US20140187714A1 - Sealant composition for electronic device - Google Patents

Sealant composition for electronic device Download PDF

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Publication number
US20140187714A1
US20140187714A1 US14/201,121 US201414201121A US2014187714A1 US 20140187714 A1 US20140187714 A1 US 20140187714A1 US 201414201121 A US201414201121 A US 201414201121A US 2014187714 A1 US2014187714 A1 US 2014187714A1
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Prior art keywords
compound
composition
electronic device
composition according
radical
Prior art date
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Abandoned
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US14/201,121
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English (en)
Inventor
Yusuke Horiguchi
Kenichiro Sato
Mieko SANO
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Henkel AG and Co KGaA
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Henkel AG and Co KGaA
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Application filed by Henkel AG and Co KGaA filed Critical Henkel AG and Co KGaA
Publication of US20140187714A1 publication Critical patent/US20140187714A1/en
Assigned to HENKEL AG & CO. KGAA reassignment HENKEL AG & CO. KGAA ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SANO, Mieko, SATO, KENICHIRO, HORIGUCHI, YUSUKE
Priority to US15/014,231 priority Critical patent/US9771500B2/en
Abandoned legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/36Amides or imides
    • C08F222/40Imides, e.g. cyclic imides
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/06Non-macromolecular additives organic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/24Homopolymers or copolymers of amides or imides
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J135/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical, and containing at least another carboxyl radical in the molecule, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J135/02Homopolymers or copolymers of esters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3142Sealing arrangements between parts, e.g. adhesion promotors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/36Amides or imides
    • C08F222/40Imides, e.g. cyclic imides
    • C08F222/402Alkyl substituted imides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/2919Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector

Definitions

  • the present invention relates to a composition to be usable for producing an electronic device, particularly a semiconductor device, and use of the same.
  • a flip chip technology by which a semiconductor chip is directly connected onto a substrate has been known.
  • a semiconductor chip and a circuit substrate are connected by means of electrodes (bumps) formed on the element formation surface side of the semiconductor chip.
  • an underfill sealant which is an adhesive composition, is generally filled between the semiconductor chip and the wiring substrate.
  • adhesive compositions containing an epoxy-based compound and/or a (meth)acrylic compound or the like have been known (e.g. Japanese Patent Laid-Open No. 2010-226098).
  • a composition utilizing a radical curing reaction of a (meth)acrylic compound has an advantage over a composition containing an epoxy-based compound that the reaction rate is higher and the efficiency in producing an electronic device can be enhanced.
  • An object of the present invention is to solve the aforedescribed problems in using a conventional adhesive composition and to provide a composition which improves productivity of electronic devices. Further, another object is to provide an electronic device or an electronic appliance containing the composition.
  • the present invention relates to the following items.
  • a sealant composition for electronic device comprising:
  • composition according to the above item 1 further comprising a radical initiator.
  • composition according to the above item 1 or 2 further comprising (b) a maleimide compound.
  • composition according to the above item 3 wherein the maleimide compound (b) comprises a bismaleimide.
  • An electronic device comprising a cured product of the composition according to any one of the above items 1 to 6.
  • An electronic appliance comprising the electronic device according to the above item 7.
  • the progress of the curing reaction of a composition according to the present invention at room temperature or higher and 80° C. or lower can be suppressed adequately. Therefore, the progress of curing reaction during flip chip mounting of a semiconductor chip is suppressed, and thus the composition of the present invention does not cause a defective electrode connection during flip chip mounting of a semiconductor chip and sufficient working time in a mounting process can be secured. As the result, a higher quality product can be provided without decreasing the production efficiency of an electronic device by flip chip mounting.
  • a composition for an electronic device according to the present invention contains at least
  • a composition of the present invention comprises a (meth)acrylic compound having two or more (meth)acryloyl groups (hereinafter, referred to as “component (a)”). Ordinarily, it is preferable that a compound having one (meth)acryloyl group and/or a compound having three or more (meth)acryloyl groups is used as needed in addition to a compound having two (meth)acryloyl groups. Further, the (meth)acrylic compound may be a monomer or an oligomer.
  • examples of monofunctional compounds having a (meth)acryloyl group include phenylphenol acrylate, methoxypolyethylene acrylate, acryloyloxyethyl succinate, a aliphatic acrylate, methacryloyloxyethyl phthalic acid, phenoxyethylene glycol methacrylate, a aliphatic methacrylate, ⁇ -carboxyethyl acrylate, isobornyl acrylate, isobutyl acrylate, tert-butyl acrylate, hydroxyethyl acrylate, hydroxypropyl acrylate, dihydrocyclopentadiethyl acrylate, cyclohexyl methacrylate, tert-butyl methacrylate, dimethylaminoethyl methacrylate, diethylaminoethyl methacrylate, tert-
  • Examples of compounds having two or more (meth)acryloyl groups include hexanediol dimethacrylate, hydroxyacryloyloxypropyl methacrylate, hexanediol diacrylate, urethane acrylate, epoxy acrylate, bisphenol A-type epoxy acrylate, modified epoxy acrylate, fatty acid-modified epoxy acrylate, amine-modified bisphenol A-type epoxy acrylate, allyl methacrylate, ethylene glycol dimethacrylate, diethylene glycol dimethacrylate, ethoxylated bisphenol A dimethacrylate, tricyclodecane dimethanol dimethacrylate, glycerine dimethacrylate, polypropylene glycol diacrylate, propoxylated ethoxylated bisphenol A diacrylate, 9,9-bis(4-(2-acryloyloxyethoxy)phenyl)fluorene, tricyclodecane diacrylate, dipropylene glycol di
  • Examples of commercial products of a (meth)acrylic compound usable for the present invention include functional monomers of SR&CD series, functional epoxy acrylate oligomers and functional urethane acrylate oligomers of CN series from Sartomer, Co., Inc., Light Ester series, and Light Acrylate series from Kyoeisha Chemical Co., Ltd., and NK Ester from Shin-Nakamura Chemical Co., Ltd.
  • the (meth)acrylic compounds may be used singly or in a combination of two or more kinds thereof.
  • the content of a (meth)acrylic compound in accordance with the present invention may be adjusted depending on the purpose of use, and is preferably from 10 to 90% by weight based on the total weight of a compound, and more preferably from 20 to 60% by weight. If the content of a (meth)acrylate is within the range, the viscosity of a composition before curing is low, and is superior in workability, and also in strength after curing.
  • composition according to the present invention contains a nitroxide compound and/or a thiocarbonylthio compound (hereinafter, referred to as “component (c)”).
  • component (c) is a compound generally used as a regulating agent for regulating a growth reaction or a termination reaction in a living radical polymerization.
  • a nitroxide compound means a compound having a nitroxide radical moiety represented by Formula (II) or a compound which can generate a nitroxide radical moiety.
  • the nitroxide radical moiety of Formula (II) is known as a capping agent for capping a radical at a polymer growing end in a living radical polymerization reaction mediated by nitroxide (NMP: Nitroxide-Mediated radical Polymerization).
  • a thiocarbonylthio compound has a structure of Formula (III), and is known as a chain transfer agent for a RAFT (Reversible Addition Fragmentation chain Transfer) polymerization reaction, which is a kind of living radical polymerization.
  • RAFT Reversible Addition Fragmentation chain Transfer
  • the composition according to the present invention When the composition according to the present invention is used for producing a semiconductor device, the composition is, for example, applied on a wiring substrate as described below. In such an event, the composition is occasionally put in a state at room temperature or higher in order to increase flowability of the composition. On this occasion, since the composition according to the present invention contains a component (c), the progress of the curing reaction is suppressed adequately and the work efficiency at a succeeding mounting process is not decreased. This is because, as presumed by the inventors, radicals generated in the composition inactivate reversibly a growing radical species with the radical structure of a component (c), and the progress of the curing reaction is suppressed thereby. In addition, the composition according to the present invention is not inhibited in the subsequent curing reaction at a higher temperature, and does not cause a problem in physical properties of a cured composition.
  • the content of a component (c) in the composition according to the present invention is preferably from 0.001 to 5% by weight based on the total weight of the composition, and more preferably from 0.01 to 1% by weight.
  • the composition according to the present invention preferably contains a thermal radical initiator described below, and in this case the molar ratio of an initiator to a component (c) (initiator:component (c)) is preferably from 1:0.001 to 1:10, and more preferably from 1:0.01 to 1:1. If the content of a component (c) is within the range, any problem in the reactivity or physical properties of a composition does not arise.
  • a compound having a nitroxide radical moiety examples thereof include 2,2,5-trimethyl-4-phenyl-3-azahexane-3-nitroxide, 2,2,6,6-tetramethyl-1-piperidinyloxy radical (TEMPO), 2,2,6,6-tetraethyl-1-piperidinyloxy radical, 2,2,6,6-tetramethyl-4-oxo-1-piperidinyloxy radical, 2,2,5,5-tetramethyl-1-pyrrolidinyloxy radical, 1,1,3,3-tetramethyl-2-isoindolinyloxy radical, and N,N-di-t-butylaminoxy radical.
  • TEMPO 2,2,6,6-tetramethyl-1-piperidinyloxy radical
  • 2,2,6,6-tetraethyl-1-piperidinyloxy radical 2,2,6,6-tetramethyl-4-oxo-1-piperidinyloxy radical
  • Examples of a compound which can generate a nitroxide radical moiety include alkoxyamine compounds represented by the following general Formula (IV):
  • R 1 , R 2 , R 3 are organic residues, and R 2 and R 3 may together form a cyclic structure.
  • alkoxyamine compounds represented by the general Formula (IV) include the following alkoxyamine compounds as described in the research paper of Didier Benoit, et al. (J. Am. Chem. Soc., 1999, 121, p. 3904 to 3920), and the like.
  • the above compounds are available as commercial products, for example, from Sigma-Aldrich Co. LLC., and can be also synthesized by a publicly known method.
  • Examples of a thiocarbonylthio compound include compounds described in Japanese Laid-open Patent Publication No. 2004-518773. Specific examples include, but not limited to, 2-cyano-2-propyl benzodithioate, 4-cyano-4-(phenylcarbonothioylthio)pentanoic acid, 2-cyano-2-propyl dodecyl trithiocarbonate, 4-cyano-4-Rdodecylsulfanylthiocarbonyl)sulfanyl]pentanoic acid, 2-(dodecylthiocarbonothioylthio)-2-methylpropionic acid, cyanomethyl dodecyl trithiocarbonate, cyanomethyl methyl(phenyl)carbamodithioate, bis(thiobenzoyl)disulfide, and bis(dodecylsulfanylthiocarbonyl)disulfide.
  • the above are available as commercial products, for example, from
  • the compounds may be used singly or in combinations of two or more of the same as a component (c) for the composition according to the present invention.
  • a composition according to the present invention may preferably contain further a (b) maleimide compound (hereinafter, referred to as “component (b)”) in addition to the (a) (meth)acrylic compound and the (c) nitroxide compound and/or a thiocarbonylthio compound.
  • component (b) maleimide compound
  • examples thereof include the following compounds.
  • a maleimide compound has at least one, preferably one or two following moiety (I) in the molecule.
  • R 1 and R 2 represent H, or a alkyl group having 1 to 6 carbons; or R 1 and R 2 together represent an alkylene group having 2 to 6 carbons.
  • R 1 and R 2 are both H; or R 1 and R 2 together represent a 1,4-butylene group.
  • the maleimide compound is preferably liquid at room temperature and therefore the moiety (I) bonds to a group that allows the maleimide compound to be liquid, for example, an organic group having a branched alkyl, alkylene, alkylene oxide, alkylene carboxyl, or alkylene amide structure having sufficient length and branches to render the maleimide compound liquid.
  • the maleimide compound may have one, or two or more structures (I).
  • the compound having two of these groups is a bismaleimide compound.
  • a maleimide compound even if it is not liquid, may be used if the composition becomes liquid as being mixed with another maleimide compound or mixed with another component.
  • Examples of a maleimide compound, in which the moiety (I) bonds to an alkyl group or an alkylene group (the groups may have a double bond, or a saturated aliphatic ring), include the following compounds.
  • Particularly preferable examples include stearyl maleimide, oleyl maleimide, behenyl maleimide, and a 1,20-bismaleimide derivative of 10,11-dioctyleicosane, as well as a combination thereof.
  • a 1,20-bismaleimide derivative of 10,11-dioctyleicosane is available from Henkel AG & Co. under a product name of X-BMI, which is synthesized from 1,20-diamino-10,11-dioctyl-eicosane and/or a diamine of a cyclic isomer thereof by a method according to U.S. Pat. No. 5,973,166 (the entire disclosures of U.S. Pat. No.
