US20220196704A1 - Measurement unit - Google Patents

Measurement unit Download PDF

Info

Publication number
US20220196704A1
US20220196704A1 US17/547,400 US202117547400A US2022196704A1 US 20220196704 A1 US20220196704 A1 US 20220196704A1 US 202117547400 A US202117547400 A US 202117547400A US 2022196704 A1 US2022196704 A1 US 2022196704A1
Authority
US
United States
Prior art keywords
ground
signal
dielectric
ground plate
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US17/547,400
Other languages
English (en)
Inventor
Tsuyoshi Inuma
Hiroshi Nakayama
Shuji Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NHK Spring Co Ltd
Original Assignee
NHK Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NHK Spring Co Ltd filed Critical NHK Spring Co Ltd
Assigned to NHK SPRING CO., LTD. reassignment NHK SPRING CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TAKAHASHI, SHUJI, NAKAYAMA, HIROSHI, INUMA, TSUYOSHI
Publication of US20220196704A1 publication Critical patent/US20220196704A1/en
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/58—Testing of lines, cables or conductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2856—Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/08—Locating faults in cables, transmission lines, or networks
    • G01R31/081—Locating faults in cables, transmission lines, or networks according to type of conductors
    • G01R31/083—Locating faults in cables, transmission lines, or networks according to type of conductors in cables, e.g. underground
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/54—Testing for continuity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B11/00—Communication cables or conductors
    • H01B11/18—Coaxial cables; Analogous cables having more than one inner conductor within a common outer conductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B11/00—Communication cables or conductors
    • H01B11/18—Coaxial cables; Analogous cables having more than one inner conductor within a common outer conductor
    • H01B11/1895—Particular features or applications
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
    • H01R4/58—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation characterised by the form or material of the contacting members
    • H01R4/66—Connections with the terrestrial mass, e.g. earth plate, earth pin
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Definitions

  • the present disclosure relates to a measurement unit.
  • a cable to be connected to an inspection device and a connecting member to be connected to an opposite end portion of the cable have been used, the opposite end portion being opposite to an end portion of the cable, the end portion being near the inspection device (see, for example, Japanese Patent No. 4678993).
  • the cable has a signal conductor in the center, a dielectric that covers the signal conductor, and a ground conductor that covers the dielectric.
  • the connecting member has a central contact to be connected to the signal conductor and a side contact to contact the ground conductor.
  • the opposite end portion of the cable in the configuration described in Japanese Patent No. 4678993 is cut diagonally to be connected to the connecting member.
  • the transmission line changes from a coaxial line to a so-called coplanar line at this connected portion and this line change tends to generate noise.
  • a measurement unit including: a ground portion forming a part of a line configured to provide continuity for grounding electric potential, the ground portion including a surface at one end of the ground portion, the surface forming a plane; a signal portion forming a part of a line configured to provide continuity for a signal for measurement, the signal portion including an end portion configured to come out in a plane that is same as the plane of the ground portion; a dielectric portion provided between the ground portion and the signal portion, the dielectric portion being insulative; a first contact probe configured to expand and contract along a longitudinal axis, the first contact probe being electrically conductive and coming into contact with the signal portion; and a second contact probe configured to expand and contract along a longitudinal axis, the second contact probe being electrically conductive and coming into contact with the ground portion.
  • FIG. 1 is a diagram illustrating a configuration of a measurement system according to an embodiment
  • FIG. 2 is a diagram illustrating a configuration of a part of the measurement system illustrated in FIG. 1 ;
  • FIG. 3 is a diagram illustrating a detailed configuration of probes held in a probe holder
  • FIG. 4 is a diagram illustrating a mode of connection between the probes and a ground plate
  • FIG. 5 is an enlarged view of a part of FIG. 4 ;
  • FIG. 6 is a diagram illustrating a configuration of the ground plate and a coaxial cable
  • FIG. 7 is a diagram illustrating a configuration of a ground plate and a coaxial cable, according to a first modified example
  • FIG. 8 is a diagram illustrating a configuration of a ground plate and a coaxial cable, according to a second modified example
  • FIG. 9 is a diagram illustrating a configuration of a coaxial cable according to a third modified example.
  • FIG. 10 is a diagram illustrating a configuration of a coaxial cable according to a fourth modified example.
  • FIG. 11 is a perspective view illustrating an example of a mode of contact between the coaxial cable and probes, according to the fourth modified example.
  • FIG. 1 A mode for implementing the present disclosure (hereinafter, referred to as an “embodiment”) will hereinafter be described by reference to the appended drawings.
  • the drawings are schematic, a relation between a thickness and a width of each portion and ratios among thicknesses of respective portions may be different from the actual relation and ratios, and the drawings may also include a portion that differs in its dimensional relations or ratios among the drawings.
  • FIG. 1 is a diagram illustrating a configuration of a measurement system according to an embodiment.
  • FIG. 2 is a diagram illustrating a configuration of a part of the measurement system illustrated in FIG. 1 .
  • FIG. 2 illustrates a configuration in a measurement unit 1 and excluding a probe holder 3 described later.
  • the measurement system includes the measurement unit 1 , a measurement device 100 that inputs and outputs signals from and to a measurement target, and connecting cables 110 and 120 that connect the measurement unit 1 and the measurement device 100 to each other.
  • the measurement unit 1 includes contact probes 2 (hereinafter, simply referred to as “probes 2 ”), the probe holder 3 that holds the probes 2 , a first ground plate 4 , a second ground plate 5 , a first coaxial line portion 6 , and a second coaxial line portion 7 .
  • FIG. 3 is a diagram illustrating a detailed configuration of probes held in a probe holder.
  • the probes 2 have electric conductivity and are connected to the first ground plate 4 and the second ground plate 5 at both ends of their longitudinal lengths.
  • the probes 2 are formed using an electrically conductive material, and each include a first plunger 21 to contact the first ground plate 4 , a second plunger 22 to contact the second ground plate 5 , and a coil spring 23 that is provided between the first plunger 21 and the second plunger 22 and couples the first plunger 21 and the second plunger 22 together to enable the probe 2 to expand and contract.
  • the first plunger 21 and second plunger 22 and the coil spring 23 that form the probe 2 share the same axis.
  • the probe holder 3 is formed using an insulating material, such as resin, machinable ceramic, or silicone, and is formed of a first member 31 positioned higher in FIG. 3 and a second member 32 positioned lower in FIG. 3 that are layered over each other.
  • the first member 31 and the second member 32 have the same number of holder holes 33 or 34 respectively formed therein for holding the plural probes 2 , and the holder holes 33 and 34 to hold the probes 2 are formed such that the axes of the holder holes 33 and 34 are aligned with each other. Positions at which the holder holes 33 and 34 are formed are determined according to a layout pattern of the probes 2 .
  • the coil spring 23 is brought into a state of being compressed along a longitudinal direction by contact loads from these ground plates.
