US20120327402A1 - Inspection device - Google Patents
Inspection device Download PDFInfo
- Publication number
- US20120327402A1 US20120327402A1 US12/741,110 US74111008A US2012327402A1 US 20120327402 A1 US20120327402 A1 US 20120327402A1 US 74111008 A US74111008 A US 74111008A US 2012327402 A1 US2012327402 A1 US 2012327402A1
- Authority
- US
- United States
- Prior art keywords
- support element
- inspection device
- optical sensor
- light
- materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N2021/0339—Holders for solids, powders
Definitions
- the invention relates to a device for inspecting contact-sensitive planar materials or work-pieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces.
- material e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces.
- material e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors
- every kind of material or work-piece will be denoted as material.
- the surfaces of materials will be treated in different working steps, wherein treatment shall be understood to be working steps like vapor-deposition or structuring, for example. Afterwards, the result of treatment will be inspected. Inspection can be carried out by using a camera provided with an image recognition and evaluation program.
- top surface of material can be inspected easily, as the material is positioned on an inspection table or a conveyer belt so that there is a free view onto the top surface thereof.
- the transport path is subdivided into several segments separated from each other by gaps so that the material is delivered up by the single segments.
- the total width thereof can be scanned.
- the transfer gap has to be dimensioned very small. Now and then, it is not possible to perform scanning in an unhindered way.
- the invention according to claim 1 relates to an inspection device which comprises a support element for supporting a material to be inspected.
- An oscillator is connected to the support element to cause it to vibrate, wherein the oscillation frequency and the amplitude of which are selected so as to keep the material to be inspected hovering on the top side of the support element by ultrasonic levitation.
- the top surface of the support element is matched to the geometric shape of the bottom surface of the material.
- the support element is made of a light-permeable material to allow the bottom surface of the material levitating on the support element to be scanned optically, that is, to be inspected by means of an optical sensor such as a camera, an interferometer, a Speckle measuring instrument or a line scan camera.
- an optical sensor such as a camera, an interferometer, a Speckle measuring instrument or a line scan camera.
- the support element may be expedient to make the support element of a material such as glass, light-permeable ceramic material, sapphire or oscillatory light-permeable plastic material, as defined in claims 2 to 4 .
- the optical properties of the support element are dependent on the material which it is made of, on the geometric shape thereof and on the wave length of the light used for the inspection.
- the support element is formed as a plane-parallel plate having an even surface.
- an expert skilled in the art will design the optical sensor thereof so that the optical properties of the plane-parallel plate with respect to the refraction of light are considered.
- the rod-like material having a circular cross section is to be held in a non-contact way and to be inspected, the rod-like material is located in a semi-circular groove of the support element, the radius thereof corresponding to that of the rod-like material.
- the optical properties of the support element are different from those of a plane-parallel plate and, therefore, the refraction and reflection properties of curved surfaces have to be considered by those skilled in the art, which is true for designing the optical sensor and also for designing the illuminating system required.
- the support element has to be regarded as a structural optic element which can be made by using technologies known for making and coating structural optic elements.
- a transport and inspection device is provided, on which materials are transported along a transport path.
- An inspection device according to any of the claims 1 to 4 is arranged at a certain position of the transport path.
- the support plate is dependent on the shape and size of the material to be supported and the surface to be inspected may be the total surface of the material or only a section thereof, it is not possible to give concrete geometric information as to the design and shape of the support plate. It is obvious to those skilled in the art and knowing the disclosed technical science that only that surface section of the support plate, in which the propagation of light beams is not shadowed or disturbed, can be used for the inspection.
- FIG. 1 is a schematic and perspective view of a support plate with a planar material put on it.
- FIG. 2 is a side view of the support plate shown in FIG. 1 and a camera arranged below it.
- FIG. 1 is a schematic and perspective view of a support plate 1 that is bent laterally.
- An oscillator (not shown) is connected to the leg 2 of this plate. Generation of oscillation is indicated by a double arrow.
- the planar material 3 is a silicon wafer levitating 0.1 mm above the support plate 1 .
- FIG. 2 is a side view of the structure shown in FIG. 1 .
- a camera 4 is arranged below the support plate 1 , which is used for inspecting the bottom surface of the silicon wafer levitating on the support plate.
- the support plate is made of an optical glass and is laterally illuminated from below.
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007052530A DE102007052530A1 (de) | 2007-11-01 | 2007-11-01 | Vorrichtungen zur Inspektion und Bestrahlung von flächigen Materialien |
DE102007052530.5 | 2007-11-01 | ||
PCT/DE2008/001790 WO2009056127A2 (de) | 2007-11-01 | 2008-10-31 | Inspektionsvorrichtung |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2008/001790 A-371-Of-International WO2009056127A2 (de) | 2007-11-01 | 2008-10-31 | Inspektionsvorrichtung |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/898,122 Continuation US8836933B2 (en) | 2007-11-01 | 2013-05-20 | Inspection device |
Publications (1)
Publication Number | Publication Date |
---|---|
US20120327402A1 true US20120327402A1 (en) | 2012-12-27 |
Family
ID=40530440
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/741,110 Abandoned US20120327402A1 (en) | 2007-11-01 | 2008-10-31 | Inspection device |
US13/898,122 Active US8836933B2 (en) | 2007-11-01 | 2013-05-20 | Inspection device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/898,122 Active US8836933B2 (en) | 2007-11-01 | 2013-05-20 | Inspection device |
Country Status (7)
Country | Link |
---|---|
US (2) | US20120327402A1 (ko) |
EP (1) | EP2269041B1 (ko) |
JP (1) | JP5502740B2 (ko) |
KR (1) | KR101545761B1 (ko) |
CN (1) | CN102239403A (ko) |
DE (2) | DE202007019013U1 (ko) |
WO (1) | WO2009056127A2 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10056071B2 (en) | 2013-07-22 | 2018-08-21 | Zs-Handling Gmbh | Device for inspecting workpiece surfaces and strip materials |
US10646972B2 (en) | 2013-07-22 | 2020-05-12 | Zs-Handling Gmbh | Device for treating or machining a surface |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008053684B4 (de) * | 2008-10-29 | 2010-10-14 | Graphikon Gesellschaft für Bildverarbeitung und Computergraphik mbH | Hinterleuchtungsvorrichtung für Halbleitererzeugnisse |
DE102023103520B3 (de) | 2023-02-14 | 2024-03-21 | Isra Vision Gmbh | Vorrichtung und Verfahren zur Inspektion eines plattenförmigen oder bahnförmigen Objekts |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0634679Y2 (ja) * | 1989-02-14 | 1994-09-07 | 日本アルミニウム工業株式会社 | 粉粒体サンプル検査装置 |
US5061679A (en) * | 1989-03-17 | 1991-10-29 | The University Of Arkansas | Drive system employing frictionless bearings including superconducting matter |
US5890580A (en) * | 1993-07-12 | 1999-04-06 | Kaijo Corporation | Object levitating apparatus, object transporting apparatus, and object levitating bearing along with an object levitating process and object transporting process |
JP2001027610A (ja) * | 1999-07-13 | 2001-01-30 | Mitsui Chemicals Inc | 樹脂ペレットの検査方法及び装置 |
DE10039482B4 (de) * | 2000-08-08 | 2016-03-24 | Zs-Handling Gmbh | Handler zum Transportieren von flachen, in der Halbleiterindustrie zur Anwendung kommenden Substraten |
US6802220B2 (en) * | 2000-10-26 | 2004-10-12 | Kabushiki Kaisha Toyota Jidoshokki | Apparatus for transporting levitated objects |
US6781684B1 (en) * | 2000-11-07 | 2004-08-24 | Donald L. Ekhoff | Workpiece levitation using alternating positive and negative pressure flows |
US6630996B2 (en) * | 2000-11-15 | 2003-10-07 | Real Time Metrology, Inc. | Optical method and apparatus for inspecting large area planar objects |
KR20040039372A (ko) * | 2001-09-21 | 2004-05-10 | 올림푸스 가부시키가이샤 | 결함 검사 장치 |
TWI222423B (en) * | 2001-12-27 | 2004-10-21 | Orbotech Ltd | System and methods for conveying and transporting levitated articles |
DE10260672A1 (de) * | 2002-12-23 | 2004-07-15 | Mattson Thermal Products Gmbh | Verfahren und Vorrichtung zum thermischen Behandeln von scheibenförmigen Substraten |
WO2004076320A1 (de) * | 2003-02-25 | 2004-09-10 | Technische Universität München | Vorrichtung zum berührungslosen transportieren und positionieren von bauteilen |
JP2005239392A (ja) * | 2004-02-27 | 2005-09-08 | Toyota Industries Corp | 物体浮揚搬送装置 |
JP4554397B2 (ja) * | 2005-02-23 | 2010-09-29 | 東京エレクトロン株式会社 | ステージ装置および塗布処理装置 |
US7391510B2 (en) * | 2006-01-26 | 2008-06-24 | Orbotech Ltd | System and method for inspecting patterned devices having microscopic conductors |
US7529338B2 (en) * | 2006-02-22 | 2009-05-05 | Focalspot, Inc. | Method and apparatus for inspecting circuit boards |
US8461022B2 (en) * | 2009-04-20 | 2013-06-11 | Applied Materials, Inc. | Methods and apparatus for aligning a substrate in a process chamber |
-
2007
- 2007-11-01 DE DE202007019013U patent/DE202007019013U1/de not_active Expired - Lifetime
- 2007-11-01 DE DE102007052530A patent/DE102007052530A1/de not_active Ceased
-
2008
- 2008-10-31 JP JP2010531413A patent/JP5502740B2/ja active Active
- 2008-10-31 KR KR1020107012115A patent/KR101545761B1/ko active IP Right Grant
- 2008-10-31 CN CN2008801143147A patent/CN102239403A/zh active Pending
- 2008-10-31 US US12/741,110 patent/US20120327402A1/en not_active Abandoned
- 2008-10-31 WO PCT/DE2008/001790 patent/WO2009056127A2/de active Application Filing
- 2008-10-31 EP EP08846098.5A patent/EP2269041B1/de active Active
-
2013
- 2013-05-20 US US13/898,122 patent/US8836933B2/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10056071B2 (en) | 2013-07-22 | 2018-08-21 | Zs-Handling Gmbh | Device for inspecting workpiece surfaces and strip materials |
US10646972B2 (en) | 2013-07-22 | 2020-05-12 | Zs-Handling Gmbh | Device for treating or machining a surface |
Also Published As
Publication number | Publication date |
---|---|
DE202007019013U1 (de) | 2010-04-29 |
US8836933B2 (en) | 2014-09-16 |
JP5502740B2 (ja) | 2014-05-28 |
CN102239403A (zh) | 2011-11-09 |
KR101545761B1 (ko) | 2015-08-19 |
WO2009056127A2 (de) | 2009-05-07 |
WO2009056127A3 (de) | 2010-07-29 |
DE102007052530A1 (de) | 2009-05-14 |
US20130321796A1 (en) | 2013-12-05 |
KR20100105566A (ko) | 2010-09-29 |
EP2269041A2 (de) | 2011-01-05 |
EP2269041B1 (de) | 2017-08-23 |
JP2011502257A (ja) | 2011-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ZIMMERMANN & SCHILP HANDHABUNGSTECHNIK GMBH, GERMA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SCHILP, MICHAEL;ZIMMERMANN, JOSEF;ZITZMANN, ADOLF;REEL/FRAME:025534/0125 Effective date: 20101220 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |