US20130161313A1 - Heat-treatment furnace - Google Patents
Heat-treatment furnace Download PDFInfo
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- US20130161313A1 US20130161313A1 US13/701,953 US201113701953A US2013161313A1 US 20130161313 A1 US20130161313 A1 US 20130161313A1 US 201113701953 A US201113701953 A US 201113701953A US 2013161313 A1 US2013161313 A1 US 2013161313A1
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 115
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 239000004065 semiconductor Substances 0.000 claims abstract description 45
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 239000002019 doping agent Substances 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 16
- 238000003780 insertion Methods 0.000 abstract description 6
- 230000037431 insertion Effects 0.000 abstract description 6
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 66
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 18
- 239000010453 quartz Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 238000009792 diffusion process Methods 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 6
- 238000011282 treatment Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000012080 ambient air Substances 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
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- 230000003647 oxidation Effects 0.000 description 3
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- 239000011574 phosphorus Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- DIZZIOFQEYSTPV-UHFFFAOYSA-N [I].CO Chemical compound [I].CO DIZZIOFQEYSTPV-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000006388 chemical passivation reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
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- 230000000737 periodic effect Effects 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
Definitions
- This invention relates to a heat-treatment furnace for use in the heat treatment of semiconductor substrates, typically silicon substrates.
- a semiconductor heat treating process is generally carried out in a furnace of the following design in order to prevent any contamination from the ambient air, heater or the like.
- a furnace core tube 21 of high-purity quartz or the like which is provided with an opening 22 at one end and a gas inlet conduit 23 at the other end is disposed inside a cylindrical heater 24 which is previously installed in the furnace.
- a boat 26 of high-purity quartz or the like having semiconductor substrates 25 rested thereon is moved into the furnace core tube 21 through the opening 22 and set in place.
- a lid 27 of high-purity quartz or the like is closed to establish a substantially tight seal.
- High-purity gas such as nitrogen or argon is fed from the gas inlet conduit 23 whereas the gas is discharged out of the furnace through small gaps between the core tube 21 and the lid 27 . While the in-furnace atmosphere is kept clean in this way, heat treatment for dopant diffusion or oxidation is carried out.
- FIG. 7 illustrates one exemplary heat-treatment flow using a heat-treatment furnace including such a core tube
- FIG. 10 illustrates one exemplary time sequence of the heat treatment.
- the prior art heat treating process is described by referring to these figures.
- high-purity gas such as nitrogen may be continuously fed from the gas inlet conduit 23 to keep cleanness in the furnace.
- the semiconductor substrates must be cooled at the boat station until a handleable temperature is reached.
- the system remains unready for insertion of a next batch, introducing a standby time between consecutive heat treatment batches.
- the heat-treatment furnace is described therein as comprising a furnace core tube which is open at one end, a shutter for operatively closing the open end, and a partition disposed in the core tube and inside the open end so as to define a gap between the partition and the inner wall of the core tube, the shutter being provided with a vent.
- This design allegedly eliminates any adverse impact by entry of ambient air.
- Patent Document 1 JP-A H05-102054
- the semiconductor substrates In the heat-treatment furnace comprising a core tube of the above-mentioned structure, however, semiconductor substrates must be moved into and out of the furnace via only one end of the core tube because of the structure. Furthermore, as indicated above, the semiconductor substrates after being taken out of the hot furnace must be cooled at the boat station until a handleable temperature is reached. For continuous implementation of the heat treatment, this introduces a standby time between consecutive heat treatment batches. Particularly when semiconductor devices which are subject to a relatively short duration of heat treatment, typically crystalline silicon solar cells, are heat treated, the standby time accounts for a relatively high proportion among the overall heat treatment time, which becomes the major cause of restricting the productivity of the heat treatment process.
- the furnace has low gas tightness due to the presence of the belt or beam, even in the structure provided with shutters at the inlet and outlet, and fails to prevent inflow of ambient air, giving rise to a problem that the carrier lifetime of semiconductor substrates can be significantly reduced by the heat treatment.
- Such continuous mode heat treatment furnaces of the belt conveyor or walking beam system also have problems including a small number of simultaneously processable workpieces per unit area, and low thermal efficiency.
- An object of the invention which has been made under the above-mentioned circumstances, is to provide a heat-treatment furnace which is adapted to reduce a standby time between batches during consecutive heat treatment of semiconductor substrates for thereby improving productivity and to reduce the frequency of breaking of gas inlet conduits for thereby saving the running cost of the heat-treatment process.
- a furnace core tube for use in heat treatment process is structured as a cylindrical shape tube which is provided at opposite ends with openings having a sufficient size to allow semiconductor substrates to be moved into and out of the core tube, a lid is detachably mounted to the core tube to block each opening to substantially seal the core tube, the core tube or lid is provided with a thin gas inlet conduit for introducing gas into the core tube, whereby the atmosphere within the furnace can be kept clean during heat treatment, and the semiconductor substrates may be moved into and out of the core tube and heat treated therein while the lids at opposite ends are opened and closed as necessary, whereby a standby time between batches during consecutive heat treatment can be reduced for thereby improving productivity.
- the core tube is structured as a simple cylindrical shape, the frequency of breaking of gas inlet conduits is reduced and the cost of the core tube itself is reduced. As a result, the running cost of the heat-treatment process can be saved.
- the invention is predicated on these findings.
- the invention provides a heat-treatment furnace as defined below.
- the invention reduces a standby time between batches during consecutive heat treatment of semiconductor substrates, thereby improving productivity.
- the core tube structured as a simple cylindrical shape reduces the frequency of breaking of gas inlet conduits, thereby saving the running cost of the heat-treatment process.
- FIG. 1 is a schematic cross-sectional view of one embodiment of the invention including a furnace core tube and lids having gas inlet conduits.
- FIG. 2 is a schematic cross-sectional view of another embodiment of the invention including a furnace core tube having gas inlet conduits disposed near opposite ends and at the lower side thereof, and lids.
- FIG. 3 is a schematic cross-sectional view of a further embodiment of the invention including a furnace core tube having a gas inlet conduit disposed near the center thereof, and lids.
- FIG. 4 is a schematic cross-sectional view of one exemplary structure of a conventional furnace core tube.
- FIG. 5 is a schematic cross-sectional view of a heat-treatment flow using one exemplary heat-treatment furnace of the invention.
- FIG. 6 is a schematic cross-sectional view of a heat-treatment flow using another exemplary heat-treatment furnace of the invention.
- FIG. 7 is a schematic cross-sectional view of a heat-treatment flow using the conventional heat-treatment furnace.
- FIG. 8 illustrates a time sequence of heat treatment using one exemplary heat-treatment furnace of the invention.
- FIG. 9 illustrates a time sequence of heat treatment using another exemplary heat-treatment furnace of the invention.
- FIG. 10 illustrates a time sequence of heat treatment using the conventional heat-treatment furnace.
- FIG. 1 illustrates the structure of one exemplary core tube included in the heat-treatment furnace of the invention.
- a cylindrical core tube 1 has openings 2 a, 2 b at axially or longitudinally opposite ends and is concentrically enclosed by a cylindrical heater 4 which is installed in a heat-treatment furnace (not shown).
- a boat 6 on which semiconductor substrates 5 are rested may be moved into and out of the core tube through either one of the openings 2 a, 2 b.
- the openings 2 a, 2 b may be substantially blocked and sealed by lids 7 a, 7 b, respectively.
- the lids 7 a, 7 b are integrally provided with thin gas inlet conduits 8 a, 8 b which penetrate through the lids 7 a, 7 b in a gas-tight manner for introducing gas into the core tube. With the lids 7 a, 7 b closed, gas can be fed from the selected one of gas inlet conduits 8 a, 8 b.
- the gas inlet conduits 8 a, 8 b need not necessarily be integrated with the lids 7 a, 7 b or protruded from the lids 7 a, 7 b.
- a separate structure is acceptable which consists of bores in the lids 7 a, 7 b and gas inlet conduits such that the conduit may be fixedly engaged in the bore by snug fit.
- FIG. 2 illustrates the structure of another exemplary core tube included in the heat-treatment furnace of the invention.
- a cylindrical core tube 1 ′ has openings 2 a, 2 b at axially or longitudinally opposite ends and thin gas inlet conduits 9 a, 9 b disposed near the opposite ends and at the lower side.
- the core tube 1 ′ is concentrically enclosed by a cylindrical heater 4 which is installed in a heat-treatment furnace (not shown).
- a boat 6 on which semiconductor substrates 5 are rested may be moved into and out of the core tube through either one of the openings 2 a, 2 b.
- the openings 2 a, 2 b may be substantially blocked and sealed by lids 7 a, 7 b, respectively.
- gas inlet conduits 9 a, 9 b With the lids 7 a, 7 b closed, gas can be fed from the selected one of gas inlet conduits 9 a, 9 b.
- the gas inlet conduits 9 a, 9 b need not necessarily be integrated with or protruded from the core tube 1 ′.
- a separate structure is acceptable which consists of bores and gas inlet conduits such that the conduit may be fixedly engaged in the bore by snug fit.
- FIG. 3 illustrates the structure of a further exemplary core tube included in the heat-treatment furnace of the invention.
- a cylindrical core tube 1 ′′ has openings 2 a, 2 b at axially or longitudinally opposite ends and a gas inlet conduit 8 c disposed near the longitudinal center and at the upper side.
- the core tube 1 ′′ is concentrically enclosed by a cylindrical heater 4 which is installed in a heat-treatment furnace (not shown).
- a boat 6 on which semiconductor substrates 5 are rested may be moved into and out of the core tube through either one of the openings 2 a, 2 b.
- the openings 2 a, 2 b may be substantially blocked and sealed by lids 7 a, 7 b, respectively.
- the lids 7 a, 7 b are integrally provided with thin gas inlet conduits 8 a, 8 b which penetrate through the lids 7 a, 7 b in a gas-tight manner for introducing gas into the core tube. With the lids 7 a, 7 b closed, gas can be fed from the selected one of gas inlet conduits 8 a, 8 b, 8 c. If gas is fed into the core tube from the gas inlet conduit 8 c with the lids 7 a, 7 b kept open, then the gas may flow toward the openings 2 a, 2 b.
- the gas inlet conduits 8 a, 8 b, 8 c need not necessarily be integrated with or protruded from the lids 7 a, 7 b or core tube 1 ′′.
- a separate structure is acceptable which consists of bores and gas inlet conduits such that the conduit may be fixedly engaged in the bore by snug fit.
- the core tube, lids, and gas inlet conduits used herein are typically made of high-purity quartz, high-purity silicon carbide (SiC) or similar material in order that the components are resistant to the high temperature of heat treatment and can keep the furnace interior clean.
- SiC silicon carbide
- the size of the core tube is not particularly limited.
- the inner diameter of the openings at opposite ends of the core tube may be sized so as to allow the semiconductor substrate-carrying boat to be moved into and out of the core tube, and is preferably at least 95% of the inner diameter of the core tube at the center, and typically equal to the inner diameter of the core tube at the center.
- the gas inlet conduits have an outer diameter of preferably 5 to 25 mm, more preferably 10 to 20 mm, an inner diameter of preferably 3 to 20 mm, more preferably 5 to 15 mm, and a protrusion length of preferably 50 to 200 mm, more preferably 100 to 150 mm.
- the gas inlet conduits are preferably spaced inward a distance of 10 to 200 mm, more preferably 20 to 150 mm from the openings.
- At least one boat station is preferably provided outside the core tube and in proximity to the opening where the boat 6 having substrates 5 rested thereon is on standby. More preferably at least one boat station is provided at a predetermined distance from each opening.
- the boat station may be made of the same material as the core tube, lids, and gas inlet conduits.
- the size of the boat station is not particularly limited as long as it allows the boat to stand by. For example, a boat station having a wall thickness of 4 mm, a length of 1,000 mm, and a width of 200 mm and defining an arcuate curved surface with a radius of 100 mm and an angle of 60° may be used.
- Semiconductor substrates are heat treated in the heat-treatment furnace comprising a core tube of the structure as shown in FIGS. 1 to 3 .
- a high-purity gas such as argon, nitrogen or oxygen is introduced from the gas inlet conduit while the high-purity gas may escape from the furnace through a small gap between the lid and the core tube.
- the gas flow prevents the ambient air from entering the furnace and keeps the atmosphere in the furnace clean during heat treatment. Then an array of semiconductor substrates on the boat positioned at the center of the core tube can be heat treated without a substantial loss of the carrier lifetime of the semiconductor substrates.
- FIG. 5 illustrates an exemplary heat-treatment flow using a heat-treatment furnace comprising a core tube according to the invention and FIG. 8 illustrates a time sequence of this heat treatment.
- the core tube in FIG. 5 is the same as in FIG. 1 .
- a high-purity gas such as nitrogen, argon or oxygen may be fed from the gas inlet conduit 8 b to keep the furnace interior clean.
- a high-purity gas such as nitrogen, argon or oxygen may be fed from the gas inlet conduit 8 a at a flow rate of 5 to 50 L/min to keep the furnace interior clean.
- This embodiment including two boat stations has the advantage of reduced standby time in that when the boat is taken out of the core tube and cooled at one boat station 10 b, a boat of a next batch may be moved from the other boat station 10 a into the core tube. These boats may be moved into and out of the core tube at the same time.
- a rod of high-purity quartz (not shown) may be used in moving the boat into and out of the core tube.
- FIG. 6 illustrates another exemplary heat-treatment flow using a heat-treatment furnace comprising a core tube according to the invention and FIG. 9 illustrates a time sequence of this heat treatment.
- the core tube in FIG. 6 is the same as in FIG. 3 .
- the furnace interior may be kept clean by feeding a high-purity gas such as nitrogen, argon or oxygen from the gas inlet conduit 8 c near the longitudinal center of the core tube 1 ′′ and discharging the gas through small gaps between the lids 7 a, 7 b and the openings 2 a, 2 b at opposite ends of the core tube.
- a high-purity gas such as nitrogen, argon or oxygen
- the standby time may be further reduced by moving the heat treated boat out of and moving a next boat into the core tube at the same time.
- the structure of the heat-treatment furnace accommodating the core tube defined herein is not particularly limited as long as it is a horizontal furnace having a cylindrical heater enclosing the cure tube.
- the heat-treatment furnace of the invention is useful in carrying out the heat treatment of semiconductor substrates and advantageous particularly when the semiconductor substrates are silicon substrates intended for the fabrication of solar cells, specifically for diffusion treatment of p- or n-type dopant into silicon substrates and oxidation treatment of silicon substrates. Besides the dopant diffusion treatment and substrate oxidation treatment, the furnace may be advantageously utilized in any heat treatments which are carried out in a horizontal furnace.
- Lapped boron-doped p-type silicon wafers having a diameter of 100 mm, a thickness of 200 ⁇ m and face orientation (100) prepared by the CZ method (resistivity 1-3 ⁇ -cm) were provided.
- Ten lapped wafers were manually arrayed on a boat of high-purity quartz having a length of 540 mm, a width of 100 mm, and a height of 30 mm, and having 100 channels at a pitch of 2.5 mm.
- the heat-treatment furnace of the invention included, as shown in FIG. 1 , a quartz core tube 1 of outer diameter 150 mm, inner diameter 142 mm, and length 3,000 mm, provided at opposite ends with openings of inner diameter 142 mm, and lids 7 a, 7 b each comprising a quartz disk of diameter 170 mm and thickness 4 mm, a cylindrical quartz box of outer diameter 141.5 mm and width 50 mm fusion bonded to the disk, and a gas inlet conduit 8 a or 8 b of inner diameter 5 mm penetrating through the disk and the box.
- boat stations of high-purity quartz each having a wall thickness of 4 mm, a length of 1,000 mm, and a width of 200 mm and defining an arcuate curved surface with a radius of 100 mm and an angle of 60° were provided.
- Each boat station was spaced 250 mm from the opening in the core tube.
- the distance from the boat standby position at the center of the boat station to the heat treatment position at the center of the core tube was 2,250 mm.
- the insertion preparatory time (standby time) taken for setting the boat on the boat station was about 1 minute per batch, and the cooling time after removal of the heat treated boat was 15 minutes per batch.
- a quartz rod having a length of 2,000 mm and an outer diameter of 15 mm and having a boss of 30 mm height protruding perpendicular to the longitudinal direction was provided for moving the boat into and out of the core tube.
- the rod was mounted in a full automatic boat loader whereby the boat was moved into and out of the core tube at a constant speed of 200 mm/min.
- the heat-treatment furnace was normally set at 830° C., and the boat was moved therein. Phosphorus was deposited for 40 minutes and then driven in at 830° C. for 17 minutes to effect deeper phosphorus diffusion. Thereafter, the boat was taken out.
- the gas composition for heat treatment was a gas mixture of 20 L/min nitrogen, 0.3 L/min oxygen, and 0.45 L/min phosphorus oxychloride (POCl 3 ) during phosphorus deposition, and a gas mixture of 20 L/min nitrogen and 0.3 L/min oxygen during other steps including standby, lid opening/closing, insertion and removal of the boat, and drive-in. Under these conditions, diffusion heat treatment was carried out in accordance with the heat treatment flow of FIG. 5 and the time sequence of FIG. 8 .
- a quartz core tube of outer diameter 150 mm, inner diameter 142 mm, and length 3,000 mm, having openings of inner diameter 142 mm at opposite ends and a gas inlet conduit of inner diameter 5 mm at a position spaced a distance of 1,500 mm from the longitudinal opposite ends of the core tube as shown in FIG. 3 was provided.
- diffusion heat treatment was carried out in accordance with the heat treatment flow of FIG. 6 and the time sequence of FIG. 9 .
- a conventional quartz core tube of outer diameter 150 mm, inner diameter 142 mm, and length 3,000 mm, having an opening of inner diameter 142 mm at one end and a gas inlet conduit of inner diameter 5 mm at the other end, and a lid comprising a quartz disk of diameter 170 mm and thickness 4 mm and a cylindrical quartz box of outer diameter 141.5 mm and width 50 mm fusion bonded to the disk were provided.
- the substrate was immersed in 25 wt % HF for 4 minutes to remove the glass coating, rinsed with deionized water, and dried.
- the sheet resistance was measured at the wafer center by the four-probe analysis.
- the substrate was immersed in 25 wt % KOH at 70° C. for 10 minutes to remove the diffusion layer, rinsed with deionized water, immersed in 1 wt % HF for 1 minute to be water repellent, and subjected to chemical passivation by the iodine methanol method.
- the bulk lifetime was measured by the micro-PCD method.
- Example 1 Average sheet resistance ( ⁇ / ⁇ ) 62.2 62.7 62.4 Average bulk lifetime ( ⁇ sec) 612 603 608 Time per batch of diffusion (min) 67 53 82
- Examples 1 and 2 display measurement results of sheet resistance and bulk lifetime which are comparable to those of Comparative Example 1 while achieving a substantial saving of the time taken per batch of diffusion.
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Abstract
The disclosed heat-treatment furnace, used in a semiconductor-substrate heat-treatment step, is characterized by the provision of a cylindrical core, both ends of which have openings sized so as to allow insertion and removal of semiconductor substrates. This reduces standby time between batches during consecutive semiconductor heat treatment, thereby improving productivity. Furthermore, the use of a simple cylindrical shape for the structure of the core reduces the frequency at which gas-introduction pipe sections fail, thereby decreasing the running cost of the heat-treatment process.
Description
- This invention relates to a heat-treatment furnace for use in the heat treatment of semiconductor substrates, typically silicon substrates.
- In the prior art, a semiconductor heat treating process is generally carried out in a furnace of the following design in order to prevent any contamination from the ambient air, heater or the like. As shown in
FIG. 4 , afurnace core tube 21 of high-purity quartz or the like which is provided with an opening 22 at one end and agas inlet conduit 23 at the other end is disposed inside acylindrical heater 24 which is previously installed in the furnace. Aboat 26 of high-purity quartz or the like havingsemiconductor substrates 25 rested thereon is moved into thefurnace core tube 21 through the opening 22 and set in place. Alid 27 of high-purity quartz or the like is closed to establish a substantially tight seal. High-purity gas such as nitrogen or argon is fed from thegas inlet conduit 23 whereas the gas is discharged out of the furnace through small gaps between thecore tube 21 and thelid 27. While the in-furnace atmosphere is kept clean in this way, heat treatment for dopant diffusion or oxidation is carried out. -
FIG. 7 illustrates one exemplary heat-treatment flow using a heat-treatment furnace including such a core tube andFIG. 10 illustrates one exemplary time sequence of the heat treatment. The prior art heat treating process is described by referring to these figures. - (1) A predetermined number of
semiconductor substrates 25 are rested on theboat 26, which is held on standby at aboat station 30. SeeFIG. 7( a) andFIG. 10( i). - (2) The
lid 27 of thecore tube 21 is opened. Theboat 26 havingsemiconductor substrates 25 rested thereon is forcedly moved from theboat station 30 to a predetermined position at the center of the furnace, using a rod of high-purity quartz or the like (not shown). SeeFIG. 7( a) andFIG. 10( ii) and (iii). - (3) The
lid 27 is closed. Thesemiconductor substrates 25 are heat treated according to the predetermined thermal profile. SeeFIG. 7( b) andFIG. 10( iv). - (4) After the heat treatment, the
lid 27 is opened. Theboat 26 havingsemiconductor substrates 25 rested thereon is forcedly moved from the predetermined position in the furnace to theboat station 30, using a rod or the like, and cooled there. SeeFIG. 7( c) andFIG. 10( v) to (vii). - For the duration from insertion to removal of the boat, high-purity gas such as nitrogen may be continuously fed from the
gas inlet conduit 23 to keep cleanness in the furnace. - In this process, after the boat is taken out of the furnace, the semiconductor substrates must be cooled at the boat station until a handleable temperature is reached. When it is desired to continuously carry out a predetermined heat treatment, the system remains unready for insertion of a next batch, introducing a standby time between consecutive heat treatment batches.
- Besides the furnace core tube mentioned above, the structure of a heat treatment furnace for use in the semiconductor substrate heat treating process is proposed, for example, in JP-A H05-102054 (
Patent Document 1, Sony Corp., diffusion furnace). The heat-treatment furnace is described therein as comprising a furnace core tube which is open at one end, a shutter for operatively closing the open end, and a partition disposed in the core tube and inside the open end so as to define a gap between the partition and the inner wall of the core tube, the shutter being provided with a vent. This design allegedly eliminates any adverse impact by entry of ambient air. - Patent Document 1: JP-A H05-102054
- In the heat-treatment furnace comprising a core tube of the above-mentioned structure, however, semiconductor substrates must be moved into and out of the furnace via only one end of the core tube because of the structure. Furthermore, as indicated above, the semiconductor substrates after being taken out of the hot furnace must be cooled at the boat station until a handleable temperature is reached. For continuous implementation of the heat treatment, this introduces a standby time between consecutive heat treatment batches. Particularly when semiconductor devices which are subject to a relatively short duration of heat treatment, typically crystalline silicon solar cells, are heat treated, the standby time accounts for a relatively high proportion among the overall heat treatment time, which becomes the major cause of restricting the productivity of the heat treatment process. Also in the case of a furnace core tube of the above-mentioned structure, upon replacement of the furnace core tube for periodic cleaning and shelf storage thereof, a thin tubular gas inlet conduit can be broken. Since the core tube of high-purity quartz or the like is expensive, the expenses for repair and purchase of a new one are high. This is one of the factors that cause to increase the running cost of the heat treatment process.
- Furthermore, when a heat treatment furnace of the continuous mode having inlet and outlet as typified by the belt conveyor or walking beam system is employed, the furnace has low gas tightness due to the presence of the belt or beam, even in the structure provided with shutters at the inlet and outlet, and fails to prevent inflow of ambient air, giving rise to a problem that the carrier lifetime of semiconductor substrates can be significantly reduced by the heat treatment. Such continuous mode heat treatment furnaces of the belt conveyor or walking beam system also have problems including a small number of simultaneously processable workpieces per unit area, and low thermal efficiency.
- An object of the invention, which has been made under the above-mentioned circumstances, is to provide a heat-treatment furnace which is adapted to reduce a standby time between batches during consecutive heat treatment of semiconductor substrates for thereby improving productivity and to reduce the frequency of breaking of gas inlet conduits for thereby saving the running cost of the heat-treatment process.
- Making extensive investigations to attain the above object, the inventors have found that a furnace core tube for use in heat treatment process is structured as a cylindrical shape tube which is provided at opposite ends with openings having a sufficient size to allow semiconductor substrates to be moved into and out of the core tube, a lid is detachably mounted to the core tube to block each opening to substantially seal the core tube, the core tube or lid is provided with a thin gas inlet conduit for introducing gas into the core tube, whereby the atmosphere within the furnace can be kept clean during heat treatment, and the semiconductor substrates may be moved into and out of the core tube and heat treated therein while the lids at opposite ends are opened and closed as necessary, whereby a standby time between batches during consecutive heat treatment can be reduced for thereby improving productivity. Since the core tube is structured as a simple cylindrical shape, the frequency of breaking of gas inlet conduits is reduced and the cost of the core tube itself is reduced. As a result, the running cost of the heat-treatment process can be saved. The invention is predicated on these findings.
- Accordingly, the invention provides a heat-treatment furnace as defined below.
- (1) A heat-treatment furnace for use in the heat treatment of semiconductor substrates, comprising a cylindrical core tube which is provided at opposite ends with openings having a sufficient size to allow semiconductor substrates to be moved into and out of the core tube.
- (2) The heat-treatment furnace of (1), further comprising lids each of which is detachably mounted to the core tube to block the opening to substantially seal the core tube.
- (3) The heat-treatment furnace of (1) or (2), further comprising thin gas inlet conduits penetrating through the lids for introducing gas into the core tube.
- (4) The heat-treatment furnace of any one of (1) to (3), further comprising thin gas inlet conduits disposed near opposite ends of the core tube for introducing gas into the core tube.
- (5) The heat-treatment furnace of any one of (1) to (4), further comprising a thin gas inlet conduit disposed near the longitudinal center of the core tube for introducing gas into the core tube.
- (6) The heat-treatment furnace of any one of (1) to (5), wherein the opening in the core tube has an inner diameter which is at least 95% of the inner diameter of the core tube at the center.
- (7) The heat-treatment furnace of any one of (1) to (6), further comprising at least one boat station disposed outside the core tube and in proximity to the opening in the core tube, the boat station carrying a boat having semiconductor substrates rested thereon on standby.
- (8) The heat-treatment furnace of any one of (1) to (7), wherein the heat treatment is intended to diffuse a p- or n-type dopant into silicon substrates.
- (9) The heat-treatment furnace of any one of (1) to (7), wherein the heat treatment is intended to oxidize silicon substrates.
- The invention reduces a standby time between batches during consecutive heat treatment of semiconductor substrates, thereby improving productivity. The core tube structured as a simple cylindrical shape reduces the frequency of breaking of gas inlet conduits, thereby saving the running cost of the heat-treatment process.
-
FIG. 1 is a schematic cross-sectional view of one embodiment of the invention including a furnace core tube and lids having gas inlet conduits. -
FIG. 2 is a schematic cross-sectional view of another embodiment of the invention including a furnace core tube having gas inlet conduits disposed near opposite ends and at the lower side thereof, and lids. -
FIG. 3 is a schematic cross-sectional view of a further embodiment of the invention including a furnace core tube having a gas inlet conduit disposed near the center thereof, and lids. -
FIG. 4 is a schematic cross-sectional view of one exemplary structure of a conventional furnace core tube. -
FIG. 5 is a schematic cross-sectional view of a heat-treatment flow using one exemplary heat-treatment furnace of the invention. -
FIG. 6 is a schematic cross-sectional view of a heat-treatment flow using another exemplary heat-treatment furnace of the invention. -
FIG. 7 is a schematic cross-sectional view of a heat-treatment flow using the conventional heat-treatment furnace. -
FIG. 8 illustrates a time sequence of heat treatment using one exemplary heat-treatment furnace of the invention. -
FIG. 9 illustrates a time sequence of heat treatment using another exemplary heat-treatment furnace of the invention. -
FIG. 10 illustrates a time sequence of heat treatment using the conventional heat-treatment furnace. - Embodiments of the invention are described below in detail with reference to the drawings, but the invention is not limited thereto. Throughout the drawings to illustrate the embodiments, parts having the same functions are designated by like numerals and their iterative description is omitted.
-
FIG. 1 illustrates the structure of one exemplary core tube included in the heat-treatment furnace of the invention. InFIG. 1 , acylindrical core tube 1 hasopenings cylindrical heater 4 which is installed in a heat-treatment furnace (not shown). Aboat 6 on whichsemiconductor substrates 5 are rested may be moved into and out of the core tube through either one of theopenings openings lids lids gas inlet conduits lids lids gas inlet conduits gas inlet conduits lids lids lids -
FIG. 2 illustrates the structure of another exemplary core tube included in the heat-treatment furnace of the invention. InFIG. 2 , acylindrical core tube 1′ hasopenings gas inlet conduits core tube 1′ is concentrically enclosed by acylindrical heater 4 which is installed in a heat-treatment furnace (not shown). Aboat 6 on whichsemiconductor substrates 5 are rested may be moved into and out of the core tube through either one of theopenings openings lids lids gas inlet conduits gas inlet conduits core tube 1′. A separate structure is acceptable which consists of bores and gas inlet conduits such that the conduit may be fixedly engaged in the bore by snug fit. -
FIG. 3 illustrates the structure of a further exemplary core tube included in the heat-treatment furnace of the invention. InFIG. 3 , acylindrical core tube 1″ hasopenings gas inlet conduit 8 c disposed near the longitudinal center and at the upper side. Thecore tube 1″ is concentrically enclosed by acylindrical heater 4 which is installed in a heat-treatment furnace (not shown). Aboat 6 on whichsemiconductor substrates 5 are rested may be moved into and out of the core tube through either one of theopenings openings lids lids gas inlet conduits lids lids gas inlet conduits gas inlet conduit 8 c with thelids openings gas inlet conduits lids core tube 1″. A separate structure is acceptable which consists of bores and gas inlet conduits such that the conduit may be fixedly engaged in the bore by snug fit. - The core tube, lids, and gas inlet conduits used herein are typically made of high-purity quartz, high-purity silicon carbide (SiC) or similar material in order that the components are resistant to the high temperature of heat treatment and can keep the furnace interior clean.
- The size of the core tube is not particularly limited. The inner diameter of the openings at opposite ends of the core tube may be sized so as to allow the semiconductor substrate-carrying boat to be moved into and out of the core tube, and is preferably at least 95% of the inner diameter of the core tube at the center, and typically equal to the inner diameter of the core tube at the center.
- The gas inlet conduits have an outer diameter of preferably 5 to 25 mm, more preferably 10 to 20 mm, an inner diameter of preferably 3 to 20 mm, more preferably 5 to 15 mm, and a protrusion length of preferably 50 to 200 mm, more preferably 100 to 150 mm. When the gas inlet conduits are provided near opposite ends and at lower side of the core tube as shown in
FIG. 2 , the gas inlet conduits are preferably spaced inward a distance of 10 to 200 mm, more preferably 20 to 150 mm from the openings. - Though not shown in
FIGS. 1 to 3 , besides the core tube, at least one boat station is preferably provided outside the core tube and in proximity to the opening where theboat 6 havingsubstrates 5 rested thereon is on standby. More preferably at least one boat station is provided at a predetermined distance from each opening. The boat station may be made of the same material as the core tube, lids, and gas inlet conduits. The size of the boat station is not particularly limited as long as it allows the boat to stand by. For example, a boat station having a wall thickness of 4 mm, a length of 1,000 mm, and a width of 200 mm and defining an arcuate curved surface with a radius of 100 mm and an angle of 60° may be used. - The heat-treatment process using the heat-treatment furnace of the invention is described. Semiconductor substrates are heat treated in the heat-treatment furnace comprising a core tube of the structure as shown in
FIGS. 1 to 3 . Preferably a high-purity gas such as argon, nitrogen or oxygen is introduced from the gas inlet conduit while the high-purity gas may escape from the furnace through a small gap between the lid and the core tube. The gas flow prevents the ambient air from entering the furnace and keeps the atmosphere in the furnace clean during heat treatment. Then an array of semiconductor substrates on the boat positioned at the center of the core tube can be heat treated without a substantial loss of the carrier lifetime of the semiconductor substrates. - Next, specific heat-treatment processes are described.
FIG. 5 illustrates an exemplary heat-treatment flow using a heat-treatment furnace comprising a core tube according to the invention andFIG. 8 illustrates a time sequence of this heat treatment. The core tube inFIG. 5 is the same as inFIG. 1 . - (1) A predetermined number of
semiconductor substrates 5 are rested on theboat 6, which stands by at theboat station 10 a (FIG. 5( a) andFIG. 8( i)). The substrates used herein may be p- or n-type silicon substrates or the like. - (2) With the
lid 7 a of thecore tube 1 opened, theboat 6 havingsemiconductor substrates 5 rested thereon is forcedly moved from theboat station 10 a to a predetermined position at the furnace center (FIG. 5( a) andFIG. 8( ii)). - (3) With the
lid 7 a closed, thesemiconductor substrates 5 are heat treated according to a predetermined thermal profile (FIG. 5( b) andFIG. 8( iii)). In the case of dopant diffusion treatment, for example, the atmosphere may be an inert gas such as nitrogen or argon, or oxygen, phosphorus oxychloride, diborane or the like. The treatment temperature and time are not particularly limited as they vary with the necessary diffusion profile, oxide film thickness and other factors. The invention becomes more effective in the event of a brief heat treatment profile. - During boat insertion and heat treatment, a high-purity gas such as nitrogen, argon or oxygen may be fed from the
gas inlet conduit 8 b to keep the furnace interior clean. - (4) After the heat treatment, the
lid 7 b is opened, and theboat 6 havingsemiconductor substrates 5 rested thereon is moved from the predetermined position in the furnace to theboat station 10 b and cooled for 10 to 30 minutes (FIG. 5( c) andFIG. 8( iv)-(v)). - During movement of the boat into and out of the core tube, a high-purity gas such as nitrogen, argon or oxygen may be fed from the
gas inlet conduit 8 a at a flow rate of 5 to 50 L/min to keep the furnace interior clean. - This embodiment including two boat stations has the advantage of reduced standby time in that when the boat is taken out of the core tube and cooled at one
boat station 10 b, a boat of a next batch may be moved from theother boat station 10 a into the core tube. These boats may be moved into and out of the core tube at the same time. Notably, a rod of high-purity quartz (not shown) may be used in moving the boat into and out of the core tube. -
FIG. 6 illustrates another exemplary heat-treatment flow using a heat-treatment furnace comprising a core tube according to the invention andFIG. 9 illustrates a time sequence of this heat treatment. The core tube inFIG. 6 is the same as inFIG. 3 . - (1) A predetermined number of
semiconductor substrates 5 are rested on theboat 6, which stands by at theboat station 10 a (FIG. 6( a) andFIG. 9( i)). - (2) With the
lid 7 a of thecore tube 1″ opened, theboat 6 havingsemiconductor substrates 5 rested thereon is forcedly moved from theboat station 10 a to a predetermined position at the furnace center (FIG. 6( a) andFIG. 9( ii)). - (3) With the
lid 7 a closed, thesemiconductor substrates 5 are heat treated according to a predetermined thermal profile (FIG. 6( b) andFIG. 9( iii)). Treating conditions may be the same as above. - (4) After the heat treatment, the
lids boat 6 havingsemiconductor substrates 5 rested thereon is moved from the predetermined position in the furnace to theboat station 10 b while another boat having fresh substrates rested thereon is moved from theboat station 10 a to the predetermined position in the furnace. With thelids FIG. 6( a) andFIG. 9( iv) and (i)-(iii). The above operation may be repeated to treat further substrates. - During movement of the boat into and out of the core tube, the furnace interior may be kept clean by feeding a high-purity gas such as nitrogen, argon or oxygen from the
gas inlet conduit 8 c near the longitudinal center of thecore tube 1″ and discharging the gas through small gaps between thelids openings - In the practice of the invention, the structure of the heat-treatment furnace accommodating the core tube defined herein is not particularly limited as long as it is a horizontal furnace having a cylindrical heater enclosing the cure tube.
- The heat-treatment furnace of the invention is useful in carrying out the heat treatment of semiconductor substrates and advantageous particularly when the semiconductor substrates are silicon substrates intended for the fabrication of solar cells, specifically for diffusion treatment of p- or n-type dopant into silicon substrates and oxidation treatment of silicon substrates. Besides the dopant diffusion treatment and substrate oxidation treatment, the furnace may be advantageously utilized in any heat treatments which are carried out in a horizontal furnace.
- Examples and Comparative Examples are given below for further illustrating the invention, but the invention is not limited thereto.
- Lapped boron-doped p-type silicon wafers having a diameter of 100 mm, a thickness of 200 μm and face orientation (100) prepared by the CZ method (resistivity 1-3 Ω-cm) were provided.
- Ten lapped wafers were manually arrayed on a boat of high-purity quartz having a length of 540 mm, a width of 100 mm, and a height of 30 mm, and having 100 channels at a pitch of 2.5 mm.
- The heat-treatment furnace of the invention included, as shown in
FIG. 1 , aquartz core tube 1 of outer diameter 150 mm, inner diameter 142 mm, and length 3,000 mm, provided at opposite ends with openings of inner diameter 142 mm, andlids thickness 4 mm, a cylindrical quartz box of outer diameter 141.5 mm and width 50 mm fusion bonded to the disk, and agas inlet conduit inner diameter 5 mm penetrating through the disk and the box. - As the boat standby position before and after heat treatment, boat stations of high-purity quartz each having a wall thickness of 4 mm, a length of 1,000 mm, and a width of 200 mm and defining an arcuate curved surface with a radius of 100 mm and an angle of 60° were provided. Each boat station was spaced 250 mm from the opening in the core tube. The distance from the boat standby position at the center of the boat station to the heat treatment position at the center of the core tube was 2,250 mm.
- For each heat treatment batch, the insertion preparatory time (standby time) taken for setting the boat on the boat station was about 1 minute per batch, and the cooling time after removal of the heat treated boat was 15 minutes per batch.
- A quartz rod having a length of 2,000 mm and an outer diameter of 15 mm and having a boss of 30 mm height protruding perpendicular to the longitudinal direction was provided for moving the boat into and out of the core tube. The rod was mounted in a full automatic boat loader whereby the boat was moved into and out of the core tube at a constant speed of 200 mm/min.
- The heat-treatment furnace was normally set at 830° C., and the boat was moved therein. Phosphorus was deposited for 40 minutes and then driven in at 830° C. for 17 minutes to effect deeper phosphorus diffusion. Thereafter, the boat was taken out.
- The gas composition for heat treatment was a gas mixture of 20 L/min nitrogen, 0.3 L/min oxygen, and 0.45 L/min phosphorus oxychloride (POCl3) during phosphorus deposition, and a gas mixture of 20 L/min nitrogen and 0.3 L/min oxygen during other steps including standby, lid opening/closing, insertion and removal of the boat, and drive-in. Under these conditions, diffusion heat treatment was carried out in accordance with the heat treatment flow of
FIG. 5 and the time sequence ofFIG. 8 . - A quartz core tube of outer diameter 150 mm, inner diameter 142 mm, and length 3,000 mm, having openings of inner diameter 142 mm at opposite ends and a gas inlet conduit of
inner diameter 5 mm at a position spaced a distance of 1,500 mm from the longitudinal opposite ends of the core tube as shown inFIG. 3 was provided. Using the same semiconductor substrates and heat-treatment furnace as in Example 1 aside from the core tube of the above structure, diffusion heat treatment was carried out in accordance with the heat treatment flow ofFIG. 6 and the time sequence ofFIG. 9 . - As shown in
FIG. 4 , a conventional quartz core tube of outer diameter 150 mm, inner diameter 142 mm, and length 3,000 mm, having an opening of inner diameter 142 mm at one end and a gas inlet conduit ofinner diameter 5 mm at the other end, and a lid comprising a quartz disk of diameter 170 mm andthickness 4 mm and a cylindrical quartz box of outer diameter 141.5 mm and width 50 mm fusion bonded to the disk were provided. - Using the same semiconductor substrates and heat-treatment furnace as in Example 1 aside from the core tube and lid of the above structure, diffusion heat treatment was carried out in accordance with the heat treatment flow of
FIG. 7 and the time sequence ofFIG. 10 . - The substrates obtained in Examples 1 and 2 and Comparative Example 1 were evaluated by the following tests.
- 1) Sheet resistance measurement
- The substrate was immersed in 25 wt % HF for 4 minutes to remove the glass coating, rinsed with deionized water, and dried. The sheet resistance was measured at the wafer center by the four-probe analysis.
- 2) Bulk lifetime measurement
- The substrate was immersed in 25 wt % KOH at 70° C. for 10 minutes to remove the diffusion layer, rinsed with deionized water, immersed in 1 wt % HF for 1 minute to be water repellent, and subjected to chemical passivation by the iodine methanol method. The bulk lifetime was measured by the micro-PCD method.
- 3) When diffusion heat treatment was consecutively carried out, the time taken per batch of heat treatment was measured.
-
TABLE 1 Comparative Example 1 Example 2 Example 1 Average sheet resistance (Ω/□) 62.2 62.7 62.4 Average bulk lifetime (μsec) 612 603 608 Time per batch of diffusion (min) 67 53 82 - Examples 1 and 2 display measurement results of sheet resistance and bulk lifetime which are comparable to those of Comparative Example 1 while achieving a substantial saving of the time taken per batch of diffusion.
-
- 1, 1′, 1″, 21: core tube
- 2 a, 2 b, 22: opening
- 4, 24: heater
- 5, 25: semiconductor substrate
- 6, 26: boat
- 7 a, 7 b, 27: lid
- 8 a, 8 b, 8 c, 9 a, 9 b, 23: gas inlet conduit
- 10 a, 10 b, 30: boat station
Claims (9)
1. A heat-treatment furnace for use in the heat treatment of semiconductor substrates, comprising a cylindrical core tube which is provided at opposite ends with openings having a sufficient size to allow semiconductor substrates to be moved into and out of the core tube.
2. The heat-treatment furnace of claim 1 , further comprising lids each of which is detachably mounted to the core tube to block the opening to substantially seal the core tube.
3. The heat-treatment furnace of claim 1 , further comprising thin gas inlet conduits penetrating through the lids for introducing gas into the core tube.
4. The heat-treatment furnace of claim 1 , further comprising thin gas inlet conduits disposed near opposite ends of the core tube for introducing gas into the core tube.
5. The heat-treatment furnace of claim 1 , further comprising a thin gas inlet conduit disposed near the longitudinal center of the core tube for introducing gas into the core tube.
6. The heat-treatment furnace of claim 1 , wherein the opening in the core tube has an inner diameter which is at least 95% of the inner diameter of the core tube at the center.
7. The heat-treatment furnace of claim 1 , further comprising at least one boat station disposed outside the core tube and in proximity to the opening in the core tube, the boat station carrying a boat having semiconductor substrates rested thereon on standby.
8. The heat-treatment furnace of any claim 1 , wherein the heat treatment is intended to diffuse a p- or n-type dopant into silicon substrates.
9. The heat-treatment furnace of claim 1 , wherein the heat treatment is intended to oxidize silicon substrates.
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US11521876B2 (en) * | 2018-03-07 | 2022-12-06 | Tokyo Electron Limited | Horizontal substrate boat |
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MY164113A (en) | 2017-11-30 |
EP2579298B1 (en) | 2020-07-08 |
US9799535B2 (en) | 2017-10-24 |
JP2012015501A (en) | 2012-01-19 |
CN103038865B (en) | 2016-01-20 |
WO2011152510A1 (en) | 2011-12-08 |
EP2579298A1 (en) | 2013-04-10 |
SG186159A1 (en) | 2013-01-30 |
TWI545298B (en) | 2016-08-11 |
US20160329216A1 (en) | 2016-11-10 |
EP2579298A4 (en) | 2017-03-15 |
TW201217734A (en) | 2012-05-01 |
AU2011259931B2 (en) | 2014-09-11 |
CN103038865A (en) | 2013-04-10 |
KR20130036261A (en) | 2013-04-11 |
JP5532016B2 (en) | 2014-06-25 |
AU2011259931A1 (en) | 2013-01-10 |
RU2012157235A (en) | 2014-07-20 |
KR101424543B1 (en) | 2014-07-31 |
RU2573059C2 (en) | 2016-01-20 |
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