  • FIG. 4 is a diagram illustrating a mode of connection between probes and a ground plate.
  • FIG. 5 is an enlarged view of a part of FIG. 4 .
  • FIG. 6 is a diagram illustrating a configuration of the ground plate and a coaxial cable.
  • (a) is a sectional view of a configuration having the second ground plate 5 and a coaxial cable 71 connected to each other.
  • (b) is a plan view of the second ground plate 5 as viewed from a side opposite to a side to which the coaxial cable 71 is connected.
  • FIG. 6 illustrates the connection between the second ground plate 5 and the coaxial cable 71 , but connection between the first ground plate 4 and a coaxial cable 61 has a similar configuration.
  • the first ground plate 4 is formed using an electrically conductive material and is plate-shaped.
  • the first ground plate 4 has, formed therein, a through hole 4 a penetrating the first ground plate 4 in its plate thickness direction (see FIG. 2 ).
  • the through hole 4 a is a hole extending with a diameter that is approximately equivalent to a diameter of the outer circumference of the coaxial cable 61 described later. Being approximately equivalent includes being identical and having a slight difference due to manufacturing errors.
  • the second ground plate 5 is formed using an electrically conductive material and is plate-shaped.
  • the second ground plate 5 has, formed therein, a through hole 5 a penetrating the second ground plate 5 in its plate thickness direction.
  • the through hole 5 a is a hole extending with a diameter that is approximately equivalent to a diameter of the outer circumference of the coaxial cable 71 described later.
  • the first ground plate 4 and the second ground plate 5 are made of copper, nickel, or stainless steel, for example.
  • the first ground plate 4 and the second ground plate 5 may be formed of a material that is the same as a material that forms ground conductors 64 and 74 described later.
  • the first coaxial line portion 6 includes the coaxial cable 61 .
  • the coaxial cable 61 is held by a cable holding member 60 . Furthermore, an opposite end portion of the coaxial cable 61 is inserted in the through hole 4 a of the first ground plate 4 , the opposite end portion being opposite to an end of the coaxial cable 61 , the end being connected to the connecting cable 110 .
  • the coaxial cable 61 may be press-fitted in the through hole 4 a , fixed by soldering, for example, or fixed by a combination of these press fitting and soldering.
  • the coaxial cable 61 has a signal conductor 62 that transmits a signal from the measurement device 100 , a dielectric 63 that is provided around the signal conductor 62 and is insulating, and the ground conductor 64 provided around the dielectric 63 (see FIG. 2 ).
  • the signal conductor 62 , the dielectric 63 , and the ground conductor 64 form a coaxial structure.
  • the dielectric 63 and the ground conductor 64 are each tubular.
  • the ground conductor 64 is made of copper, nickel, or stainless steel, for example.
  • the coaxial cable 61 thus has a configuration that is the same as that of a so-called semi-rigid cable.
  • a signal conductor forms a signal portion and a dielectric forms a dielectric portion.
  • An end portion of the coaxial cable 61 is exposed from the through hole 4 a at a surface of the first ground plate 4 , the end portion being near the first ground plate 4 .
  • An end face of the coaxial cable 61 and the surface of the first ground plate 4 are thus positioned in the same plane, the surface being on a side of the first ground plate 4 , the side being where the end face of the coaxial cable 61 comes out.
  • the first ground plate 4 forms a ground portion by being electrically connected to the ground conductor 64 .
  • the ground portion forms a part of a line that provides continuity for grounding electric potential.
  • the second coaxial line portion 7 includes the coaxial cable 71 .
  • the coaxial cable 71 is held by a cable holding member 70 . Furthermore, an opposite end portion of the coaxial cable 71 is inserted in the through hole 5 a of the second ground plate 5 , the opposite end portion being opposite to an end of the coaxial cable 71 , the end being connected to the connecting cable 120 .
  • the coaxial cable 71 may be press-fitted in the through hole 5 a , fixed by soldering, for example, or fixed by a combination of these press fitting and soldering.
  • the coaxial cable 71 has a signal conductor 72 that transmits a signal from the measurement device 100 , a dielectric 73 that is provided around the signal conductor 72 , and the ground conductor 74 provided around the dielectric 73 .
  • the signal conductor 72 , the dielectric 73 , and the ground conductor 74 form a coaxial structure.
  • the dielectric 73 and the ground conductor 74 are each tubular.
  • the ground conductor 74 is made of copper, nickel, or stainless steel, for example.
  • the coaxial cable 71 thus has a configuration that is the same as that of a so-called semi-rigid cable.
  • An end portion of the coaxial cable 71 is exposed from the through hole 5 a at a surface of the second ground plate 5 , the end portion being near the second ground plate 5 .
  • An end face of the coaxial cable 71 and the surface of the second ground plate 5 are thus positioned in the same plane, the surface being on a side of the second ground plate 5 , the side being where the end face of the coaxial cable 71 comes out.
  • the second ground plate 5 forms a ground portion as described above by being electrically connected to the ground conductor 74 .
  • each of the coaxial cables 61 and 71 comes into contact with three probes 2 .
  • the first ground plate 4 and the coaxial cable 61 form a first connecting portion and the second ground plate 5 and the coaxial cable 71 form a second connecting portion.
  • the measurement system may include at least one of the first and second connecting portions, and any other publicly known mode of connection may be adopted for the other one of the first and second connecting portions.
  • each of the probes 2 comes into contact with any one of the signal conductor 62 and the ground conductor 64 , at the end portion of the coaxial cable 61 , the end portion coming out from the first ground plate 4 .
  • one of the probes 2 comes into contact with the signal conductor 62 and the other two of the probes 2 come into contact with the ground conductor 64 .
  • the coaxial cable 71 similarly, the probe 2 that comes into contact with the signal conductor 62 comes into contact with the signal conductor 72 , and the other two probes 2 that come into contact with the ground conductor 64 come into contact with the ground conductor 74 .
  • Central axes of the coaxial cables 61 and 71 and central axes of the probes 2 are thus either aligned with each other or extend parallel to each other, in their longitudinal directions.
  • the probe 2 (a first contact probe) that comes into contact with the signal conductors 62 and 72 is illustrated as a probe 2 S and the probes 2 (second contact probes) that come into contact with the ground conductors 64 and 74 are illustrated as probes 2 G.
  • Parts with which the probes 2 G come into contact may be a surface of the first ground plate 4 and a surface of the second ground plate 5 , without being limited to the ground conductors 64 and 74 .
  • the minimum pitch between the probes 2 is a radius of the inner circumference of a ground conductor.
  • the pitch between the probes is determined by (diameter of outer circumference of ground conductor+diameter of inner circumference of ground conductor) ⁇ 2 ⁇ 2.
  • an end face of a signal conductor of a coaxial cable and an end face of a ground portion formed of a ground conductor and a ground plate are positioned in the same plane, and plural probes are brought into contact with the signal conductor and the ground portion to achieve continuity for a signal line and a ground line.
  • the measurement unit 1 is able to be used for various types of measurement without being limited by the mode of connection.
  • a configuration using a single coaxial cable has been described above with respect to the embodiment, but a configuration including a ground plate that is provided with plural through holes and holds plural coaxial cables may be adopted instead.
  • FIG. 7 is a diagram illustrating a configuration of a ground plate and a coaxial cable, according to a first modified example.
  • (a) is sectional view of a configuration having a second ground plate and a coaxial cable connected to each other.
  • (b) is a plan view of the second ground plate as viewed from an opposite side of the second ground plate, the opposite side being opposite to a side of the second ground plate, the side being where the coaxial cable is connected.
  • a measurement unit according to this first modified example has, provided therein, a second ground plate 5 A instead of the second ground plate 5 described above, and a coaxial cable 71 A instead of the coaxial cable 71 . Description of any configuration that is the same as that of the embodiment described above will hereinafter be omitted.
  • the coaxial cable 71 A has a signal conductor 72 , a dielectric 73 , and a ground conductor 74 A that is provided around the dielectric 73 .
  • the signal conductor 72 , the dielectric 73 , and the ground conductor 74 A form a coaxial structure.
  • the ground conductor 74 A is made of copper, nickel, or stainless steel, for example.
  • the coaxial cable 71 A thus has a configuration that is the same as that of a so-called semi-rigid cable.
  • the ground conductor 74 A is shorter than the signal conductor 72 and the dielectric 73 by a length corresponding to a thickness of the second ground plate 5 A, the end portion being at an end of the ground conductor 74 A, the end being connected to the second ground plate 5 A. Therefore, the outer periphery of the dielectric 73 is exposed at the end portion of the ground conductor 74 A, the end portion being at the end to be connected to the second ground plate 5 A.
  • the second ground plate 5 A is formed using an electrically conductive material and is plate-shaped.
  • the second ground plate 5 A has, formed therein, a through hole 5 b penetrating the second ground plate 5 A in its plate thickness direction.
  • the through hole 5 b is a hole extending with a diameter that is approximately equivalent to a diameter of the outer circumference of the dielectric 73 .
  • the coaxial cable 71 A is connected to the second ground plate 5 A by insertion of the dielectric 73 into the through hole 5 b .
  • the dielectric 73 of the coaxial cable 71 A may be press-fitted into the through hole 5 b , the dielectric 73 may be fixed to the second ground plate 5 A by soldering, for example, or the coaxial cable 71 A may be fixed by a combination of these press-fitting and soldering.
  • the ground conductor 74 A comes into contact with a surface of the second ground plate 5 A.
  • the second ground plate 5 A and the ground conductor 74 A are thereby electrically connected to each other.
  • the ground conductor 74 A and the second ground plate 5 A may be fixed to each other by soldering, for example, to be electrically connected to each other.
  • End portions of the signal conductor 72 and dielectric 73 of the coaxial cable 71 A are exposed from the through hole 5 b at a surface of the second ground plate 5 A. End faces of the signal conductor 72 and dielectric 73 and the surface of the second ground plate 5 A are thus positioned in the same plane, the surface being on a side of the second ground plate 5 A, the side being where an end face of the coaxial cable 71 A comes out.
  • the probe 2 S comes into contact with the signal conductor 72 that comes out from the through hole 5 b .
  • the probes 2 G come into contact with the surface of the second ground plate 5 A.
  • an end face of a signal conductor of a coaxial cable and an end face of a ground portion formed of a ground conductor and a ground plate are positioned in the same plane, and plural probes are brought into contact with the signal conductor and the ground portion to achieve continuity for a signal line and a ground line.
  • This first modified example enables a coaxial line to be maintained and thus unchanged in form, contrary to the conventional configuration, and as a result, enables reduction in noise.
  • the first modified example enables the freedom of the layout of the probes 2 to be increased and is thus able to be adapted to various types of measurement.
  • FIG. 8 is a diagram illustrating a configuration of a ground plate and a coaxial cable, according to a second modified example.
  • (a) is a sectional view of a configuration having a second ground plate and a coaxial cable connected to each other.
  • (b) is a plan view of the second ground plate as viewed from a side opposite to a side to which the coaxial cable is connected.
  • a measurement unit according to this second modified example has, provided therein, a second ground plate 5 B instead of the second ground plate 5 described above, and a coaxial cable 71 B instead of the coaxial cable 71 . Description of any configuration that is the same as that of the embodiment described above will hereinafter be omitted.
  • the coaxial cable 71 B has a first signal conductor 72 A (a signal conductor) that transmits a signal from the measurement device 100 , a first dielectric 73 A (a cable dielectric) provided around the first signal conductor 72 A, and a ground conductor 74 A provided around the first dielectric 73 A.
  • the first signal conductor 72 A, the first dielectric 73 A, and the ground conductor 74 A form a coaxial structure, and their end faces are positioned in the same plane, the end faces being at their ends to be connected to the second ground plate 5 B.
  • the second ground plate 5 B is formed using an electrically conductive material and is plate-shaped.
  • the second ground plate 5 B has a second signal conductor 51 (a signal relaying portion) and a second dielectric 52 (a ground plate dielectric) covering the outer periphery of the second signal conductor 51 .
  • the first signal conductor 72 A and the second signal conductor 51 form a signal portion and the first dielectric 73 A and the second dielectric 52 form a dielectric portion.
  • the second ground plate 5 B has, formed therein, a through hole 5 b penetrating the second ground plate 5 B in its plate thickness direction.
  • the through hole 5 b is a hole extending with a diameter that is approximately equivalent to a diameter of the outer circumference of the second dielectric 52 .
  • the second dielectric 52 of the second signal conductor 51 and second dielectric 52 is fixed in the through hole 5 b . Upon the fixing, end faces of the second signal conductor 51 and second dielectric 52 are positioned in the same plane as a surface of the main body of the second ground plate 5 B.
  • the second signal conductor 51 and the first signal conductor 72 A preferably have the same diameter. Furthermore, the second dielectric 52 and the first dielectric 73 A preferably have the same diameter. In addition, the first dielectric 73 A and the second dielectric 52 may be formed using the same material, or may be formed using materials different from each other.
  • the coaxial cable 71 B is connected to the second ground plate 5 B by being fixed in a state where the first signal conductor 72 A has been brought into contact with the second signal conductor 51 .
  • the ground conductor 74 A comes into contact with a surface of the second ground plate 5 B.
  • the second ground plate 5 B and the ground conductor 74 A are thereby electrically connected to each other.
  • the first signal conductor 72 A and the second signal conductor 51 may be electrically connected to each other by being fixed to each other by soldering, for example.
  • the second ground plate 5 B and the ground conductor 74 A may be electrically connected to each other by being fixed to each other by soldering, for example.
  • the probe 2 S comes into contact with an opposite end of the second signal conductor 51 to be electrically connected thereto, the opposite end being opposite to an end of the second signal conductor 51 , the end being an end with which the first signal conductor 72 A comes into contact.
  • the probes 2 G come into contact with an opposite surface of surfaces of the second ground plate 5 B to be electrically connected thereto, the opposite surface being opposite to the surface with which the ground conductor 74 A comes into contact.
  • an end face of a signal conductor of a coaxial cable and an end face of a ground portion formed of a ground conductor and a ground plate are positioned in the same plane, and plural probes are brought into contact with the signal conductor and the ground portion to achieve continuity for a signal line and a ground line.
  • This second modified example enables a coaxial line to be maintained and thus unchanged in form, contrary to the conventional configuration, and as a result, enables reduction in noise.
  • the second modified example enables the freedom of the layout of the probes 2 to be increased and is thus able to be adapted to various types of measurement.
  • FIG. 9 is a diagram illustrating a configuration of a coaxial cable according to a third modified example.
  • (a) is a sectional view of the coaxial cable.
  • (b) is a plan view of the coaxial cable.
  • a measurement unit according to this third modified example does not have the second ground plate 5 described above, and is provided with a coaxial cable 71 C instead of the coaxial cable 71 . Description of any configuration that is the same as that of the embodiment described above will be omitted.
  • the coaxial cable 71 C has the signal conductor 72 and dielectric 73 described above, and a ground conductor 74 B covering the outer periphery of the dielectric 73 .
  • the signal conductor 72 , the dielectric 73 , and the ground conductor 74 B form a coaxial structure.
  • the ground conductor 74 B has a tubular portion 741 extending along a longitudinal direction of the coaxial cable 71 C (the dielectric 73 ), and a flat plate portion 742 that is provided at an end portion of the tubular portion 741 and is tabular. End faces of the signal conductor 72 and dielectric 73 are thus positioned in the same plane as a surface of the flat plate portion 742 , the end faces being at ends of the signal conductor 72 and dielectric 73 , the ends being where the signal conductor 72 and dielectric 73 are exposed on the surface of the flat plate portion 742 .
  • the ground conductor 74 B forms a ground portion.
  • the probe 2 S comes into contact with the signal conductor 72 that comes out from the flat plate portion 742 .
  • the probes 2 G come into contact with the surface of the flat plate portion 742 .
  • this third modified example described above also, an end face of a signal conductor of a coaxial cable and a surface of a ground conductor (a flat plate portion) are positioned in the same plane, and plural probes are brought into contact with the signal conductor and the ground conductor to achieve continuity for a signal line and a ground line.
  • This third modified example enables a coaxial line to be maintained and thus unchanged in form, contrary to the conventional configuration, and as a result, enables reduction in noise.
  • the third modified example enables the freedom of the layout of the probes 2 to be increased and is thus able to be adapted to various types of measurement.
  • FIG. 10 is a diagram illustrating a configuration of a coaxial cable according to a fourth modified example.
  • (a) is a sectional view of the coaxial cable.
  • (b) is a plan view of the coaxial cable.
  • a measurement unit according to this fourth modified example does not have the second ground plate 5 described above, and is provided with a coaxial cable 71 D instead of the coaxial cable 71 . Description of any configuration that is the same as that of the embodiment described above will be omitted.
  • the coaxial cable 71 D has the signal conductors 72 and the dielectrics 73 described above, and a ground conductor 74 C covering the outer peripheries of the dielectrics 73 .
  • the ground conductor 74 C has a first tubular portion 743 that covers the dielectric 73 , a second tubular portion 744 that covers the dielectric 73 different from the dielectric 73 covered by the first tubular portion 743 , and a flat plate portion 745 that is provided at an end portion of the first tubular portion 743 and second tubular portion 744 and is tabular. End faces of the signal conductors 72 and the dielectrics 73 and a surface of the flat plate portion 745 are positioned in the same plane, the end faces being at ends of the signal conductors 72 and the dielectrics 73 , the ends being where the signal conductors 72 and the dielectrics 73 are exposed on the surface of the flat plate portion 745 .
  • FIG. 11 is a perspective view illustrating an example of a mode of contact between the coaxial cable and probes, according to the fourth modified example.
  • One of the probes 2 S comes into contact with one of the signal conductors 72 that come out from the flat plate portion 745 .
  • the other one of the probes 2 S comes into contact with the other one of the signal conductors 72 that come out from the flat plate portion 745 .
  • one of the probes 2 G is positioned between (inward from) the probes 2 S and comes into contact with the surface of the flat plate portion 745 .
  • the remaining two of the probes 2 G are each positioned outward from the two probes 2 S and come into contact with the surface of the flat plate portion 745 .
  • the layout and number of the probes 2 G are not limited to the layout and number provided in FIG. 11 , and various modifications are possible. For example, a configuration without the probe 2 G provided between the two probes 2 S may be adopted instead.
  • an end face of a signal conductor of a coaxial cable and a surface of a ground conductor are positioned in the same plane, and plural probes are brought into contact with the signal conductor and the ground conductor to achieve continuity for a signal line and a ground line.
  • This fourth modified example enables a coaxial line to be maintained and thus unchanged in form, contrary to the conventional configuration, and as a result, enables reduction in noise.
  • the fourth modified example enables the freedom of the layout of the probes 2 to be increased and is thus able to be adapted to various types of measurement.
  • first to fourth modified examples a configuration including a second ground plate and a coaxial cable connected to the second ground plate and a configuration without the second ground plate have been described above, but the first to fourth modified examples are also applicable to a configuration including a first ground plate and a coaxial cable connected to the first ground plate and any one of the above described configurations may be adopted for the mode of connection between the probes 2 and the coaxial cable.
  • the same configurations may be combined together or configurations different from each other may be combined together.
  • a ground plate may be configured to have an insulating portion as long as continuity is achieved between the probes 2 G and the ground plate.
  • probes to be used may each be: a probe including a pipe member; a pogo pin; a solid electrically conductive member; an electrically conductive pipe; a wire; or a connecting terminal (a connector) that connects electric contact points together, or any combination of these different types of probes may be adopted as appropriate.
  • the measurement unit is suitable for reducing noise, as described above.
  • the present disclosure has an effect of enabling reduction in noise.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Inspection Of Paper Currency And Valuable Securities (AREA)
  • Vehicle Body Suspensions (AREA)
  • Lasers (AREA)
US17/547,400 2020-12-17 2021-12-10 Measurement unit Pending US20220196704A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020209745A JP2022096563A (ja) 2020-12-17 2020-12-17 測定ユニット
JP2020-209745 2020-12-17

Publications (1)

Publication Number Publication Date
US20220196704A1 true US20220196704A1 (en) 2022-06-23

Family

ID=81992612

Family Applications (1)

Application Number Title Priority Date Filing Date
US17/547,400 Pending US20220196704A1 (en) 2020-12-17 2021-12-10 Measurement unit

Country Status (5)

Country Link
US (1) US20220196704A1 (zh)
JP (1) JP2022096563A (zh)
KR (1) KR20220087381A (zh)
CN (1) CN114646858A (zh)
TW (1) TWI785933B (zh)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6039580A (en) * 1998-07-16 2000-03-21 Raytheon Company RF connector having a compliant contact
US20030117129A1 (en) * 2001-12-20 2003-06-26 Frank Parrish Low-cost tester interface module
US20030122538A1 (en) * 2000-09-28 2003-07-03 Teradyne, Inc. Coaxial cable for ATE with overvoltage protection
US20050208828A1 (en) * 2004-03-16 2005-09-22 Miller Will A Controlled-impedance coaxial cable interconnect system
WO2010117058A1 (ja) * 2009-04-09 2010-10-14 日本発條株式会社 コンタクトプローブおよびプローブユニット
US9645172B2 (en) * 2014-10-10 2017-05-09 Samtec, Inc. Cable assembly
USRE47459E1 (en) * 2011-10-24 2019-06-25 Ardent Concepts, Inc. Controlled-impedance cable termination using compliant interconnect elements
US10931040B1 (en) * 2018-08-02 2021-02-23 Ardent Concepts, Inc. Controlled-impedance circuit board connector assembly

