference 39).
  • the recipient When the recipient is to be opened, it is driven away from the wall 32 to the right, while the bellows 37 is stretched.
  • dry gas is introduced into the recipient through a valve 40, so that it flows through the same and escapes through the means of access 41 into the bellows 37, thus preventing the moist external air from penetrating into the recipient.
  • One of these means of access 41 is indicated in FIGURE 4 as a flap.
  • the bellows folds up and forms a small enclosed space around the annular seal 42 between the bell 31 and the wall 32, which space remains filled with dry air and accordingly prevents condensation on the outside of the said seal and of the flange of the bell.
  • a separate supply line of dry gas could be provided for this enclosed space in order to make even more sure that no moist air can penetrate into it.
  • a method for the operation of a high vacuum plant having an evacuatable recipient comprising the steps of opening the recipient, inserting dry articles to be treated in vacuo into said recipient and introducing simultaneously into the same a flow of dried gas of a humidity below that of the surrounding atmosphere, closing said recipient, evacuating said recipient to a pressure of the order below 10* mm. Hg, carrying out the treatment of the articles in vacuo, re-opening said recipient while introducing simultaneously into the same a flow of the said dried gas from a point in the interior of said recipient towards the opening thereof, and Withdrawing the treated articles.
  • a method as claimed in claim 1, comprising the additional step of maintaining in the space surrounding said recipient an atmosphere of a humidity 'lower than that of the ambient air.
  • a method for the shortening of the pumping time in discontinuously operating vacuum plants having a vacuum recipient repeatedly to be opened and subsequently closed for inserting dry articles to be treated therein and for withdrawing the same after treatment comprising the consecutive steps of opening an access opening to said vacuum recipient, blowing dry gas of a humidity substantially lower than that of the surrounding atmosphere from the interior of said vacuum recipient outwardly in the direction towards said open access opening, closing said access opening, and evacuating said vacuum recipient to a pressure of the order below 10 mm.
  • a device for treating articles under high vacuum comprising in combination: a recipient, a casing surrounding said recipient at least at one end thereof, means for moving said recipient from an open to a closed position within said casing, a gas-tight sealing member engaged by said recipient in its closed position, means tor evacuating said recipient, means in said casing providing access to the interior thereof, a flexible closure for said access means, a source of dried gas, and means for injecting said dried gas into the interior of said casing.
  • valved means for injecting a current of dried gas into the recipient.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Engineering & Computer Science (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Furnace Details (AREA)
  • Drying Of Solid Materials (AREA)
US20790A 1959-04-07 1960-04-07 High-vacuum plants Expired - Lifetime US3088219A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH7164159A CH367269A (de) 1959-04-07 1959-04-07 Verfahren zum Betrieb von Hochvakuumanlagen, deren Rezipient zwecks Beschickung und Entnahme der im Vakuum zu behandelnden Gegenstände geöffnet werden kann, und Vakuumanlage zur Durchführung dieses Verfahrens

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US3088219A true US3088219A (en) 1963-05-07

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US20790A Expired - Lifetime US3088219A (en) 1959-04-07 1960-04-07 High-vacuum plants

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US (1) US3088219A (en, 2012)
CH (1) CH367269A (en, 2012)
GB (1) GB883376A (en, 2012)
NL (1) NL105775C (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3253351A (en) * 1963-02-05 1966-05-31 Bettanin Giuseppe Vacuum-drying apparatus
US3293773A (en) * 1964-08-24 1966-12-27 Vir Tis Company Inc Freeze drying apparatus
US3932944A (en) * 1974-09-12 1976-01-20 Mitsumasa Chiba Method and apparatus for preventing waterdrops inside a sealed instrument

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1580957A (en) * 1921-10-27 1926-04-13 Gen Motors Corp Coating and baking apparatus for automobile parts and the like
US1799248A (en) * 1924-11-10 1931-04-07 Willard Storage Battery Co Method of drying articles
US1866346A (en) * 1929-03-05 1932-07-05 Gen Electric Drying treatment
US2307802A (en) * 1941-06-24 1943-01-12 Reichel Lab High vacuum, low temperature drying apparatus
US2465963A (en) * 1945-06-02 1949-03-29 Borden Co Removing ultimate moisture from powdered products
US2858795A (en) * 1954-05-24 1958-11-04 British Insulated Callenders Apparatus for drying and impregnating small articles
US2890878A (en) * 1956-12-28 1959-06-16 Nat Res Corp Apparatus for annealing in a high vacuum

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1580957A (en) * 1921-10-27 1926-04-13 Gen Motors Corp Coating and baking apparatus for automobile parts and the like
US1799248A (en) * 1924-11-10 1931-04-07 Willard Storage Battery Co Method of drying articles
US1866346A (en) * 1929-03-05 1932-07-05 Gen Electric Drying treatment
US2307802A (en) * 1941-06-24 1943-01-12 Reichel Lab High vacuum, low temperature drying apparatus
US2465963A (en) * 1945-06-02 1949-03-29 Borden Co Removing ultimate moisture from powdered products
US2858795A (en) * 1954-05-24 1958-11-04 British Insulated Callenders Apparatus for drying and impregnating small articles
US2890878A (en) * 1956-12-28 1959-06-16 Nat Res Corp Apparatus for annealing in a high vacuum

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3253351A (en) * 1963-02-05 1966-05-31 Bettanin Giuseppe Vacuum-drying apparatus
US3293773A (en) * 1964-08-24 1966-12-27 Vir Tis Company Inc Freeze drying apparatus
US3932944A (en) * 1974-09-12 1976-01-20 Mitsumasa Chiba Method and apparatus for preventing waterdrops inside a sealed instrument

Also Published As

Publication number Publication date
NL105775C (en, 2012) 1963-03-15
GB883376A (en) 1961-11-29
CH367269A (de) 1963-02-15

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