US20060042318A1 - Method and apparatus for homogenizing a glass melt - Google Patents

Method and apparatus for homogenizing a glass melt Download PDF

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Publication number
US20060042318A1
US20060042318A1 US10/930,540 US93054004A US2006042318A1 US 20060042318 A1 US20060042318 A1 US 20060042318A1 US 93054004 A US93054004 A US 93054004A US 2006042318 A1 US2006042318 A1 US 2006042318A1
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US
United States
Prior art keywords
chamber
stir chamber
gas flow
gas
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/930,540
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English (en)
Inventor
Steven Burdette
Raymond Fraley
Steven Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to US10/930,540 priority Critical patent/US20060042318A1/en
Assigned to CORNING INCORPORATED reassignment CORNING INCORPORATED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FRALEY, RAYMOND E., BURDETTE, STEVEN R., WAGNER, STEVEN R.
Priority to EP05796761A priority patent/EP1794096A4/en
Priority to JP2007530509A priority patent/JP2008511538A/ja
Priority to KR1020077007481A priority patent/KR20070091601A/ko
Priority to TW094130451A priority patent/TW200619162A/zh
Priority to CNA2005800288450A priority patent/CN101065333A/zh
Priority to PCT/US2005/032952 priority patent/WO2006026787A2/en
Publication of US20060042318A1 publication Critical patent/US20060042318A1/en
Priority to US11/974,873 priority patent/US7735340B2/en
Abandoned legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/18Stirring devices; Homogenisation
    • C03B5/187Stirring devices; Homogenisation with moving elements

Definitions

  • the invention relates generally to a method of reducing contaminants in a glass melt, and more specifically to reducing condensation-formed contaminants during a glass stirring process.
  • One approach for improving the homogeneity of glass is to pass the molten glass through a vertically-oriented stir chamber located downstream of the melter.
  • Such stir chambers are equipped with a stirrer having a central shaft which is rotated by a suitable motor.
  • a plurality of blades extend from the shaft and serve to mix the molten glass as it passes from the top to the bottom of the stir chamber.
  • the present invention is concerned with the operation of such stir chambers without introducing further defects into the resulting glass, specifically, defects arising from condensed oxides.
  • Volatile oxides in a glass stir chamber can be formed from any of the elements present in the glass and stir chamber. Some of the most volatile and damaging oxides are formed from Pt, As, Sb, B, and Sn.
  • Primary sources of condensable oxides in a glass melt include hot platinum surfaces for PtO 2 , and the glass free surface for B 2 O 3 , As 4 O 6 , Sb 4 O 6 , and SnO 2 .
  • glass free surface what is meant is the surface of the glass which is exposed to the atmosphere within the stir chamber.
  • the atmosphere above the glass free surface and which atmosphere may contain any or all of the foregoing, or other volatile materials, is hotter than the atmosphere outside of the stir chamber, there is a natural tendency for the atmosphere above the free glass surface to flow upward through any opening, such as through the annular space between the stirrer shaft and the stir chamber cover. Since the stir chamber shaft becomes cooler as the distance between the stirrer shaft and the glass free surface increases, the volatile oxides contained with the stir chamber atmosphere will condense onto the surface of the shaft if the shaft and/or cover temperature are below the dew point of the oxides. When the resulting condensates reach a critical size they can break off, falling into the glass and causing inclusion or blister defects in the glass product.
  • Heating the shaft above the glass free surface has proven only partially successful in reducing particulate contamination in the glass melt, resulting only in a stratification of the condensation.
  • a method of stirring a glass melt comprising flowing molten glass through a stir chamber, the stir chamber having at least one wall and a cover, the cover having a passage therethrough.
  • the stir chamber further includes a stirrer comprising a shaft which extends through the cover passage, thereby forming an annular gap between the shaft and the cover.
  • a gas is flowed through the annular gap at a rate of at least about 100 sccm (standard cubic centimeters per minute).
  • the gas is flowed at a rate of at least about 400 sccm, more preferably at least about 900 sccm and most preferably at a rate of at least about 1200 sccm.
  • the flow of gas is preferably everywhere downward through the annular gap.
  • the gas flows at a velocity of at least about 0.35 m/s for an annular gap of about 0.25 inches (0.635 cm).
  • the gas is air, although other gases may be used, as appropriate.
  • the method advantageously causes the gas to flow along the stirrer shaft, thereby reducing the condensation of volatile oxides along the shaft at a predetermined rate, which may thereafter dislodge and contaminate the molten glass.
  • a preferred apparatus for practicing the method disclosed herein comprising a stir chamber configured to hold molten glass and a stir chamber cover, the cover defining a passage therethrough, a stirrer having a shaft extending through the cover into the stir chamber, thereby forming an annular gap between the cover and the shaft, one or more gas flow tubes for evacuating the stir chamber, the flow tubes having an end within the stir chamber, the end of the flow tube not extending overtop a surface of the molten glass.
  • annular spacer plate may be positioned between the cover and the stir chamber wall, the spacer plate comprising gas flow passages for evacuating or pressurizing the stir chamber.
  • the gas flow passages may be connected to a manifold.
  • the manifold is in fluid communication with a vacuum system or with a compressor system, depending upon whether or not the stir chamber is to be evacuated or pressurized with a gas.
  • FIG. 1 is a cross sectional view of an exemplary stir chamber according to an embodiment of the present invention showing the chamber cover and the gas flow pipes which enter the region of the chamber above the level of the glass free surface.
  • FIG. 2 illustrates the offset between the center of the inside perimeter of the cover passage and the center of the stirrer shaft.
  • FIG. 3 is a cross sectional view of an exemplary stir chamber according to another embodiment of the present invention showing the stir chamber, the stir chamber cover, and a spacer plate disposed between the chamber and the chamber cover.
  • FIG. 4 is a horizontal cross section view of a spacer plate, including a gas manifold, which may be used between the stir chamber wall and the cover, the spacer plate have passages for evacuating or pressurizing the stir chamber.
  • FIG. 1 illustrates an exemplary apparatus for practicing a method for homogenizing a glass melt according to an embodiment of the present invention.
  • Stir chamber 10 of FIG. 1 includes an inlet pipe 12 and an outlet pipe 14 .
  • molten glass flows into the stir chamber, as indicated by arrow 13 , through inlet pipe 12 , and flows out of the chamber, as shown by arrow 15 , through outlet pipe 14 .
  • Stir chamber 10 includes at least one wall 16 which is preferably cylindrically-shaped and substantially vertically-oriented, although stir chamber may have other shapes such as oval or hexagonal.
  • the stir chamber wall includes an inner lining 18 comprising platinum or a platinum alloy.
  • Other lining materials having similar refractory properties, including resistance to corrosion, as well as electrical conductivity, may be substituted.
  • Glass inlet pipe 12 is located at or near the bottom of stir chamber 10 whereas glass outlet pipe 14 is located near the top of the stir chamber.
  • inlet pipe 12 and outlet pipe 14 may be reversed, such that the molten glass flows into the stir chamber from the top and flows out through the bottom of the stir chamber.
  • Intermediate positions for the inlet and outlet pipes may also be employed provided adequate stirring (i.e. the desired amount of homogenization) is achieved.
  • Stir chamber 10 further includes a stirrer 20 comprising shaft 22 and a plurality of blades 24 which extend outward from the shaft towards wall 16 of the stir chamber.
  • Shaft 22 is typically substantially vertically-oriented and rotatably mounted such that blades 24 which extend from the lower portion of the shaft rotate within the stir chamber at least partially submerged below free surface 26 of the molten glass.
  • the molten glass surface temperature is typically in the range between about 1400° C. to 1600° C., but may higher or lower depending upon the glass composition.
  • Stirrer 20 is preferably composed of platinum, but may be a platinum alloy, or a dispersion-strengthened platinum or platinum alloy (e.g., a zirconia-strengthened platinum alloy).
  • stir chamber 10 may include a drain tube 28 for removing glass from the stir chamber during, for example, shut down of the system.
  • the stir chamber may include an optional sump 30 .
  • Stirrer 20 is rotated by a suitable drive.
  • stirrer 20 may be rotated by an electric motor (not shown) through appropriate gearing or by a belt drive.
  • stir chamber 10 is covered by chamber cover 32 .
  • Chamber cover 32 may rest directly upon wall 16 , or high temperature sealing material may be disposed between the wall and the cover, the seal between the wall and the cover in any event being sufficient to prevent appreciable gas flow between the cover and the wall.
  • Cover 32 may also include cover heater 34 for heating the chamber cover and therefore helping to control the free surface temperature of the glass melt flowing through the stir chamber.
  • Cover heater 34 typically includes a resistance coil, typically comprising platinum, imbedded within the chamber cover refractory material. The resistance coil is supplied with an electric current, preferably alternating current, although direct current may be applied, to thereby heat the chamber cover.
  • the chamber cover is typically between about 2 inches (5.08 cm) and 3 inches (7.62 cm) from the free surface of the glass melt, but this distance may be greater, as needed.
  • volume 35 is defined between the stir chamber cover 32 , stir chamber wall 16 and glass free surface 26 .
  • Chamber cover 32 also includes a passage through which stirrer shaft 22 passes.
  • the inside surface of the passage may include a lining which forms casing 36 .
  • casing 36 be resistant to corrosion due to the high temperature and the corrosive gases and condensates which may develop from the molten glass.
  • Casing 36 typically comprises platinum or a platinum alloy. Shaft 22 passing through the chamber cover passage forms annular gap 38 between the outside surface of shaft 22 and the inside surface of either the passage or, should casing 36 be employed, the annular gap is formed between the outside surface of the shaft and the inside surface of the casing.
  • shaft heater 40 preferably comprises a resistance heating element.
  • the heating element is preferably comprised of platinum, but may be a platinum alloy.
  • annular gap 38 eliminates contact between the rotating shaft and the casing, heaters, insulation and cover.
  • the center of the inside circular perimeter of the casing i.e. the center circumscribed by the annular space, is offset from the center of the shaft by no more than about 0.15 inches (0.381 cm), more preferably no more than about 0.12 inches (0.305 cm), and most preferably by no more than about 0.04 inches (0.102 cm). This is illustrated by FIG. 2 showing offset ⁇ between the shaft center and the annulus center.
  • width L of the annular gap is at least about 0.25 inches (0.635 cm), but may be greater than about 0.5 inches (1.27 cm).
  • At least one flow tube 50 extends from outside stir chamber 10 to the inside of stir chamber 10 , i.e. volume 35 .
  • Each flow tube should be constructed from a material capable of withstanding the high temperatures present in the chamber, typically in excess of 1400° C., without substantial degradation due to contact with the oxide condensates.
  • Each flow tube typically has an inside diameter of at least about 0.5 inches (1.27 cm), and is preferably comprised of platinum, although other materials, such as a platinum alloy, may be used, provided the material exhibits a resistance to corrosion or other forms of degradation (such as cracking) which may result from the harsh stir chamber environment.
  • end 52 of gas flow tube 50 which is within stir chamber 10 , is positioned such that it does not extend directly over glass free surface 26 within the chamber.
  • FIG. 1 depicts two gas flow tubes. As shown by FIG. 1 , gas flow tube ends 52 may terminate within an annular region overtop the walls of the stir chamber rather than terminating in a position above free surface 26 of the glass melt.
  • condensate which may accumulate at gas flow tube ends 52 , and which may subsequently dislodge, is prevented from falling onto the glass free surface 26 . Condensate falling onto the free surface of the glass melt may result in contamination of the melt, and be manifest as inclusions or other defects within the glass article produced from the melt.
  • Pe the Peclet number
  • U the downward gas velocity in m/s
  • L the width of the annulus between the cover casing and the outer surface of stir shaft 22 in meters
  • D the oxide diffusivity in m 2 /s.
  • Condensation of volatile oxides along the stirrer shaft, and in particular within and above annulus 38 surrounding the stir shaft can be eliminated by causing a suitably high downward gas velocity U.
  • a vacuum is drawn on volume 35 above glass free surface 26 through the at least one gas flow tube 50 of the apparatus by a suitable vacuum system (not shown), such as by a vacuum pump and associated piping.
  • a suitable vacuum system such as by a vacuum pump and associated piping.
  • one end of gas flow tube 50 extends into volume 35 within the stir chamber, while the opposite end is connected to a suitable vacuum system, the vacuum system therefore being in fluid communication with the inside of the stir chamber via gas flow tube 50 .
  • the vacuum pump may be, for example, a venturi pump driven by compressed air, although other vacuum pumps as are known in the art may be used.
  • the surfaces of the gas flow tube are at a temperature lower than the temperature of the molten glass surface, and preferably lower than the dew point of the volatile oxides within volume 35 so that volatized oxides removed from the stir chamber through gas flow tubes 50 may condense within the flow tubes rather than on shaft 22 or on the inner surface of casing 36 .
  • the dew points of the volatile oxides in the volume above the glass free surface depend on the glass composition and the temperatures of the surfaces present within volume 35 . Calculations of the dew points of oxides along the shaft can be made based on the temperature profile along the shaft, the diffusivity of a particular oxide, the gas flow velocity U through annular gap 38 , and the dew point vs. concentration curve for the oxide. Dew points for common volatile oxides may be as low as 559° C. for As 4 O 6 to as high as 1455° C. for PtO 2 .
  • a gas flow rate may be chosen which will maintain the oxide dew points below the shaft temperature at all points along the shaft. Since it is preferable that volatilized oxides condense within the gas flow tube rather than along shaft 22 , gas flow tube 50 may be designed such that individual flow tubes are replaceable and may further include filtration to keep condensed oxides from fouling the vacuum system. Filtration may comprise a stainless steel mesh or wool in a suitable can or container through which the gas flows, such as are commercially available, for example, through Nor-Cal Products, Inc.
  • the pressure differential between the reduced pressure within volume 35 and the atmospheric pressure outside of the tank causes a flow of atmospheric gas from outside the stir chamber through annular gap 38 into volume 35 .
  • the velocity and volume of the gas flow is preferably sufficiently large that gas flow is everywhere downward in annulus 38 (for the case where a vacuum is drawn on volume 35 ) in spite of a destabilizing temperature gradient which may be present. Additionally, the gas velocity should be sufficiently large so as to eliminate transport of condensable materials upward, through the annular gap, by diffusion.
  • the flow of atmospheric gas through annular gap 38 is at least about 100 sccm, more preferably between about 400 sccm and about 900 sccm, although flow rates may be as high as 1600 sccm.
  • spacer plate 56 may be interposed between stir chamber wall 16 and cover 32 .
  • Spacer plate 56 comprises at least one gas flow passage 58 through the plate which serves the same function as the gas flow tubes in the previous embodiment.
  • gas flow tubes 50 may not be required.
  • Spacer plate 56 preferably contains a plurality of gas flow passages 58 disposed about the circumference of the plate. The at least one gas flow passage may be connected individually to a vacuum system or a compressor system.
  • manifold 60 may surround the spacer plate and connect the at least one gas flow passage to the vacuum system or the compressor system, depending upon whether a positive pressure or a negative pressure, with respect to atmospheric pressure, is desired in volume 35 ′ defined between cover 32 , glass surface 26 and spacer 56 .
  • the use of a manifold may be desired when multiple gas flow passages are utilized.
  • a filter system is desirable to remove condensate which may accumulate within the gas flow passages or downstream piping.
  • the apparatus of FIG. 3 is shown without gas flow tubes 50 , however gas flow tubes 50 may also be used if desired.
  • FIG. 4 shows spacer plate 56 and manifold 60 as a horizontal cross section, looking down on the spacer plate. Arrow 62 indicates gas flow into or out of the manifold, depending upon whether manifold 60 is connected to a vacuum system for evacuating the stir chamber, or if the manifold is connected to a compressor system for pressurizing the stir chamber.
  • the gas flow passage openings 64 which open into volume 35 of the stir chamber are set back from the inside surface of stir chamber wall 16 so that any volatile oxides which may condense around the openings does not fall into the molten glass within the stir chamber.
  • a filter system as previously described may be suitably installed, for example, in pipe 66 connecting manifold 60 with the vacuum system (no shown).

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
US10/930,540 2004-08-31 2004-08-31 Method and apparatus for homogenizing a glass melt Abandoned US20060042318A1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
US10/930,540 US20060042318A1 (en) 2004-08-31 2004-08-31 Method and apparatus for homogenizing a glass melt
EP05796761A EP1794096A4 (en) 2004-08-31 2005-08-31 METHOD AND DEVICE FOR HOMOGENIZING A GLASS MELT
JP2007530509A JP2008511538A (ja) 2004-08-31 2005-08-31 溶融ガラスの均質化方法および装置
KR1020077007481A KR20070091601A (ko) 2004-08-31 2005-08-31 글래스 멜트를 균질화하는 방법 및 장치
TW094130451A TW200619162A (en) 2004-08-31 2005-08-31 Method and apparatus for homogenizing a glass melt
CNA2005800288450A CN101065333A (zh) 2004-08-31 2005-08-31 均质化玻璃熔体的方法和装置
PCT/US2005/032952 WO2006026787A2 (en) 2004-08-31 2005-08-31 Method and apparatus for homogenizing a glass melt
US11/974,873 US7735340B2 (en) 2004-08-31 2007-10-16 Method and apparatus for homogenizing a glass melt

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/930,540 US20060042318A1 (en) 2004-08-31 2004-08-31 Method and apparatus for homogenizing a glass melt

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US11/974,873 Continuation US7735340B2 (en) 2004-08-31 2007-10-16 Method and apparatus for homogenizing a glass melt

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US20060042318A1 true US20060042318A1 (en) 2006-03-02

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US11/974,873 Expired - Fee Related US7735340B2 (en) 2004-08-31 2007-10-16 Method and apparatus for homogenizing a glass melt

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US (2) US20060042318A1 (zh)
EP (1) EP1794096A4 (zh)
JP (1) JP2008511538A (zh)
KR (1) KR20070091601A (zh)
CN (1) CN101065333A (zh)
TW (1) TW200619162A (zh)
WO (1) WO2006026787A2 (zh)

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US20090025428A1 (en) * 2007-07-25 2009-01-29 Karin Naumann Method and device for homogenizing a glass melt
WO2009108320A1 (en) * 2008-02-29 2009-09-03 Corning Incorporated Methods and apparatus for reducing platinum-group defects in sheet glass
US20100080078A1 (en) * 2008-09-29 2010-04-01 Martin Herbert Goller Method and apparatus for homogenizing a glass melt
US20110016919A1 (en) * 2009-07-27 2011-01-27 Martin Herbert Goller Apparatus and methods for making glass
US20110126592A1 (en) * 2009-11-30 2011-06-02 Gilbert De Angelis Devices for Controlling Atmosphere over Molten-Glass Free-Surfaces
WO2011066248A2 (en) * 2009-11-30 2011-06-03 Corning Incorporated Method and apparatus for reducing condensate related defects in a glass manufacturing process
US20120042693A1 (en) * 2010-08-23 2012-02-23 Hojong Kim Method and apparatus for homogenizing a glass melt
US20120125051A1 (en) * 2010-11-23 2012-05-24 Richard Bergman Delivery apparatus for a glass manufacturing apparatus and methods
US8499584B2 (en) * 2007-08-08 2013-08-06 Corning Incorporated Molten glass delivery apparatus for optical quality glass
US20140117017A1 (en) * 2012-10-29 2014-05-01 Gilbert De Angelis Stir chambers for stirring molten glass and high-temperature sealing articles for the same
CN104944739A (zh) * 2014-03-31 2015-09-30 安瀚视特控股株式会社 玻璃基板的制造方法以及玻璃基板的制造装置
US20150360990A1 (en) * 2014-06-13 2015-12-17 Schott Ag Method and device for producing a glass article from a glass melt
CN105246843A (zh) * 2013-01-24 2016-01-13 康宁股份有限公司 用于精制熔融的玻璃的方法和设备
US9776904B2 (en) * 2014-06-06 2017-10-03 Owens-Brockway Glass Container Inc. Process and apparatus for refining molten glass
CN113772921A (zh) * 2021-10-08 2021-12-10 大城县洪海保温材料有限公司 保温材料熔融装置
US20220017398A1 (en) * 2018-11-21 2022-01-20 Corning Incorporated Method for decreasing bubble lifetime on a glass melt surface
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DE102006060972B4 (de) * 2006-12-20 2012-12-06 Schott Ag Verfahren und Vorrichtung zum Homogenisieren einer Glasschmelze, sowie Verwendung
US8256951B2 (en) * 2006-12-21 2012-09-04 Corning Incorporated Stirrers for minimizing erosion of refractory metal vessels in a glass making system
DE102008017045B9 (de) * 2008-04-03 2012-07-05 Umicore Ag & Co. Kg Rührsystem und Verfahren zum Homogenisieren von Glasschmelzen
US8087262B2 (en) * 2008-11-18 2012-01-03 Corning Incorporated Platinum condensation abatement by electrostatic precipitation
CN101559337B (zh) * 2009-05-27 2012-01-25 哈尔滨工业大学 一种搅拌混料装置
TWI494283B (zh) * 2010-02-25 2015-08-01 Corning Inc 製造玻璃物件之設備及方法
US8528365B2 (en) 2011-02-24 2013-09-10 Corning Incorporated Apparatus for removing volatilized materials from an enclosed space in a glass making process
CN102211851A (zh) * 2011-04-11 2011-10-12 安徽华强玻璃科技有限公司 水晶玻璃窑炉料道搅拌埚
CN103221347B (zh) * 2011-11-18 2016-08-03 安瀚视特股份有限公司 玻璃的制造方法及搅拌装置
CN102583954B (zh) * 2012-02-22 2013-11-20 成都中光电科技有限公司 用于降低铂金通道排气孔挥发物结石的装置及制造方法
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CN203625224U (zh) * 2013-09-17 2014-06-04 安瀚视特控股株式会社 熔融玻璃处理装置及玻璃基板的制造装置
JP6682519B2 (ja) 2014-09-29 2020-04-15 コーニング インコーポレイテッド ガラス導入管の環境制御
KR101798719B1 (ko) * 2014-11-24 2017-11-16 주식회사 엘지화학 Lcd 유리 제조용 교반기, 이의 제조방법 및 lcd 유리의 제조방법
CN109641772B (zh) 2016-08-24 2022-04-26 康宁股份有限公司 玻璃制造设备和方法
CN106746497B (zh) * 2016-12-15 2021-02-26 东旭光电科技股份有限公司 铂金通道搅拌桶和铂金通道搅拌桶装置
US11708288B2 (en) * 2016-12-22 2023-07-25 Nippon Electric Glass Co., Ltd. Stirrer and method for manufacturing glass plate
CN107382030B (zh) * 2017-09-08 2023-08-22 中建材玻璃新材料研究院集团有限公司 一种用于电子显示玻璃铂金通道的密封结构
CN107793011A (zh) * 2017-09-13 2018-03-13 彩虹(合肥)液晶玻璃有限公司 一种减少熔融玻璃中凝聚污染物的装置和方法
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CN104944739A (zh) * 2014-03-31 2015-09-30 安瀚视特控股株式会社 玻璃基板的制造方法以及玻璃基板的制造装置
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TW200619162A (en) 2006-06-16
EP1794096A4 (en) 2008-02-13
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US20080041109A1 (en) 2008-02-21
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CN101065333A (zh) 2007-10-31
WO2006026787A3 (en) 2007-05-31

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