US20140131246A1 - Container and method of mitigating metal-contact contamination of polysilicon - Google Patents

Container and method of mitigating metal-contact contamination of polysilicon Download PDF

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Publication number
US20140131246A1
US20140131246A1 US14/075,989 US201314075989A US2014131246A1 US 20140131246 A1 US20140131246 A1 US 20140131246A1 US 201314075989 A US201314075989 A US 201314075989A US 2014131246 A1 US2014131246 A1 US 2014131246A1
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US
United States
Prior art keywords
container
polyurethane
polysilicon
protective liner
metal surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/075,989
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English (en)
Inventor
Robert J. Geertsen
Robert M. Davidson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rec Silicon Inc
Original Assignee
Rec Silicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rec Silicon Inc filed Critical Rec Silicon Inc
Priority to US14/075,989 priority Critical patent/US20140131246A1/en
Assigned to REC SILICON INC reassignment REC SILICON INC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DAVIDSON, ROBERT M., GEERTSEN, ROBERT J.
Publication of US20140131246A1 publication Critical patent/US20140131246A1/en
Abandoned legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/14—Linings or internal coatings

Definitions

  • the present disclosure relates to a modified container for polysilicon and a method of mitigating metal contamination of polysilicon contained within.
  • Silicon of ultra-high purity is used extensively for applications in the electronic industry and the photovoltaic industry.
  • the purity demanded by industry for these applications is extremely high and frequently materials with only trace amounts of contamination measured at the part per billion levels are deemed acceptable.
  • By rigorous control of the purity of the reactants used to manufacture polycrystalline silicon it is possible to produce such high purity polycrystalline silicon but then extreme care must be taken in any handling, packaging or transportation operations to avoid post contamination.
  • the polycrystalline silicon is in contact with a surface there is a risk of contamination of the polycrystalline silicon with that surface material. If the extent of contamination exceeds certain industrial stipulations then the ability to sell the material into these end applications may be restricted or even denied. In this respect minimizing contact metal contamination is a primary concern if silicon performance criteria in the semiconductor industries are to be attained.
  • this disclosure concerns a method of reducing or eliminating contamination of granular polysilicon, during storage or transportation, from contact with an inner metal surface of a container, the method comprises placing polysilicon in a container provided with a protective liner comprising microcellular elastomeric polyurethane on at least a portion of an inner metal surface of the container, the liner being located such that the polysilicon is shielded from contact with the inner metal surface.
  • this disclosure relates to a container suitable for holding granular polysilicon.
  • the container is a container at least partially constructed of metal and having an inner metal surface that defines a region to contain polysilicon, and portions of the inner surface that have contact with the polysilicon are provided with a protective liner comprising microcellular elastomeric polyurethane, thereby reducing or eliminating metal contamination of the polysilicon.
  • this disclosure relates to an article comprising:
  • FIG. 1 is a schematic cross-sectional view of a lined container suitable for holding polysilicon.
  • FIG. 2 is a schematic perspective view of a lined hopper and discharge chute suitable for holding and discharging polysilicon.
  • storage container in the context of this disclosure may include a bin, a drum, a chute, a hopper or a crushing bed at least partially of metal construction and/or having polysilicon contact surfaces at least partially of metal.
  • the container may be associated with the processing and manufacturing operation of polysilicon and/or the packaging and transportation of polysilicon.
  • the container may be an article of commerce when polysilicon is held within the container.
  • the polysilicon held within the container is not limited to any particular source and may include particulate or granular silicon used as seed in a fluid bed reactor method of producing polysilicon, or the product harvested from such a process.
  • the polysilicon contained within the container can also be that obtained from a Siemens process and may be in the form silicon dendrites obtained according to the method disclosed in the U.S. patent publication U.S.2003/0150378.
  • the polysilicon storage container is a container intended for use with polysilicon associated a fluid bed manufacturing processes for crystalline polysilicon, typically referred to as granulate or granular silicon.
  • Granulate silicon encompasses material having an average size in its largest dimension of from about 0.01 micron to as large as 15 millimeters. More typically, the majority of granulate silicon will have an average particle size of from about 0.1 to about 5 millimeters and be essentially spheroid in form and devoid of the presence of any sharp or acute edge structure.
  • Metal contamination of silicon held within the container is caused by direct contact of the silicon with a metal surface, or by entrainment of erosion or wear products as discrete metal particles within the bulk of the silicon mass (e.g., particulate polysilicon).
  • the contamination is reduced or avoided by the presence of a protective liner at least partially covering one or more inner metal surfaces of a container and wherein the protective liner comprises microcellular elastomeric polyurethane.
  • the term “polyurethane” may also include materials where the polymer backbone comprises polyureaurethanes or polyurethane-isocyanurate linkage.
  • at least 50% or at least 75% of the surface is covered by a protective liner as disclosed herein.
  • the surface is completely covered by the protective liner. “Completely” should be taken as essentially free from defects from a practical point of view. When polysilicon is added to the container, the polysilicon contacts the protective liner instead of a bare metal surface.
  • FIG. 1 is a cross-sectional schematic diagram of an exemplary polysilicon storage container 10 including a container 20 at least partially of metal construction and a protective liner 30 at least partially covering one of more inner surfaces 22 of the container 20 .
  • Particulate or granular polysilicon 40 located within the container 20 is in contact with the protective liner 30 .
  • FIG. 2 is a schematic perspective view of an exemplary polysilicon container system 100 including a storage hopper 110 and a discharge chute 120 .
  • storage hopper 110 and chute 120 is at least partially constructed of metal.
  • a protective liner 130 at least partially covers one or more inner metal surfaces 112 of hopper 110 , and/or at least partially covers one or more inner metal surfaces 122 of chute 120 .
  • Particulate or granular polysilicon 140 located within hopper 110 and chute 120 , is in contact with the protective liner 130 .
  • elastomeric refers to a polymer with elastic properties, e.g., similar to vulcanized natural rubber. Thus, elastomeric polymers can be stretched, but retract to approximately their original length and geometry when released.
  • microcellular generally refers to a foam structure having pore sizes ranging from 1-100 ⁇ m. Microcellular materials typically appear solid on casual appearance with no discernible reticulate structure unless viewed under a high-powered microscope. With respect to elastomeric polyurethanes, the term “microcellular” typically is defined by density, such as an elastomeric polyurethane having a bulk density greater than 600 kg/m 3 . Polyurethane of lower bulk density typically starts to acquire a reticulate form and is generally less suited for use as the protective coating described herein.
  • Microcellular elastomeric polyurethane suitable for use in the disclosed application is that having a bulk density of 1150 kg/m 3 or less, and a Shore Hardness of at least 65A.
  • the elastomeric polyurethane has a Shore Hardness of up to 90A, such as up to 85A; and from at least 70A.
  • the Shore Hardness may range from 65A to 90A, such as 70A to 85A.
  • the suitable elastomeric polyurethane will have a bulk density of from at least 600 kg/m 3 , such as from at least 700 kg/m 3 and more preferably from at least 800 kg/m 3 ; and up to 1150 kg/m 3 , such as up to 1100 kg/m 3 or up to 1050 kg/m 3 .
  • the bulk density may range from 600-1150 kg/m 3 , such as 800-1150 kg/m 3 , or 800-1100 kg/m 3 .
  • the bulk density of solid polyurethane is understood to be in the range of 1200-1250 kg/m 3 .
  • the elastomeric polyurethane has a Shore Hardness of from 65A to 90A and a bulk density of from 800 to 1100 kg/m 3 .
  • Elastomeric polyurethane can be either a thermoset or a thermoplastic polymer; this presently disclosed application is better suited to the use of thermoset polyurethane.
  • Microcellular elastomeric polyurethane having the above physical attributes is observed to be particularly robust, and withstands the abrasive environment and exposure to particulate granulate silicon eminently better than many other materials.
  • the protective liner or coating on the inner metal surface of the container typically will be present in an overall thickness of from at least 0.1, such as from at least 0.5, from at least 1.0, or from at least 3.0 millimeters; and up to a thickness of about 10, such as up to about 7, or up to about 6 millimeters.
  • embodiments of the disclosed protective liner may have a thickness from 0.1-10 mm, such as 0.5-7 mm or 3-6 mm.
  • the protective liner can be a plastic laminate structure comprising an outer polyurethane lamella being in contact with the silicon. However, in one embodiment, it is contemplated that the majority or the entirety of the protective liner be the elastomeric microcellular polyurethane.
  • the placement of the protective liner within the 1 container may be achieved by obtaining the elastomeric microcellular polyurethane in the form of a sheet; cutting the sheet to form one or more parts shaped to conform to the interior size and geometry of the cavity of the container; coating at least a portion of the inner metal surface of the container with an adhesive; and then bringing into contact with the adhesive the polyurethane sheet thereby forming a laminate structure of metal/adhesive/polyurethane.
  • the adhesive is applied to an outer surface of the polyurethane material (i.e., the surface facing the inner metal surface of the container), and the polyurethane/adhesive is brought into contact with the inner metal surface of the container.
  • the adhesive is applied to both the inner metal surface and the surface of the polyurethane material.
  • the adhesive is selected to be compatible with the metal and polyurethane, thereby providing adequate adhesion and avoiding subsequent delamination and/or failure.
  • Suitable adhesives include, but are not limited to, a polyurethane, isocyanate or epoxy-based adhesive.
  • the metal surface and/or the back surface of the polyurethane sheet to be brought into the contact with the adhesive may be roughened and/or treated with a primer substance to enhance the integrity and strength of the adhesive bond.
  • the placement of the microcellular polyurethane protective liner can be achieved by a spray-coating technique.
  • the precursor materials to the polyurethane are brought together and sprayed directly as a reactive mass onto the exposed metal surface, which on reacting out and curing provides the desired protective liner.
  • Preparing the protective liner in this manner offers the advantage of good adhesion of the polyurethane to the metal surface while avoiding seams inherent to the above-mentioned placement procedure involving cut sheets.
  • An alternative application procedure to spray coating is in situ casting of the polyurethane, which has the additional advantage of providing an article with substantially smooth continuous polyurethane surfaces.
  • Procedures for the manufacture of microcellular polyurethane elastomers are well known to a person skilled in the in the art and in general comprises reacting a polyisocyanate with a polyether polyol giving a polyether polyol-based polyurethane (“Pe-PU”), or alternatively by reaction of a polyisocyanate with a polyester polyol giving a polyester polyol-based polyurethane (“Pst-PU”).
  • Polyester polyol-based polyurethane elastomers are typically observed as having physical properties better suited to the presently disclosed application compared to the polyether polyol-based polyurethane elastomer and hence are the preferred elastomeric polyurethane for use herein.
  • Exemplary publications teaching the preparation of microcellular polyurethane elastomers include: U.S. Pat. No. 4,647,596; U.S. Pat. No. 5,968,993; U.S. Pat. No. 5,231,159; U.S. Pat. No. 6,579,952; U.S.2002/111,453 and U.S.2011/003103.
  • Procedures for the manufacture of polyurethane-lined metal articles are also known to a person skilled in the art and exemplified by publications including U.S.2005/189,028; GB 2,030,669; U.S. Pat. No. 5,330,238; or JP52-20452.
  • Procedures for manufacture of polyurethane or polyurethane-urea and articles therewith by spray techniques are also known to a person skilled in the art and exemplified by publications including U.S.2008/305,266; WO2012/005351; U.S. Pat. No. 6,399,736; U.S. Pat. No. 6,747,117; U.S. Pat. No. 7,736,745; and U.S. Pat. No. 6,730,353.
  • microcellular elastomeric polyurethane as a protective liner for the container relative to other potential liner materials is illustrated by studying the abrasion resistance properties of the potential liner materials. Abrasion is considered the mostly likely means of failure of the protective liner. Hence an accelerated abrasion wear test has been deployed to identify the material of choice.
  • the test procedure has been designed to mimic the demanding conditions that might occur in a typical operation associated with the manufacture, transfer and storage of granulate polysilicon.
  • the general procedure consists of subjecting coupons (3′′ ⁇ 3′′ ⁇ 0.5′′ (7.6 ⁇ 7.6 ⁇ 1.3 cm)) of plastic resins to abrasive impact erosion by particulate polysilicon and observing the change to the surface of the coupon after a given time.
  • the particulate or granular polysilicon used consists of essentially smooth spheroid particles having an average (95%) particle size of from 0.9-1.2 mm.
  • the polysilicon particles are caused to impact the large surface of the plastic coupons, at a focused central point, by being carried in a jetted air stream operating at a pressure of about 15 psi (103,420 Pa) and estimated as conferring a particle velocity of from 45 to 55 feet/sec (13.7-16.8 m/s).
  • the orientation of the jetted air stream was set to provide a fixed given impact angle, relative to the coupon surface. This configuration exposes the coupon surface to passage of approximately 24 kg/hour of granular polysilicon material.
  • the wear and abrasive loss on the coupon being observed by formation of a surface crater the depth of which is measured after a set continuous exposure time to polysilicon.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Silicon Compounds (AREA)
  • Packages (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
US14/075,989 2012-11-09 2013-11-08 Container and method of mitigating metal-contact contamination of polysilicon Abandoned US20140131246A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US14/075,989 US20140131246A1 (en) 2012-11-09 2013-11-08 Container and method of mitigating metal-contact contamination of polysilicon

Applications Claiming Priority (2)

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US201261724844P 2012-11-09 2012-11-09
US14/075,989 US20140131246A1 (en) 2012-11-09 2013-11-08 Container and method of mitigating metal-contact contamination of polysilicon

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US (1) US20140131246A1 (ja)
JP (1) JP2015535512A (ja)
KR (1) KR20150082332A (ja)
CN (1) CN103946130B (ja)
DE (1) DE112013005360T5 (ja)
TW (1) TWI642603B (ja)
WO (1) WO2014074819A1 (ja)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
US20150104369A1 (en) * 2013-10-11 2015-04-16 Rec Silicon Inc Polysilicon transportation device and a reactor system and method of polycrystalline silicon production therewith

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JP7388373B2 (ja) * 2021-01-25 2023-11-29 信越半導体株式会社 洗浄後の多結晶シリコン原料の保管容器、保管装置、及び保管方法

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Also Published As

Publication number Publication date
CN103946130A (zh) 2014-07-23
TW201437114A (zh) 2014-10-01
DE112013005360T5 (de) 2015-07-23
WO2014074819A1 (en) 2014-05-15
JP2015535512A (ja) 2015-12-14
CN103946130B (zh) 2019-02-01
TWI642603B (zh) 2018-12-01
KR20150082332A (ko) 2015-07-15

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AS Assignment

Owner name: REC SILICON INC, WASHINGTON

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DAVIDSON, ROBERT M.;GEERTSEN, ROBERT J.;REEL/FRAME:031898/0541

Effective date: 20131203

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION