US20080278828A1 - Optical Element - Google Patents
Optical Element Download PDFInfo
- Publication number
- US20080278828A1 US20080278828A1 US11/994,482 US99448206A US2008278828A1 US 20080278828 A1 US20080278828 A1 US 20080278828A1 US 99448206 A US99448206 A US 99448206A US 2008278828 A1 US2008278828 A1 US 2008278828A1
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- US
- United States
- Prior art keywords
- optical element
- mount component
- friction
- dissipates
- mount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/001—Counterbalanced structures, e.g. surgical microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/01—Vibration-dampers; Shock-absorbers using friction between loose particles, e.g. sand
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
- F16F7/104—Vibration-dampers; Shock-absorbers using inertia effect the inertia member being resiliently mounted
- F16F7/108—Vibration-dampers; Shock-absorbers using inertia effect the inertia member being resiliently mounted on plastics springs
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
- G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
Definitions
- the invention relates to an optical element, a mount component, a mount for an optical element, a projection objective and a method for producing microstructures.
- EP 1 275 995 A2 describes an optical system having a number of optical elements with a device for detecting the position of the optical element, which are fitted on a measuring structure that is mounted on a base plate via a spring and a damper.
- DE 100 41 993 C1 discloses a damper having a damper mass, an elastomeric spring, a base and a fastening bolt that is intended to be used for absorbing vibrations, in particular in the case of motor vehicles.
- vibration dampers are certainly suitable for the very large vibration amplitudes such as occur in motor vehicles.
- these vibration dampers cannot be used with optical elements.
- most known vibration dampers have a preferred direction in which they damp particularly well the vibrations occurring, and are, moreover, tuned to specific frequencies.
- the object is further achieved by a mount component for an optical element having at least one additional element fitted thereon which dissipates the vibrational energy of the mount component by friction.
- the element according to the invention transforms the vibrational energy by friction into heat.
- the term “friction” comprises all effects that are capable of dissipating energy, that is to say, in particular, also by Coulomb friction, internal friction and/or by effects caused by the viscosity or viscoelasticity of the participating materials.
- the element which dissipates the vibrational energy of the optical element or of the mount component by friction does not itself form a vibrational system, it is effective for a very wide frequency spectrum, it being possible for this effectiveness of the vibrational damping to be improved by increasing the mass of the element which dissipates the vibrational energy of the mount component by friction. By contrast, it is possible to reduce the mass of the element which dissipates the vibrational energy of the mount component by friction when the aim is to damp vibrations of high frequency.
- a particular advantage of the element according to the invention consists in the fact that it requires only a very small additional installation space, or no installation space at all in specific embodiments, and can therefore be used without a problem for the most varied applications.
- the element which dissipates the vibrational energy of the optical element or of the mount component by friction to be very easily adapted to the respective geometrical conditions of the optical element or of the mount.
- the element according to the invention which dissipates the vibrational energy of the optical element or of the mount component by friction results in a passive vibration damping that therefore requires only a very slight outlay on design.
- the element which dissipates the vibrational energy of the optical element or of the mount component by friction is fitted directly on the optical element or on the mount component and not on a holding structure or the like, and so the vibrations are influenced directly.
- the element is not arranged between two components vibrating relative to one another, and therefore does not produce direct coupling.
- the element according to the invention which dissipates vibrations of the optical element or of the mount component can advantageously be used both with manipulable and with non-manipulable optical elements, it being fitted either on the optical element itself or on a mount component of a mount holding the optical element. There is thereby no change at all in the position of the optical element or of the mount component because of the nature of the vibration damping.
- the element which dissipates the vibrational energy of the optical element or of the mount component by friction has an additional mass. Such an additional mass substantially increases the possible damping of the vibrations.
- a soft elastic adhesive such as, for example, a polyurethane elastomer adhesive
- a polyurethane elastomer adhesive can be very well suited to fitting the additional mass on the optical element or the mount. Energy is dissipated inside the adhesive upon the occurrence of vibrations by the internal friction inside the adhesive as well as by viscous effects and effects of entropy elasticity.
- the fibrous medium can be, for example, a fleece, a felt or a loose tangle of fibers, or else a fiber-modified elastomer, for example.
- the additional mass is designed as a ring connected to the optical element or to the mount component.
- the ring is designed as a ring connected to the optical element or to the mount component.
- the element which dissipates the vibrational energy of the mount component by friction is fitted on one or more of those points of the optical element or of the mount component at which the amplitude of the vibration is highest, this results in a particularly good damping of the vibrations of the optical element or of the mount component.
- the element which dissipates the vibrational energy of the optical element or of the mount component by friction is arranged on the outside of the optical element or of the mount component.
- the pourable medium can be, for example, sand, a granular material or a powder.
- the element which dissipates the vibrational energy of the optical element by friction has a wire cable having a number of individual wires and on the ends of which respective masses are arranged.
- the element which dissipates the vibrational energy of the optical element by friction is designed as a tube filled with a pourable medium.
- the tube consists of a flexible material.
- the element which dissipates the vibrational energy of the optical element or of the mount component by friction is tuned to the natural frequency of the optical element or of the mount component.
- a substantially improved damping of the vibrations results from such a tuning of the element.
- the element which dissipates the vibrational energy of the mount component by friction is arranged in a cutout in the mount component, the result is a very slight space requirement therefor.
- Claim 35 results in a mount for holding an optical element having at least one mount component as claimed in one of claims 19 to 34 .
- an alternative solution can consist in a mount having at least two mount components, one of the two mount components having a resilient element that is connected at a contact point to the other mount component and exerts a contact pressure on the latter, an element which dissipates the vibrational energy of the mount by friction being formed by the contact point and the two mount components.
- a lithography objective having at least one optical element according to the invention is specified in claim 37 .
- a lithography objective having at least one mount according to the invention is specified in claim 38 .
- Claim 39 relates to a projection exposure machine having an illumination system and having a lithography objective as claimed in claim 37 or 38 .
- Claim 40 yields a method for producing semiconductor components by using such a projection exposure machine.
- FIG. 1 shows a first embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction, on a mount component of an optical element;
- FIG. 2 shows a second embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction, in the case of which the additional mass is arranged on the outside of the optical element;
- FIG. 3 shows an alternative to the embodiment in accordance with FIG. 2 ;
- FIG. 4 shows a further alternative to the embodiment in accordance with FIG. 2 ;
- FIG. 5 shows a further alternative to the embodiment in accordance with FIG. 2 ;
- FIG. 6 shows a further alternative to the embodiment in accordance with FIG. 2 ;
- FIG. 7 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction
- FIG. 8 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction
- FIG. 9 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction
- FIG. 10 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction
- FIG. 11 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction
- FIG. 12 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction
- FIG. 13 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction
- FIG. 14 shows a further embodiment of the inventive element which dissipates vibrational energy of the optical element by friction, in the case of which the additional mass is the mount component coupled to the optical element via at least one resilient element;
- FIG. 15 shows a projection exposure machine having a lithography objective
- FIG. 16 shows a graph for illustrating the inventive damping of vibrations in the case of weak damping.
- FIG. 17 shows a graph for illustrating the inventive damping of vibrations in the case of strong damping.
- FIG. 1 shows an optical element 1 , which is designed in this case as a lens and is held in a mount 2 .
- the mount 2 has two mount components, specifically an inner ring 3 , on which the optical element 1 is fitted, and an outer ring 5 connected to the inner ring 3 via an actuating element 4 .
- the inner ring 3 can be moved within certain limits via the actuating element 4 , which can be, for example, of the type described in detail in U.S. Pat. No. 6,191,898 B1, and can also be denoted as a manipulator.
- the inner ring 3 is, moreover, connected to the outer ring 5 via a spring element 6 whose function is likewise described in detail in U.S. Pat. No. 6,191,898 B1, for which reason it is not intended to go into more detail there on the ring.
- the disclosure content of U.S. Pat. No. 6,191,898 B1 is incorporated in full hereby as the subject matter of the present application.
- the optical element 1 could also be designed as a mirror or as a prism.
- an element which dissipates the vibrational energy of the optical element by friction which can also be denoted as a vibration-damping device or vibration damper and is assigned in the present case to the inner ring 3 .
- the element 7 described below in detail and which dissipates the vibrational energy of the optical element 1 by friction has an additional mass 8 that can also be denoted as an inertial mass or as a seismic mass.
- the element 7 which dissipates the vibrational energy of the optical element 1 by friction should be tuned as accurately as possible to a natural frequency f 0 or to a natural frequency of the spectrum of natural frequencies of the optical element 1 or of the mount component 3 or 5 , because the best damping of vibrations can be achieved in this way.
- Calculation methods known per se can be used to design and dimension the element 7 .
- a large roll in the design of the element 7 which dissipates the vibrational energy of the optical element 1 is played in this case by the mass of said dissipating element, which is determined to a not inconsiderable extent by the additional mass 8 . It holds here that the element 7 must be the more accurately tuned the less the mass of the same.
- the mass, determined by the additional mass 8 , if appropriate, of the element 7 which dissipates the vibrational energy of the optical element 1 by friction is sufficiently large, for example 1/10- 1/100 of the mass of the optical element 1 , or of the mount 2 or of the mount component 3 or 5 , to be damped.
- a low mass of the element 7 has the advantage of a slight additional volume and a negligible additional load in the event of shock etc.
- the natural frequency f 0 of the element 7 is calculated as follows:
- the additional mass 8 is arranged in a container 10 filled with a pourable medium 9 and which is located in a cutout 11 of the inner ring 3 .
- Sand, a granular material or a powder, for example can be used as the pourable medium 9 in which the mass 8 is arranged or which forms a part of the mass 8 .
- the mass 8 can be a weight consisting of a metal such as steel, for example and which is loosely embedded in the pourable medium 9 .
- the pourable medium 9 converts the vibrational energy of the optical element 1 and/or of the mount 2 into heat by friction.
- the damping effect of the element 7 which dissipates the vibrational energy of the optical element by friction can be influenced and optimized by varying the density and/or the grain size or, given different types of the pourable medium 9 , by the differences in the densities and/or the grain sizes.
- the mass 8 is preferably fitted at those points of the mount 2 at which the amplitude of the vibration is highest, that is to say at an antinode, and this leads to optimum damping of vibrations.
- the pourable medium 9 it is also possible, if appropriate, to use very viscous liquids, pastes, fats, waxes, elastomers and, in particular, fibers or fibrous media, or mixtures of these components.
- the additional mass 8 can be arranged thereon or be surrounded thereby.
- the pourable medium 9 or the other materials named above can be used to tune the element 7 which dissipates the vibrations of the optical element 1 to a multiplicity of natural frequencies of the optical element 1 . Consequently, the above-named problems with regard to tuning the element 7 to the natural frequency of the optical element 1 are circumvented or at least eased. This results from the many different natural frequencies of the individual elements of the pourable medium 9 .
- FIG. 2 shows an embodiment of the element 7 which dissipates the vibrational energy of the optical element by friction, and in this case the mass 8 is likewise fitted in a container 10 filled with the pourable medium 9 .
- the container 10 with the mass 8 is arranged on the outside of the optical element 1 and in this way damps the vibrations thereof.
- the connection of the container 10 to the optical element 1 can be performed, for example, by bonding.
- the mass 8 is fitted at those points of the optical element 1 at which the amplitude of the vibration is highest, that is to say at an antinode. Consequently, as illustrated in FIG. 2 , it is also possible for a number of elements 7 which dissipate the vibrational energy of the optical element by friction to be provided around the periphery of the optical element 1 .
- the element 7 which dissipates the vibrational energy of the optical element 1 by friction in accordance with FIG. 3
- said element is once again fitted on the outside of the optical element 1 , the mass 8 being formed by the pourable medium 9 .
- the pourable medium 9 can take the form of individual particles consisting, for example, of lead or another material of a relatively high density, and be enclosed in the container 10 .
- the container 10 is formed in this case by a foil sealed by means of laser welding, for example.
- the element 7 in accordance with FIG. 5 has a tube 14 consisting of a flexible material, for example of an elastomer, and which is filled with the pourable medium 9 .
- the tube 14 filled with the pourable medium 9 is already sufficient as the mass which dissipates the vibrations of the optical element 1 , and can thus form the element 7 .
- FIG. 6 A further embodiment of the element 7 is illustrated in FIG. 6 .
- a stiff rod 15 is provided at both its ends with respective masses 8 and fitted on the optical element 1 via an articulated joint 16 , preferably consisting of an elastomer, and a connecting element 17 .
- the elastomer in this case takes over a similar function to the pourable medium 9 described above.
- FIG. 7 A further embodiment of the element 7 which dissipates the vibrational energy of the optical element 1 or of the mount components 3 or 5 of the mount 2 by friction is illustrated in section in FIG. 7 .
- a ring 28 constituting the additional mass 8 rests on the inner ring 3 of the mount 2
- a flat component 29 is arranged between the two rings, for example a fibrous material such as, for example, an annular paper or a felt or an elastomer.
- the additional mass 8 designed as a ring 28 , and the flat component 29 together form the element 7 , which dissipates the vibrational energy of the mount 2 or of the optical element 1 (not illustrated in this figure) by friction.
- the flat component 9 can also be used to tune the element 7 which dissipates the vibrations of the optical element 1 to the natural frequency of the optical element 1 , since the element 7 designed in this way has a number of natural frequencies.
- the ring 28 could also consist of a number of individual ring elements of which then one corresponds at least approximately to the natural frequency or one of the natural frequencies of the optical element 1 , such that it is possible, if appropriate, to avoid a complicated design of the element 7 .
- the inner ring 3 of the mount 2 has a recess 30 in which there is arranged the flat component 29 designed in the form of a fleece-like medium such as, for example, a felt, a piece of paper, a fleece or a fiber mat.
- the flat component 29 is once again preferably of annular design.
- the ring 28 Located on the flat component 29 is the ring 28 , which can consist, for example, of metal.
- the ring 28 in turn forms the additional, inertial mass 8
- the flat component 29 forms the medium that ensures the friction which dissipates the vibrations.
- the recess 30 the element 7 which dissipates vibrations can be accommodated inside the mount 2 in a particularly space saving fashion.
- FIG. 9 illustrates a further embodiment of the element 7 which dissipates the vibrational energy of the optical element 1 or of the mount components 3 or 5 of the mount 2 by friction.
- the ring 28 consisting of metal, for example, is connected to the optical element 1 .
- This connection of the ring 28 to the optical element 1 can be implemented directly or via an additional component such as, for example, the flat component 29 or, as in the present case, an adhesive 31 .
- This embodiment of the element 7 requires only a very small space, and can also be retrofitted on virtually any optical element 1 .
- an adhesive 31 in particular a soft elastic adhesive such as, for example, a polyurethane elastomer adhesive, for fitting the ring 28 , which forms the additional mass 8 , on the optical element 1 .
- the elastomeric properties of the adhesive 31 contribute substantially to the damping properties thereof.
- fitting the additional mass 8 on the mount component 2 as described above repeatedly, to which end it is thus likewise possible to use the adhesive 31 .
- a dissipation of energy comes about inside the adhesive 31 , and this can be explained by the internal friction inside the adhesive 31 as well as by viscous effects and effects of entropy elasticity.
- the thickness of the adhesive 31 substantially determines the dimensions of the spring constant.
- the adhesive 31 can either be provided unfilled, that is to say as a pure adhesive 31 , or in a fashion filled with powder, fibers and/or another suitable material as filler, in order to increase the damping effect. Moreover, it is conceivable to introduce the adhesive 31 both over the entire area and in a punctiform fashion.
- the adhesive 31 is also to be taken into account with reference to the above-described adaptation of the element 7 which dissipates the vibrational energy of the optical element 1 by friction, since both the material used and, in particular, the thickness of the adhesive 31 , influence the natural frequency of the element 7 , and thus the adaptation thereof to the natural frequency of the optical element 1 .
- the mass of the element 7 should be as large as possible, especially as compared with the mass of the adhesive 31 , in order to prevent excessively sharp deviations from the natural frequency of the optical element 1 .
- the type of loading of the adhesive 31 also plays a role in this context, since a different adhesive 31 must be used in the case of a tensile load than in that of a sheer or compressive load.
- the stiffness k of the adhesive 31 can be calculated using the following formula:
- ⁇ being the transverse contraction coefficient of the adhesive 31 .
- FIGS. 11 , 12 and 13 show various ways of fitting the additional mass 8 , which is represented in each case by the ring 28 , on the optical element 1 .
- the adhesive 31 is located in FIG. 11 both between the upper surface and the lateral surface of the optical element 1 and the correspondingly designed ring 28 , whereas the adhesive 31 is applied only to the cylindrical lateral surface in the case of the design in accordance with FIG. 12 , and only to the upper surface of the optical element 1 in the case of FIG. 13 , in order to connect the ring 28 to the optical element 1 .
- FIG. 14 shows a further embodiment of the element 7 which dissipates the vibrational energy of the optical element 1 or of the mount components 3 or 5 of the mount 2 by friction.
- the mount 2 is coupled to the optical element 1 by two resilient elements 18 a and 18 b so as to produce between the two resilient elements 18 a and 18 b a locally restricted friction or contact point 19 at which the resilient elements 18 a and 18 b exert contact pressures on one another.
- the vibrational energy of the optical element 1 is converted into heat by dry friction, and thus the vibrations of the optical element 1 are damped, in the event of moving the two mount components 3 and 5 relative to one another or in the event of a relative movement between the optical element 1 and the resilient elements 18 a and 18 b or the mount 2 .
- the mount 2 or, in general, one of the mount components 3 or 5 , forms the mass 8
- the element 7 is formed by the contact point 19 and the two mount components 3 and 5 . It is advantageous that only very slight forces occur which influence the position of the optical element 1 only insubstantially.
- the resilient element 18 b can, for example, be a support for the optical element 1 , as is, for example, known from U.S. Pat. No. 6,392,825 or U.S. Pat. No. 4,733,945.
- a lithography objective 20 is illustrated extremely schematically in FIG. 15 . It has a housing 21 in which a number of optical elements 1 are arranged and held, preferably by means of appropriate mounts 2 .
- the lithography objective 20 is part of a projection exposure machine 22 that serves the purpose of producing semiconductor components and has an illumination system 23 , fitted on the top side of the lithography objective 20 , with a light source 24 that transmits a beam path 25 through the lithography objective 20 with the aid of which a reticle 26 is imaged in a manner known per se onto a wafer 27 located below the lithography objective 1 .
- This projection exposure machine 22 can therefore be used to carry out a method for producing semiconductor components that is known per se and therefore not described in more detail below.
- At least one of the optical elements 1 and/or at least one of the mounts 10 is provided with an element 7 , described above, which dissipates the vibrational energy of the optical element 1 or of the mount components 3 or 5 of the mount 2 by friction.
- FIG. 16 shows a graph in which various amplitude profiles are plotted against frequency f.
- the line denoted by “32” shows the vibration amplitude A of the optical element 1 in the region of its natural frequency f 0 without the inventive element 7 . It is to be seen here that there is a very high vibration amplitude in the case of the natural frequency f 0 of the optical element 1 or of the mount 2 on which the optical element 7 can be fitted.
- an element 7 that is designed for this natural frequency f 0 but which is very weakly damped results in the curve denoted by “33” of the vibration amplitude of the optical element 1 or of the mount 2 , measured at the optical element 1 or at the mount 2 , in the case of which because of the design there is no longer any or at least only a very little vibration amplitude at the natural frequency f 0 , but there are two secondary maxima, which can also be very disturbing.
- the run of the vibration amplitude of the element 7 is illustrated by the reference “34”.
- the absolute value of the vibration amplitude of the element 7 does not have to be in conformity with the vibration amplitude of the optical element 1 .
Abstract
An optical element has at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction.
Description
- The invention relates to an optical element, a mount component, a mount for an optical element, a projection objective and a method for producing microstructures.
- A system for damping vibrations that act on an optical element in an imaging apparatus is described in U.S. Pat. No. 6,700,715 B1. In this case, vibrations occurring are detected by sensors integrated in the optical element, and frequencies counteracting the natural frequencies introduced by the vibrations or deformations are introduced in the form of an adaptronic control loop by activating piezoelectric elements as actuators. The relatively high complexity of the system is disadvantageous here.
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EP 1 275 995 A2 describes an optical system having a number of optical elements with a device for detecting the position of the optical element, which are fitted on a measuring structure that is mounted on a base plate via a spring and a damper. - DE 100 41 993 C1 discloses a damper having a damper mass, an elastomeric spring, a base and a fastening bolt that is intended to be used for absorbing vibrations, in particular in the case of motor vehicles.
- DE 84 17 760 U1 describes a vibration damper that can be built onto a unit of a motor vehicle and exists as a spring system with one or more bundles of wires, fibers or strips that are intended to ensure temperature-dependent damping of vibrations.
- Such vibration dampers are certainly suitable for the very large vibration amplitudes such as occur in motor vehicles. However, by virtue of their size alone, these vibration dampers cannot be used with optical elements. Moreover, most known vibration dampers have a preferred direction in which they damp particularly well the vibrations occurring, and are, moreover, tuned to specific frequencies.
- Since, however, in the case of optical elements or the mounts in which the optical elements are mounted, vibrations of very different frequencies and directions of vibration can occur, such vibration dampers cannot be used for optical elements. Particularly in the case of mounts for optical elements that are fitted with manipulators such as are described for example, in U.S. Pat. No. 6,191,898 B1, the optical element vibrates not only at its natural frequency, but there also occurs vibrations of the manipulator or of the optical element in common with one or more mount components, it being possible for very low natural frequencies that are difficult to control to occur in conjunction with relatively high amplitudes.
- It is therefore an object of the present invention to provide an optical element and a mount for an optical element that experience a very good damping of vibration in the case of different vibration frequencies and of different alignments of these vibrations.
- This object is achieved according to the invention by means of an optical element having at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction.
- The object is further achieved by a mount component for an optical element having at least one additional element fitted thereon which dissipates the vibrational energy of the mount component by friction.
- The element provided according to the invention which dissipates the vibrational energy of the mount component by friction and can also be denoted as a vibration damper or as a vibration damping device damps the vibrations of the optical element by dissipating the vibrational energy, vibrations being damped in all six degrees of freedom. Here, the element according to the invention transforms the vibrational energy by friction into heat. Within the scope of the present patent application, the term “friction” comprises all effects that are capable of dissipating energy, that is to say, in particular, also by Coulomb friction, internal friction and/or by effects caused by the viscosity or viscoelasticity of the participating materials.
- Since the element which dissipates the vibrational energy of the optical element or of the mount component by friction does not itself form a vibrational system, it is effective for a very wide frequency spectrum, it being possible for this effectiveness of the vibrational damping to be improved by increasing the mass of the element which dissipates the vibrational energy of the mount component by friction. By contrast, it is possible to reduce the mass of the element which dissipates the vibrational energy of the mount component by friction when the aim is to damp vibrations of high frequency.
- A particular advantage of the element according to the invention consists in the fact that it requires only a very small additional installation space, or no installation space at all in specific embodiments, and can therefore be used without a problem for the most varied applications. In particular, it is also possible for the element which dissipates the vibrational energy of the optical element or of the mount component by friction to be very easily adapted to the respective geometrical conditions of the optical element or of the mount. Moreover, the element according to the invention which dissipates the vibrational energy of the optical element or of the mount component by friction results in a passive vibration damping that therefore requires only a very slight outlay on design.
- The element which dissipates the vibrational energy of the optical element or of the mount component by friction is fitted directly on the optical element or on the mount component and not on a holding structure or the like, and so the vibrations are influenced directly. In particular, the element is not arranged between two components vibrating relative to one another, and therefore does not produce direct coupling.
- The element according to the invention which dissipates vibrations of the optical element or of the mount component can advantageously be used both with manipulable and with non-manipulable optical elements, it being fitted either on the optical element itself or on a mount component of a mount holding the optical element. There is thereby no change at all in the position of the optical element or of the mount component because of the nature of the vibration damping.
- In an advantageous refinement of the invention, it can be provided that the element which dissipates the vibrational energy of the optical element or of the mount component by friction has an additional mass. Such an additional mass substantially increases the possible damping of the vibrations.
- When the additional mass is connected to the optical element or to the mount component by means of an adhesive, this results in a very good damping of vibrations. In particular, a soft elastic adhesive such as, for example, a polyurethane elastomer adhesive, can be very well suited to fitting the additional mass on the optical element or the mount. Energy is dissipated inside the adhesive upon the occurrence of vibrations by the internal friction inside the adhesive as well as by viscous effects and effects of entropy elasticity.
- Very good results are achieved, furthermore, with reference to the damping of vibrations when the additional mass is arranged on a fibrous medium or is surrounded by a fibrous medium. The fibrous medium can be, for example, a fleece, a felt or a loose tangle of fibers, or else a fiber-modified elastomer, for example.
- Moreover, it can be provided that the additional mass is designed as a ring connected to the optical element or to the mount component. For reasons of space, when use takes place in a mount it is obvious to arrange the ring in an annular cutout in the mount component.
- When it is provided in an advantageous development of the invention that the element which dissipates the vibrational energy of the mount component by friction is fitted on one or more of those points of the optical element or of the mount component at which the amplitude of the vibration is highest, this results in a particularly good damping of the vibrations of the optical element or of the mount component.
- In order to avoid damage to the optical element and to achieve fitting the element which dissipates the vibrational energy of the optical element or of the mount component by friction in as simple a way as possible, it can be provided that the element which dissipates the vibrational energy of the optical element or of the mount component by friction is arranged on the outside of the optical element or of the mount component.
- When the element which dissipates the vibrational energy of the optical element or of the mount component by friction has no mechanical contact with an element other than the optical element, or is connected to the mount component to be damped and has no contact with another element, influencing of the damping of vibrations is effectively prevented.
- A particularly good damping of vibrations was observed in the case of an embodiment in which the element which dissipates the vibrational energy of the mount component by friction has a container filled with a pourable medium.
- The pourable medium can be, for example, sand, a granular material or a powder.
- Good results with regard to the damping of vibrations were also achieved with an embodiment in which the element which dissipates the vibrational energy of the optical element by friction has a wire cable having a number of individual wires and on the ends of which respective masses are arranged.
- Moreover, in one refinement of the invention it can be provided that the element which dissipates the vibrational energy of the optical element by friction is designed as a tube filled with a pourable medium.
- It is to be preferred thereby when the tube consists of a flexible material.
- In a further, very advantageous development of the invention, it can be provided that the element which dissipates the vibrational energy of the optical element or of the mount component by friction is tuned to the natural frequency of the optical element or of the mount component. A substantially improved damping of the vibrations results from such a tuning of the element.
- When, in a further refinement of the invention, the element which dissipates the vibrational energy of the mount component by friction is arranged in a cutout in the mount component, the result is a very slight space requirement therefor.
- Claim 35 results in a mount for holding an optical element having at least one mount component as claimed in one of
claims 19 to 34. - In accordance with claim 36, an alternative solution can consist in a mount having at least two mount components, one of the two mount components having a resilient element that is connected at a contact point to the other mount component and exerts a contact pressure on the latter, an element which dissipates the vibrational energy of the mount by friction being formed by the contact point and the two mount components.
- A lithography objective having at least one optical element according to the invention is specified in claim 37.
- A lithography objective having at least one mount according to the invention is specified in claim 38.
- Claim 39 relates to a projection exposure machine having an illumination system and having a lithography objective as claimed in claim 37 or 38.
- Claim 40 yields a method for producing semiconductor components by using such a projection exposure machine.
- A number of exemplary embodiments of the invention are illustrated below in principle with the aid of the drawing, in which:
-
FIG. 1 shows a first embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction, on a mount component of an optical element; -
FIG. 2 shows a second embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction, in the case of which the additional mass is arranged on the outside of the optical element; -
FIG. 3 shows an alternative to the embodiment in accordance withFIG. 2 ; -
FIG. 4 shows a further alternative to the embodiment in accordance withFIG. 2 ; -
FIG. 5 shows a further alternative to the embodiment in accordance withFIG. 2 ; -
FIG. 6 shows a further alternative to the embodiment in accordance withFIG. 2 ; -
FIG. 7 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction; -
FIG. 8 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction; -
FIG. 9 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction; -
FIG. 10 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction; -
FIG. 11 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction; -
FIG. 12 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction; -
FIG. 13 shows a further embodiment of the inventive element which dissipates the vibrational energy of the optical element by friction; -
FIG. 14 shows a further embodiment of the inventive element which dissipates vibrational energy of the optical element by friction, in the case of which the additional mass is the mount component coupled to the optical element via at least one resilient element; -
FIG. 15 shows a projection exposure machine having a lithography objective; -
FIG. 16 shows a graph for illustrating the inventive damping of vibrations in the case of weak damping; and -
FIG. 17 shows a graph for illustrating the inventive damping of vibrations in the case of strong damping. -
FIG. 1 shows anoptical element 1, which is designed in this case as a lens and is held in amount 2. Themount 2 has two mount components, specifically aninner ring 3, on which theoptical element 1 is fitted, and anouter ring 5 connected to theinner ring 3 via anactuating element 4. So as to be able to vary the position of theoptical element 1, theinner ring 3 can be moved within certain limits via theactuating element 4, which can be, for example, of the type described in detail in U.S. Pat. No. 6,191,898 B1, and can also be denoted as a manipulator. Theinner ring 3 is, moreover, connected to theouter ring 5 via aspring element 6 whose function is likewise described in detail in U.S. Pat. No. 6,191,898 B1, for which reason it is not intended to go into more detail there on the ring. The disclosure content of U.S. Pat. No. 6,191,898 B1 is incorporated in full hereby as the subject matter of the present application. Instead of being designed as a lens, theoptical element 1 could also be designed as a mirror or as a prism. - In order to damp vibrations occurring at the
optical element 1 and/or themount 2, provision is made of an element which dissipates the vibrational energy of the optical element by friction and which can also be denoted as a vibration-damping device or vibration damper and is assigned in the present case to theinner ring 3. Theelement 7 described below in detail and which dissipates the vibrational energy of theoptical element 1 by friction has anadditional mass 8 that can also be denoted as an inertial mass or as a seismic mass. - The
element 7 which dissipates the vibrational energy of theoptical element 1 by friction should be tuned as accurately as possible to a natural frequency f0 or to a natural frequency of the spectrum of natural frequencies of theoptical element 1 or of themount component element 7. A large roll in the design of theelement 7 which dissipates the vibrational energy of theoptical element 1 is played in this case by the mass of said dissipating element, which is determined to a not inconsiderable extent by theadditional mass 8. It holds here that theelement 7 must be the more accurately tuned the less the mass of the same. Given a very high mass of theelement 7, which reacts less sensitively to the exact adaptation to the desired natural frequency f0 of theoptical element 1, it is therefore possible to perform a relatively coarse tuning, or a relatively large range of natural frequencies or a relatively large range of the spectrum of natural frequencies are covered. Thus, it should always be ensured that the mass, determined by theadditional mass 8, if appropriate, of theelement 7 which dissipates the vibrational energy of theoptical element 1 by friction is sufficiently large, for example 1/10- 1/100 of the mass of theoptical element 1, or of themount 2 or of themount component - However, it is not always possible to fit a large mass on the
optical element 1, and for this reason it is necessary in the case of relatively low masses to perform a more accurate tuning of theelement 7 which dissipates the vibrational energy of theoptical element 1. A low mass of theelement 7 has the advantage of a slight additional volume and a negligible additional load in the event of shock etc. The natural frequency f0 of theelement 7 is calculated as follows: -
- k being the stiffness and m the mass of the
element 7. - In the embodiment in accordance with
FIG. 1 , theadditional mass 8 is arranged in acontainer 10 filled with apourable medium 9 and which is located in acutout 11 of theinner ring 3. Sand, a granular material or a powder, for example, can be used as thepourable medium 9 in which themass 8 is arranged or which forms a part of themass 8. For example, themass 8 can be a weight consisting of a metal such as steel, for example and which is loosely embedded in thepourable medium 9. Together with themass 8, thepourable medium 9 converts the vibrational energy of theoptical element 1 and/or of themount 2 into heat by friction. Of course, it is also conceivable to mix different types of thepourable medium 9. The friction takes place in this case both inside thepourable medium 9 and at the interfaces between thepourable medium 9 and themass 8. - The damping effect of the
element 7 which dissipates the vibrational energy of the optical element by friction can be influenced and optimized by varying the density and/or the grain size or, given different types of thepourable medium 9, by the differences in the densities and/or the grain sizes. Themass 8 is preferably fitted at those points of themount 2 at which the amplitude of the vibration is highest, that is to say at an antinode, and this leads to optimum damping of vibrations. Instead of thepourable medium 9, it is also possible, if appropriate, to use very viscous liquids, pastes, fats, waxes, elastomers and, in particular, fibers or fibrous media, or mixtures of these components. When use is made of a fibrous medium, theadditional mass 8 can be arranged thereon or be surrounded thereby. Thepourable medium 9 or the other materials named above can be used to tune theelement 7 which dissipates the vibrations of theoptical element 1 to a multiplicity of natural frequencies of theoptical element 1. Consequently, the above-named problems with regard to tuning theelement 7 to the natural frequency of theoptical element 1 are circumvented or at least eased. This results from the many different natural frequencies of the individual elements of thepourable medium 9. -
FIG. 2 shows an embodiment of theelement 7 which dissipates the vibrational energy of the optical element by friction, and in this case themass 8 is likewise fitted in acontainer 10 filled with thepourable medium 9. However, thecontainer 10 with themass 8 is arranged on the outside of theoptical element 1 and in this way damps the vibrations thereof. The connection of thecontainer 10 to theoptical element 1 can be performed, for example, by bonding. It is also to be preferred in this case that themass 8 is fitted at those points of theoptical element 1 at which the amplitude of the vibration is highest, that is to say at an antinode. Consequently, as illustrated inFIG. 2 , it is also possible for a number ofelements 7 which dissipate the vibrational energy of the optical element by friction to be provided around the periphery of theoptical element 1. - In the case of the embodiment of the
element 7 which dissipates the vibrational energy of theoptical element 1 by friction in accordance withFIG. 3 , said element is once again fitted on the outside of theoptical element 1, themass 8 being formed by thepourable medium 9. Thepourable medium 9 can take the form of individual particles consisting, for example, of lead or another material of a relatively high density, and be enclosed in thecontainer 10. Thecontainer 10 is formed in this case by a foil sealed by means of laser welding, for example. - In the case of the embodiment of the
element 7 which dissipates the vibrational energy of theoptical element 1 by friction in accordance withFIG. 4 , twoadditional masses 8 are arranged at the ends of awire cable 12, theelement 7 being formed as a result. In order to convert the vibrations into heat by internal, dry friction, thewire cable 12 has a number ofindividual wires 13 that rub against one another in the event of vibrations and thus, together with themass 8, absorb the vibrational energy of theoptical element 1. Anelement 7 of such a design could also be fitted on one of the twomount components mount 2, so that what is involved is anelement 7 which dissipates the vibrational energy of the twomount components mount 2 by friction. The same also holds for the embodiments ofFIGS. 5 and 6 described below. - The
element 7 in accordance withFIG. 5 has atube 14 consisting of a flexible material, for example of an elastomer, and which is filled with thepourable medium 9. Thetube 14 filled with thepourable medium 9 is already sufficient as the mass which dissipates the vibrations of theoptical element 1, and can thus form theelement 7. In addition, however, it is also possible here for there to be fitted at the two ends of thetube 14additional masses 8 that are indicated by dashed lines. - A further embodiment of the
element 7 is illustrated inFIG. 6 . Here, astiff rod 15 is provided at both its ends withrespective masses 8 and fitted on theoptical element 1 via an articulated joint 16, preferably consisting of an elastomer, and a connectingelement 17. The elastomer in this case takes over a similar function to thepourable medium 9 described above. - A further embodiment of the
element 7 which dissipates the vibrational energy of theoptical element 1 or of themount components mount 2 by friction is illustrated in section inFIG. 7 . Here, aring 28 constituting theadditional mass 8 rests on theinner ring 3 of themount 2, and aflat component 29 is arranged between the two rings, for example a fibrous material such as, for example, an annular paper or a felt or an elastomer. Here, theadditional mass 8 designed as aring 28, and theflat component 29 together form theelement 7, which dissipates the vibrational energy of themount 2 or of the optical element 1 (not illustrated in this figure) by friction. The friction takes place in this case at the two interfaces between theflat component 29 and each of the tworings flat component 29. Particularly when there is a fibrous material, theflat component 9 can also be used to tune theelement 7 which dissipates the vibrations of theoptical element 1 to the natural frequency of theoptical element 1, since theelement 7 designed in this way has a number of natural frequencies. Moreover, thering 28 could also consist of a number of individual ring elements of which then one corresponds at least approximately to the natural frequency or one of the natural frequencies of theoptical element 1, such that it is possible, if appropriate, to avoid a complicated design of theelement 7. - In the case of the embodiment of the
element 7 in accordance withFIG. 8 which dissipates the vibrational energy of theoptical element 1 or of themount components mount 2 by friction, theinner ring 3 of themount 2 has arecess 30 in which there is arranged theflat component 29 designed in the form of a fleece-like medium such as, for example, a felt, a piece of paper, a fleece or a fiber mat. Theflat component 29 is once again preferably of annular design. Located on theflat component 29 is thering 28, which can consist, for example, of metal. Here, thering 28 in turn forms the additional,inertial mass 8, and theflat component 29 forms the medium that ensures the friction which dissipates the vibrations. As a result of therecess 30, theelement 7 which dissipates vibrations can be accommodated inside themount 2 in a particularly space saving fashion. -
FIG. 9 illustrates a further embodiment of theelement 7 which dissipates the vibrational energy of theoptical element 1 or of themount components mount 2 by friction. Here, thering 28, consisting of metal, for example, is connected to theoptical element 1. This connection of thering 28 to theoptical element 1 can be implemented directly or via an additional component such as, for example, theflat component 29 or, as in the present case, an adhesive 31. This embodiment of theelement 7 requires only a very small space, and can also be retrofitted on virtually anyoptical element 1. - With reference to the damping of vibrations, it has proven to be very well suited to use an adhesive 31, in particular a soft elastic adhesive such as, for example, a polyurethane elastomer adhesive, for fitting the
ring 28, which forms theadditional mass 8, on theoptical element 1. The elastomeric properties of the adhesive 31 contribute substantially to the damping properties thereof. The same also holds for fitting theadditional mass 8 on themount component 2, as described above repeatedly, to which end it is thus likewise possible to use the adhesive 31. Upon the occurrence of vibrations, a dissipation of energy comes about inside the adhesive 31, and this can be explained by the internal friction inside the adhesive 31 as well as by viscous effects and effects of entropy elasticity. In this case, the thickness of the adhesive 31 substantially determines the dimensions of the spring constant. - Here, the adhesive 31 can either be provided unfilled, that is to say as a
pure adhesive 31, or in a fashion filled with powder, fibers and/or another suitable material as filler, in order to increase the damping effect. Moreover, it is conceivable to introduce the adhesive 31 both over the entire area and in a punctiform fashion. - The adhesive 31 is also to be taken into account with reference to the above-described adaptation of the
element 7 which dissipates the vibrational energy of theoptical element 1 by friction, since both the material used and, in particular, the thickness of the adhesive 31, influence the natural frequency of theelement 7, and thus the adaptation thereof to the natural frequency of theoptical element 1. Particularly when the tolerances with regard to the thickness and to the material properties of the adhesive 31 which determine the stiffness of said optical element are relatively large, the mass of theelement 7 should be as large as possible, especially as compared with the mass of the adhesive 31, in order to prevent excessively sharp deviations from the natural frequency of theoptical element 1. The type of loading of the adhesive 31 also plays a role in this context, since a different adhesive 31 must be used in the case of a tensile load than in that of a sheer or compressive load. - The stiffness k of the adhesive 31 can be calculated using the following formula:
-
- where k=stiffness, G=sheer modulus, A=total adhesively bonded area, t=thickness of the adhesive 31, and α=sheer correction factor (specifies the ratio of total cross-sectional area to the cross-sectional area active for sheer). It holds for rectangular cross sections that:
-
- with ν being the transverse contraction coefficient of the adhesive 31.
- By contrast with the design illustrated in
FIG. 9 , there is no need for thering 28 fitted on theinner ring 3 of themount 2 to have a constant cross section, nor need the latter be closed, either. As illustrated inFIG. 10 , individualadditional masses 8 can also be adhesively bonded on theoptical element 1, their number being a function of the required damping effect of theelement 7. These individualadditional masses 8 can also be fitted on theinner ring 3 of themount 2 in a similar way. -
FIGS. 11 , 12 and 13 show various ways of fitting theadditional mass 8, which is represented in each case by thering 28, on theoptical element 1. - As explained briefly above, the adhesive 31 is located in
FIG. 11 both between the upper surface and the lateral surface of theoptical element 1 and the correspondingly designedring 28, whereas the adhesive 31 is applied only to the cylindrical lateral surface in the case of the design in accordance withFIG. 12 , and only to the upper surface of theoptical element 1 in the case ofFIG. 13 , in order to connect thering 28 to theoptical element 1. -
FIG. 14 shows a further embodiment of theelement 7 which dissipates the vibrational energy of theoptical element 1 or of themount components mount 2 by friction. Here, themount 2 is coupled to theoptical element 1 by tworesilient elements resilient elements contact point 19 at which theresilient elements optical element 1 is converted into heat by dry friction, and thus the vibrations of theoptical element 1 are damped, in the event of moving the twomount components optical element 1 and theresilient elements mount 2. Here, themount 2 or, in general, one of themount components mass 8, and theelement 7 is formed by thecontact point 19 and the twomount components optical element 1 only insubstantially. Theresilient element 18 b can, for example, be a support for theoptical element 1, as is, for example, known from U.S. Pat. No. 6,392,825 or U.S. Pat. No. 4,733,945. - A
lithography objective 20 is illustrated extremely schematically inFIG. 15 . It has ahousing 21 in which a number ofoptical elements 1 are arranged and held, preferably by means ofappropriate mounts 2. Thelithography objective 20 is part of aprojection exposure machine 22 that serves the purpose of producing semiconductor components and has anillumination system 23, fitted on the top side of thelithography objective 20, with alight source 24 that transmits abeam path 25 through thelithography objective 20 with the aid of which areticle 26 is imaged in a manner known per se onto a wafer 27 located below thelithography objective 1. Thisprojection exposure machine 22 can therefore be used to carry out a method for producing semiconductor components that is known per se and therefore not described in more detail below. Here, it is preferred for at least one of theoptical elements 1 and/or at least one of themounts 10 to be provided with anelement 7, described above, which dissipates the vibrational energy of theoptical element 1 or of themount components mount 2 by friction. -
FIG. 16 shows a graph in which various amplitude profiles are plotted against frequency f. Here, the line denoted by “32” shows the vibration amplitude A of theoptical element 1 in the region of its natural frequency f0 without theinventive element 7. It is to be seen here that there is a very high vibration amplitude in the case of the natural frequency f0 of theoptical element 1 or of themount 2 on which theoptical element 7 can be fitted. However, anelement 7 that is designed for this natural frequency f0 but which is very weakly damped, results in the curve denoted by “33” of the vibration amplitude of theoptical element 1 or of themount 2, measured at theoptical element 1 or at themount 2, in the case of which because of the design there is no longer any or at least only a very little vibration amplitude at the natural frequency f0, but there are two secondary maxima, which can also be very disturbing. The run of the vibration amplitude of theelement 7 is illustrated by the reference “34”. The absolute value of the vibration amplitude of theelement 7 does not have to be in conformity with the vibration amplitude of theoptical element 1. - In principle, the same curves are illustrated in
FIG. 17 , there now being a strongly dampedelement 7 which dissipates the vibrations of theoptical element 1. It is to be seen that the curve denoted by “32” is identical to that ofFIG. 16 , whereas in the case of a stronger damping by theelement 7 there is still a relatively large amplitude at the natural frequency f0, although the two secondary maxima are substantially lower. It becomes plain from this that concerning the damping of theoptical element 1 with a broadband stimulation a better effect is achieved given relatively strong damping of theelement 7. As inFIG. 16 , thecurve 34 inFIG. 17 also shows the amplitude of theelement 7.
Claims (40)
1. An optical element having at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction.
2. The optical element as claimed in claim 1 , in which the element which dissipates the vibrational energy of the optical element by friction has an additional mass.
3. The optical element as claimed in claim 2 , in which the additional mass is connected to the optical element by means of an adhesive.
4. The optical element as claimed in claim 2 , in which the additional mass is arranged on a fibrous medium.
5. The optical element as claimed in claim 2 , in which the additional mass is surrounded by a fibrous medium.
6. The optical element as claimed in one of claims 2 to 5 , in which the additional mass is designed as a ring connected to the optical element.
7. The optical element as claimed in one of claims 1 to 6 , in which the element which dissipates the vibrational energy of the optical element by friction is fitted on one or more of those points of the optical element at which the amplitude of the vibration is highest.
8. The optical element as claimed in one of claims 1 to 7 , in which the element which dissipates the vibrational energy of the optical element by friction is arranged on the outside of the optical element.
9. The optical element as claimed in one of claims 1 to 8 , in which the element which dissipates the vibrational energy of the optical element by friction has no mechanical contact with an element other than the optical element.
10. The optical element as claimed in one of claims 1 to 9 , in which the element which dissipates the vibrational energy of the optical element by friction has a container filled with a pourable medium.
11. The optical element as claimed in claims 2 and 10 , in which the mass is arranged in the container filled with the pourable medium.
12. The optical element as claimed in claim 10 , in which the pourable medium is sand.
13. The optical element as claimed in claim 10 , in which the pourable medium is a granular material.
14. The optical element as claimed in claim 10 , in which the pourable medium is a powder.
15. The optical element as claimed in one of claims 1 to 14 , in which the element which dissipates the vibrational energy of the optical element by friction has a wire cable having a number of individual wires and on the ends of which respective masses are arranged.
16. The optical element as claimed in one of claims 1 to 15 , in which the element which dissipates the vibrational energy of the optical element by friction is designed as a tube filled with a pourable medium.
17. The optical element as claimed in claim 16 , in which the tube consists of a flexible material.
18. The optical element as claimed in one of claims 1 to 17 , in which the element which dissipates the vibrational energy of the optical element by friction is tuned to the natural frequency of the optical element.
19. A mount component for an optical element having at least one additional element fitted thereon which dissipates the vibrational energy of the mount component by friction.
20. The mount component as claimed in claim 19 , in which the element which dissipates the vibrational energy of the mount component by friction has an additional mass.
21. The mount component as claimed in claim 20 , in which the additional mass is connected to the mount component by means of an adhesive.
22. The mount component as claimed in claim 20 , in which the additional mass is arranged on a fibrous medium.
23. The mount component as claimed in claim 20 , in which the additional mass is surrounded by a fibrous medium.
24. The mount component as claimed in one of claims 19 to 23 , in which the additional mass is designed as a ring connected to the mount component.
25. The mount component as claimed in claim 22 , in which the ring is arranged in an annular cutout in the mount component.
26. The mount component as claimed in one of claims 19 to 25 , in which the element which dissipates the vibrational energy of the mount component by friction is fitted on one or more of those points of the mount component at which the amplitude of the vibration is highest.
27. The mount component as claimed in one of claims 19 to 26 , in which the element which dissipates the vibrational energy of the mount component by friction is connected exclusively to the mount component to be damped and has no contact with another element.
28. The mount component as claimed in one of claims 19 to 27 , in which the element which dissipates the vibrational energy of the mount component by friction is arranged in a cutout in the mount component.
29. The mount component as claimed in one of claims 19 to 28 , in which the element which dissipates the vibrational energy of the mount component by friction has a container filled with a pourable medium.
30. The mount component as claimed in claims 19 and 29 , in which the mass is arranged in the container filled with the pourable medium.
31. The mount component as claimed in claim 29 , in which the pourable medium is sand.
32. The mount component as claimed in claim 29 , in which the pourable medium is a granular material.
33. The mount component as claimed in claim 29 , in which the pourable medium is a powder.
34. The mount component as claimed in one of claims 19 to 33 , in which the element which dissipates the vibrational energy of the mount component by friction is tuned to the natural frequency of the mount component.
35. A mount for holding an optical element having at least one mount component as claimed in one of claims 19 to 34 .
36. The mount having at least two mount components, one of the two mount components having a resilient element that is connected at a contact point to the other mount component and exerts a contact pressure on the latter, an element which dissipates the vibrational energy of the mount by friction being formed by the contact point and the two mount components.
37. A lithography objective having at least one optical element as claimed in one of claims 1 to 19 .
38. A lithography objective having at least one mount as claimed in one of claims 35 or 36 .
39. A projection exposure machine having an illumination system and having a lithography objective as claimed in claim 37 or 38 for producing semiconductor components.
40. A method for producing semiconductor components by using a projection exposure machine as claimed in claim 39 .
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Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
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US20080259469A1 (en) * | 2007-04-23 | 2008-10-23 | Nikon Corporation | Optical element holding apparatus, barrel, exposure apparatus, and manufacturing method for device |
US20090147356A1 (en) * | 2007-12-06 | 2009-06-11 | Olympus Corporation | Microscope system |
US20090180091A1 (en) * | 2007-11-15 | 2009-07-16 | Asml Holding N.V. | Lithographic Apparatus, Projection System And Damper for Use in a Lithographic Apparatus and Device Manufacturing Method |
WO2010083965A1 (en) * | 2009-01-20 | 2010-07-29 | Carl Zeiss Smt Ag | Damping device |
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US11784290B2 (en) | 2013-03-28 | 2023-10-10 | Nichia Corporation | Light-emitting device with improved flexural resistance and electrical connection between layers, production method therefor, and device using light-emitting device |
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US9897926B2 (en) | 2014-01-31 | 2018-02-20 | Asml Netherlands B.V. | Stage positioning system and lithographic apparatus |
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Also Published As
Publication number | Publication date |
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US8705185B2 (en) | 2014-04-22 |
KR20080032178A (en) | 2008-04-14 |
US20120194795A1 (en) | 2012-08-02 |
TWI451148B (en) | 2014-09-01 |
KR101428817B1 (en) | 2014-08-08 |
JP2009501350A (en) | 2009-01-15 |
JP6055252B2 (en) | 2016-12-27 |
JP2013050722A (en) | 2013-03-14 |
WO2007006577A1 (en) | 2007-01-18 |
TW200712589A (en) | 2007-04-01 |
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