US20080158664A1 - Arrangement and method for image acquisition on a prober - Google Patents

Arrangement and method for image acquisition on a prober Download PDF

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Publication number
US20080158664A1
US20080158664A1 US11/964,747 US96474707A US2008158664A1 US 20080158664 A1 US20080158664 A1 US 20080158664A1 US 96474707 A US96474707 A US 96474707A US 2008158664 A1 US2008158664 A1 US 2008158664A1
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Prior art keywords
microscope
objective lens
image
test object
probe needles
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Abandoned
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US11/964,747
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English (en)
Inventor
Michael Teich
Axel Becker
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Cascade Microtech Dresden GmbH
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SUSS MicroTec Test Systems GmbH
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Filing date
Publication date
Application filed by SUSS MicroTec Test Systems GmbH filed Critical SUSS MicroTec Test Systems GmbH
Assigned to SUSS MICROTEC TEST SYSTEMS GMBH reassignment SUSS MICROTEC TEST SYSTEMS GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TEICH, MICHAEL, BECKER, AXEL
Publication of US20080158664A1 publication Critical patent/US20080158664A1/en
Priority to US12/847,308 priority Critical patent/US20110181710A1/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged

Definitions

  • the invention relates to a system for a focused multi-planar image acquisition in a prober, which is provided with a movement device and a clamping fixture, which is mounted on said movement device and is intended for a test object. Furthermore, the prober exhibits probe needles, which can make contact with the test object; holding devices for the probe needles; and a clamping plate, which is arranged above the clamping fixture and on which the holding devices can be mounted and which exhibits a viewing aperture, which visibly exposes the surface of the test object.
  • the system is provided with an image capturing device, which is mounted above the viewing aperture and which comprises a microscope with an objective lens and an objective holder. Said system is also provided with a lighting device, which can generate a light beam, directed on the surface of the test object.
  • the invention also relates to a method for a focused multi-planar image acquisition in a prober. According to the method, when the surface of a test object is positioned laterally in relation to the tips of the separated probe needles, a microscope is focused on the surface of the test object at a first time and on the plane of the probe needles at a second time.
  • a confocal microscope is a variant of the light microscope, with which virtual optical cross sectional scans of an object can be produced. These cross sectional scans are then assembled with suitable software into a three dimensional display.
  • the light falls through an aperture diaphragm on the specimen via a beam splitter mirror and an objective lens.
  • the emitted light is captured by the objective lens and focused on the aperture of an aperture diaphragm, behind which is located the detector.
  • the aperture diaphragm causes the beams from layers, which are located higher or lower than the focal plane, for which the objective lens is set, to be blanked out.
  • the result is an image that matches a sectioning of the specimen in the focal plane.
  • the image of this focal plane is stored.
  • the focus of the objective lens is put into another focal plane, which is at a distance from the first focal plane.
  • an image, which matches a cross sectional scan of the specimen in this other focal plane is generated and stored.
  • a three dimensional image of the specimen is generated from the individual images from the various focal planes with suitable software.
  • microscope objective lens focusing systems In order to adjust the focus of the objective lens of the confocal microscope it is known to use microscope objective lens focusing systems as fast and compact adjustment units, which can be easily installed in most microscopes. In so doing, they are screwed in between the turret and the objective lens. To this end, such a microscope objective lens focusing system exhibits a turret-sided threaded shaft, which can be screwed into the objective thread of the microscope turret. Then the objective lens itself can be screwed into an internal thread in the microscope objective lens focusing system.
  • the threaded shaft and the internal thread can be moved in the axial direction in relation to each other by means of a position-encoded piezoelectric linear actuator.
  • a position-encoded piezoelectric linear actuator By applying various voltages to the piezoelectric linear actuator, the distance between the objective lens and the turret head and, thus, the focus can be modified by electric means.
  • a suitable focal plane can be selected while scanning with a confocal microscope by varying the voltage in the microscope objective lens focusing system.
  • the object to be examined is illuminated with a laser beam.
  • the laser beam is expanded in such a manner that it illuminates the entire object.
  • Another possibility with respect to a total illumination of the object is not to fan out, but rather to deflect temporally the laser beam along the line of a scanner mode and, thus, to illuminate the object by means of a scanned laser beam.
  • a prober generally consists of a movement device, for example, an X-Y cross-table, which can also perform slight rotary motions in order to correct the position.
  • This movement device has a clamping fixture—a so-called chuck.
  • the test object can be mounted on this clamping fixture.
  • a clamping plate Above the clamping fixture is a clamping plate, which is provided with a feed-through and viewing aperture.
  • holding devices for the probe needles can be mounted on this clamping plate, for example, by means of vacuum holders, so that the probe needles can extend through the feed-through and viewing aperture and make an electric contact at the corresponding points on the object to be tested, thus measuring the object to be tested for its electrical properties.
  • probe cards where the probe needles are mounted, as the probe card needles, securely on the probe card; and then the probe card is placed securely in the clamping plate.
  • the objects to be tested have to be positioned in relation to the tips of the probe needles.
  • a vertical motion of the movement device usually brings about a separation between the object to be tested and the probe needles.
  • the distance between the tips of the probe needles and the test object ranges usually from 200 to 250 ⁇ m.
  • the movement device moves the clamping fixture and, thus, the object to be tested in such a manner that another test object or another part of the test object comes to rest under the tips of the probe needles.
  • an additional vertical motion places again the object to be tested in contact with the tips of the probe needles.
  • this positioning operation is controlled by an image capturing device, which comprises a microscope and usually also a video camera.
  • the image capturing device that is, the objective lens of the microscope—is mounted above the viewing aperture.
  • the image capturing device photographs the surface of the object to be tested, which in turn is passed to an image evaluating unit. Then with the image evaluating unit it is possible to control with suitable analysis programs the movement device so accurately that the tips of the probe needles come to rest directly over the corresponding contacts on the test object; and the measuring process can begin.
  • the viewing takes place either by way of a monitor, which reproduces and enlarges the video camera-generated image, or directly at the eyepiece of the microscope by an operator, who then controls the positioning and the electrical contacting in accordance with the indicated position.
  • this microscope is provided with a vertical adjustment drive, by means of which an adjustment of the entire microscope changes the distance between the objective lens and the imaging plane.
  • the tips and the contact surface lie in different imaging planes with respect to the objective lens. As a result, a sharp image of both the tips and the contact surface can never be obtained simultaneously.
  • the operator's first step is to guide the contact pads of the test object under the probe needles, which can be seen only as very ill-defined shadows.
  • the second step is to decrease the distance between the probe needles and the test object. This action will bring the probe needles sharper into focus, if the microscope is focused on the test object. Hence, it is still feasible to make some subsequent adjustments. However, it is not until contact has actually been made that it is possible to determine exactly whether the tips of the contact needles are, in fact, exactly on the contact pads of the test object. If necessary, the operator has to break the contact once again, re-position, and then make contact again.
  • both objects can be brought into sharp focus by capturing the image of the wafer surface in a first step. Then in a second step after mechanical adjustment of the microscope the sharp image of the probe tip is captured. Thereupon the two images are stacked one on top of the other and assembled into one sharp composite image.
  • a sharp image of both the probe needles and the test object is produced, however, this applies only to the static image, thus not to the real time mode.
  • the object of the invention is to enable a focused multi-planar image acquisition in real time—that is, even while the test object is moving.
  • the objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of the vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.
  • a microscope objective lens focusing system which can focus the objective lens, independently of the vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.
  • the distance between the objective lens and the eyepiece or the image capturing plane is changed by means of a microscope objective lens focusing system - a feature that, in principle, is already possible with purely mechanical solutions.
  • the adjustment is significantly simplified, if the microscope objective lens focusing system is designed so as to be electrically adjustable and is connected to a control unit, which controls the movement of the microscope objective lens focusing system.
  • the control unit could be a simple switch, which triggers the two focuses by means of two switch positions.
  • An especially fast adjustment capability of the microscope objective lens focusing system is achieved by providing it with a piezo drive.
  • a focus adjustment can be integrated into the objective lens or in a different location in the beam path of the microscope.
  • the microscope objective lens focusing system can be installed in the microscope, which is present in a prober, without any major modifications, if said microscope has a microscope-sided threaded shaft, which can be screwed into the objective thread of the objective holder, and if the microscope has an internal thread for receiving the objective lens, and if the threaded shaft and the internal thread can be moved in relation to each other in the axial direction by means of a position-encoded piezoelectric linear actuator.
  • Another embodiment of the invention provides that the image capturing device is connected to an image evaluating unit.
  • the image capturing device is connected to an image evaluating unit.
  • Such a feature would make it possible, for example, to control the focus setting.
  • control of the microscope objective lens focusing system is carried out by the image evaluating unit itself, in that said image evaluating unit comprises the control unit.
  • the image capturing device has a video camera.
  • the problem, on which the invention is based, is solved by a method, wherein the objective lens is focused, independently of a vertical adjustment of the microscope, on the two focal planes at different times; and wherein the respective focus settings at the objective lens are changed multiple times during the positioning operation.
  • the method achieves that the imaging of the two focal planes appears to the viewer to be displayed simultaneously.
  • the simultaneously appearing imaging of both focal planes can be achieved by exploiting the eye's slowness in that the focus settings are changed at a rate that exceeds the eye's rate of slowness.
  • the changing of the focus settings at identical time intervals can be performed very simply, especially if the illumination takes place with a monochromatic light or a white light.
  • the images captured by the microscope are captured by a video camera and displayed on a screen.
  • a video camera also makes it possible to feed the video camera-captured images to an image evaluating unit and to store at least two images, which are captured in succession with different focus settings and to display said images in the display in such a manner that they are projected one over the other.
  • image evaluating unit it is also possible to select imaging rates that are below the slowness rate of the human eye, since they exist, of course, in the stored form.
  • image evaluating unit it is also possible to achieve especially good color images (to be explained in detail below).
  • An especially sharp and high resolution image rendering can be achieved if the image of at least the surface of the test object is composed of images taken in succession in different color channels.
  • the focus settings are changed in such a manner that several images of the test object are captured with an illumination, the color of which varies with the respective image.
  • an image of the tip of the probe needle is taken.
  • one image is assembled from the images of the test image by projecting the image of the tip of the probe needle into said image.
  • FIG. 1 depicts an inventive prober in an embodiment with probe needles.
  • FIG. 2 depicts an inventive prober in an embodiment with a probe card.
  • FIG. 3 is a sectional drawing of an inventive image capturing device.
  • FIG. 4 is a front view of a microscope objective lens focusing system that is used according to the invention.
  • FIG. 5 is a top view of a microscope objective lens focusing system that is used according to the invention.
  • FIG. 6 is a side view of a microscope objective lens focusing system that is used according to the invention.
  • FIG. 7 is a perspective view of a microscope objective lens focusing system that is used according to the invention.
  • FIG. 8 is an exploded view of the probe needles with respect to the surface of the test object.
  • a prober 1 comprises an X-Y cross table 2 as a movement device.
  • the X-Y cross table 2 is disposed in a housing 3 .
  • a clamping fixture 4 is mounted on the X-Y cross table. In this case the clamping fixture 4 can be rotated by an angle ⁇ .
  • the clamping fixture 4 serves to receive a test object 5 .
  • the test object 5 may be, for example, a semiconductor wafer, on which there are a plurality of semiconductor chips, which in turn exhibit individual contact pads.
  • the probe needles 6 make contact with said test object.
