US20110070110A1 - Piezoelectric micro blower - Google Patents

Piezoelectric micro blower Download PDF

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Publication number
US20110070110A1
US20110070110A1 US12/953,555 US95355510A US2011070110A1 US 20110070110 A1 US20110070110 A1 US 20110070110A1 US 95355510 A US95355510 A US 95355510A US 2011070110 A1 US2011070110 A1 US 2011070110A1
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Prior art keywords
blower
wall
driver
opening
central space
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US12/953,555
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English (en)
Inventor
Atsuhiko Hirata
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Assigned to MURATA MANUFACTURING CO., LTD. reassignment MURATA MANUFACTURING CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HIRATA, ATSUHIKO
Publication of US20110070110A1 publication Critical patent/US20110070110A1/en
Abandoned legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Definitions

  • the present invention relates to a piezoelectric micro blower that is capable of transporting a compressible fluid, such as air.
  • a piezoelectric micro pump is used, for example, for a pump for transporting water for cooling a small-sized electronic device, such as a notebook computer, and a pump for transporting fuel in a fuel cell.
  • a piezoelectric micro blower can be used as a blower that replaces a fan for cooling a CPU or other heat generating electronic component or as a blower to supply oxygen that is required for electric power generation in a fuel cell.
  • a piezoelectric micro pump/piezoelectric micro blower is a device that includes a diaphragm that is deformed due to flexion when a voltage is applied to a piezoelectric element.
  • the piezoelectric micro pump/piezoelectric micro blower has the advantages of a simple structure, a low-profile body, and low power consumption.
  • check valves each of which is made of a soft material, such as rubber or resin, at an inlet port and an outlet port.
  • a piezoelectric element at a low frequency, such as tens of hertz.
  • a piezoelectric micro blower that does not include any check valve to transport a compressible fluid.
  • a flow generation device is disclosed in Japanese Examined Patent Application Publication No. S64-2793.
  • the flow generation device disclosed therein includes a substrate that includes a pressurizing chamber that is filled with a fluid, a nozzle plate that includes nozzles that are directed to the pressurizing chamber, an opening, and an electric vibrator that is attached to the nozzle plate such that the nozzles are located approximately at the center of the opening.
  • the nozzle plate and the electric vibrator are attached to the substrate.
  • An alternating current that has a frequency that is close to the resonance frequency of the electric vibrator is supplied to the electric vibrator.
  • a check valve can be omitted.
  • an air chamber into which air flows is provided in front of the nozzle plate.
  • a fluid that is ejected through the nozzles sucks ambient air into the air chamber.
  • the fluid is discharged through an exit port together with the ambient air.
  • the open area of the air chamber is relatively large, the pressure energy of the fluid that is ejected through the nozzles is dissipated into the periphery of the air chamber.
  • the structure disclosed in Japanese Examined Patent Application Publication No. S64-2793 has a disadvantage in that it is difficult to increase the flow rate through the exit port.
  • a micro blower that includes an ejection unit that sucks air from the outside and ejects the air, a cover that includes an exit port to discharge the air ejected from the ejection unit, and a base unit that is connected to the ejection unit is disclosed in a Japanese Unexamined Patent Application Publication No. 2005-113918.
  • the micro blower includes an ejection plate that includes a suction hole and an ejection hole.
  • a vibration plate that is provided with a magnetic sheet is attached to the back of the ejection plate.
  • a pressurizing chamber is provided between the ejection plate and the vibration plate.
  • a coil is used to vibrate the magnetic sheet. Ejection airflow is generated from a cavity as a result of the vibration of the magnetic sheet.
  • the airflow sucks ambient air into a cover cavity that is located in front of the ejection plate.
  • the fluid ejected is discharged through the exit port together with the ambient air. Since the open area of the cover cavity is greater than that of the pressurizing chamber, the pressure energy of the fluid that is ejected through the ejection hole is dissipated into the cover cavity. For this reason, the structure disclosed therein has the same disadvantage as that of the structure disclosed in the Japanese Examined Patent Application Publication No. S64-2793, that is, it is difficult to increase the flow rate through the exit port.
  • preferred embodiments of the present invention provide a piezoelectric micro blower which is capable of transporting a compressible fluid efficiently without using a check valve and achieving an increased flow rate.
  • a preferred embodiment of the present invention provides a piezoelectric micro blower including a blower body, a driver including a peripheral portion that is fixed to the blower body and a piezoelectric element, and a blower chamber provided between the blower body and the driver, wherein a voltage is applied to the piezoelectric element to cause the driver to vibrate due to flexion to transport a compressible fluid.
  • the piezoelectric micro blower preferably includes a first wall of the blower body, the blower chamber being provided between the driver and the first wall, a first opening that extends through the first wall, the inside of the blower chamber being in communication with the outside of the blower chamber through the first opening, a second wall that is provided at a side opposite the blower chamber with the first wall being provided between the second wall and the blower chamber, the second wall being spaced at a distance from the first wall, a second opening that extends through the second wall, a central space that is provided between the first wall and the second wall, has an open area that is greater than the first opening and the second opening but less than the blower chamber, and is in communication with the first opening and the second opening, and an inlet passage that includes an outer end that is in communication with the outside of the piezoelectric micro blower and an inner end that is connected to the central space, wherein a bottleneck portion that has a passage area that is less than that of the inlet passage is provided in the inlet passage.
  • the inlet passage is connected to the central space between the first opening and the second opening. Since the inlet passage is not directly connected to the blower chamber, the inlet passage is less susceptible to a pressure change in the blower chamber. Even though a check valve is not provided, a fluid that flows at high speed from the first opening to the second opening does not flow backward into the inlet passage. Thus, it is possible to effectively increase the flow rate.
  • the open area of the central space is preferably greater than the first opening and the second opening but less than the blower chamber. The fluid entering from the inlet passage temporarily accumulates in the central space. Entrained by the flow of a fluid that is blown out through the first opening, the fluid that has accumulated in the central space is discharged through the second opening together with the fluid blown out through the first opening.
  • a fluid is sucked from the inlet passage into the central space by utilizing the pressure energy of a fluid pressed out of the blower chamber.
  • the fluid sucked from the inlet passage and the fluid pressed out of the blower chamber flow into each other to be discharged through the second opening.
  • the inlet passage was directly connected to the central space, the pressure energy of the fluid in the central space would be dissipated into the inlet passage.
  • a bottleneck portion having a passage area that is less than that of the inlet passage is preferably provided in the inlet passage.
  • the bottleneck portion is provided in the inlet passage, the pressure energy that is present inside the central space is much less likely to be dissipated into the inlet passage. Accordingly, it is possible to efficiently direct the pressure energy toward the second opening, thereby achieving an increase in the flow rate of a fluid discharged through the second opening.
  • the first opening is provided at a portion of the first wall that faces an area of the approximate center of the driver.
  • the first opening is arranged such that it faces an area of approximate the center of the driver, which is the area at which the displacement of the driver is the greatest, it is possible to obtain the maximum flow rate.
  • the second opening provided at a portion of the second wall that faces the first opening. With this preferred structure, it is possible for a fluid ejected at high speed from the first opening to pass through the central space and be discharged through the second opening with reduced resistance.
  • the bottleneck portion is provided at a region in which the inlet passage and the central space are connected.
  • the bottleneck portion may be provided anywhere in the inlet passage.
  • the passage area of the bottleneck portion should gradually decrease in a direction of flow from the inlet passage to the central space. Since the average pressure in the central space is less than that in the inlet passage, a pressure gradient exists therebetween. Although pressure loss occurs in a flow channel because of friction between a fluid and wall surfaces, if no bottleneck portion is provided therein, vena contracta would be produced in the vicinity of the entrances to the central space because the pressure of the central space is less than the pressure decrease caused by the pressure loss. A vortex would develop in the vicinity of the vena contracta, which would result in loss. For this reason, the flow rate would decrease. To reduce such a flow loss, the bottleneck portion is preferably provided in the inlet passage.
  • the passage area of the bottleneck portion preferably gradually decreases in a direction of a flow from the inlet passage to the central space.
  • the inlet passage should include a plurality of passages extending in radial directions from the central space.
  • the outer ends of the plural passages of the inlet passage should be respectively in communication with inlet ports.
  • the open area of the central space should be arranged such that the portion of the first wall that faces the central space vibrates when the driver vibrates.
  • the vibration of the first wall acts to increase the quantity of a fluid that is caused to flow by the driver. Since the quantity thereof increases because of the displacement of the first wall, it is possible to achieve a further increase in the flow rate.
  • the portion of the first wall that faces the central space should vibrate in a sympathetic manner as the driver vibrates. That is, it is possible to cause the first wall to vibrate in a sympathetic manner in response to or by following the displacement of the driver by making the natural vibration frequency of the portion of the first wall that faces the central space close to the vibration frequency of the driver.
  • both the first wall and the driver may vibrate in the first-order mode or a higher-order mode (e.g., third-order mode).
  • a higher-order mode e.g., third-order mode
  • one of the first wall and the driver only may vibrate in the first-order mode, while the other may vibrate in a higher-order mode.
  • the driver according to a preferred embodiment of the present invention may preferably be, for example, a unimorph-type driver that includes a piezoelectric element that expands and contracts in a planar direction and that is attached to one surface of a diaphragm, e.g., a resin plate or a metal plate, for example, a bimorph-type driver that includes piezoelectric elements that expand and contract in opposite directions and that are attached respectively to both surfaces of a diaphragm, or a bimorph-type driver that includes a multilayer piezoelectric element that is deformed due to flexion by itself and that is attached to one surface of a diaphragm.
  • a unimorph-type driver that includes a piezoelectric element that expands and contracts in a planar direction and that is attached to one surface of a diaphragm, e.g., a resin plate or a metal plate
  • a bimorph-type driver that includes piezoelectric elements that expand and contract in opposite directions and that are attached
  • the entire body of the driver may preferably be defined as a multilayer piezoelectric element.
  • the shape of the piezoelectric element may be a disc, a rectangle, or a ring, for example.
  • An intermediate plate may preferably be sandwiched between the piezoelectric element and the diaphragm.
  • the structure may be modified in various ways as long as the driver vibrates in the direction of thickness due to flexion when an alternating voltage, which is either a sinusoidal-wave voltage or a rectangular-wave voltage, is applied to the piezoelectric element.
  • first-order resonance mode means a mode in which the center portion of the driver and the peripheral portion thereof are displaced in the same direction.
  • third-order resonance mode means a mode in which the center portion of the driver and the peripheral portion thereof are displaced in opposite directions.
  • a piezoelectric micro blower As described above, a piezoelectric micro blower according to various preferred embodiments of the present invention produce the following advantageous effects.
  • a driver is caused to vibrate due to bending so as to suck a fluid from a central space into a blower chamber through a first opening.
  • the fluid is pressed out of the blower chamber at high speed to be discharged through a second opening.
  • the fluid pressed out thereof entrains a fluid that is present inside the central space to be discharged together. Therefore, it is possible to obtain a discharging flow, the quantity of which is greater than the displacement volume of the driver, without providing a check valve.
  • the bottleneck portion since a bottleneck portion is provided in an inlet passage, the bottleneck portion reduces the likelihood that the energy of a pressure fluctuation in the central space will be dissipated into the inlet passage. Therefore, it is possible to efficiently direct the pressure energy toward the second opening. Consequently, it is possible to achieve a further increase in the flow rate.
  • FIG. 1 is a perspective view that illustrates an overall configuration of a piezoelectric micro blower according to a first preferred embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of the piezoelectric micro blower illustrated in FIG. 1 .
  • FIG. 3 is a sectional view taken along the line III-III of FIG. 1 .
  • FIG. 4 is a sectional view taken along the line IV-IV of FIG. 3 .
  • FIGS. 5A to 5E are diagrams that illustrate the operation of the piezoelectric micro blower illustrated in FIG. 3 .
  • FIG. 6 is a sectional view of a piezoelectric micro blower according to another example of a preferred embodiment of the present invention.
  • FIGS. 7A and 7B are diagrams that illustrate flow rate characteristics relative to an applied voltage and flow rate characteristics relative to power consumption that were obtained from samples in which the material and thickness of separators are different from each other.
  • FIG. 8 is a sectional view of a micro blower having bottleneck portions according to another example of a preferred embodiment of the present invention.
  • a piezoelectric micro blower according to a first preferred embodiment of the present invention is shown in FIGS. 1 to 4 .
  • a piezoelectric micro blower A according to the first preferred embodiment of the present invention is an air blower that is preferably used to cool electronic equipment, for example.
  • the piezoelectric micro blower A includes a top plate (second wall) 10 , a flow channel formation plate 20 , a separator (first wall) 30 , a blower frame member 40 , a driver 50 , and a bottom plate 60 , which are attached to define a layered structure in this order as viewed from the top.
  • the peripheral portion of the driver 50 is fixed by bonding between the blower frame member 40 and the bottom plate 60 .
  • the members described above, except the driver 50 , that is, members 10 , 20 , 30 , 40 , and 60 , are components that define a blower body 1 .
  • Each of the members 10 , 20 , 30 , 40 , and 60 is preferably made of a flat rigid flat material, such as a metal plate or a hard resin plate, for example.
  • the top plate 10 is preferably a quadrangular flat plate, for example.
  • a discharging port (second opening) 11 is provided as a through hole at the approximate center of the top plate 10 .
  • the flow channel formation plate 20 is preferably also a flat plate that has substantially the same outer shape as that of the top plate 10 .
  • a center hole (central space) 21 that preferably has a diameter greater than that of the discharging port 11 is provided at the approximate center of the flow channel formation plate 20 .
  • the outer ends of the inlet passages 22 are respectively in communication with inlet ports 8 , which will be explained later.
  • the inlet passages 22 are preferably in communication with the center hole 21 from four different directions.
  • Each of the inlet passages 22 preferably includes a bottleneck portion 23 .
  • the bottleneck portion 23 is defined by the tapered portion of the inlet passage 22 at which the width thereof is reduced toward the center hole 21 .
  • the bottleneck portions 23 are preferably provided at regions at which the inlet passages 22 are connected to the center hole 21 .
  • the regions at which the bottleneck portions 23 are provided are not limited thereto.
  • the bottleneck portions 23 may be provided anywhere in the inlet passages 22 .
  • the separator 30 is preferably also a flat plate that has substantially the same outer shape as that of the top plate 10 .
  • a communication hole (first opening) 31 is provided at the approximate center of the separator 30 , specifically, at a location corresponding to the position of the discharging port 11 .
  • the communication hole 31 preferably has a diameter that is substantially the same as that of the discharging port 11 , for example.
  • the diameter of the communication hole 31 may preferably be exactly the same as that of the discharging port 11 .
  • the diameter of the communication hole 31 may preferably be different from that of the discharging port 11 . However, it is required that the diameter is less than that of the center hole 21 .
  • Inlet holes 32 are provided near four corners of the separator 30 , specifically, at locations corresponding to the outer ends of the inlet passages 22 , respectively.
  • the center of the discharging port 11 , the center of the center hole 21 , and the center of the communication hole 31 are preferably aligned on the same or substantially the same axis.
  • the center of the aligned openings 11 , 21 , and 31 corresponds to the center of the driver 50 , which will be explained later.
  • the separator 30 is made of a thin metal plate so that a portion of the separator 30 that is located at an area corresponding to the center hole 21 can be vibrated in a sympathetic manner.
  • the blower frame member 40 is also preferably a flat plate that has substantially the same outer shape as that of the top plate 10 .
  • a circular cavity 41 having a large diameter is preferably provided at the approximate center of the blower frame member 40 .
  • Inlet holes 42 are preferably provided near four corners of the blower frame member 40 , specifically, at locations corresponding to the positions of the inlet holes 32 , respectively. Since the blower frame member 40 is fixed by bonding between the separator 30 and the driver 50 , the cavity 41 of the blower frame member 40 defines a blower chamber.
  • the blower chamber 41 is not limited to an enclosed space.
  • the blower chamber 41 may be a partially open space.
  • the bottom plate 60 is also preferably a flat plate that has substantially the same outer shape as that of the top plate 10 .
  • a cavity 61 is preferably provided at the approximate center of the bottom plate 60 .
  • the two-dimensional shape of the cavity 61 is substantially the same as that of the blower chamber 41 .
  • the bottom plate 60 preferably has a thickness that is greater than the sum of the thickness of a piezoelectric element 52 and the amount of displacement of a diaphragm 51 .
  • the driver 50 preferably includes the diaphragm 51 and the piezoelectric element 52 .
  • the piezoelectric element 52 preferably has a circular shape, for example, and is attached to the lower surface of the diaphragm 51 at the central area thereof.
  • resin can be used as the material of the diaphragm 51 , for example.
  • a resin plate that is made of glass epoxy resin may preferably be used as the diaphragm 51 .
  • the piezoelectric element 52 preferably has a disc shaped having a diameter less than that of the cavity 41 of the blower frame member 40 .
  • a single-plate piezoelectric ceramic including electrodes on both surfaces is preferably used as the piezoelectric element 52 , for example.
  • the piezoelectric element is attached to the back of the diaphragm 51 (i.e., one surface of the diaphragm 51 that is opposite to the other surface facing the blower chamber 41 ). That is, the driver 50 is preferably configured as a unimorph driver, for example.
  • an alternating voltage either a sinusoidal wave or a rectangular wave
  • the piezoelectric element 52 expands and contracts in a planar direction. As a result, the displacement of the entire body of the driver 50 in the direction of its thickness occurs due to bending.
  • the alternating voltage applied to the piezoelectric element 52 causes the driver 50 to become displaced either in a first-order resonance mode or in a third-order resonance mode due to bending. Since such a voltage is applied thereto, it is possible to significantly increase the displacement volume of the driver 50 as compared to a case in which a voltage having any frequency other than the above-described frequency is applied thereto. Consequently, it is possible to significantly increase the flow rate.
  • Inlet holes 51 a are preferably provided near four corners of the diaphragm 51 , specifically, at locations corresponding to the locations of the inlet holes 32 , 42 , and 62 , respectively.
  • the inlet holes 32 , 42 , 51 a , and 62 are aligned such that they define each of the inlet ports 8 .
  • One end of the inlet port 8 is defined as a downward open end.
  • the other end of the inlet port 8 is in communication with the inlet passage 22 .
  • the inlet ports 8 of the piezoelectric micro blower A are open at the bottom of the blower body 1 .
  • the discharging port 11 is open at the top of the blower body 1 .
  • a compressible fluid can be sucked into the inlet ports 8 through the open ends thereof, which are preferably provided at the reverse side of the piezoelectric micro blower A, and then can be discharged from the discharging port 11 , which is preferably provided at the front side of the piezoelectric micro blower A.
  • Such a structure is suitable for use as a blower to supply air to a fuel cell or a blower to cool a CPU using air. It is not always necessary that the open ends of the inlet ports 8 be oriented downward, and instead, the open ends may be open at the sides.
  • the driver 50 illustrated in FIG. 3 preferably includes the diaphragm 51 and the piezoelectric element 52
  • the structure of the driver 50 is not limited to the illustrated example.
  • the driver 50 may preferably further include an intermediate plate that is sandwiched between the diaphragm 51 and the piezoelectric element 52 .
  • a plate that is preferably made of metal, such as SUS, for example, can be used as the intermediate plate 53 . Since the intermediate plate 53 is sandwiched between the diaphragm 51 and the piezoelectric element 52 , a neutral plane at the time of the displacement of the driver 50 due to bending is located inside the intermediate plate 53 , which results in greater displacement efficiency. Therefore, it is possible to provide a piezoelectric micro blower that can produce a high flow rate with a low voltage.
  • FIGS. 5A to 5E are diagrams that schematically illustrate an example of the operation of the piezoelectric micro blower A. To facilitate understanding, displacement is shown in an exaggerated manner. An initial state (when no voltage is applied thereto) is shown in FIG. 5A .
  • FIGS. 5B to 5E illustrate the displacement of the driver 50 and the separator 30 at intervals of 1 ⁇ 4 of a cycle of a voltage (e.g., sinusoidal wave) applied to the piezoelectric element 52 .
  • a voltage e.g., sinusoidal wave
  • the vibration of the separator 30 occurs with a delay of a predetermined phase (in this example, approximately 90°) with respect to the vibration of the driver 50 . Because of the sympathetic vibration of the separator 30 , a large pressure wave is generated from the first opening 31 in an upward direction. Air is forced out of the central space 21 through the second opening 11 to the outside due to the pressure wave. Therefore, it is possible to increase the flow rate as compared to a case in which the separator 30 is not vibrated in a sympathetic manner. Since the air is forced out of the central space 21 , new air is sucked from the inlet passages 22 into the central space 21 , thereby generating a continuous airflow exiting from the second opening 11 .
  • a predetermined phase in this example, approximately 90°
  • FIGS. 5A to 5E an example of the displacement of the driver 50 in a first-order resonance mode is illustrated.
  • the same principle holds true for displacement in a third-order resonance mode.
  • the amount of displacement of the separator 30 is greater than that of the driver 50 .
  • the Young's modulus of the separator 30 the thickness of the separator 30 , and other factors and parameters, there is a possibility that the amount of displacement of the separator 30 is less than that of the driver 50 .
  • the phase delay of the separator 30 with respect to the driver 50 is not limited to approximately 90°.
  • the above-described structure may be modified as long as the vibration of the separator 30 occurs with a certain delay with respect to the vibration of the driver 50 , and, for this reason, an actual change in the distance between the driver 50 and the separator 30 is greater than a change that would occur if the separator 30 did not vibrate at all.
  • a flow-rate measurement was performed for a piezoelectric micro blower A having the following specifications.
  • a unimorph element that includes a diaphragm, a single-plate piezoelectric ceramic element, and an intermediate plate that is sandwiched between the diaphragm and the piezoelectric ceramic element was used as the driver.
  • the diaphragm was made of a 42Ni plate having a thickness of about 0.08 mm.
  • the intermediate plate was an SUS430 plate having a thickness of about 0.15 mm and a diameter of about 11 mm.
  • the piezoelectric ceramic element had a thickness of about 0.2 mm and a diameter of about 11 mm.
  • Blower chamber about 0.15 mm in height, about 16 mm in diameter
  • Blower body about 20 mm in length, about 20 mm in width, about 2.4 mm in height
  • Second opening about 0.8 mm in diameter
  • Inlet passages about 2.5 mm in width, about 0.5 mm in height, four passages
  • Bottleneck portions about 1 mm in width
  • a voltage having a sinusoidal waveform of 24 kHz and 20 Vp-p was applied to the piezoelectric micro blower A having the above-described specifications.
  • the flow rate was about 0.9 L/min under a condition of about 100 Pa.
  • the driver was energized in the third-order mode.
  • the driver may be energized in the first-order mode.
  • Another experiment was performed for comparison with the use of a piezoelectric micro blower having the same specifications as described above except that it does not include any bottleneck portion.
  • the flow rate was about 0.77 L/min under the condition of about 100 Pa. From the above-described results, it was discovered that the bottleneck portions contribute to an increase in the flow rate.
  • the quantity of flow is relatively large in the above-described structure in which the inlet passages include the bottleneck portions.
  • the inlet passages 22 include the bottleneck portions 23 , the pressure energy that is present inside the central space 21 is less likely to be dissipated into the inlet passages 22 . Accordingly, it is possible to efficiently direct the pressure energy that is present inside the central space 21 toward the second opening 11 , thereby achieving an increase in the flow rate.
  • the bottleneck portions 23 are preferably provided in the vicinity of entrances to the central space 21 , the conformity of the shape of the flow channel to the shape of the flow increases. With the increased conformity, it is possible to prevent a vortex from developing and thus to reduce flow loss. Consequently, the flow rate of the blower is increased.
  • the separator 30 is preferably attached to the flow channel formation plate 20 .
  • the central area of the separator 30 that corresponds to the central space 21 is configured as a regional portion that can vibrate. As illustrated in FIGS. 5A to 5E , the vibration of the central area of the separator 30 has a strong affect on the flow rate.
  • the size of the central space 21 (open area) is designed to have an appropriate diameter that makes it easier for the central area of the separator 30 to vibrate. However, it is impossible to restrain the separator 30 at regions at which the inlet passages 22 are connected to the central space 21 .
  • the flow channel formation plate 20 including the bottleneck portions 23 since the front end of each of the bottleneck portions 23 has a tapered shape, the area at which the sidewalls of the central space 21 exist is relatively large. That is, as compared to a case in which no bottleneck portions are provided, it is possible to increase the area in which the separator 30 is supported.
  • the shape of the area in which the separator 30 is supported is preferably substantially circular. With the bottleneck portions 23 , the flow channel formation plate 20 can support the central area of separator 30 more securely, which contributes to an increase in the flow rate.
  • Table 1 shows the flow rate obtained when the drive frequency of the driver 50 and the diameter of the central space 21 are changed.
  • the unit of the flow rate is L/min.
  • a diaphragm (42Ni plate) having a thickness of about 0.08 mm was used for a drive frequency of about 24.4 kHz.
  • a diaphragm (42Ni plate) having a thickness of about 0.1 mm was used for a drive frequency of about 25.5 kHz.
  • the flow rate increases as the frequency increases when the diameter of the central space 21 is about 5 mm, whereas the flow rate increases as the frequency decreases when the diameter of the central space 21 is about 6 mm.
  • the natural vibration frequency of the driver 50 differs depending on the material of the diaphragm 51 and the thickness thereof.
  • FIGS. 7A and 7B show the results of an experiment conducted on a piezoelectric micro blower B having a structure in which the driver 50 includes the diaphragm 51 , the piezoelectric element 52 , and the intermediate plate 53 that is sandwiched between the diaphragm 51 and the piezoelectric element 52 .
  • Table 2 the experiment was performed to compare the flow rate obtained when the material of the separator 30 and the thickness thereof are changed.
  • a plate that is made of phosphor bronze with a thickness of about 0.05 mm was used as a separator in a first sample.
  • a plate that is made of SUS304 with a thickness of about 0.1 mm was used as a separator in a second sample.
  • the specifications of the piezoelectric micro blower B are the same or substantially the same as those of the piezoelectric micro blower A.
  • the specifications of the first sample are the same or substantially the same as those of the second sample except for the separator.
  • the drive frequency of about 24.4 kHz was used for both the first sample and the second sample.
  • a plate that is made of SUS304 and has a certain thickness is one and a half times as rigid as a plate that is made of phosphor bronze and has the same thickness. Since the separator of the second sample is twice as thick as the separator of the first sample, the rigidity of the separator of the second sample is far greater than the rigidity of the separator of the first sample. In other words, a portion of the separator of the first sample that faces the central space vibrates, whereas a portion of the separator of the second sample that faces the central space does not significantly vibrate. The purpose of the experiment is to measure the influence of the vibration of a portion of the separator that faces the central space on the flow rate.
  • the flow rate of the second sample obtained when a voltage of about 20 Vp-p was applied thereto was approximately about 0.42 L/min.
  • the flow rate of the first sample obtained when the same voltage of about 20 Vp-p was applied thereto was approximately about 0.78 L/min. Therefore, the flow rate of the first sample is roughly twice that of the second sample. That is, the vibration of the portion of the separator significantly contributes to an increase in the flow rate.
  • FIG. 7B shows the results of a comparison of the flow rate based on power consumption. Although power consumption changes due to a change in impedance, the first sample is advantageous when compared based on the same power consumption.
  • FIG. 8 illustrates the shape of bottleneck portions according to a second preferred embodiment of the present invention. Since the structure of the flow channel formation plate 20 according to the second preferred embodiment of the present invention is substantially the same as that of the first preferred embodiment of the invention (refer to FIG. 4 ) except for the shape of bottleneck portions, the same reference numerals are used for the components described earlier. The components described earlier are not explained below.
  • bottleneck portions 24 that are not tapered are provided at regions at which the inlet passages 22 are connected to the central space 21 .
  • the bottleneck portions 24 prevent the energy of a pressure fluctuation in the central space 21 from being dissipated into the inlet passages 22 . Thus, it is possible to achieve an increase in the flow rate.
  • a portion of a separator (first wall) that corresponds to a central space preferably vibrates in a sympathetic manner as a driver vibrates.
  • the separator it is not always necessary for the separator to vibrate in a sympathetic manner.
  • Any alternative structure in which the vibration of a driver excites a separator, and, in addition, the separator vibrates in response to or by following the vibration of the driver makes it possible to achieve an increase in the flow rate.
  • the shape of an inlet passage is not limited to a linear passage extending in a radial direction as shown in FIG. 4 . That is, the shape of the inlet passage may be arbitrarily selected.
  • the number of inlet passages may also be arbitrarily selected depending on the required flow rate and the required level of noise.
  • a plurality of plate members are preferably attached in layers to define a blower body.
  • the structure of the blower body is not limited thereto.
  • the top plate and the flow channel formation plate 20 may be integrally molded as a single component that is made of resin or metal. The same applies to, for example, the separator 30 and the blower frame member 40 , or the flow channel formation plate 20 and the separator 30 .

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
US12/953,555 2008-05-30 2010-11-24 Piezoelectric micro blower Abandoned US20110070110A1 (en)

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JP2008142250 2008-05-30
JP2008-142250 2008-05-30
PCT/JP2009/058968 WO2009145064A1 (ja) 2008-05-30 2009-05-14 圧電マイクロブロア

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EP (1) EP2306019A4 (ja)
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JP5287854B2 (ja) 2013-09-11
EP2306019A1 (en) 2011-04-06
EP2306019A4 (en) 2014-10-15
JPWO2009145064A1 (ja) 2011-10-06

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