US20130056910A1 - Device and method for producing three-dimensional structures - Google Patents

Device and method for producing three-dimensional structures Download PDF

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Publication number
US20130056910A1
US20130056910A1 US13/696,966 US201113696966A US2013056910A1 US 20130056910 A1 US20130056910 A1 US 20130056910A1 US 201113696966 A US201113696966 A US 201113696966A US 2013056910 A1 US2013056910 A1 US 2013056910A1
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consolidated
laser
optical system
focusing optical
focus
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Ruth Houbertz-Krauss
Thomas Stichel
Soenke Steenhusen
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Multiphoton Optics GmbH
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B29C64/273—Arrangements for irradiation using laser beams; using electron beams [EB] pulsed; frequency modulated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B29C64/386—Data acquisition or data processing for additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y70/00—Materials specially adapted for additive manufacturing

Definitions

  • the present invention relates to a device as well as a method for creating three-dimensional structures, such as solids or surface structures consisting of a material to be consolidated, in particular a material containing organopolysiloxane, by way of locally selective consolidation of the latter as a result of light-induced organic cross-linking.
  • the prior art comprises descriptions about the creation of three-dimensional solids or surface structures e.g. by means of light-induced processes, in particular by means of organic cross-linking, in that initially only one layer or plane is produced as a two-dimensional component of the structure to be created and the three-dimensional design of the solid or the surface structure is achieved with the successive processing of consecutive two-dimensional layers or planes.
  • Examples of said two-dimensionally designed methods include stereolithography, selective laser sintering (SLS) or 3D printing (3DP).
  • SLS selective laser sintering
  • 3DP 3D printing
  • the disadvantages of two-dimensional methods are the relatively long production times, because the solids to be manufactured are generated layer by layer and a new layer to be consolidated has to be prepared after the consolidation of every layer. These disadvantages are particularly serious if the solids to be manufactured are to be designed with sizes up to millimeter and centimeter range.
  • the exposure is achieved through the transparent bottom of the bath tank in order to prevent an interaction of the developing solid with the gaseous atmosphere above the bath surface, e.g. an oxidation reaction.
  • the liquid material is consolidated in the direct vicinity of the bottom of the tank.
  • the latter has to be coated with a non-polymerizable fluid acting as a separation layer, see DE 41 02 260 A1, claim 13.
  • a non-polymerizable fluid acting as a separation layer see DE 41 02 260 A1, claim 13.
  • Faster processes provide three-dimensional methods in which the material-modifying radiation interacts directly with the volume of a still untreated, solid or liquid starting material.
  • the use of two- or multiphoton polymerization for the consolidation of materials containing organopolysiloxane (polymerization is achieved with two- (TPA) or multiphoton absorption) has been disclosed in WO 03/037606 A1.
  • radiation with a wavelength is used which is not absorbed in the reactive material under normal circumstances.
  • Multiphoton absorption in the focus of the lens is achieved by focusing femtosecond laser pulses into the material, whereby similar chemical alterations can be induced as with the use of a laser beam having considerably shorter wavelengths.
  • the material to be consolidated is for example arranged in the quantity of a drop between two optical slides as microscope slides or adhering to an uncovered microscope slide.
  • a defined interface has to be exposed to enable an exposure under defined conditions.
  • the exposure is achieved through one of the two slides from above or from below.
  • the exposure is achieved from below through the underside of the microscope slide.
  • no larger structures can be consolidated, because material on the side facing away from the lens can only be consolidated at a limited distance from the microscope slide which is defined by the work status of the lens because of the exposure through or via the microscope slide.
  • the size of manufacturable structures is limited to about 100 ⁇ m to 700 ⁇ m, depending on the required accuracy.
  • a special device variant relates to a vertically (i.e., along the optical axis) movable focusing optical system with a high numerical aperture, which—to prevent errors caused by fluid-air interfaces—is immersed into a bath with the same material to be consolidated as the one provided as bath material for the manufacture of the consolidated solid.
  • the focus of the device is located outside of this bath in a second bath.
  • the object of the present invention is to provide a device as well as a method for creating three-dimensional solids or surface structures by way of locally selective consolidation of a material as a result of light-induced organic cross-linking, whereby essentially any shapes of solids and structures, in particular with dimensions as well as heights in the millimeter and centimeter range, preferably with shorter production times compared to the prior art and corresponding high resolution, low material expenses and with high accuracy as well as reproducibility can be created.
  • the invention is designed to also allow the creation of large solids with very high accuracy.
  • the object is achieved with a device for creating three-dimensional structures consisting of a material to be consolidated, in particular a material containing organopolysiloxane, by way of locally selective consolidation of the latter as a result of light-induced cross-linking, comprising a laser source, a movable focusing optical system for creating one or a plurality of laser foci and a material container for the material to be consolidated, wherein the material container consists at least partially of a material that is permeable for the used laser beam and is, or can be, arranged in the beam path in such a way that the laser beam can be introduced into the material to be consolidated through the material container, wherein the material container acts as optically defined interface and wherein a carrier unit is arranged in the material container which can be positioned relative to the latter.
  • the focusing optical system is preferably designed movable on at least one plane, while the carrier unit is movable perpendicular thereto. It is particularly preferable that the focusing unit is below the bath tank and is movable at least in the horizontal plane (X-Y), while the carrier unit is movable perpendicular thereto in Z-direction. In exceptional cases, the focusing unit can be arranged above the bath tank instead, if the latter has a lid and the bath material reaches all the way to the lid. In one variant of the invention, the focusing optical system is arranged on the side of the bath tank and can be moved at least in one X-Z or Y-Z plane, while the carrier unit is analogously movable in Y- or X-direction, respectively.
  • the object is achieved with a device for creating three-dimensional structures consisting of a material to be consolidated, in particular a material containing organopolysiloxane, by way of locally selective consolidation of the latter as a result of light-induced cross-linking, comprising a laser source, a movable focusing optical system for creating one or a plurality of laser foci and a material container for the material to be consolidated, wherein the focusing optical system is impermeable to the material to be consolidated and arranged immersible in the material container in such a way that the beam exit surface of the focusing optical system itself creates the optically defined interface.
  • the focusing optical system is preferably movable in all three directions in space and can hence be positioned freely in the bath.
  • the object is achieved with a method for creating three-dimensional structures consisting of a material to be consolidated, in particular a material containing organopolysiloxane, by way of locally selective consolidation of the latter as a result of light-induced organic cross-linking based on laser radiation, wherein the material to be consolidated is or will be arranged in a material container, the material container is permeable for the used laser at least in some areas, a laser pulse or a laser pulse sequence is positioned through the material container into the material to be consolidated onto at least one laser focus in such a way that the material container forms an optically defined interface via which the laser is introduced into the material to be consolidated, consolidation conditions are only achieved in the immediate vicinity of at least one laser focus due to the intensity present there, such that one volume element of the material to be consolidated is consolidated per focus for the duration of the laser pulse or the laser pulse sequence, wherein the laser focus is created by means of a focusing optical system which is preferably movable in at least one plane and a
  • the object is achieved with a method for creating three-dimensional structures consisting of a material to be consolidated, in particular a material containing organopolysiloxane, by way of locally selective consolidation of the latter as a result of light-induced organic cross-linking based on laser radiation, wherein the material to be consolidated is or will be arranged in a material container, a laser pulse or a laser pulse sequence is positioned into at least one laser focus in the material to be consolidated via a focusing optical system, consolidation conditions are only achieved in the immediate vicinity of at least one laser focus due to the intensity present there, such that one volume element of the material to be consolidated is consolidated per focus for the duration of the laser pulse sequence, wherein the focusing optical system is movable and is or will preferably be immersed movable in all three directions in space (X, Y, Z) into the material to be consolidated in the material container, such that an exit surface of the focusing optical system forms an optically defined interface via which the laser pulse or the laser pulse sequence is introduced into the
  • the limiting effects of the working distance of the focusing optical system are resolved with its positionability and the one of the carrier platform, if applicable inside the bath relative to the focus/the foci of the lens/lenses in Z-direction.
  • the following dilemma arises when using a scanner to position the focus/the foci in the XY plane: if the focus is moved in XY-direction via movable mirrors (scanner system) to position the focus accordingly, the focusing optical system must have a large input aperture (size of the circular input opening, several cm) to produce large solids, to make sure that the laser beam emitted by the movable mirrors is not leaving the focusing optical system.
  • the addressable range in the plane is severely restricted due to the analogously small input apertures. It can be shown that the addressable range is restricted to a diameter of about 500 ⁇ m with a numerical aperture of, for example, 0.95, even when not taking into account the aberrations occurring because of the use of a bath and the associated deviations of the light beam as a result of optically “contaminated” surfaces along the ideal pathway.
  • an objective lens with a high NA can be used for the bath design according to the invention, even if a large mold is to be produced.
  • these molds can be produced irrespective of the working distance. Therefore, it is possible to select whether fine, high-resolution structures or—by increasing the laser output—also wide lines and hence an elevated construction rate should be achieved (the lines become wider when the laser output is increased because the consolidation conditions are met in a broader three-dimensional space [threshold process]).
  • object lenses only achieve the best imaging properties in a specific focal range. If they are derived from microscopy, it is usually found on the underside of the cover glass (corresponding to the inner surface of the wall of the bath tank). Any deviation from this point results in imaging errors and hence smudging of the focus in the space. According to the invention, it is therefore preferred to select the distance of the object lens and the bath and hence the position of the focusing plane in such a way that it has to pass as little of the bath material to be consolidated as possible.
  • the resulting advantages in particular include that the conditions for the formation of the focal range do not change during the structuring process, because it is the carrier that is moved in Z-direction rather than the lens and that it is possible to work close to the optimal conditions defined by the lens manufacturer.
  • any type of object lens can be used, i.e., ones with and without immersion.
  • the focusing optical system is immersed into the material and can be positioned there analogously without any restrictions or alternatively, a carrier unit on which the material is deposited while being consolidated, can be positioned arbitrarily in the material bath.
  • the invention also allows for a combination of these two alternatives. It enables the highly flexible creation of three-dimensional structures with sizes up to the centimeter range.
  • the focus position can be selected in the material to be consolidated without any limitation, by immersing and positioning the focusing optical system.
  • the focus position relative to the material container and hence the material to be consolidated and the location of the material consolidation in the material bath are in fact generally limited, usually to two dimensions, but already consolidated material can be positioned relative to the focus position via the carrier unit, such that the corresponding positioning of already consolidated material allows the creation of structures with almost any size.
  • the material container is preferably a tub with a corresponding size in which the material to be consolidated is provided in the form of a bath. Essentially any size of material baths can be used to support the effect of the creation of structures which are not restricted in terms of their size achieved with the invention.
  • the present invention is suitable in particular for the manufacture of specific and arbitrarily shaped function elements, for example planar or cylindrical substrates. They include e.g. optical elements for uses in the field of (bio) photonics and for anti-reflective coatings. As well, the simultaneous manufacture of photonic crystals for future photonic circuits and components is possible.
  • the structures created with the device can be used in micromechanics (as MEMS or MOEMS) and in micro- and nanoelectronics as well as in quantum components and polymer electronics.
  • the structuring device can be used for life science applications, e.g. in orthopedics (for prosthetics among other things), regenerative medicine (e.g. as carrier structures) and for pharmaceutical applications (including as drug delivery systems).
  • a material to be consolidated within the meaning of the invention is an organic material or an inorganic/organic hybrid material, in particular a material containing organopolysiloxane, each of which can be consolidated photochemically.
  • the material to be consolidated can be a material filled with nano- or microparticles, for example, or an unfilled material. Filled materials comprise certain additive materials which are unbound under certain circumstances, said additive materials potentially conveying certain desirable properties to the material.
  • the bath material to be consolidated can either be processed solvent-free or containing solvent.
  • the type of used solvent is not critical for the latter case; however, non-toxic solvents are favorable, for example if the structures to be produced are intended for medical or related applications.
  • the bath material can be highly viscous, depending on the used polysiloxane, which is usually formed by polycondensation of one or a plurality of organically polymerizable silanes. In these cases, the use of a lens positioned outside the bath is preferable.
  • the latter can be designed in a previously known fashion as necessary (by means of monomolecular or thicker layers) in such a way that the separation is possible during the development process by way of solvent removal or by way of “lifting up” the structure by means of a specially arranged device (e.g. a knife).
  • a sacrificial layer can be applied to the substrate, which the consolidated mold adheres to, but which dissolves during the development process (the removal of adhering bath material) in such a way that the created structure is lifted up from the substrate.
  • the produced solid can simply be removed by lifting it out of the bath, for example by moving the carrier out of the bath. It is then rinsed with a suitable solvent as necessary to remove any adhering bath material and air-dried or dried otherwise (e.g. in an inert gas atmosphere).
  • the invention allows the in situ manufacture of three-dimensional solids of any shape consisting of materials to be consolidated by way of light-induced cross-linking processes across a wide wavelength range with the use of different laser and optical systems. It is basically possible to work on a multitude of material and substance classes simultaneously and extensively.
  • Two- or multiphoton polymerization (2PP/nPP) is used for the targeted consolidation.
  • a focused laser pulse or a succession of focused laser pulses is specifically aimed at an addressed volume element in the material to be consolidated.
  • a laser pulse sequence or a sequence of laser pulses refers to a number of chronologically successive single laser pulses used to consolidate a structural unit (voxels). The number of pulses is at least two, preferably 100 to 1000 or several hundred to several thousand.
  • the laser pulse or the laser pulse sequence achieves two- (TPA) or multiphoton absorption at the location of the volume elements to be consolidated in the focus, wherein similar chemical alterations can be induced as with the use of considerably shorter wavelengths.
  • the present invention has the advantage that three-dimensional structures can be produced in a single step with few materials required and in a very short period of time, wherein structures with almost any size can be produced with high precision.
  • voxels smaller than 100 nm to 100 ⁇ m can be produced.
  • the laser intensity it is theoretically possible to create infinitesimally small volume elements.
  • the optical pathway of the laser pulses through the lens or the lens glass can be kept short and imaging errors can be reduced.
  • the produced voxels can be more or less overlapping and as a whole form the one- to three-dimensional structure to be produced.
  • Said scaffolding structures can advantageously have a pore structure in the range of 10 nm to 10 mm, preferably from 1 ⁇ m to 5 mm.
  • the produced structures can be nonporous, e.g. in the form of nanostructures.
  • the positioning is such that the focus or foci are or become positioned near the carrier unit or adjacent thereto.
  • Initially consolidated material accumulates on the carrier unit within the scope of its consolidation and is positioned relative to the focus or foci together with the carrier unit during the further course of the structuring or consolidation process.
  • the further positioning is such that material accumulates on already consolidated material or on the carrier unit.
  • the material container When the laser beam is aimed through the material container into the material to be consolidated, the material container itself serves the purpose of forming a defined interface where the laser beam enters the material to be consolidated. Because of the material container arranged opposite said positionable carrier unit, the working distance of the used lens by which the distance of the consolidation range is defined from one wall or the bottom of the material container, has no limiting effect.
  • a laser beam is introduced through the wall or the bottom of the material container, it is particularly advantageous if no contact is established between the lens and the material to be consolidated. This allows the rapid movement and positioning of the lens. No turbulences are created in the material and the resistance is lower than when positioning an immersed lens. Furthermore, there is no need for the lens to be impermeable to the material to be consolidated. Since no contact is established between the lens and the material to be consolidated, it is also possible to process aggressive materials which would damage the lens.
  • the focusing optical system itself forms a defined optimal interface for the laser beam entering the material to be consolidated.
  • the consolidation can occur at any location in the material bath, without the need of using an additional positionable carrier unit, because the lens can be positioned in the material bath as desired as well as immersed to almost any depths and the place of consolidation is not restricted by the working distance of the lens.
  • a device comprises a lens for the three-dimensional splitting of the laser beam and creation of at least two laser foci or intensity maximums arranged at a distance from each other, hereinafter referred to as parallelization.
  • parallelization the laser beam energy can simultaneously be aimed three-dimensionally at two or a plurality of voxels, so that consolidation simultaneously occurs in two or a plurality of locations. This allows the creation of relatively large structures and molds within a short period of time.
  • n voxels therefore allows the acceleration of the production time of the structures to be produced by factor n, depending on the element to be produced.
  • Said factor n corresponds to the number of intensity maximums or laser foci created by the beam splitting, through which multiphoton polymerization is triggered.
  • the invention not only allows a parallel creation of voxels of a single function element, but also a parallel creation of two or a plurality of function elements.
  • a single structure can simultaneously be created via a plurality of foci or a plurality of structures can simultaneously be created via one or a plurality of foci each.
  • one or a plurality of lenses can be used to create n foci. It is possible to produce a plurality of structures on the same substrate as well as to select a separate substrate for each structure.
  • parallelization can be achieved by way of beam formation or by splitting one laser beam into a plurality of sub-beams, which are each focused and simultaneously consolidate voxels at several locations in the material.
  • an amplitude mask introduced into the beam path, which creates a diffraction pattern in the far-field of the beam.
  • a microlens array, an axicon lens can be used for example to create a ring-shaped focal plane or an electrically controllable three-dimensional light modulator as a dynamically variable phase mask, which achieves a specific distribution of the light intensity of a plurality of foci and hence a partial parallelization of the structuring process.
  • the foci can be moved in space by means of targeted dynamic modulation of the phase, and no mechanical shifting units are required as a result.
  • the device according to the invention comprises a positioning system used to position the laser focus or the laser foci in the material bath.
  • the positioning is achieved with a movement of the focusing optical system, supplemented with a movement of a carrier unit arranged in the bath, if applicable.
  • It can be carried out in the form of a linear and/or rotatory positioning in and/or by one, two, three or more axes.
  • a carrier unit for consolidated material can be movable relative to the laser focus, in particular linearly movable and/or rotatable. Because it is not necessary to move the material container, only relatively small masses need to be accelerated and slowed down, thus facilitating an ultra-accurate positioning.
  • the carrier unit can be movable in all embodiments of the inventions, if necessary also in more than one, e.g. in two or in all three directions of space.
  • the positioning is achieved by moving the lens.
  • the latter can be movable in one direction of space, e.g. in Y-direction if the carrier in the material bath is movable at least in X- and Z-direction.
  • the focusing optical system is preferably movable in at least two directions of space, e.g. in X- and Y-direction, while the carrier can be moved at least in Z-direction. If the focusing optical system can be moved in all three directions of space, which would make sense especially with an immersed focusing optical system, no carrier is required at all in the material bath, or said carrier can be arranged rigidly in the bath.
  • the position of at least one focus can be selected arbitrarily relative to the material to be consolidated. Different starting points for the material modification can be addressed herewith. If a plurality of laser foci is used, one focal plane is defined for all foci, whose position or location in the material to be consolidated can be addressed. However, if an active, dynamic room light modulator is used, it is generally possible that the relative position of foci to each other can be varied dynamically. If a defined point in the material in a focal range is to be consolidated, its position can be corrected e.g. by means of software if the substrate surface (carrier surface) is known, while the data of an optical detection system, for example in the form of a 3D scanner can be used if the surface texture is unknown. The following applies in this respect:
  • Curing of the liquid material directly at the surface of the substrate is important with (multiphoton) structuring of liquid materials.
  • An anchor point is required for this purpose, to ensure that the next volume element (voxel) to be consolidated is in contact with the already consolidated area or the substrate. If this is not the case, already consolidated areas can drift away from their target position in liquid resin, thus impairing the structural quality. This can result in a defective structure. If the anchor point was not located correctly on the substrate, the structure may indeed have been generated correctly, but it can ultimately not be located because it no longer adheres to the substrate during the development and can no longer be found. Therefore, preferred embodiments of the invention relate to the location of said anchor point (or also a plurality of said anchor points as applicable).
  • said anchor point is detected by means of a microscope camera installed in the system.
  • Said microscope camera is aimed at the surface to be structured; aside from the developing structures, it can also be used to observe the laser spot. When the latter is smallest in the camera image (during the movement in Z-direction), the substrate is hit optimally.
  • the anchor point can be found automatically.
  • the sample or the substrate previously introduced into the bath is measured in situ using a detection system (of any kind).
  • the substrate surface-related data obtained in this fashion is used to either determine the anchor point individually for each structure when a plurality of structures are recorded, or, when recording a single (large) structure, to adjust its geometry in such a way that it almost always has a defined orientation to the substrate surface.
  • a single-point sensor i.e., a sensor that is only capable of measuring a single point in the X-Y plane to scan the substrate surface for creating the topography image.
  • a single-point sensor is explained as an example below.
  • a voltage signal is generated, which is relative to the substrate or the target anchor point, depending on the position of the focal range. Said voltage signal should reach a level, preferably a maximum when the anchor point hits the focus. As illustrated in FIG. 12 , this can be achieved e.g. with the method of back reflection in the beam path.
  • the structuring laser or the pulses are introduced, they pass e.g. a glass slide which is initially not relevant for the propagation of said pulses. Then, the radiation is focused into the material in the traditional manner. Depending on the Z position, a small part of the pulses is reflected back, because of the refractive index contrast present between the substrate and liquid resist material. Said reflection is at the maximum if the interface between the substrate and the resist is hit optimally.
  • the back reflection is tapped with the glass slide which diverts part thereof onto a photodiode.
  • a topography image can be obtained in this fashion, namely if said maximization of the back reflection is repeated in many points on the substrate, and the Z positions where the maximums occur are saved.
  • the laser utilized for the structuring can be used as radiation source as necessary for the back reflection method. In so doing, its output is advantageously set very low to prevent the risk of bringing about an unwanted consolidation of bath material with the light beam intended for the back reflection.
  • a controller also makes it possible that a certain signal level of the back reflection is always maintained by compensating the Z position, while the focus is moved in the plane.
  • controllers such as PIs or PIDs are suitable for this purpose.
  • a PI controller combines the advantage of the P controller, namely fast reaction, with the advantage of the I controller, i.e., the exact deviation control.
  • a PI-controlled circuit is therefore accurate and moderately fast.
  • a PID controller combines the favorable characteristics of all three controller types. The PID-controlled circuit is accurate and very fast. Therefore, a PID controller is very suitable for the invention.
  • the positioning accuracy of at least one or each motion axis preferably amounts to at least 0.20 ⁇ m.
  • the use of positioning systems in the form of ultra-precise linear tables, for example, tables with air bearings or tables movable with piezo technology, having large travel pathways as well as optionally of large substrates or material baths (e.g. 62 cm ⁇ 62 cm) allows the creation of both small structures with dimensions of less than one millimeter as well as macroscopic solids with edge lengths of several centimeters.
  • a positioning device with at least one rotatable axis instead or in addition to the linear positioning in the three-dimensional planes.
  • This makes it possible to rotate either the material to be consolidated or a carrier unit immersed into said positioning device around at least one three-dimensional axis.
  • Substrates in the form of rolled up foils or similar can be used which subsequently serve as carrier unit or are positioned with one of the latter.
  • the foil-like substrates can be guided by means of rotational positioning and positioned relative to at least one laser focus.
  • the rotational positioning is preferably achieved with a resolution of at least 0.079 arcseconds and/or a speed of at least 3 micro-arcseconds.
  • the maximum rotational speed preferably amounts to about 300 rotations per minute with a repeatability of less than 2 arcseconds.
  • the positioning system comprises the following characteristics: the travel range, ideally in every direction, preferably amounts to at least 150 mm, in particular in every direction of space.
  • the positioning accuracy in every direction is preferably ⁇ 0.20 ⁇ m.
  • the accuracy in connection with the repeated approach of a point is ⁇ 0.05 ⁇ m.
  • the accuracy perpendicular to the direction of travel in the horizontal plane in particular amounts to ⁇ 0.25 ⁇ m and the accuracy perpendicular to the direction of travel in the vertical plane to ⁇ 0.25 ⁇ m.
  • the traverse rate of the positioning system is up to 300 mm/s (although lower speeds are possible as well), with a maximum linear acceleration under no load conditions of about 10 m/s 2 .
  • Solid-state lasers, diode-pumped solid-state lasers, semiconductor lasers, fiber lasers, etc. with any wavelength can generally be used as a radiation source.
  • the frequency is doubled, its wavelength is within the range of green light.
  • the advantage of Ytterbium lasers is their wavelength of 1030 nm.
  • the structurable materials can be processed more efficiently than with lasers with wavelength ranges of approximately 800 nm. In terms of material formulations, the process window is considerably larger.
  • Ti-sapphire laser When the frequency is doubled, a Ti-sapphire laser disadvantageously is in the UV range at about 400 nm. However, this is such a high-energy spectral range that the exposure of the majority of material systems to be consolidated would already achieve a 1PP process which can be prevented with the use of laser systems having larger wavelengths.
  • Another disadvantage of Ti-sapphire lasers is that the duration of their laser pulses is usually too short. This would indeed achieve greater process efficiency, but it also creates problems, because short pulses have a very broad spectrum and imaging errors are more likely to occur. Short pulses are generally more difficult to manage, potentially being more costly and time-consuming.
  • Ytterbium laser systems are generally possible. It is advantageous that these lasers can be pumped with diodes and that no additional pump lasers and various other instruments are required.
  • relatively short pulses are the advantage of Ytterbium lasers compared to Nd:YAG lasers. While Ytterbium lasers can achieve pulses of far less than one picosecond, the pulse lengths of an Nd:YAG laser are generally greater than one picosecond and hence rather unfavorable for triggering a non-linear absorption, because of the risk of weakly cross-linked and labile structures which can result in the disadvantages described above.
  • the pulse lengths required for efficiently triggering a non-linear absorption are smaller than one picosecond. Additional photoinitiators can be used to improve interactions between light and material and for the more efficient stimulation of the polymerization.
  • the repetition rate can preferably be set between 1 kHz and 80 MHz, preferably between 10 kHZ and 80 MHz.
  • wavelengths in the UV range, in the visible range as well as in the infrared range can be used.
  • the lasers can have outputs between 100 mW and 5 W, preferably between 150 mW and 2 W and/or a pulse length of less than 1 picosecond and/or a repetition rate between 1 to 80 MHz.
  • the laser beam can be split or the three-dimensional beam formation achieved in different fashions. It can be brought about with the use of passive DOEs (diffractive optical elements) such as for example phases or amplitude masks, or with microlens arrays or active, preferably dynamically adjustable DOEs as well as combinations of said elements. Consequently, any intensity distributions can be effectuated, such as for example a plurality of foci or foci with arbitrary shapes, which allow the recording of one structure each with a plurality of foci which may be shaped as needed. DOEs for phase modulation are particularly advantageous, because, compared to DOEs with amplitude masks, they are associated with no or only minor output losses.
  • a one-dimensional grid with a grid distance of preferably less than 10 ⁇ m or a two-dimensional array with a pixel distance of preferably less than 10 ⁇ m can advantageously be used as a mask.
  • a plurality of focusing optical systems can be used. They can then be moved relative to the carrier material (substrate) in such a way that a plurality of structures can simultaneously be recorded with one focus each.
  • the use of a plurality of focusing optical systems requires the splitting of the laser output through conventional beam splitters into a plurality of beams which are each aimed at one focusing optical system.
  • a combination of the beam formations above is possible, in that a modulator first creates the desired intensity distribution of the radiation and the latter is subsequently focused through a plurality of lenses.
  • Every focusing optical system can be movable relative to other elements of the beam guide, the material container, the material to be consolidated and/or the carrier unit in such a way that only the focusing optical system alone needs to be moved for the positioning and the remaining elements of the beam guide can be installed rigidly.
  • the laser beam can be guided at least in partial areas of the beam guide via optical waveguides in a particularly advantageous design.
  • Hybrid lenses consisting of diffractive optical elements and conventional lenses can be used to prevent focusing-related imaging errors.
  • the diffractive optical elements consist, for example, of quartz glass, materials containing organopolysiloxane, fluids or any material combination.
  • Using focusing optical systems without adjusting the index of refraction results in a positioning error in connection with variable penetration depths of the light into the material, said positioning error being due to the refraction at the interface between the air and material (i.e., the movement of the focus does not coincide with the movement of the lens).
  • Said deviation in the Z positioning of the focus can be compensated with a corrective factor, e.g. by means of computer software.
  • the device and method of the present invention are advantageously not restricted by refraction limits of the focusing optical systems, because a different absorption behavior is present than with linear single-photon absorption on the one hand and because a threshold process is utilized on the other hand.
  • the absorption profile (approximating a Gaussian profile) continues to be narrower, thus allowing better resolution, because of the non-linear correlation between the photon density and the absorption behavior.
  • the absorption behavior of the single-photon absorption is characterized with linearity opposite the photon density and can be explained with classical physics, the simultaneous absorption of two or more photons has its origins in quantum mechanics.
  • the device can comprise a dispenser system for the in situ deposition of the material to be consolidated.
  • said system allows material to be consolidated to be added to the material bath to match the respective process status.
  • the bath only needs to contain as much material as required to create the first voxels at the beginning of the manufacture.
  • More material to be consolidated is only added via the dispenser system during the course of the further manufacture and as the solid continues to grow, preferably always only at the quantity required for creating the next voxels.
  • the bath is always only filled with the quantity of material to be consolidated required for the current creation of voxels, with the advantage that only a relatively small mass needs to be moved in connection with the positioning movement of the bath and when a lens immersed in the material is positioned by way of a movement, the lens does not need to be moved deeply immersed in material, whereby flow resistances and swirling in the bath are prevented for the most part, which has a positive impact on the quality of the created solids.
  • the dispenser system can comprise freely actuatable nozzles allowing a locally definable feed of material to be consolidated, wherein the conservation of materials results in a considerable cost reduction and protection of resources during the manufacture of the function elements.
  • the dispenser system preferably possesses a high positioning accuracy in the micrometer range. Basically, the procedure described above can also be performed manually without the use of a dispenser system.
  • the device can comprise a scanner system, in particular a 3D scanner, or such a scanner can be used for the method.
  • a scanner system in particular a 3D scanner, or such a scanner can be used for the method.
  • This allows the digitalization of templates or solids with any shapes and the obtained data can be used to record solids and structures with complex shapes into the material to be consolidated directly in the machine.
  • structures produced with the device can be used as master structure for further molding techniques. In the process, both the single use as well as the repeated use of the same master is intended.
  • FIG. 1 shows a schematic illustration of a device according to the prior art
  • FIGS. 2 to 4 show schematic illustrations of first embodiments of devices according to the invention with exposure of the material containing organopolysiloxane through a material container,
  • FIGS. 5 to 7 show schematic illustrations of second embodiments of devices according to the invention with exposure of the material containing organopolysiloxane through a focusing optical system immersed in the material,
  • FIGS. 8 and 9 show schematic illustrations of third embodiments with the use of elements for three-dimensional beam shaping and
  • FIGS. 10 and 11 show schematic illustrations of fourth embodiments having a positioning system with a rotational axis.
  • FIG. 12 shows a motion unit for the focusing optical system.
  • FIG. 13 shows an illustration of the optical detection of an anchor point.
  • FIGS. 14 a and b show two three-dimensional structures produced according to the invention with very different sizes, of which the latter can be used as “scaffold” (the distance from one of the large square openings to the other is approximately 300 ⁇ m).
  • FIG. 1 contains a schematic illustration of a device used to explain part of the invention.
  • the device according to this figure comprises a laser source 1 , a deflection mirror 2 as component of a beam guide as well as a focusing optical system 3 .
  • the unfocused laser beam 4 exiting the laser source 1 is guided to the focusing optical system 3 through the deflection mirror 2 . There, it is focused into a focus 5 .
  • Material to be consolidated 6 is arranged below the focusing optical system 3 , between a lower carrier 7 and an upper carrier 8 .
  • the material retainer consisting of lower carrier 7 and upper carrier 8 , together with the material to be consolidated 6 placed in between, can be positioned in X- and Y-direction relative to the focus 5 and the focusing optical system 3 , while the focusing optical system 3 can be positioned in Z-direction relative to the material 6 .
  • FIG. 1 shows an arrangement of the focusing optical system 3 relative to the material to be consolidated 6 at the start of a consolidation cycle.
  • the focus 5 borders directly on the lower carrier 7 such that material consolidated in the focus area accumulates on the carrier 7 .
  • This initial positioning is required in order to consolidate material within the scope of the further consolidation in a fixed position or else no defined structures can be built up.
  • the distance between the respective top side of the lower carrier 7 and upper carrier 8 has to be smaller than the working distance 9 of the focusing optical system 3 . Otherwise, it is impossible to position the focus 5 on the lower carrier 7 and to accumulate consolidated material there.
  • the distance between the lower carrier 7 and upper carrier 8 could indeed be greater than the working distance 9 of the focusing optical system 3 .
  • the consolidation would only be possible with a limited distance to the upper carrier 8 , corresponding to the working distance 9 less the thickness of the upper carrier 8 .
  • the geometry and size of producible structures are restricted in an undesirable manner.
  • FIG. 2 shows a first embodiment of the invention in which the exposure of the material to be consolidated is achieved through a material container 10 .
  • the exposure is conducted through the bottom 11 of the material container 10 from below, by directing an unfocused laser beam 4 created in the laser source 1 via a deflection mirror 2 to a focusing optical system 3 arranged underneath the material container 10 .
  • the deflection mirror 2 can be designed positionable.
  • the beam is focused by the focusing optical system in the material to be consolidated 6 in the material container 10 . Similar to the device according to FIG. 1 , the maximum depth at which the focus can be immersed into the material to be consolidated 6 is limited by the working distance 9 of the focusing optical system 3 .
  • the device illustrated in FIG. 2 comprises a carrier unit 12 that can be positioned opposite the material container 10 .
  • the carrier unit 12 is immersed in the material to be consolidated 6 in the material container 10 .
  • the carrier unit 12 is positionable in Z-direction, while the focusing optical system is positionable in X- and Y-direction.
  • FIG. 2 again contains an exemplary illustration of the start of the creation of a structure.
  • the carrier unit 12 is positioned relative to the material container 10 and focus 5 in such a way that the focus is adjacent to the lower surface area of the carrier unit 12 .
  • Material that has consolidated in the vicinity of the focus 5 is deposited at the underside of the carrier unit 12 and adheres to it.
  • the carrier unit 12 can be positioned in Z-direction in such a way that the focus comes to rest at an interface of already consolidated material and subsequently consolidated material is deposited on already consolidated material and adheres to it.
  • the position of the consolidation in X- or Y-direction is determined with the positioning of the focusing optical system 3 in X- as well as Y-direction and with the corresponding introduction of laser pulses.
  • the carrier unit positionable in Z-direction and the corresponding travel guide makes it possible to consolidate structures whose dimensions are independent and in particular larger than the working distance 9 of the used focusing optical system 3 .
  • FIG. 5 shows a further schematic illustration of a different embodiment of the invention.
  • the device again comprises a laser source 1 , wherein an unfocused laser beam 4 emitted by it is aimed at a focusing optical system 3 via a deflection mirror 2 .
  • it comprises a material container 10 containing material to be consolidated 6 as well as a carrier unit 12 .
  • the latter is not mobile, but it can be positionable in one or a plurality of directions.
  • the laser beam is introduced into the material to be consolidated 6 via the focusing optical system 3 immersed in the material to be consolidated 6 .
  • the focusing optical system 3 comprises a case 14 with a beam output area 13 and is positionable in the three directions of space X, Y and Z. With the immersion of the focusing optical system 3 , the beam output area 13 forms a defined interface with the material to be consolidated 6 , thus enabling a defined and accurate introduction of the laser beam into the material to be consolidated 6 .
  • FIG. 5 again shows the device at the start of the structuring process, in which the focusing optical system 3 is arranged relative to the carrier unit 12 at the working distance 9 such that the focus 5 borders on the surface of the carrier unit 12 .
  • the consolidation and accumulation in X- and Y-direction is determined with the corresponding positioning in X- as well as Y-direction.
  • the structuring can be performed with the corresponding positioning of the focusing optical system 3 in Z-direction, matching the strength of the already consolidated material adhering to the carrier unit 12 .
  • the height of the producible structures is not restricted either by the working distance 9 of the focusing optical system 3 .
  • the present invention is using a focusing optical system 3 with high NA for all possible embodiments, at least with an NA of greater than 0.25 in order to achieve the desired high resolution or small voxels.
  • the working distances 9 of the objective lenses preferably range between 0.1 and 100 mm, more preferably between 1 and 10 mm.
  • the focus range 5 of the focusing optical system obviously has to be inside the bath 10 . Therefore, the thickness of the transparent bath bottom which has to be penetrated also needs to be considered in the selection of the proper working distance. It is favorable if the thickness of the bath bottom is selected in the range of 0.1 and 20 mm, preferably in the range of 0.5 and 5 mm.
  • Values of 0.1 to 2 mm are best for the distance between the focus range 5 and the bath bottom. With lower values, there is a risk that the material consolidates directly on the bottom and adheres there. As a consequence, the removal of the carrier unit 12 would be impaired. Values above the favorable range may result in increasing imaging errors (mainly spherical aberrations). Since the focusing optical system is moved at least in one plane according to the invention (usually the horizontal, i.e., the X-Y plane), the size of the selected NA is not necessarily relevant, especially with a minimum value of 0.25.
  • the laser beam is preferably coupled into the focusing optical system by way of a system of mirrors as illustrated in FIG. 12 .
  • FIG. 8 shows an embodiment of the invention, the design of which essentially corresponds to the embodiment according to FIG. 5 .
  • a beam shaping element 15 for example in the form of a phase or amplitude mask, is arranged in the beam path between the deflection mirror 2 and the focusing optical system 3 .
  • the beam shaping element 15 With the use of the beam shaping element 15 , the laser beam is focused into a plurality of foci 5 a, 5 b and 5 c via focusing optical system 3 in such a way that material to be consolidated 6 can be consolidated at several positions simultaneously. In the process, the number of consolidation positions corresponds to the number n of created foci (parallelization).
  • FIG. 9 shows a corresponding use of a beam shaping element 15 within the scope of a device according to the exemplary embodiment of FIG. 2 . Reference is made to the description of FIG. 2 above.
  • FIGS. 3 , 4 , 6 and 7 Other devices with parallelization are illustrated in FIGS. 3 , 4 , 6 and 7 .
  • the parallelization is achieved with the use of a semi-permeable deflection mirror 16 , used to split the unfocused laser beam 4 exiting the laser source 1 into two sub-beams 17 a, 17 b, each of which are aimed at an independent focusing optical system 3 .
  • the devices according to FIGS. 3 and 6 comprise two carrier units 12 a and 12 b immersed into the material to be consolidated 6 , which can be positioned in Z-direction jointly or independently from each other. Structures with different geometries can be created simultaneously with said devices, with the corresponding approach of the positioning axes.
  • FIGS. 4 and 7 show devices in which it is possible to record at several positions on a carrier unit 12 simultaneously by means of parallelization, said carrier unit being immersed in the material to be consolidated.
  • FIGS. 10 and 11 Another embodiment of the invention is illustrated in FIGS. 10 and 11 .
  • a rotary table 18 that allows a rotational positioning e.g. around a rotational axis 19 additionally or alternatively to a linear positioning is used instead of only a single linearly positionable carrier unit 12 .
  • the rotary table 18 illustrated in FIG. 10 serves the positioning of a foil-shaped carrier unit with material to be consolidated 6 relative to the focus 5 .
  • a carrier unit 12 which can be rotated around a rotational axis 19 and can be positioned linearly in Z-direction is immersed in a bath of material to be consolidated.
  • the focusing optical system 3 can be positioned linearly in X- and Y-direction. The focus position is set such that material 6 is consolidated, deposited and virtually rolled up on the carrier unit 12 .

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Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140257518A1 (en) * 2013-03-08 2014-09-11 The Trustees Of Princeton University Multi-functional hybrid devices/structures using 3d printing
WO2015083104A1 (en) * 2013-12-03 2015-06-11 Layerwise N.V. Method and device for calibrating multiple energy rays for the additive manufacturing of an object
WO2015139094A1 (en) * 2014-03-21 2015-09-24 Laing O'rourke Australia Pty Limited Method and apparatus for fabricating an object
US20150343664A1 (en) * 2014-05-27 2015-12-03 Jian Liu Method and Apparatus for Three-Dimensional Additive Manufacturing with a High Energy High Power Ultrafast Laser
WO2015191257A1 (en) * 2014-06-12 2015-12-17 General Electric Company Selective laser melting additive manufacturing method with simultaneous multiple melting lasers beams and apparatus therefor
US9470858B2 (en) 2013-01-11 2016-10-18 Multiphoton Optics Gmbh Optical package and a process for its preparation
CN106061712A (zh) * 2013-12-18 2016-10-26 斯凯孚公司 一种用于研磨通过增材制造定制的工件的机器
WO2016184888A1 (en) * 2015-05-19 2016-11-24 Addifab Aps Additive manufacturing arrangement with shared radiation source
WO2017029529A1 (en) * 2015-08-14 2017-02-23 Bartos Márton Apparatus and method for manufacturing a three-dimensional object
WO2017060573A2 (en) 2015-10-09 2017-04-13 Inkron Oy Three dimensonal printing materials and method for making a 3d printed article
US20170123237A1 (en) * 2015-10-30 2017-05-04 Seurat Technologies, Inc. Light recycling for additive manufacturing optimization
US20170182708A1 (en) * 2015-12-09 2017-06-29 Autodesk, Inc. Multi-material stereolithographic three dimensional printing
US20170225393A1 (en) * 2016-02-04 2017-08-10 Global Filtration Systems, A Dba Of Gulf Filtration Systems Inc. Apparatus and method for forming three-dimensional objects using two-photon absorption linear solidification
EP3208075A1 (en) * 2016-02-17 2017-08-23 Hochschule für angewandte Wissenschaften Aschaffenburg Optical method and apparatus for fabricating a structured object
TWI597153B (zh) * 2016-06-07 2017-09-01 台達電子工業股份有限公司 三維列印裝置及其成像系統
US20170291260A1 (en) * 2016-04-06 2017-10-12 General Electric Company Additive Machine Utilizing Rotational Build Surface
US20180029299A1 (en) * 2015-02-26 2018-02-01 Stratasys, Inc. Additive manufacturing with offset stitching
US20180065295A1 (en) * 2016-09-05 2018-03-08 Ford Global Technologies, Llc Three Dimensional Continuous Fabrications
FR3056593A1 (fr) * 2016-09-28 2018-03-30 Ecole Centrale De Marseille Procede pour la realisation d’un objet tridimensionnel par un processus de photo-polymerisation multi-photonique et dispositif associe
US20180173160A1 (en) * 2014-03-24 2018-06-21 B.G. Negev Technologies And Applications Ltd. At Ben-Gurion University Optical sectioning using a phase pinhole
US10086566B2 (en) * 2014-01-02 2018-10-02 Old World Labs Apparatus for production of three-dimensional objects by stereolithography
WO2019002902A1 (en) * 2017-06-30 2019-01-03 Nikon Corporation METHOD FOR MANUFACTURING AN ARTICLE MADE OF A POLYMERIZED MATERIAL
JP2019022974A (ja) * 2017-07-21 2019-02-14 ツェーエル・シュッツレヒツフェアヴァルトゥングス・ゲゼルシャフト・ミト・べシュレンクテル・ハフツング ３次元の物体を付加製造するための工場
CN109501245A (zh) * 2018-10-19 2019-03-22 上海光琢科技有限公司 基于脉冲式曝光的光固化3d打印方法
KR20190038821A (ko) * 2016-07-07 2019-04-09 테크니셰 우니베르시태트 빈 3차원 컴포넌트들의 리소그래피 기반 제너러티브 생산을 위한 방법
DE102018201901A1 (de) 2018-02-07 2019-08-08 Ford Global Technologies, Llc Vorrichtung und Verfahren zur additiven Fertigung dreidimensionaler Strukturen
WO2019186070A1 (fr) * 2018-03-28 2019-10-03 Ecole Centrale De Marseille Procédé pour la réalisation d'un objet tridimensionnel par un processus de photopolymérisation multi-photonique et dispositif associé
KR20200028333A (ko) * 2017-05-10 2020-03-16 엘켐 실리콘즈 프랑스 에스에이에스 3d 프린터를 사용하는 실리콘 엘라스토머 물품의 제조 방법
JP2020059634A (ja) * 2018-10-12 2020-04-16 公益財団法人レーザー技術総合研究所 光学素子製造方法
US10690486B2 (en) * 2018-07-03 2020-06-23 Amo Development, Llc Water-immersed high precision laser focus spot size measurement apparatus
US20200307071A1 (en) * 2019-03-27 2020-10-01 30 Systems, Inc. High Productivity System for Printing Precision Articles
US10809468B2 (en) 2015-08-10 2020-10-20 Multiphoton Optics Gmbh Optical component with beam deflection element, method for production thereof, and beam deflection elements suitable for the component
US10875094B2 (en) * 2018-03-29 2020-12-29 Vulcanforms Inc. Additive manufacturing systems and methods
US10882251B2 (en) 2017-05-15 2021-01-05 Holo, Inc. Viscous film three-dimensional printing systems and methods
US20210181096A1 (en) * 2019-12-13 2021-06-17 Alcon Inc. System and method of determining issues with optical components
CN113039014A (zh) * 2018-10-31 2021-06-25 环球生命科学解决方案德国有限公司 聚合物膜的改进及其相关改进
US11130199B2 (en) * 2016-08-26 2021-09-28 Multiphoton Optics Gmbh Device and method for laser-assisted processing of bodies or surfaces
US20210379829A1 (en) * 2018-11-06 2021-12-09 Ecole Polytechnique Federale De Lausanne (Epfl) Methods and apparatus for tomographic additive manufacturing with a spatially coherent light source
CN113927897A (zh) * 2021-09-18 2022-01-14 深圳摩方新材科技有限公司 一种高利用率的多材料树脂3d打印系统和方法
US20220055288A1 (en) * 2015-04-28 2022-02-24 Warsaw Orthopedic, Inc. 3d printing devices and methods
US11351735B2 (en) 2018-12-26 2022-06-07 Holo, Inc. Sensors for three-dimensional printing systems and methods
US11400650B2 (en) 2017-06-16 2022-08-02 Holo, Inc. Methods and systems for stereolithography three-dimensional printing
US11883903B2 (en) * 2016-07-25 2024-01-30 Amplitude Method and appliance for cutting materials by multi-beam femtosecond laser
US11993017B2 (en) * 2018-11-06 2024-05-28 Ecole Polytechnique Federale De Lausanne (Epfl) Methods and apparatus for tomographic additive manufacturing with a spatially coherent light source

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202011111072U1 (de) 2011-02-25 2019-03-27 Nanoscribe Gmbh Vorrichtung zum ortsaufgelösten Einbringen eines Intensitätsmusters aus elektromagnetischer Strahlung in eine photosensitive Substanz
BE1020596A3 (nl) * 2012-03-27 2014-01-07 Materialise Nv Werkwijze voor het verminderen van differentiële krimp bij stereolithografie.
DE102012021284B4 (de) * 2012-10-29 2014-12-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur schichtweisen Herstellung von Bauteilen mittels Photopolymerisation
DE102013104600B4 (de) 2013-01-11 2019-10-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schichten oder dreidimensionale Formkörper mit zwei Bereichen unterschiedlicher Primär- und/oder Sekundärstruktur, Verfahren zur Herstellung des Formkörpers und Materialien zur Durchführung dieses Verfahrens
WO2015197495A1 (en) 2014-06-27 2015-12-30 Koninklijke Philips N.V. Printing device and method for 3d printing
WO2016013038A1 (en) * 2014-07-23 2016-01-28 Millennium Art S.R.L. Stereolithographic machine with high productivity
DE102015003652B4 (de) * 2015-03-20 2017-03-16 Universität Stuttgart Verfahren zum Verbinden einer optischen Festkernfaser mit einer weiteren optischen Faser und optische Festkernfaser mit Fügungsvorrichtung
DE102015207180A1 (de) * 2015-04-21 2016-10-27 Siemens Aktiengesellschaft Verfahren und Vorrichtung zum schichtweisen Herstellen dreidimensionaler Strukturen
EP3287263A1 (de) 2016-08-26 2018-02-28 Multiphoton Optics Gmbh Vorrichtung und verfahren zur lasergestützten bearbeitung von körpern oder oberflächen
EP3290188A1 (de) * 2016-08-30 2018-03-07 Lithoz GmbH Verfahren zum verfestigen eines photopolymerisierbaren, diffus reflektierenden materials
CN110467149A (zh) * 2018-05-10 2019-11-19 安世亚太科技股份有限公司 一种碳基功能器件及其制备方法
DE102018128418B3 (de) * 2018-11-13 2019-11-14 Nanoscribe Gmbh Verwendung eines Dispenser-Aufsatzes und Dispenser-Aufsatz für eine Vorrichtung zum Schreiben von 3D-Strukturen mittels Laserlithografie
DE102018221670A1 (de) 2018-12-13 2020-06-18 Karlsruher Institut für Technologie Vorrichtung und Verfahren zur optischen Charakterisierung oder Bearbeitung eines Objekts
AU2020353167A1 (en) * 2019-09-27 2022-04-21 Prellis Biologics, Inc. Three-dimensional printed organs, devices, and matrices
AT523200B1 (de) * 2019-11-20 2021-10-15 Univ Graz Tech Vorrichtung zur additiven fertigung
US20230133547A1 (en) * 2019-11-26 2023-05-04 Lubbe Steven Devices, systems, and methods for 3d printing
DE102022106696A1 (de) 2021-03-22 2022-09-22 Polydiagnost Entwicklungs-, Produktions-, Vertriebs-, Und Servicegesellschaft Für Medizinelektronische Diagnostik- Und Therapiegeräte Mbh Endoskopoptik und Endoskop
EP4316782A1 (de) * 2022-08-01 2024-02-07 UpNano GmbH Verfahren und vorrichtung zur lithographiebasierten generativen fertigung eines dreidimensionalen bauteils

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990006540A1 (fr) * 1988-12-05 1990-06-14 Centre National De La Recherche Scientifique (Cnrs) Procede et dispositif de fabrication d'une piece solide tridimensionnelle par phototransformation d'un liquide organique
EP0379068A2 (en) * 1989-01-18 1990-07-25 Mitsui Engineering and Shipbuilding Co, Ltd. Optical molding method and apparatus
US20040126694A1 (en) * 2000-06-15 2004-07-01 Devoe Robert J. Microfabrication of organic optical elements
US20050263932A1 (en) * 2002-08-02 2005-12-01 Martin Heugel Device and method for the production of three-dimensional objects by means of generative production method
WO2006109355A1 (ja) * 2005-04-11 2006-10-19 Japan Science And Technology Agency 異波長レーザー光を用いた多光束微小構造物光造形方法及び装置
US20070000885A1 (en) * 2004-01-09 2007-01-04 General Lasertronics Corporation Color sensing for laser decoating

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992000185A1 (en) * 1990-06-22 1992-01-09 Martin Russell Harris Optical waveguides
DE4102260A1 (de) * 1991-01-23 1992-07-30 Artos Med Produkte Vorrichtung zur herstellung beliebig geformter koerper
DE4414775A1 (de) 1994-04-14 1995-10-19 Eos Electro Optical Syst Vorrichtung und Verfahren zum Herstellen eines dreidimensionalen Objekts
US5922364A (en) 1997-03-03 1999-07-13 Young, Jr.; Albert C. Stereolithography layering control system
US6020591A (en) 1997-07-11 2000-02-01 Imra America, Inc. Two-photon microscopy with plane wave illumination
CA2326322C (en) 1998-04-21 2011-03-01 University Of Connecticut Free-form nanofabrication using multi-photon excitation
US6214276B1 (en) 1999-05-18 2001-04-10 Creo Srl Method of forming objects from thermosensitive composition
US6583381B1 (en) * 1999-05-24 2003-06-24 Potomac Photonics, Inc. Apparatus for fabrication of miniature structures
DE19957370C2 (de) * 1999-11-29 2002-03-07 Carl Johannes Fruth Verfahren und Vorrichtung zum Beschichten eines Substrates
AU2001268465A1 (en) 2000-06-15 2001-12-24 3M Innovative Properties Company Multiphoton curing to provide encapsulated optical elements
DE10111422A1 (de) * 2001-03-09 2002-09-26 Hannover Laser Zentrum Verfahren und Vorrichtung zur Herstellung eines Formkörpers aus einem durch Bestrahlung zu verfestigenden flüssigen Material
US6841340B2 (en) * 2001-07-13 2005-01-11 Fuji Photo Film Co., Ltd. Optical fabricating method and apparatus
DE10152878B4 (de) 2001-10-26 2007-08-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Erzeugen dreidimensionaler Formkörper oder Oberflächen aus organopolysiloxanhaltigen Ausgangsmaterialien durch Laser-Bestrahlung und deren Verwendung
GB0303070D0 (en) * 2003-02-11 2003-03-19 Univ Nottingham A novel method of light assisted fabrication of materials in liquid media
JP2004307699A (ja) 2003-04-09 2004-11-04 Nitto Denko Corp 親水性基含有樹脂構造体及びその製造方法
FR2859543B1 (fr) 2003-09-08 2005-12-09 Pascal Joffre Systeme de fabrication d'un objet a trois dimensions dans un materiau photo polymerisable
JP2005084617A (ja) 2003-09-11 2005-03-31 Fuji Photo Film Co Ltd 多光子吸収露光方法および装置
US7568904B2 (en) * 2005-03-03 2009-08-04 Laser Solutions Co., Ltd. Stereolithography apparatus
JP2007057622A (ja) 2005-08-22 2007-03-08 Ricoh Co Ltd 光学素子及びその製造方法、光学素子用形状転写型の製造方法及び光学素子用転写型
US7520740B2 (en) 2005-09-30 2009-04-21 3D Systems, Inc. Rapid prototyping and manufacturing system and method
US7551359B2 (en) 2006-09-14 2009-06-23 3M Innovative Properties Company Beam splitter apparatus and system
CN100547440C (zh) 2007-12-05 2009-10-07 中国科学院电工研究所 一种用于双光子微细加工的三维超分辨衍射光学器件及其设计方法
JP5344553B2 (ja) 2008-09-08 2013-11-20 国立大学法人九州大学 ２光子吸収重合性組成物及び光デバイス

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990006540A1 (fr) * 1988-12-05 1990-06-14 Centre National De La Recherche Scientifique (Cnrs) Procede et dispositif de fabrication d'une piece solide tridimensionnelle par phototransformation d'un liquide organique
EP0379068A2 (en) * 1989-01-18 1990-07-25 Mitsui Engineering and Shipbuilding Co, Ltd. Optical molding method and apparatus
US20040126694A1 (en) * 2000-06-15 2004-07-01 Devoe Robert J. Microfabrication of organic optical elements
US20050263932A1 (en) * 2002-08-02 2005-12-01 Martin Heugel Device and method for the production of three-dimensional objects by means of generative production method
US20070000885A1 (en) * 2004-01-09 2007-01-04 General Lasertronics Corporation Color sensing for laser decoating
WO2006109355A1 (ja) * 2005-04-11 2006-10-19 Japan Science And Technology Agency 異波長レーザー光を用いた多光束微小構造物光造形方法及び装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Sun, Hong-Bo et al. Two-Photon Photopolymerization and 3D Lithography Microfabrication. Springer-Verlag. (2004) 170. 169- 273. *
WO 2006109355 A1. (Machine Translation) *
WO 9006540 A1. (Machine Translation) *

Cited By (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9470858B2 (en) 2013-01-11 2016-10-18 Multiphoton Optics Gmbh Optical package and a process for its preparation
US9517128B2 (en) * 2013-03-08 2016-12-13 The Trustees Of Princeton University Multi-functional hybrid devices/structures using 3D printing
US20140257518A1 (en) * 2013-03-08 2014-09-11 The Trustees Of Princeton University Multi-functional hybrid devices/structures using 3d printing
US20160303806A1 (en) * 2013-12-03 2016-10-20 Layerwise N.V. Method and device for calibrating multiple energy rays for the additive manufacturing of an object
US10725446B2 (en) * 2013-12-03 2020-07-28 Layerwise Method and device for calibrating multiple energy rays for the additive manufacturing of an object
WO2015083104A1 (en) * 2013-12-03 2015-06-11 Layerwise N.V. Method and device for calibrating multiple energy rays for the additive manufacturing of an object
BE1024052B1 (nl) * 2013-12-03 2017-11-08 Layerwise N.V. Werkwijze en inrichting voor het kalibreren van meerdere energiestralen voor het additief vervaardigen van een object
CN106061712A (zh) * 2013-12-18 2016-10-26 斯凯孚公司 一种用于研磨通过增材制造定制的工件的机器
US10086566B2 (en) * 2014-01-02 2018-10-02 Old World Labs Apparatus for production of three-dimensional objects by stereolithography
EP3119589A4 (en) * 2014-03-21 2017-11-08 Laing O'Rourke Australia Pty Limited Method and apparatus for fabricating an object
WO2015139094A1 (en) * 2014-03-21 2015-09-24 Laing O'rourke Australia Pty Limited Method and apparatus for fabricating an object
US10545458B2 (en) * 2014-03-24 2020-01-28 B.G. Negev Technologies And Applications Ltd., At Ben Gurion University Optical sectioning using a phase pinhole
US20180173160A1 (en) * 2014-03-24 2018-06-21 B.G. Negev Technologies And Applications Ltd. At Ben-Gurion University Optical sectioning using a phase pinhole
US20150343664A1 (en) * 2014-05-27 2015-12-03 Jian Liu Method and Apparatus for Three-Dimensional Additive Manufacturing with a High Energy High Power Ultrafast Laser
WO2015191257A1 (en) * 2014-06-12 2015-12-17 General Electric Company Selective laser melting additive manufacturing method with simultaneous multiple melting lasers beams and apparatus therefor
US10195692B2 (en) 2014-06-12 2019-02-05 General Electric Company Parallel direct metal laser melting
US20180029299A1 (en) * 2015-02-26 2018-02-01 Stratasys, Inc. Additive manufacturing with offset stitching
US11931952B2 (en) * 2015-04-28 2024-03-19 Warsaw Orthopedic, Inc. 3D printing devices and methods
US20220055288A1 (en) * 2015-04-28 2022-02-24 Warsaw Orthopedic, Inc. 3d printing devices and methods
WO2016184888A1 (en) * 2015-05-19 2016-11-24 Addifab Aps Additive manufacturing arrangement with shared radiation source
US10809468B2 (en) 2015-08-10 2020-10-20 Multiphoton Optics Gmbh Optical component with beam deflection element, method for production thereof, and beam deflection elements suitable for the component
US11220045B2 (en) * 2015-08-14 2022-01-11 GRANTE Antenna Fejlesztô és Gyártó Zrt. Apparatus and method for manufacturing a three-dimensional object
WO2017029529A1 (en) * 2015-08-14 2017-02-23 Bartos Márton Apparatus and method for manufacturing a three-dimensional object
WO2017060573A2 (en) 2015-10-09 2017-04-13 Inkron Oy Three dimensonal printing materials and method for making a 3d printed article
US11964429B2 (en) * 2015-10-30 2024-04-23 Seurat Technologies, Inc. Light recycling for additive manufacturing optimization
US20170123237A1 (en) * 2015-10-30 2017-05-04 Seurat Technologies, Inc. Light recycling for additive manufacturing optimization
US20210001404A1 (en) * 2015-10-30 2021-01-07 Seurat Technologies, Inc. Light Recycling For Additive Manufacturing Optimization
US10960465B2 (en) * 2015-10-30 2021-03-30 Seurat Technologies, Inc. Light recycling for additive manufacturing optimization
US20170182708A1 (en) * 2015-12-09 2017-06-29 Autodesk, Inc. Multi-material stereolithographic three dimensional printing
US11845225B2 (en) 2015-12-09 2023-12-19 Holo, Inc. Multi-material stereolithographic three dimensional printing
US11141919B2 (en) * 2015-12-09 2021-10-12 Holo, Inc. Multi-material stereolithographic three dimensional printing
US20170225393A1 (en) * 2016-02-04 2017-08-10 Global Filtration Systems, A Dba Of Gulf Filtration Systems Inc. Apparatus and method for forming three-dimensional objects using two-photon absorption linear solidification
US10442133B2 (en) 2016-02-17 2019-10-15 Hochschule Fuer Angewandte Wissenschaften Aschaffenburg Optical method and apparatus for fabricating a structured object
EP3208075A1 (en) * 2016-02-17 2017-08-23 Hochschule für angewandte Wissenschaften Aschaffenburg Optical method and apparatus for fabricating a structured object
WO2017140546A1 (en) * 2016-02-17 2017-08-24 Hochschule Für Angewandte Wissenschaften Aschaffenburg Optical method and apparatus for fabricating a structured object
US20170291260A1 (en) * 2016-04-06 2017-10-12 General Electric Company Additive Machine Utilizing Rotational Build Surface
US10239157B2 (en) * 2016-04-06 2019-03-26 General Electric Company Additive machine utilizing rotational build surface
CN109070217A (zh) * 2016-04-06 2018-12-21 通用电气公司 利用旋转构建表面的增材机
TWI597153B (zh) * 2016-06-07 2017-09-01 台達電子工業股份有限公司 三維列印裝置及其成像系統
KR20190038821A (ko) * 2016-07-07 2019-04-09 테크니셰 우니베르시태트 빈 3차원 컴포넌트들의 리소그래피 기반 제너러티브 생산을 위한 방법
KR102292576B1 (ko) 2016-07-07 2021-08-23 테크니셰 우니베르시태트 빈 3차원 컴포넌트들의 리소그래피 기반 제너러티브 생산을 위한 방법
JP2019524487A (ja) * 2016-07-07 2019-09-05 テクニシュ ウニヴァアズィテート ウィーン リソグラフィに基づいて三次元構成要素を生成的に製造するための方法
US11883903B2 (en) * 2016-07-25 2024-01-30 Amplitude Method and appliance for cutting materials by multi-beam femtosecond laser
US11130199B2 (en) * 2016-08-26 2021-09-28 Multiphoton Optics Gmbh Device and method for laser-assisted processing of bodies or surfaces
US10987858B2 (en) * 2016-09-05 2021-04-27 Ford Global Technologies, Llc Three dimensional continuous fabrications
US20180065295A1 (en) * 2016-09-05 2018-03-08 Ford Global Technologies, Llc Three Dimensional Continuous Fabrications
JP2019531207A (ja) * 2016-09-28 2019-10-31 エコール サントラル ドゥ マルセイユ 多光子光重合プロセスによる３次元物体の製造方法とその関連装置
FR3056593A1 (fr) * 2016-09-28 2018-03-30 Ecole Centrale De Marseille Procede pour la realisation d’un objet tridimensionnel par un processus de photo-polymerisation multi-photonique et dispositif associe
WO2018060617A1 (fr) * 2016-09-28 2018-04-05 Ecole Centrale De Marseille Procédé pour la réalisation d'un objet tridimensionel par un processus de photo-polymérisation multi-photonique et dispositif associé
KR20200028333A (ko) * 2017-05-10 2020-03-16 엘켐 실리콘즈 프랑스 에스에이에스 3d 프린터를 사용하는 실리콘 엘라스토머 물품의 제조 방법
JP2020519501A (ja) * 2017-05-10 2020-07-02 エルケム・シリコーンズ・フランス・エスアエスＥＬＫＥＭ ＳＩＬＩＣＯＮＥＳ Ｆｒａｎｃｅ ＳＡＳ ３ｄプリンターを使用したシリコーンエラストマー物品の製造方法
KR102256427B1 (ko) 2017-05-10 2021-05-25 엘켐 실리콘즈 프랑스 에스에이에스 3d 프린터를 사용하는 실리콘 엘라스토머 물품의 제조 방법
US10882251B2 (en) 2017-05-15 2021-01-05 Holo, Inc. Viscous film three-dimensional printing systems and methods
US11161301B2 (en) 2017-05-15 2021-11-02 Holo, Inc. Viscous film three-dimensional printing systems and methods
US11400650B2 (en) 2017-06-16 2022-08-02 Holo, Inc. Methods and systems for stereolithography three-dimensional printing
WO2019002902A1 (en) * 2017-06-30 2019-01-03 Nikon Corporation METHOD FOR MANUFACTURING AN ARTICLE MADE OF A POLYMERIZED MATERIAL
US11511483B2 (en) 2017-06-30 2022-11-29 Nikon Corporation Method for manufacturing an article made of a polymerized material
JP7136815B2 (ja) 2017-06-30 2022-09-13 株式会社ニコン 重合された材料で作られる物品を製造する方法
JP2020525311A (ja) * 2017-06-30 2020-08-27 株式会社ニコン 重合された材料で作られる物品を製造する方法
JP2019022974A (ja) * 2017-07-21 2019-02-14 ツェーエル・シュッツレヒツフェアヴァルトゥングス・ゲゼルシャフト・ミト・べシュレンクテル・ハフツング ３次元の物体を付加製造するための工場
US11207735B2 (en) 2018-02-07 2021-12-28 Ford Global Technologies, Llc Apparatus and method for the additive manufacturing of three-dimensional structures
DE102018201901A1 (de) 2018-02-07 2019-08-08 Ford Global Technologies, Llc Vorrichtung und Verfahren zur additiven Fertigung dreidimensionaler Strukturen
WO2019186070A1 (fr) * 2018-03-28 2019-10-03 Ecole Centrale De Marseille Procédé pour la réalisation d'un objet tridimensionnel par un processus de photopolymérisation multi-photonique et dispositif associé
FR3079517A1 (fr) * 2018-03-28 2019-10-04 Ecole Centrale De Marseille Procede pour la realisation d’un objet tridimensionnel par un processus de photo-polymerisation multi-photonique et dispositif associe
US10875094B2 (en) * 2018-03-29 2020-12-29 Vulcanforms Inc. Additive manufacturing systems and methods
US11561087B2 (en) 2018-07-03 2023-01-24 Amo Development, Llc Water-immersed high precision laser focus spot size measurement apparatus
US10690486B2 (en) * 2018-07-03 2020-06-23 Amo Development, Llc Water-immersed high precision laser focus spot size measurement apparatus
US11156453B2 (en) 2018-07-03 2021-10-26 Amo Development, Llc Water-immersed high precision laser focus spot size measurement apparatus
US11852460B2 (en) 2018-07-03 2023-12-26 Amo Development, Llc Water-immersed high precision laser focus spot size measurement apparatus
JP2020059634A (ja) * 2018-10-12 2020-04-16 公益財団法人レーザー技術総合研究所 光学素子製造方法
JP7151033B2 (ja) 2018-10-12 2022-10-12 公益財団法人レーザー技術総合研究所 光学素子製造方法
CN109501245A (zh) * 2018-10-19 2019-03-22 上海光琢科技有限公司 基于脉冲式曝光的光固化3d打印方法
CN113039014A (zh) * 2018-10-31 2021-06-25 环球生命科学解决方案德国有限公司 聚合物膜的改进及其相关改进
US20210379829A1 (en) * 2018-11-06 2021-12-09 Ecole Polytechnique Federale De Lausanne (Epfl) Methods and apparatus for tomographic additive manufacturing with a spatially coherent light source
US11993017B2 (en) * 2018-11-06 2024-05-28 Ecole Polytechnique Federale De Lausanne (Epfl) Methods and apparatus for tomographic additive manufacturing with a spatially coherent light source
US11351735B2 (en) 2018-12-26 2022-06-07 Holo, Inc. Sensors for three-dimensional printing systems and methods
US11679547B2 (en) * 2019-03-27 2023-06-20 3D Systems, Inc. High productivity system for printing precision articles
US20200307071A1 (en) * 2019-03-27 2020-10-01 30 Systems, Inc. High Productivity System for Printing Precision Articles
US11726032B2 (en) * 2019-12-13 2023-08-15 Alcon Inc. System and method of determining issues with optical components
US20210181096A1 (en) * 2019-12-13 2021-06-17 Alcon Inc. System and method of determining issues with optical components
CN113927897A (zh) * 2021-09-18 2022-01-14 深圳摩方新材科技有限公司 一种高利用率的多材料树脂3d打印系统和方法

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