JPH0257717A - Direct-acting stage guide bar damping mechanism - Google Patents

Direct-acting stage guide bar damping mechanism

Info

Publication number
JPH0257717A
JPH0257717A JP63207384A JP20738488A JPH0257717A JP H0257717 A JPH0257717 A JP H0257717A JP 63207384 A JP63207384 A JP 63207384A JP 20738488 A JP20738488 A JP 20738488A JP H0257717 A JPH0257717 A JP H0257717A
Authority
JP
Japan
Prior art keywords
guide bar
stage guide
damping mechanism
vibration
direct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63207384A
Other languages
Japanese (ja)
Inventor
Kaname Furukawa
古川　要
Shinkichi Okawa
大河　真吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP63207384A priority Critical patent/JPH0257717A/en
Publication of JPH0257717A publication Critical patent/JPH0257717A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

PURPOSE:To increase damping effect to suit to the use for precision devices such as semiconductor printing device, etc. by using a hollow tubular material as a guide bar and filling it with high damping material such as sand, vibration- proof rubber, etc. CONSTITUTION:A cylindrical hollow tube 1 is filled with vibration damping material 4 such as sand, rubber, etc. and a cover 2 is placed on it through a sealing member 3 such as O-ring, etc. The cross-sectional shape of the hollow tube 1 may be square as well as circular. When a direct-acting stage guide bar is constructed so, the damping capacity of the stage can be increased. When it is used for precision devices such as semiconductor exposure device, etc., therefore, movement and positioning of high accuracy can be achieved smoothly and rapidly.

Description

【発明の詳細な説明】 ［産業上の利用分野］ 本発明は半導体焼付装置等振動の除去または防止を必要
とする精密機器に用いられる直動ステージのガイドバー
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a guide bar for a linear stage used in precision equipment such as semiconductor printing equipment that requires vibration removal or prevention.

［従来の技術］ 従来直動ステージのガイドバーとして例えば特開昭６２
−６３２１８号に記載されているように円柱の棒（中実
丸棒）が使用されていた。[Prior art] For example, as a guide bar for a linear motion stage,
A cylindrical bar (solid round bar) was used as described in No.-63218.

［発明が解決しようとする問題点コ しかしながら従来の円柱棒のガイドバーの場合、振動に
対する減衰性がきわめて悪く、精密機器に使用する際の
大きな欠点になっていた。[Problems to be Solved by the Invention] However, in the case of conventional cylindrical guide bars, their damping properties against vibrations are extremely poor, which is a major drawback when used in precision instruments.

［問題点を解決するための手段および作用］本発明はガ
イドバーとして中空のパイプ状の物を使用し、内部に砂
、防振ゴム等減衰性の高い物質を封入することにより、
減衰効果を高めたものである。[Means and effects for solving the problems] The present invention uses a hollow pipe-like object as a guide bar, and fills the inside with a highly damping material such as sand or vibration-proof rubber.
This has an enhanced damping effect.

［実施例］ 第１図は本発明に係る直動ステージガイドバー減衰機構
の断面図である。[Example] FIG. 1 is a sectional view of a linear motion stage guide bar damping mechanism according to the present invention.

第１図において１は円柱状の中空パイプ、２は蓋、３は
パイプ内に封入した物質をシールするための０リング等
シール部材、４は砂等防振効果のある物質からなる振動
減衰材料である。In Figure 1, 1 is a cylindrical hollow pipe, 2 is a lid, 3 is a sealing member such as an O-ring for sealing the substance sealed inside the pipe, and 4 is a vibration damping material made of a substance with a vibration-proofing effect such as sand. It is.

振動減衰材料としては砂の他にゴム、プラスチックその
他の適当な材料を用いることができる。In addition to sand, rubber, plastic, or other suitable materials can be used as the vibration damping material.

中空パイプ１は第２図に示すように円形断面であるが、
これに限らず三角形、四角形等の角形断面であってもよ
い。The hollow pipe 1 has a circular cross section as shown in FIG.
The cross section is not limited to this, and may be a rectangular cross section such as a triangle or a quadrangle.