  • An external test circuit (not shown in detail) makes contact, for example, with the contact pads of a semiconductor wafer, as the test object. Therefore, said contact pads are driven with electric signals; and in this way their reaction is determined.
  • probe holders 7 serve to hold the probe needles and, on the other hand, to fine position the probe needles in relation to the test object.
  • probe holders 7 there is a clamping plate, a so-called probe holder plate 8 .
  • the probe holders 7 can be vacuum mounted on this probe holder plate 8 and are, thus, fixed in place.
  • the probe holder plate 8 is provided with an aperture 9 .
  • this aperture 9 exposes at the top the surface 10 of the test object 5 for observation.
  • the probe needles 6 it is possible for the probe needles 6 to extend through this aperture 9 from the top side of the probe holder plate 8 as far as to the test object 5 .
  • An image capturing device 11 is mounted above the viewing aperture 9 in the probe holder plate 8 .
  • This image capturing device 11 comprises a microscope 12 with a lighting device 13 and an objective lens 14 and a video camera 15 .
  • the video camera 15 is connected to an image evaluating unit 16 .
  • the image evaluating unit 16 in turn comprises a computer with suitable analysis software.
  • FIG. 2 shows a design that is analogous to the design described in FIG. 1 .
  • the major distinction between the two embodiments lies in the use of a probe card 17 in FIG. 2 , instead of individual probe needles 6 with separate probe holders 7 .
  • This probe card 17 exhibits its own probe card needles 18 and is held in the aperture 9 by means of a probe card adapter 19 .
  • the image capturing unit as depicted in FIGS. 1 and 2 , is enlarged once again in FIG. 3 and shown as a sectional drawing.
  • the objective lens 14 is provided with a microscope objective lens focusing system 20 .
  • FIGS. 4 to 7 show in greater detail the microscope objective lens focusing system 20 that is used according to the invention.
  • the microscope objective lens focusing system 20 comprises a bottom member 21 , which receives a piezo drive, which is not illustrated in detail.
  • This piezo drive which is made of a material that changes geometrically on applying a voltage, constitutes an electric drive, which is connected via a connector 22 to the image evaluating unit 16 , which contains the control unit (not illustrated in detail) for the piezo drive.
  • the bottom member is provided with an internal thread 23 , into which the objective lens 14 can be screwed.
  • an upper member 24 which can be moved in the axial direction and—on use in the microscope 12 —in the vertical direction in relation to the bottom member 21 and which can be driven by the piezo drive.
  • Said upper member is provided with a threaded shaft 25 . Therefore, the microscope objective lens focusing system 20 can be installed into the microscope 12 , present in a prober 1 , without any major modifications, since it can be screwed with the microscope-sided threaded shaft 25 into the objective thread of the objective holder 26 . Then the internal thread 23 serves to hold the objective lens 14 . As a consequence of the geometrical change in the piezo drive on application of a voltage, the focus of the objective lens 14 is adjusted.
  • This microscope objective lens focusing system 20 is also connected to the image evaluating unit 16 by way of the connector 22 , so that with the software, installed in the image evaluating unit 16 , the microscope objective lens focusing system 20 can adjust the focus of the objective lens very quickly as a function of the images to be captured.
  • the contact pads 27 of the test object 5 are in the state, since the probe needles 6 are not in contact with the contact pads. Hence, it is possible to move the test object in relation to the probe needles 6 into a first focal plane 28 and to move the tips 29 of the probe needles 6 into a second focal plane 30 .
  • the objective lens 14 is moved from a first position 31 , in which the focus 32 is in the first focal plane 28 , into a second position 33 , in which the focus 32 of the objective lens 14 is in the second focal plane. Between these two positions 31 and 33 , the objective lens 14 is then switched back and forth; and the images are projected one over the other, so that the images of both planes appear to be sharp.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Studio Devices (AREA)
  • Microscoopes, Condenser (AREA)
US11/964,747 2006-12-27 2007-12-27 Arrangement and method for image acquisition on a prober Abandoned US20080158664A1 (en)

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US20090179019A1 (en) * 2008-01-16 2009-07-16 International Business Machines Corporation Removing material from defective opening in glass mold
US20090179020A1 (en) * 2008-01-16 2009-07-16 International Business Machines Corporation Removing material from defective opening in glass mold and related glass mold for injection molded solder
US20090185035A1 (en) * 2008-01-18 2009-07-23 Olympus Corporation Microscope system, control method used for microscope system, and recording medium
US20110013011A1 (en) * 2006-12-27 2011-01-20 Suss Microtec Test Systems Gmbh Arrangement and method for focusing a multiplane image acquisition on a prober
US20110141260A1 (en) * 2008-06-17 2011-06-16 Nikon Corporation Microscope apparatus and storage medium storing microscope apparatus control program
DE102009059274A1 (de) * 2009-12-22 2011-06-30 Kraus, Max-Joseph, Dr. med., 82031 Messung der Dynamik der Änderungen von Blutplättchen
US9110131B2 (en) 2010-04-13 2015-08-18 Cascade Microtech, Inc. Method and device for contacting a row of contact areas with probe tips
US20200025823A1 (en) * 2018-07-20 2020-01-23 Formfactor Beaverton, Inc. Probe systems and methods for collecting an optical image of a device under test
CN112435955A (zh) * 2019-08-26 2021-03-02 合肥晶合集成电路股份有限公司 一种晶圆裂片的支撑装置及其固定方法

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110013011A1 (en) * 2006-12-27 2011-01-20 Suss Microtec Test Systems Gmbh Arrangement and method for focusing a multiplane image acquisition on a prober
US8072586B2 (en) * 2006-12-27 2011-12-06 Cascade Microtech, Inc. Arrangement and method for focusing a multiplane image acquisition on a prober
US9254533B2 (en) 2008-01-16 2016-02-09 GlobalFoundries, Inc. Removing material from defective opening in glass mold
US20090179019A1 (en) * 2008-01-16 2009-07-16 International Business Machines Corporation Removing material from defective opening in glass mold
US8800952B2 (en) 2008-01-16 2014-08-12 International Business Machines Corporation Removing material from defective opening in glass mold and related glass mold for injection molded solder
US8237086B2 (en) * 2008-01-16 2012-08-07 International Business Machines Corporation Removing material from defective opening in glass mold
US20090179020A1 (en) * 2008-01-16 2009-07-16 International Business Machines Corporation Removing material from defective opening in glass mold and related glass mold for injection molded solder
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US20090185035A1 (en) * 2008-01-18 2009-07-23 Olympus Corporation Microscope system, control method used for microscope system, and recording medium
US20110141260A1 (en) * 2008-06-17 2011-06-16 Nikon Corporation Microscope apparatus and storage medium storing microscope apparatus control program
US9261699B2 (en) * 2008-06-17 2016-02-16 Nikon Corporation Microscope apparatus and storage medium storing microscope apparatus control program
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DE102009059274A1 (de) * 2009-12-22 2011-06-30 Kraus, Max-Joseph, Dr. med., 82031 Messung der Dynamik der Änderungen von Blutplättchen
US9110131B2 (en) 2010-04-13 2015-08-18 Cascade Microtech, Inc. Method and device for contacting a row of contact areas with probe tips
US20200025823A1 (en) * 2018-07-20 2020-01-23 Formfactor Beaverton, Inc. Probe systems and methods for collecting an optical image of a device under test
US10698025B2 (en) * 2018-07-20 2020-06-30 Formfactor Beaverton, Inc. Probe systems and methods that utilize a flow-regulating structure for improved collection of an optical image of a device under test
CN112435955A (zh) * 2019-08-26 2021-03-02 合肥晶合集成电路股份有限公司 一种晶圆裂片的支撑装置及其固定方法

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US20110181710A1 (en) 2011-07-28

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