EP2306019A4 - PIEZOELECTRIC MICRO FAN - Google Patents

PIEZOELECTRIC MICRO FAN

Info

Publication number
EP2306019A4
EP2306019A4 EP09754572.7A EP09754572A EP2306019A4 EP 2306019 A4 EP2306019 A4 EP 2306019A4 EP 09754572 A EP09754572 A EP 09754572A EP 2306019 A4 EP2306019 A4 EP 2306019A4
Authority
EP
European Patent Office
Prior art keywords
piezoelectric microblower
microblower
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09754572.7A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2306019A1 (en
Inventor
Atsuhiko Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of EP2306019A1 publication Critical patent/EP2306019A1/en
Publication of EP2306019A4 publication Critical patent/EP2306019A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP09754572.7A 2008-05-30 2009-05-14 PIEZOELECTRIC MICRO FAN Withdrawn EP2306019A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008142250 2008-05-30
PCT/JP2009/058968 WO2009145064A1 (ja) 2008-05-30 2009-05-14 圧電マイクロブロア

Publications (2)

Publication Number Publication Date
EP2306019A1 EP2306019A1 (en) 2011-04-06
EP2306019A4 true EP2306019A4 (en) 2014-10-15

Family

ID=41376945

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09754572.7A Withdrawn EP2306019A4 (en) 2008-05-30 2009-05-14 PIEZOELECTRIC MICRO FAN

Country Status (4)

Country Link
US (1) US20110070110A1 (ja)
EP (1) EP2306019A4 (ja)
JP (1) JP5287854B2 (ja)
WO (1) WO2009145064A1 (ja)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8485793B1 (en) * 2007-09-14 2013-07-16 Aprolase Development Co., Llc Chip scale vacuum pump
JP5533823B2 (ja) * 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
JP5528404B2 (ja) * 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
EP3346131B1 (en) * 2011-10-11 2022-04-27 Murata Manufacturing Co., Ltd. Fluid control apparatus and method for adjusting fluid control apparatus
JP5652551B2 (ja) * 2012-02-21 2015-01-14 株式会社村田製作所 流体制御装置
JP5928160B2 (ja) 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 圧電ポンプおよびこれを備えた血圧情報測定装置
CN103016317B (zh) * 2012-12-13 2015-07-08 江苏大学 一种基于附壁效应的三腔无阀压电泵
JP6119847B2 (ja) * 2013-04-24 2017-04-26 株式会社村田製作所 カフ圧制御装置
FR3012443B1 (fr) 2013-10-24 2021-04-30 Univ Sciences Technologies Lille Procede pour generer un ecoulement de fluide
KR20150085612A (ko) * 2014-01-16 2015-07-24 삼성전기주식회사 마이크로 펌프
JP6061054B2 (ja) * 2014-03-07 2017-01-18 株式会社村田製作所 ブロア
JP6052475B2 (ja) 2014-07-16 2016-12-27 株式会社村田製作所 流体制御装置
JP6536669B2 (ja) * 2015-03-03 2019-07-03 株式会社村田製作所 吸引装置
TWI557321B (zh) * 2015-06-25 2016-11-11 科際精密股份有限公司 壓電泵及其操作方法
EP3203077B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10378529B2 (en) 2016-01-29 2019-08-13 Microjet Technology Co., Ltd. Miniature pneumatic device
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
US10385838B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Miniature fluid control device
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203078B1 (en) 2016-01-29 2021-05-26 Microjet Technology Co., Ltd Miniature pneumatic device
EP3203076B1 (en) 2016-01-29 2021-05-12 Microjet Technology Co., Ltd Miniature fluid control device
CN107795465B (zh) * 2016-09-05 2020-10-30 研能科技股份有限公司 微型流体控制装置
TWI661127B (zh) 2016-09-05 2019-06-01 研能科技股份有限公司 微型流體控制裝置
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
TWI638097B (zh) * 2017-02-20 2018-10-11 研能科技股份有限公司 微型氣體傳輸裝置
TWI652652B (zh) * 2017-08-21 2019-03-01 研能科技股份有限公司 具致動傳感模組之裝置
TWI698584B (zh) * 2017-08-31 2020-07-11 研能科技股份有限公司 氣體輸送裝置
TWI683059B (zh) * 2017-08-31 2020-01-21 研能科技股份有限公司 氣體輸送裝置
TWI663332B (zh) * 2017-08-31 2019-06-21 研能科技股份有限公司 氣體輸送裝置
WO2019159501A1 (ja) * 2018-02-16 2019-08-22 株式会社村田製作所 流体制御装置
TWI695934B (zh) * 2019-03-29 2020-06-11 研能科技股份有限公司 微機電泵浦
JP2022553270A (ja) * 2019-10-18 2022-12-22 ヒールテル・（グアンジョウ）・メディカル・テクノロジー・カンパニー・リミテッド 流体を注入するためのシステム及び方法
EP4006367B1 (en) 2020-11-27 2024-05-22 European Space Agency Gas bearing system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置
US20040033146A1 (en) * 2002-08-15 2004-02-19 Xunhu Dai Micropumps with passive check valves
EP1523038A2 (en) * 2003-10-07 2005-04-13 Samsung Electronics Co., Ltd. Valveless micro air delivery device
WO2007055136A1 (ja) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. ユニモルフ振動板を用いたポンプ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5541584U (ja) * 1978-09-13 1980-03-17
US6227809B1 (en) * 1995-03-09 2001-05-08 University Of Washington Method for making micropumps
WO2008069266A1 (ja) * 2006-12-09 2008-06-12 Murata Manufacturing Co., Ltd. 圧電マイクロブロア

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置
US20040033146A1 (en) * 2002-08-15 2004-02-19 Xunhu Dai Micropumps with passive check valves
EP1523038A2 (en) * 2003-10-07 2005-04-13 Samsung Electronics Co., Ltd. Valveless micro air delivery device
JP2005113918A (ja) * 2003-10-07 2005-04-28 Samsung Electronics Co Ltd バルブレスマイクロ空気供給装置
WO2007055136A1 (ja) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. ユニモルフ振動板を用いたポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2009145064A1 *

Also Published As

Publication number Publication date
WO2009145064A1 (ja) 2009-12-03
US20110070110A1 (en) 2011-03-24
JP5287854B2 (ja) 2013-09-11
EP2306019A1 (en) 2011-04-06
JPWO2009145064A1 (ja) 2011-10-06

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Legal Events

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Effective date: 20140916

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Ipc: F04B 45/047 20060101AFI20140910BHEP

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