［発明の効果］ 以上説明したように、直動ステージのガイドバーとして
、中空のパイプを用い内部に砂等の防振効果のある物質
を封入することにより、ステージの減衰性を高めること
ができる。したがって、半導体露光装置等の精密機器に
用いれば高精度の移動位置決め制御が円滑かつ迅速に達
成される。[Effects of the Invention] As explained above, by using a hollow pipe as the guide bar of the linear stage and filling the inside with a material having a vibration-proofing effect such as sand, the damping performance of the stage can be increased. . Therefore, when used in precision equipment such as semiconductor exposure equipment, highly accurate movement positioning control can be achieved smoothly and quickly.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明に係る直動ステージガイドバー減衰機構
の断面図、第２図は第１図のＡ−Ａ断面図である。 １：中空パイプ、 ２：蓋、 ３：０リング、 ４：振動減衰材料。 特許出願人　　　キャノン株式会社 代理人　弁理士　　　伊　東　哲　也 代理人　弁理士　　　伊　東　辰　雄FIG. 1 is a sectional view of a linear motion stage guide bar damping mechanism according to the present invention, and FIG. 2 is a sectional view taken along line A-A in FIG. 1: Hollow pipe, 2: Lid, 3: 0 ring, 4: Vibration damping material. Patent Applicant Canon Co., Ltd. Agent Patent Attorney Tetsuya Ito Agent Patent Attorney Tatsuo Ito

Claims (6)

【特許請求の範囲】[Claims] （１）中空パイプと該中空パイプ内に封入した振動減衰
材料からなることを特徴とする直動ステージガイドバー
減衰機構。(1) A linear stage guide bar damping mechanism comprising a hollow pipe and a vibration damping material sealed inside the hollow pipe. （２）前記中空パイプは円形断面であることを特徴とす
る特許請求の範囲第１項記載の直動ステージガイドバー
減衰機構。(2) The linear motion stage guide bar damping mechanism according to claim 1, wherein the hollow pipe has a circular cross section. （３）前記中空パイプは角形断面であることを特徴とす
る特許請求の範囲第１項記載の直動ステージガイドバー
減衰機構。(3) The linear motion stage guide bar damping mechanism according to claim 1, wherein the hollow pipe has a rectangular cross section. （４）前記振動減衰材料は砂からなることを特徴とする
特許請求の範囲第１項記載の直動ステージガイドバー減
衰機構。(4) The linear motion stage guide bar damping mechanism according to claim 1, wherein the vibration damping material is made of sand. （５）前記振動減衰材料はゴムからなることを特徴とす
る特許請求の範囲第１項記載の直動ステージガイドバー
減衰機構。(5) The linear motion stage guide bar damping mechanism according to claim 1, wherein the vibration damping material is made of rubber. （６）前記中空パイプ端部はシール手段を介して蓋によ
り封止されたことを特徴とする特許請求の範囲第１項か
ら第５項までのいずれか１項記載の直動ステージガイド
バー減衰機構。(6) The linear motion stage guide bar damping according to any one of claims 1 to 5, wherein the end of the hollow pipe is sealed with a lid via a sealing means. mechanism.
JP63207384A 1988-08-23 1988-08-23 Direct-acting stage guide bar damping mechanism Pending JPH0257717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63207384A JPH0257717A (en) 1988-08-23 1988-08-23 Direct-acting stage guide bar damping mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63207384A JPH0257717A (en) 1988-08-23 1988-08-23 Direct-acting stage guide bar damping mechanism

Publications (1)

Publication Number Publication Date
JPH0257717A true JPH0257717A (en) 1990-02-27

Family

ID=16538842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63207384A Pending JPH0257717A (en) 1988-08-23 1988-08-23 Direct-acting stage guide bar damping mechanism

Country Status (1)

Country Link
JP (1) JPH0257717A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0628402U (en) * 1992-09-16 1994-04-15 エヌティエヌ株式会社 Lead screw device
JP2005064474A (en) * 2003-07-31 2005-03-10 Canon Inc Positioning mechanism, exposure apparatus, and device manufacturing method
JP2009501350A (en) * 2005-07-14 2009-01-15 カール・ツァイス・エスエムティー・アーゲー Optical element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0628402U (en) * 1992-09-16 1994-04-15 エヌティエヌ株式会社 Lead screw device
JP2005064474A (en) * 2003-07-31 2005-03-10 Canon Inc Positioning mechanism, exposure apparatus, and device manufacturing method
JP4649136B2 (en) * 2003-07-31 2011-03-09 キヤノン株式会社 Actuator, exposure apparatus, and device manufacturing method
JP2009501350A (en) * 2005-07-14 2009-01-15 カール・ツァイス・エスエムティー・アーゲー Optical element
JP2013050722A (en) * 2005-07-14 2013-03-14 Carl Zeiss Smt Gmbh Optical element
US8705185B2 (en) 2005-07-14 2014-04-22 Carl Zeiss Smt Gmbh Optical element

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