  • X-BMI contains one, or two or more of 1,20-bismaleimide-10,11-dioctyl-eicosane [compound denoted by Formula (X-1)], 1-heptylene maleimide-2-octylene maleimide-4-octyl-5-heptylcyclohexane [compound denoted by Formula (X-2)], 1,2-dioctylene maleimide-3-octyl-4-hexylcyclohexane [compound denoted by Formula (X-3)], and the like.
  • Bismaleimide compounds denoted by formulas (X-1) to (X-3) may be also preferably used solely.
  • Examples of a maleimide compound, in which the moiety (I) is bonded with a group having an alkylene oxide structure include the following compounds.
  • R is an alkylene group, preferably ethylene or 1,2-propylene
  • n is an integer from 2 to about 40, wherein the magnitude of an integer and the distribution of n to render the compound liquid are selected preferably.
  • the compound is available from DIC Corporation as LUMICURE (registered trademark) MIA200.
  • Examples of another usable maleimide compound include a compound (3,4,5,6-tetrahydrophthaloimide ethyl acrylate) denoted by the following formula.
  • the above maleimide compounds may be used singly or in a combination of two or more kinds thereof.
  • the content of a maleimide compound in accordance with the present invention is preferably from 0 to 50% by weight based on the total weight of a composition, more preferably from 0.1 to 50% by weight, and further preferably from 1 to 20% by weight. If the content of a maleimide compound is within the range, the curing rate becomes superior.
  • a composition contains a maleimide compound in accordance with the present invention
  • the (meth)acrylic compound and the maleimide compound in a composition polymerize by a radical reaction by being heated to a predetermined temperature.
  • only 1 kind of compound may polymerize to form a homopolymer, or two or more kinds of compounds may polymerize to form a copolymer.
  • a composition according to the present invention may contain a filler.
  • a filler By blending a filler, a composition for an electronic device having a low coefficient of linear expansion exhibiting superior dimensional stability and improved flame resistance can be obtained.
  • a filler either of an insulating inorganic filler or an electrically conductive inorganic filler may be selected depending on the purpose of use.
  • an insulating inorganic filler include silica, calcium silicate, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, aluminum nitride, and boron nitride, and particularly silica is preferable.
  • an electrically conductive inorganic filler include a metal and carbon black.
  • a filler subjected to a surface modification according to need may be also used.
  • Examples of commercial products include a lineup of “Mitsubishi carbon black” from Mitsubishi Chemical Corporation, “Asahi” series from Asahi Carbon Co., Ltd., calcium silicate “PCM Lite” series, aluminum hydroxide “ALH” series, and alumina-based “Celasule” from Kawai Lime Ind.
  • the average particle diameter of a filler is preferably smaller than the gap dimension between a semiconductor chip element formation surface and a wiring substrate. If the average particle diameter of a filler is too large, the filler may be trapped between metal connections in producing a semiconductor device, so that good electrical reliability may not be established, or a chip may break.
  • the blending amount of a filler may be adjustable depending on the purpose of use, it is preferably, for example, from 1 to 99% by weight based on the total weight of an adhesive composition, and more preferably from 10 to 80% by weight. If the content is within the range, a composition having a sufficient effect of filler addition and a viscosity free from any problem in handling can be obtained.
  • a composition according to the present invention contains preferably a radical initiator, more preferably a thermal radical initiator.
  • a thermal radical initiator an organic peroxide is preferable, and one that generates a radical at a convenient temperature is selected.
  • radical initiator examples thereof include diisobutyl peroxide, cumyl peroxyneodecanate, di-n-propyl peroxycarbonate, diisopropyl peroxycarbonate, di-sec-butyl peroxycarbonate, 1,1,3,3-tetramethylbutyl peroxyneodecanate, di(4-t-butylcyclohexyl)peroxydicarbonate, di(2-ethylhexyl)peroxydicarbonate, t-hexyl peroxyneodecanate, t-butyl peroxyneodecanate, t-butyl peroxyneoheptanate, t-hexyl peroxypivalate, t-butyl peroxypivalate, di(3,5,5-trimethylhexanoyl)peroxide, dilauroyl peroxide, 1,1,3,3-tetramethylbutyl peroxy-2-eth
  • the organic peroxides can be purchased from Akzo Nobel N.V., Gio specialities Chemical, Arkema S.A., NOF Corporation, Kayaku Akzo Corporation, and the like. The same may be used singly, or in a combination of two or more kinds thereof.
  • the blending amount of a radical initiator is preferably from 0.01 to 10% by weight based on the total weight of a composition, and more preferably from 0.1 to 5% by weight. If the blending amount of a thermal radical initiator is within the range, there occurs no problem of instability in applying the composition or of prolongation of a curing time.
  • a composition according to the present invention may contain an additive as needed, such as a silane coupling agent, a rubber component, an antioxidant, a light stabilizer, a radical stabilizing agent, and a surfactant.
  • a silane coupling agent and a rubber component can advantageously improve the adhesive property of a composition, relax a stress, and reduce warping of a cured reaction product.
  • an antioxidant, and a radical stabilizing agent may be used in order to extend the pot life.
  • a surfactant may be added for defoaming in coating, or for improving the wettability to a target to be coated and the leveling property.
  • silane coupling agent examples thereof include an aminosilane coupling agent, an epoxy silane coupling agent, a ureide silane coupling agent, an isocyanate silane coupling agent, a vinyl silane coupling agent, a (meth)acrylic silane coupling agent, and a ketimine silane coupling agent, and among these, an isocyanate silane coupling agent, a (meth)acrylic silane coupling agent, and an epoxy silane coupling agent are preferable.
  • the silane coupling agents can be purchased from Dow Corning Toray Silicone Co., Ltd., Shin-Etsu Silicone, Matsumoto Fine Chemical Co., Ltd., Tokyo Chemical Industry Co., Ltd. and the like.
  • the blending amount of a silane coupling agent is adjustable appropriately, it is preferably, for example, from 0 to 10% by weight based on the total weight of a composition, and more preferably from 0 to 5% by weight. If the content of a silane coupling agent is too high, a silane coupling agent vaporizes during thermal compression bonding in a flip chip process to develop voids.
  • examples thereof include industrial rubbers, such as acrylic rubber, nitrile rubber, butadiene rubber, and nitrile butadiene rubber, and a low molecular weight crosslinking agent for rubber.
  • industrial rubbers such as acrylic rubber, nitrile rubber, butadiene rubber, and nitrile butadiene rubber, and a low molecular weight crosslinking agent for rubber.
  • commercial products for industrial rubbers include “Paracron RP” series from Negami Chemical Industrial Co., Ltd., “Staphyloid IM” series and “Staphyloid AC” series from Ganz Chemical Co., Ltd., “Zeon” series from Zeon Kasei Co., Ltd., and “METABLEN C/E/W/S/SX/SRX” from Mitsubishi Rayon Co., Ltd.
  • Examples of commercial products for a low molecular weight crosslinking agent for rubber include “Ricon” series from Sartomer, “Poly bd” and “Poly ip” series, “EPOL” series, and “Krasol” from Idemitsu Kosan Co., Ltd., and “NISSO-PB” from Nippon Soda Co., Ltd.
  • the products may be used singly or in a combination of two or more kinds thereof.
  • a commercial product of an acrylic resin, in which a rubber particle has been dispersed in advance may be used, and examples thereof include Paracron SN-50, AS-3000, ME-2000, W-1163, W-248E, W-197C, PRE-COAT 200, and PANLON S-2012 from Negami Chemical Industrial Co., Ltd.
  • the blending amount of rubber is adjustable appropriately, it is preferably, for example, from 0 to 30% by weight based on the total weight of an adhesive composition, and more preferably from 0 to 20% by weight. If the rubber content is too high, the viscosity of an adhesive composition increases too much causing such problems that the handling property may be deteriorated, or mixing of other components may become difficult, or the adhesiveness of an adhesive may be deteriorated.
  • Examples include for an antioxidant and a radical stabilizing agent hydroquinones, benzoquinones, and hindered phenols; and for a light stabilizer benzotriazole-based, triazine-based, benzophenone-based, benzoate-based, and hindered amine-based ultraviolet absorbers.
  • a surfactant may be selected out of catalogs of commercial products depending on a purpose of use.
  • a composition according to the present invention can be obtained by mixing uniformly the above specified respective components, as well as a solvent according to need.
  • a composition is only required that a viscosity thereof is adjusted as long as it can be applied by a coater such as a dispenser, and may be also solventless. It is also possible to adjust viscosity by selection of compounds in a composition, or by adjustment of the blending amounts thereof.
  • a composition according to the present invention can be produced by kneading uniformly predetermined amounts of the respective components by, without limitation thereto, using singly or in a combination of publicly known various kneading machines, such as a homodisperser, a universal mixer, a Banbury mixer, a kneader, a twin roll mill, a triple roll mill, and an extruder. Kneading may be conducted under various conditions, such as at normal temperature or with heating, at a normal pressure, a reduced pressure, or an increased pressure, or with inert gas flow.
  • various kneading machines such as a homodisperser, a universal mixer, a Banbury mixer, a kneader, a twin roll mill, a triple roll mill, and an extruder. Kneading may be conducted under various conditions, such as at normal temperature or with heating, at a normal pressure, a reduced pressure, or an increased pressure, or with inert gas flow.
  • composition for an electronic device according to the present invention is preferably used as a sealant for an electronic device, without particular restriction thereto.
  • a sealant include an underfill sealant (sealant) for an electronic device including a semiconductor chip, an insulating varnish, an insulating material for a printed wiring substrate, an impregnation resin for a printed wiring substrate, a coating material for an electronic device, a potting material for an electronic device, and an adhesive for an electronic device. It is particularly preferable that the present invention is directed to use as an underfill sealant.
  • a production method of an electronic device comprising a composition according to the present invention will be described.
  • a flip chip process is preferably used.
  • a production method of an electronic device comprises, for example,
  • a composition according to the present invention is applied on a circuit face of a wiring substrate. All over the surface of a wiring substrate or only a part where a semiconductor chip is to be mounted may be coated with the composition.
  • a coating method include coating methods using a spin coater, a dispenser, a roller, and the like and screen printing.
  • a syringe used in the coating process, a substrate, and the like may be heated to room temperature or higher as needed so as to improve the flowability of the composition.
  • a semiconductor chip is placed on a part coated with an adhesive composition on a wiring substrate.
  • a circuit face of the wiring substrate namely, a face coated with the composition in the coating process
  • an element formation surface of the semiconductor chip are so aligned that the two face each other.
  • thermal compression bonding is followed. Heating may be performed additionally after the thermal compression bonding in order to cure the adhesive composition.
  • thermal compression bonding is performed immediately after position adjustment using a flip chip bonder, or after position adjustment and provisional mounting, heating connection is performed in a reflow oven, and the like.
  • a thermal profile suitable for a package or a sealing method is applied.
  • chip mounting not only a flip chip bonder, a die bonder, and the like, with which position adjustment is possible, may be also used alternatively.
  • the temperature for thermal compression bonding there is no particular restriction on the temperature for thermal compression bonding.
  • a temperature higher than the melting point by 10 to 100° C. is preferable, 200° C. or higher is preferable, and 210 to 300° C. is more preferable.
  • the duration time for thermal compression bonding is preferably from 1 to 20 sec, and the pressure is preferably from 0.1 to 7 MPa. Further, if additional heating is performed for curing completely an adhesive composition after the thermal compression bonding, for example, 150 to 220° C. for 30 to 180 min are preferable.
  • An electronic device obtained as above can be applied to various electronic appliances utilizing a semiconductor chip, such as a cell phone, a personal computer, and a TV.
  • a semiconductor chip such as a cell phone, a personal computer, and a TV.
  • Table 1 shows compounds used in the following Examples and Comparative Examples.
  • N-tert-butyl-N-(2-methyl-1-phenylpropyl)-O-(1- compound phenylethyl)hydroxylamine compound represented by Formula V
  • N-2 Produced by Sigma-Aldrich Co. LLC.
  • 2,2,5-Trimethyl-4-phenyl-3-azahexane-3-nitroxide N-3 Produced by Sigma-Aldrich Co. LLC.
  • TEMPO 2,2,6,6-tetramethyl-1-piperidinyloxy radical
  • Thiocarbonylthio S-1 (Produced by Sigma-Aldrich Co.
  • Circuit substrate WALTS-KIT MB50-0102JY_CR from Waits Co., Ltd. Pads are according to CuOSP specifications.
  • the circuit substrate (1) and the semiconductor chip (2) are connected together to form a daisy chain, and when all the bumps in a chip are connected, the continuity can be established. In other words, if a single bump out of 544 bumps cannot be connected, electrical insulation is recognized by an electrical continuity test.
  • Table 2 shows compounds blended in the respective Examples and Comparative Examples and the blending amounts thereof (% by weight).
  • the composition A was applied on a circuit substrate with an autodispenser to obtain a circuit substrate B coated with the adhesive composition A.
  • the position of a semiconductor chip and the circuit substrate B was adjusted and the two were pressed together using a flip chip bonder equipped with a pulse heat function, followed by thermal compression bonding with pulse heating at 240° C. Thereafter, the composition A was cured in an oven at 150° C. for 1 hour to complete an electronic device C.
  • Example 1 The electrical continuity of the above produced electronic device C was examined to find that the electrical continuity was good with respect to any heat exposure time on the hot plate at 80° C. (Table 3). Namely, all of the 544 bumps on the semiconductor chip were connected. Therefore, it was demonstrated that the composition in Example 1 maintained liquidity sufficient for processing, even if the same was left standing on a hot plate at 80° C.
  • Electronic devices were produced by the same method as in Example 1, except that the components to be blended in the compositions were changed as shown in Table 2. Also in Examples 2 to 13, circuit substrates coated with the compositions were left standing at 80° C. for 0 min, 15 min, 30 min, 45 min, 60 min, and 90 min, then electronic devices were produced, and the electrical continuity thereof were examined. As the results, for all the cases, good electrical continuity was obtained. Therefore, it was demonstrated that the compositions in Examples 2 to 13 also maintained liquidity sufficient for processing, even if the same were left standing on a hot plate at 80° C.
  • An electronic device was produced by the same method as in Example 1, except that the components to be blended in a composition were changed as shown in Table 2 and a maleimide compound and component (c) were not blended. Also in Comparative Example 1, circuit substrates coated with the composition were left standing at 80° C. for 0 min, 15 min, 30 min, 45 min, 60 min, and 90 min, then electronic devices were produced, and the electrical continuity thereof were examined. As the results, good electrical continuity of an electronic device produced without being left standing at 80° C. (heat exposure time 0 min) was confirmed, however in all other cases, electrical continuity was not established (Table 4). Therefore, it was demonstrated that curing of the composition in Comparative Example 1 had progressed by being left standing at 80° C., and good electrical continuity could not be established.
  • An electronic device was produced by the same method as in Example 1, except that the components to be blended in a composition were changed as shown in Table 2 and component (c) was not blended. Also in Comparative Example 2, the electrical continuity was examined as in Example 1. As the results, good electrical continuity of an electronic device produced without being left standing at 80° C. (heat exposure time 0 min) was confirmed, however in all other cases (left standing at 80° C.), electrical continuity was not established. It was confirmed that curing of the composition in Comparative Example 2 had also progressed by being left standing at 80° C., and good electrical continuity could not be established.
  • An electronic device was produced by the same method as in Example 1, except that the components to be blended in a composition were changed as shown in Table 2 and component (c) was replaced with benzoquinone which is a polymerization inhibitor. Also in Comparative Example 3, the electrical continuity was examined as in Example 1. As the results, good electrical continuity of an electronic device produced without being left standing at 80° C. (heat exposure time 0 min) was confirmed, however in all other cases (left standing at 80° C.), electrical continuity was not established. It was confirmed that curing of the composition in Comparative Example 3 had progressed by being left standing at 80° C., and good electrical continuity could not be established.
  • An electronic device was produced by the same method as in Example 1, except that the components to be blended in a composition were changed as shown in Table 2 and component (c) was replaced with hydroquinone which is a polymerization inhibitor. Also in Comparative Example 4, the electrical continuity was examined as in Example 1. As the results, good electrical continuity of an electronic device produced without being left standing at 80° C. (heat exposure time 0 min) was confirmed, however in all other cases (left standing at 80° C.), electrical continuity was not established. It was confirmed that curing of the composition in Comparative Example 4 had progressed by being left standing at 80° C., and good electrical continuity could not be established.

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US10870756B2 (en) 2016-08-10 2020-12-22 Panasonic Intellectual Property Management Co., Ltd. Acrylic composition for encapsulation, sheet material, laminated sheet, cured object, semiconductor device, and process for producing semiconductor device
US12006433B2 (en) 2019-01-31 2024-06-11 Panasonic Intellectual Property Management Co., Ltd. Thermosetting resin composition, resin sheet, laminate, and printed wiring board

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US9771500B2 (en) 2017-09-26
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CN103858217A (zh) 2014-06-11
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US20160177148A1 (en) 2016-06-23
JP6084567B2 (ja) 2017-02-22

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