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244308A (ja) * 2000-02-25 2001-09-07 Mitsubishi Electric Corp 高周波信号用のプローブ
JP4678993B2 (ja) 2001-06-19 2011-04-27 日置電機株式会社 高周波プローブおよび高周波プローブの製造方法
US7053643B2 (en) * 2004-03-25 2006-05-30 Intel Corporation Radio frequency (RF) test probe
TWM358968U (en) * 2008-12-31 2009-06-11 Universal Scient Ind Co Ltd Probe device
TWI569017B (zh) * 2014-11-14 2017-02-01 Nippon Mektron Kk Coaxial probe holding mechanism and electrical characteristics check device
TWI537566B (zh) * 2014-11-18 2016-06-11 Mpi Corp Probe module

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6039580A (en) * 1998-07-16 2000-03-21 Raytheon Company RF connector having a compliant contact
US20030122538A1 (en) * 2000-09-28 2003-07-03 Teradyne, Inc. Coaxial cable for ATE with overvoltage protection
US20030117129A1 (en) * 2001-12-20 2003-06-26 Frank Parrish Low-cost tester interface module
US20050208828A1 (en) * 2004-03-16 2005-09-22 Miller Will A Controlled-impedance coaxial cable interconnect system
WO2010117058A1 (ja) * 2009-04-09 2010-10-14 日本発條株式会社 コンタクトプローブおよびプローブユニット
USRE47459E1 (en) * 2011-10-24 2019-06-25 Ardent Concepts, Inc. Controlled-impedance cable termination using compliant interconnect elements
US9645172B2 (en) * 2014-10-10 2017-05-09 Samtec, Inc. Cable assembly
US10931040B1 (en) * 2018-08-02 2021-02-23 Ardent Concepts, Inc. Controlled-impedance circuit board connector assembly

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
English translation of TW M358968 U1 (Year: 2009) *

Also Published As

Publication number Publication date
JP2022096563A (ja) 2022-06-29
TW202225698A (zh) 2022-07-01
CN114646858A (zh) 2022-06-21
TWI785933B (zh) 2022-12-01
KR20220087381A (ko) 2022-06-24

Similar Documents

Publication Publication Date Title
US7332923B2 (en) Test probe for high-frequency measurement
KR100855208B1 (ko) 고성능 테스터 인터페이스 모듈
US9645172B2 (en) Cable assembly
US4734046A (en) Coaxial converter with resilient terminal
US6039580A (en) RF connector having a compliant contact
WO2008072322A1 (ja) 同軸ケーブルユニット、及び試験装置
EP1471357A2 (en) Ic socket
US20070296432A1 (en) Measurement board for electronic device test apparatus
US7507127B2 (en) Cable attachment, cable assembly including the same, and connector including the assembly
KR20040093023A (ko) 검사용 동축 프로브 및 그것을 이용한 검사 유닛
US11320461B2 (en) Probe unit
US20210382087A1 (en) Probe element and probe unit
JPS6337465B2 (zh)
US20200241044A1 (en) Test device
US20220196704A1 (en) Measurement unit
US10126328B1 (en) Electrical measurement test fixture
JP7327659B2 (ja) 検査用コネクタ及び検査用ユニット
JP7334791B2 (ja) 検査用コネクタ及び検査用ユニット
KR20100095142A (ko) 검사용 소켓
TWI741531B (zh) 測試裝置
US20220018877A1 (en) Probe unit
JP7509159B2 (ja) 検査用コネクタ
JP4979190B2 (ja) 検査プローブ治具
US11121514B1 (en) Flange mount coaxial connector system
CN216747823U (zh) 探头构件和连接器的检查构造

Legal Events

Date Code Title Description
AS Assignment

Owner name: NHK SPRING CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:INUMA, TSUYOSHI;NAKAYAMA, HIROSHI;TAKAHASHI, SHUJI;SIGNING DATES FROM 20211118 TO 20211122;REEL/FRAME:058356/0872

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: ADVISORY ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED