US20100090573A1 - Door for vacuum chamber - Google Patents

Door for vacuum chamber Download PDF

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Publication number
US20100090573A1
US20100090573A1 US12/526,880 US52688008A US2010090573A1 US 20100090573 A1 US20100090573 A1 US 20100090573A1 US 52688008 A US52688008 A US 52688008A US 2010090573 A1 US2010090573 A1 US 2010090573A1
Authority
US
United States
Prior art keywords
door
guide plate
chamber
grooves
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/526,880
Other languages
English (en)
Inventor
Jung Suek Ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Human Meditek Co Ltd
Original Assignee
Human Meditek Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Human Meditek Co Ltd filed Critical Human Meditek Co Ltd
Assigned to HUMAN MEDITEK CO., LTD. reassignment HUMAN MEDITEK CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KO, JUNG SUEK
Publication of US20100090573A1 publication Critical patent/US20100090573A1/en
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/166—Sealing means

Definitions

  • the present invention relates, in general, to a door for a vacuum chamber and, more particularly, to a door for a vacuum chamber, which is used to put an article into the chamber, and is constructed to prevent the door from being deformed by a bending load when a vacuum is created in the vacuum chamber.
  • the process of manufacturing a wafer or substrate includes unit steps, such as a dry etching step, a physical or chemical vapor deposition step, a photoresist washing step, etc. In these unit steps, plasma is widely used.
  • the method of using plasma is used to disinfect or sterilize articles on which the presence of germs is unacceptable, such as medical instruments.
  • a plasma sterilizer 10 which sterilizes an article, such as a medical instrument, using hydrogen peroxide, and decomposes the used hydrogen peroxide into nontoxic matter using plasma, prior to discharging the nontoxic matter outside the sterilizer.
  • a plasma sterilizer 10 is provided with a vacuum chamber 20 , in which a vacuum is formed.
  • a door 30 is mounted to one surface of the chamber 20 , and is used for insertion of an article to be sterilized, such as a medical instrument, into the chamber.
  • the door 30 is mounted to the open surface of the chamber so as to open or close it.
  • the door 30 rotates around the hinge assembly 50 , thus opening the opening of the base plate 40 and the opening which is provided on one surface of the chamber 20 .
  • the article to be sterilized such as the medical instrument, is put into the chamber through the openings. Subsequently, the door 30 rotates around the hinge assembly 50 again, thus closing the opening of the base plate 40 and the opening of the chamber 20 .
  • a vacuum in order to sterilize the article using the plasma generated in the chamber 20 , a vacuum must be created in the chamber 20 .
  • the vacuum is created in the chamber 20 , the door 30 is pulled towards the chamber 20 by external atmospheric pressure.
  • the hinge assembly 50 of the door 30 may be deformed due to the load. Thereby, the entire door 30 may be distorted.
  • the hinge assembly 50 of the door 30 is mounted to only one end of the door 30 .
  • stress concentrates on the hinge assembly 50 Hence, when the hinge assembly 50 is deformed due to a load, and thus the door 30 is distorted, the door 30 cannot perfectly close the chamber 20 . As a result, it is difficult to create a vacuum in the chamber 20 .
  • an object of the present invention is to provide a door for a vacuum chamber, which is constructed to prevent the door, for opening or closing an opening formed in one surface of the chamber, from being deformed by a bending load generated during the evacuation of the chamber, thus reliably creating a vacuum in the chamber, and reducing the cost of maintenance of the door.
  • the present invention provides a door for a vacuum chamber, including a chamber having in one surface thereof an opening; a door rotated to open or close the opening of the chamber; and a guide plate which is fastened to an outer surface of the door in such a way as to be spaced apart from the door by a predetermined interval, and is rotatably coupled at one end thereof to a hinge assembly.
  • the door includes fastening holes having a predetermined depth at regular intervals, and the guide plate includes through holes corresponding to the fastening holes, so that a fastening member passes through a corresponding through hole and is secured at an end thereof to the corresponding fastening hole, thus fastening the guide plate to the door.
  • first grooves are formed at regular intervals in a surface of the door contacting the guide plate
  • second grooves are formed in the guide plate to correspond to the first grooves in the door, so that, when the guide plate contacts the door, a space having a predetermined size is defined between the first and second grooves.
  • Each of the first grooves in the door is formed around a corresponding fastening hole to have a predetermined depth
  • each of the second grooves in the guide plate is formed around a corresponding through hole to have a predetermined depth.
  • an elastic member is installed in the space, is secured at a first end thereof to an inner surface of each of the first grooves in the door, and is secured at a second end thereof to an inner surface of each of the second grooves in the guide plate.
  • the elastic member comprises a coil spring.
  • the door further includes a guide bushing having a hole through which the fastening member passes.
  • the guide bushing includes a first part which passes through a corresponding through hole in the guide plate and slides a predetermined interval in the space, and a second part which has a diameter larger than the through hole in the guide plate and is stopped by an outer surface of the guide plate.
  • a predetermined gap is defined between the second part of the guide bushing and the outer surface of the guide plate.
  • a block is fastened to the guide plate, increases strength of the guide plate, and has a hole for guiding the guide bushing.
  • a base plate having in a central portion thereof an opening, is provided on a front of the opening of the chamber, and the door is rotated to open or close the opening of the base plate and the opening of the chamber.
  • the hinge assembly is mounted to an end of the base plate, and an end of the guide plate is rotatably coupled to the hinge assembly.
  • the present invention provides a door for a vacuum chamber, which rotates around a hinge assembly provided on one side of the door, and which is constructed so that guide plates are provided on the upper and lower portions of the door in such a way as to be spaced apart from the door by a predetermined interval, and each of the guide plates is rotatably coupled at one end thereof to the fixed hinge assembly, and an elastic member is interposed between the door and the corresponding guide plate, thus allowing the guide plate to remain in a fixed position, even if the door is pulled towards the chamber when the vacuum chamber is evacuated, therefore preventing stress from being concentrated on a part of the door coupled to the hinge assembly, and preventing the hinge assembly from being deformed.
  • FIG. 1 is a perspective view showing a conventional plasma sterilizer, and showing the coupling of a vacuum chamber with a door;
  • FIG. 2 is a perspective view showing the coupling of a vacuum chamber with a door, according to the present invention
  • FIG. 3 is a sectional view taken along line A-A of FIG. 2 ;
  • FIG. 4 is an exploded sectional view of FIG. 3 .
  • FIG. 2 is a perspective view showing the coupling structure of a door for a vacuum chamber, according to the present invention
  • FIG. 3 is a sectional view taken along line A-A of FIG. 2
  • FIG. 4 is an exploded sectional view of FIG. 3 .
  • a plasma sterilizer is provided with a chamber 20 which creates a vacuum so as generate plasma, and a door 30 which is mounted to one surface of the chamber 20 and is used to put articles to be sterilized, for example, medical instruments, into the chamber 20 .
  • the chamber 20 is hermetically sealed, except for an opening which is provided in one surface of the chamber.
  • the door 30 is mounted so as to open or close the opening.
  • a base plate 40 which is open at a central portion thereof, is mounted to the opening of the chamber 20 .
  • the door 30 is provided on the front of the base plate 40 so as to open or close the opening which is formed in the central portion of the base plate 40 .
  • the base plate 40 is part of a frame for supporting the chamber 20 , and is secured to the chamber.
  • Guide plates 70 are rotatably mounted to one surface of the base plate 40 , and are fastened to the door 30 .
  • hinge assemblies 60 are provided on one end of the base plate 40 .
  • Each guide plate 70 is rotatably coupled at one end thereof to the corresponding hinge assembly 60 .
  • the guide plate 70 is fastened to the door via a plurality of fastening units 80 .
  • grooves 32 are provided at regular intervals in the outer surface of the door 30 which contacts each guide plate 70 .
  • a fastening hole 34 is formed in the center of each groove 32 and is deeper than the groove.
  • grooves 72 are provided on the inner surface of each guide plate 70 which contacts the outer surface of the door 30 , and correspond to the grooves 32 in the door 30 .
  • each guide plate 70 contacts the door 30 , the grooves 32 and 72 overlap each other, thus defining a space 92 having a predetermined size.
  • a through hole 74 is formed in the center of each groove 72 in each guide plate 70 , so that a guide bushing 84 and a fastening member 82 , which will be described below, pass through the through hole.
  • the guide bushing 84 has a “T”-shaped section, and includes a first part 84 b and a second part 84 c.
  • the first part passes through the corresponding through hole 74 in each guide plate 70 , and slides a predetermined interval in the space 92 .
  • the second part has a larger diameter than the through hole 74 in the guide plate 70 , so that the second part is stopped by the outer surface of the guide plate 70 .
  • a hole 84 a is formed in the guide bushing 84 so that the fastening member 82 passes through the guide bushing.
  • the end of the fastening member 82 is fastened to the corresponding fastening hole 34 of the door 30 .
  • the second part 84 c of the guide bushing 84 is spaced apart from the outer surface of the guide plate 70 by a predetermined interval, thus defining a gap G between the outer surface of the guide plate and the second part. The reason why this gap is formed will be described below.
  • an elastic member 90 is installed in each space 92 , which is defined between the grooves 32 and 72 in the door 30 and each guide plate 70 , and surrounds the outer surface of the first part 84 b of the guide bushing 84 .
  • One end of the elastic member 90 is supported by the inner surface of each groove 32 in the door 30 , while the other end of the elastic member is supported by the inner surface of the corresponding groove 72 in each guide plate 70 .
  • any member may be used as the elastic member 90 , as long as the member has predetermined elasticity. It is preferable that a coil spring be used as the elastic member.
  • blocks 86 are mounted to each guide plate 70 via bolts. Each block surrounds the corresponding guide bushing 84 so as to guide the sliding motion of the guide bushing, and increases the strength of the guide plate 70 .
  • the door 30 is opened to put an article to be sterilized into the chamber 20 .
  • the door 30 is closed again so as to seal the chamber 20 .
  • a vacuum is created in the chamber 20 , thus generating plasma.
  • the fastening members 82 are fastened to the corresponding fastening holes 34 , which are formed in the upper and lower edges of the door 30 . As the door 30 is pulled, the fastening members 82 move inwards.
  • each elastic member 90 which is installed in the space 92 defined between each of the grooves 32 in the door 30 and the corresponding groove 72 in each guide plate 70 , is extended as the door 30 is pulled.
  • each guide bushing 84 through which the fastening member 82 passes, is also pulled inwards by a predetermined interval.
  • the maximum interval by which each guide bushing 84 is pulled is equal to the gap G which is defined between the guide plate 70 and the second part 84 c of the guide bushing 84 .
  • each guide plate 70 remains in a fixed position.
  • each hinge assembly 60 which is coupled to the corresponding guide plate 70 and the base plate 40 .
  • each fastening member 82 is pushed outwards along with the corresponding guide bushing 84 .
  • the second part 84 c of each guide bushing 84 is spaced apart from the corresponding guide plate 70 by a predetermined interval.
  • the present invention may be applied to any vacuum chamber constructed such that a door is mounted to one surface of the vacuum chamber so as to open or close it.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Drying Of Semiconductors (AREA)
US12/526,880 2007-02-12 2008-02-12 Door for vacuum chamber Abandoned US20100090573A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2007-0014230 2007-02-12
KR1020070014230A KR100892781B1 (ko) 2007-02-12 2007-02-12 진공챔버용 도어
PCT/KR2008/000818 WO2008100056A1 (fr) 2007-02-12 2008-02-12 Porte pour chambre à vide

Publications (1)

Publication Number Publication Date
US20100090573A1 true US20100090573A1 (en) 2010-04-15

Family

ID=39690245

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/526,880 Abandoned US20100090573A1 (en) 2007-02-12 2008-02-12 Door for vacuum chamber

Country Status (8)

Country Link
US (1) US20100090573A1 (fr)
EP (1) EP2116113B1 (fr)
JP (1) JP2010518291A (fr)
KR (1) KR100892781B1 (fr)
CN (1) CN101642002A (fr)
BR (1) BRPI0807488A2 (fr)
ES (1) ES2466670T3 (fr)
WO (1) WO2008100056A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100238420A1 (en) * 2009-03-18 2010-09-23 Nuflare Technology, Inc. Lithography apparatus and lithography method
JP2020120012A (ja) * 2019-01-24 2020-08-06 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置
US11532465B2 (en) * 2018-02-21 2022-12-20 Christof-Herbert Diener Low-pressure plasma chamber, low-pressure plasma installation and method for producing a low-pressure plasma chamber
WO2023245883A1 (fr) * 2022-06-23 2023-12-28 拉普拉斯(无锡)半导体科技有限公司 Cavité de vide

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101276619B1 (ko) * 2012-11-20 2013-06-19 주식회사 로우템 센서감응식 개방구조를 갖는 멸균기 도어
DE102014213942B4 (de) 2014-07-17 2016-01-28 Christof-Herbert Diener Vakuumanlage, insbesondere Plasmaanlage, mit einem rundum geschlossenen Kammerstrangpressprofil
CN105405736B (zh) * 2015-12-01 2017-09-29 珠海宝丰堂电子科技有限公司 真空腔室装置
CN114809888B (zh) * 2022-04-06 2023-08-29 常州雷宁电磁屏蔽设备有限公司 等离子电磁屏蔽门

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2556354A (en) * 1948-03-23 1951-06-12 Cardox Corp Carbon dioxide tank cover for railway refrigerator cars
EP0019293A1 (fr) * 1979-05-22 1980-11-26 Planatolwerk Willy Hesselmann Chemische und Maschinenfabrik für Klebetechnik Récipient sous pression avec soupape de sécurité pour produits collants
US4922660A (en) * 1988-11-16 1990-05-08 Crown Forest Industries Limited Plywood veneer dryer door
US5007183A (en) * 1989-09-20 1991-04-16 Nippon Scientific Co., Ltd. Vacuum drier apparatus
US6932354B2 (en) * 2002-01-31 2005-08-23 Dupont Dow Elastomers, Llc Valve seal assembly

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4044918A (en) * 1975-06-16 1977-08-30 Huntington Mechanical Laboratories, Inc. High temperature, quick access door for high vacuum chambers
SU1093854A1 (ru) * 1983-01-11 1984-05-23 Специальное Проектно-Конструкторское И Технологическое Бюро Электротермического Оборудования Саратовского Завода Электротермического Оборудования Вакуумный шиберный затвор
JPH0369757A (ja) * 1989-08-07 1991-03-26 Mitsuo Kumabe アンテナ取付部付屋根裏換気装置
US5313738A (en) * 1991-01-22 1994-05-24 Mdt Corporation Closure for doors used with small and medium sized pressure vessels
JPH09199293A (ja) * 1996-01-18 1997-07-31 Nikon Corp 高周波を用いる処理装置および密封容器
US6050446A (en) * 1997-07-11 2000-04-18 Applied Materials, Inc. Pivoting lid assembly for a chamber
JP2002266546A (ja) * 2001-03-07 2002-09-18 Meiki Co Ltd 真空チャンバの扉
KR20060112012A (ko) * 2005-04-26 2006-10-31 삼성전자주식회사 반도체 제조설비의 도어개폐장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2556354A (en) * 1948-03-23 1951-06-12 Cardox Corp Carbon dioxide tank cover for railway refrigerator cars
EP0019293A1 (fr) * 1979-05-22 1980-11-26 Planatolwerk Willy Hesselmann Chemische und Maschinenfabrik für Klebetechnik Récipient sous pression avec soupape de sécurité pour produits collants
US4922660A (en) * 1988-11-16 1990-05-08 Crown Forest Industries Limited Plywood veneer dryer door
US5007183A (en) * 1989-09-20 1991-04-16 Nippon Scientific Co., Ltd. Vacuum drier apparatus
US6932354B2 (en) * 2002-01-31 2005-08-23 Dupont Dow Elastomers, Llc Valve seal assembly

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Abstract for Nawrat, EP0019293 A1, 11-1980. *
Translation for Nawrat, EP0019293 A1, 11-1980. *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100238420A1 (en) * 2009-03-18 2010-09-23 Nuflare Technology, Inc. Lithography apparatus and lithography method
US8653477B2 (en) * 2009-03-18 2014-02-18 Nuflare Technology, Inc. Lithography apparatus and lithography method
US11532465B2 (en) * 2018-02-21 2022-12-20 Christof-Herbert Diener Low-pressure plasma chamber, low-pressure plasma installation and method for producing a low-pressure plasma chamber
JP2020120012A (ja) * 2019-01-24 2020-08-06 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置
JP7063281B2 (ja) 2019-01-24 2022-05-09 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置
WO2023245883A1 (fr) * 2022-06-23 2023-12-28 拉普拉斯(无锡)半导体科技有限公司 Cavité de vide

Also Published As

Publication number Publication date
WO2008100056A1 (fr) 2008-08-21
EP2116113A1 (fr) 2009-11-11
KR20080075279A (ko) 2008-08-18
EP2116113A4 (fr) 2011-11-30
BRPI0807488A2 (pt) 2014-05-13
CN101642002A (zh) 2010-02-03
JP2010518291A (ja) 2010-05-27
ES2466670T3 (es) 2014-06-10
KR100892781B1 (ko) 2009-04-15
EP2116113B1 (fr) 2014-03-26

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Legal Events

Date Code Title Description
AS Assignment

Owner name: HUMAN MEDITEK CO., LTD.,KOREA, REPUBLIC OF

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:KO, JUNG SUEK;REEL/FRAME:023394/0901

Effective date: 20091006

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION