US20060012875A1 - Microscope with increased resolution - Google Patents

Microscope with increased resolution Download PDF

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Publication number
US20060012875A1
US20060012875A1 US10/967,343 US96734304A US2006012875A1 US 20060012875 A1 US20060012875 A1 US 20060012875A1 US 96734304 A US96734304 A US 96734304A US 2006012875 A1 US2006012875 A1 US 2006012875A1
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Prior art keywords
microscope
sample
grid
microscope according
illumination
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US10/967,343
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English (en)
Inventor
Ralf Wolleschensky
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Jenoptik AG
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Carl Zeiss Jena GmbH
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Assigned to CARL ZEISS JENA GMBH reassignment CARL ZEISS JENA GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: WOLLESCHENSKY, RALF
Publication of US20060012875A1 publication Critical patent/US20060012875A1/en
Priority to US11/698,279 priority Critical patent/US7468834B2/en
Priority to US12/973,130 priority patent/USRE43702E1/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives

Definitions

  • FIG. 1 schematically shows a laser scanning microscope 1 comprising essentially five components: a radiation source module 2 that generates excitation radiation for laser scanning microscopy; a scanning module 3 that conditions the excitation radiation and suitably deflects it for scanning over a sample; a microscope module 4 , for the sake of simplicity shown only schematically, that directs the scanning radiation prepared by the scan module in a microscopic beam path onto a sample; and a detector module 5 that receives and detects optical radiation from the sample.
  • Detector module 5 can, as shown in FIG. 1 , be configured so as to be spectrally multichanneled. Concerning the general description of a laser scanning microscope that scans point by point, reference is made to DE 19702753A1 which thus is an integral part of the present description.
  • Radiation source module 2 generates illumination radiation that is suitable for the laser scanning microscopy, i.e., in particular radiation that can trigger fluorescence.
  • the radiation source module has several radiation sources for this purpose.
  • two lasers 6 and 7 are provided in radiation source module 2 , downstream of which a light valve 8 and an attenuator 9 is arranged and which couple their radiation via a coupling point 10 into a fiber optical waveguide 11 .
  • Light valve 8 acts as a deflector with which a reduction of radiation can be effected without it being necessary to switch off the operation of the lasers in laser unit 6 or 7 themselves.
  • Light valve 8 by way of example is configured as an AOTF which in order to switch off radiation deflects the laser beam prior to injection in optical fiber waveguide 11 in the direction of a not-depicted light trap.
  • laser unit 6 has 3 lasers B, C, D, while laser unit 7 contains only one laser A.
  • the depiction thus is exemplary for a combination of single and multiple wave-length lasers which individually or also jointly are coupled to one or more fibers. The coupling can also take place over several fibers simultaneously, the radiation of which subsequently is mixed through a color uniter following passage through an adapting optic. It is thus possible to use extremely varied wave lengths or ranges for the excitation radiation.
  • the radiation coupled into fiber optic waveguide 11 is drawn together by means of movable collimation optics 12 and 13 through radiation uniting mirrors 14 , 15 and is changed with respect to the radiation profile in a beam-forming unit.
  • Collimators 12 , 13 collimate the radiation brought in from radiation source module 2 into scan module 3 into an infinite beam path. This takes place advantageously in each case with the aid of a single lens which as a result of moving along the optical axis under the control of (a not-depicted) central steering unit has a focusing function in that the distance between collimator 12 , 13 and the respective end of the fiber optic is modifiable.
  • the beam-forming unit From the radially symmetric Gaussian profiled laser beam, as is present after beam uniting mirrors 14 , 15 , the beam-forming unit, which will be explained in detail later, generates a linear beam that no longer is radially symmetrical but rather is suited in cross section to generate a rectangular illuminating field.
  • This illuminating beam which is also designated as being line-shaped serves as triggering radiation and is conducted via a main color splitter 17 and a yet to be described zoom optic to a scanner 18 .
  • the main color splitter will be discussed later, but it should be mentioned at this point that it has the function of separating the sample radiation returning from microscope module 4 from the triggering radiation.
  • Scanner 18 deflects the line-shaped beam in one or two axes, after which it is bundled through a scanning objective lens 19 and a tube-shaped lens and an objective lens of microscope module 4 into a focus 22 which is situated in a preparation or in a sample. Optical imaging takes place such that the sample is illuminated in a focal line with triggering radiation.
  • Fluorescence radiation excited in this manner in the line-shaped focus arrives through objective lens and tubular lens of microscope module 4 and scanning objective lens 19 back to scanner 18 so that in the reverse direction there again is a resting beam behind scanner 18 . It is therefore also said that the scanner 18 de-scans the fluorescence radiation.
  • Main color splitter 17 allows the fluorescence radiation in other wave length ranges than the excitation radiation to pass so that it can be redirected via a redirecting mirror 24 in the detector module 5 and can then be analyzed.
  • detector module 5 has several spectral channels, i.e., the fluorescence radiation coming from redirecting mirror 24 is split in a secondary color splitter 25 into two spectral channels.
  • Each spectral channel has a slit diaphragm 26 which realizes a confocal or partially confocal image with respect to sample 23 and the size of which slit diaphragm establishes the depth of focus with which the fluorescence can be detected.
  • the geometry of slit diaphragm 26 thus determines the cutting plane within the (thick) preparation from which fluorescence radiation is detected.
  • Slit diaphragm 26 is arranged behind a blocking filter 27 that blocks out undesired excitation radiation which entered into detector module 5 .
  • the radiation separated out in this manner which originated from a certain depth section and was fanned out linearly is then analyzed by a suitable detector 28 .
  • the second spectral detection channel which likewise comprises a slit diaphragm 26 a , a blocking filter 27 a , and a detector 28 a , is also constructed analogous to the depicted color channel.
  • a confocal slit aperture in detector module 5 is only by way of example.
  • a single-point scanner can of course also be realized.
  • Slit diaphragms 26 , 26 a are then replaced by apertured diaphragms and the beam-forming unit can be omitted.
  • all optics are configured radially symmetrically for such a construction style.
  • any desired multiple-point arrangements such as point-cloud or Nipkow-disk concepts can be used as will be explained later with the aid of FIGS. 3 and 4 .
  • the Gaussian beam bundles present behind the movable, i.e., sliding collimators 12 and 13 are united through a ladder of mirrors in the form of beam-uniting mirrors 14 , 16 and then in the construction depicted with confocal slit diaphragm are converted into a beam bundle with rectangular beam cross section.
  • a cylinder telescope 37 that is arranged behind an aspherical unit 38 which is followed by cylinder optics 39 is utilized in the beam-forming unit.
  • the illumination arrangement with aspherical unit 38 can serve the purpose of uniform filling of a pupil between a tubular lens and an objective lens. In this way the optical resolution of the objective lens can be fully utilized.
  • This variant thus is also advantageous in a single-point or multiple-point scanning microscope system, for example in a line scanning system (in the case of the latter in addition to the axis in which focusing upon or into the sample takes place).
  • the excitation radiation by way of example conditioned linearly is directed onto main color splitter 17 .
  • the latter is configured as a spectrally neutral splitter mirror in accordance with DE 10257537 A1, the full disclosure content of which is incorporated here.
  • the term “color splitter” thus also comprises non-spectrally acting splitter systems.
  • a homogenous neutral splitter for example 50/50, 70/30, 80/20, or the like
  • a dichroitic splitter can also be used.
  • the main color splitter preferably is provided by a mechanism which facilitates an easy change, for example through a corresponding splitter wheel that contains individual interchangeable splitters.
  • the dichroitic main color splitter is particularly advantageous if coherent, i.e., directional radiation is to be detected such as, for example, reflection, Stokesian or anti-Stokesian Raman spectroscopy, coherent Raman processes of relatively high order, general parametric non-linear optical processes such as second harmonic generation, third harmonic generation, sum frequency generation, and double and multiple photon absorption or fluorescence.
  • coherent, i.e., directional radiation such as, for example, reflection, Stokesian or anti-Stokesian Raman spectroscopy, coherent Raman processes of relatively high order, general parametric non-linear optical processes such as second harmonic generation, third harmonic generation, sum frequency generation, and double and multiple photon absorption or fluorescence.
  • Several of these methods of non-linear optical spectroscopy require the use of two or more laser beams which are superimposed collinearly. In so doing, the depicted beam unification of the radiation of several lasers proves to be particularly advantageous.
  • the dichroitic beam divider which is widely
  • the excitation radiation or illumination radiation is brought to scanner 18 through motor-controlled zoom optics 41 .
  • zoom optics 41 are advantageous in which the pupil position remains in a continuous tuning process during adjustment of the focus location and of the imaging scale.
  • the three motorized degrees of freedom depicted in FIG. 1 , symbolized by arrows, of zoom optics 41 correspond precisely to the number of degrees of freedom which are provided for adaptation of the three parameters imaging scale, focus location, and pupil location.
  • zoom optics 41 at the exit-side pupil of which a fixed diaphragm 42 is arranged.
  • diaphragm 42 can also be predetermined through the limitation of the mirror surface of scanner 18 .
  • Output-side diaphragm 42 with zoom optics 41 causes a predefined pupil diameter to always be imaged on scanning objective lens 19 independent of the setting of the zoom enlargement.
  • the objective lens pupil continues to be fully illuminated regardless of the setting of zoom optics 41 .
  • the use of a self-contained diaphragm 42 advantageously prevents the occurrence of undesired scatter radiation in the area of scanner 18 .
  • cylinder telescope 37 which is likewise motorized and is arranged in front of aspherical unit 38 .
  • this is selected as a result of a compact construction but does not have to be such.
  • cylinder telescope 37 is automatically swung into the optical beam path. If zoom objective lens 41 is made smaller, incomplete illumination of aperture diaphragm 42 is prevented. Swivelable cylinder telescope 37 thus ensures that even at zoom factors smaller than 1, i.e., independent of the setting of zoom optics 41 an illumination line of constant length is always present at the site of the objective lens pupil. In comparison to a simple visual field zoom, laser performance losses in the illumination beam are thus avoided.
  • remote controllable adjustment elements are also provided in detector module 5 of the laser scanning microscope of FIG. 1 .
  • round optics 44 as well as cylinder optics 39 by way of example are provided in front of the slit diaphragm and cylinder optics 39 are provided directly in front of detector 28 , each of which can be shifted in axial direction by motor.
  • correction unit 40 In addition to compensation, a correction unit 40 is provided which will be described briefly below.
  • blocking filter 27 is arranged in front of second cylinder lens 39 , blocking filter 27 having suitable spectral properties in order to allow only the desired fluorescence radiation to reach detector 28 , 28 a.
  • a change of color splitter 25 of blocking filter 27 unavoidably is accompanied by a certain tilt error or wedge error upon swiveling into place.
  • the color splitter can cause an error between the sample range and slit diaphragm 26
  • blocking filter 27 can cause an error between slit diaphragm 26 and detector 28 .
  • a plane-parallel plate 40 is arranged between round optics 44 and slit diaphragm 26 , i.e., in the imaging beam path between sample and detector 28 which under the control of a controller can be brought into various inclination positions.
  • Plane-parallel plate 40 in addition is adjustably mounted in a suitable holding device.
  • FIG. 2 shows how with the aid of zoom optics 41 , a region of interest ROI can be selected within the maximum scan field SF which is available. If one allows the steering of scanner 18 to be such that the amplitude does not change, as is required by way of example for resonance scanners, an enlargement greater than 1.0 set at the zoom optics will cause a narrowing of the selected region of interest ROI centered around the optical axis of scan field SF.
  • Resonance scanners are described by way of example in Pawley, Handbook of Biological Confocal Microscopy, Plenum Press, 1944, pages 461 ff.
  • an embodiment form is advantageous which provides in a pupil of the beam path between main color splitter 17 and sample 23 an Abbe-König prism that as is known results in a rotation of the image field. The latter is also picked up again in the direction of the detector.
  • FIG. 3 shows a further possible construction for a laser scanning microscope 1 in which a Nipkow disk approach is realized.
  • Light-source module 2 which is depicted in FIG. 3 in greatly simplified form, illuminates a Nipkow disk 64 , as it is described by way of example in U.S. Pat. No. 6,028,360, WO 88 079695, or DE 2360197 A1, via a minilens array 65 through main color splitter 17 .
  • the pinholes of the Nipkow disk which are illuminated via minilens array 65 are depicted in the sample situated in microscope module 4 .
  • zoom optics 41 are again provided.
  • Nipkow scanner in contrast to the construction of FIG. 1 , illumination takes place in the passage through main color splitter 17 and the beam to be detected is reflected out.
  • detector 28 in contrast to FIG. 2 detector 28 is now configured for spatial resolution so that the multiple-point illumination achieved with Nipkow disk 64 is also scanned correspondingly parallel.
  • suitably fixed optics 63 with positive refracting power are arranged between Nipkow disk 64 and zoom optics 41 which convert the beam exiting in divergent manner through the pinholes of Nipkow disk 64 into suitable bundle diameter.
  • Main color splitter 17 for the Nipkow configuration of FIG. 3 is a classic dichroitic beam splitter, i.e., not the beam splitter mentioned above with slit-shaped or point-shaped reflecting region.
  • Zoom optics 41 correspond to the construction explained above, with scanner 18 , of course, being made superfluous by Nipkow disk 64 . It can nevertheless be provided if one wishes to make the selection explained with the aid of FIG. 2 of a region ROI. The same applies to the Abbe-König prism.
  • FIG. 4 An alternative approach with multiple-point scanning is shown schematically in FIG. 4 in which several light sources beam obliquely into the scanner pupil.
  • zoom optics 41 for imaging between main color splitter 17 and scanner 18 , a zoom function can be realized as depicted in FIG. 2 .
  • FIG. 2 Through simultaneous beaming of light bundles at various angles in a plane conjugated to the pupil, light spots are generated in a plane conjugated to the objective lens plane which simultaneously are brought by scanner 18 over a subregion of the entire object field.
  • the image formation takes place through evaluation of all subimages on a spatially resolving matrix detector 28 .
  • Another possible embodiment form is multiple point scanning as described in U.S. Pat. No. 6,028,306, the disclosures of which are incorporated here in full.
  • a spatially resolving detector 28 is provided. The sample is then illuminated through a multiple-point light source which is realized through a beam expander with downstream microlens array which illuminates a multiple aperture plate such that a multiple-point light source is thereby realized.
  • FIG. 5 shows a light source LQ 2 which is arranged behind a grid G.
  • [Light source LQ 2 ] can be united via a splitter T with a light source LQ 1 for excitation of fluorescence. Both light sources are depicted through cylinder optics ZL as a line on the sample.
  • LQ 1 generates a homogenous line on/in the sample.
  • LQ 2 generates a periodically modulated line.
  • the MDB separates the illumination from the detection.
  • the MDB can be configured as a dichroitic color splitter or as a strip mirror corresponding to DE102575237.
  • the MBD [sic] must be arranged in the vicinity of a pupil plane of the microscope arrangement.
  • the mirroring in of LQ 1 and of the zeroth order of LQ 2 it has a centrally arranged strip mirror (along the y-axis), and for LQ 2 it has two strip mirrors arranged decentrally along the y axis corresponding to the grid frequency.
  • a scanner P 2 serves to move the illumination line over sample PR. Also arranged are scanning optics SO, tubular lens TL, objective lens L in same beam path as well as pinhole optics PO, filter, and detector or slit diaphragm in the detector beam path.
  • LQ 1 and LQ 2 are connected to a control unit for synchronization of the sample illumination with LQ 1 and LQ 2 .
  • FIG. 6 depicts how an interference field of the ⁇ 1 st , 0 th , or 1 st order is formed at an amplitude grid G in transmission during irradiation with laser light. If these interference-capable fields are depicted in a sample linearly, by way of example, a Talbot structure (literature: Talbot effect) arises in the Z direction. The Talbot effect occurs upon the bending of coherent light at a planar periodic structure of period d.
  • the distance between the Talbot planes is equal to the depth resolution of the microscope objective lens.
  • LQ 2 in combination with the grid advantageously serves to suppress fluorescent processes (Lit.: S. W. Hell and J. Wichmann, Opt. Lett. 19, 780; 1994).
  • Depopulation mechanisms can by way of example be the stimulated emission (Lit.: T. A. Klar, M. Dyba, and S. W. Hell; Appl. Phys. Let. Vol 78, No.: 4, 393, 2001), the depopulation of the ground state or the purposeful switching of dyes into various emission/absorption conditions.
  • the beam from LQ 1 serves to excite fluorescence,
  • a beam line of LQ 1 is presented in X-Z direction which illuminates the sample homogenously in the direction of the arrow along the X axis.
  • the depth resolution of the objective lens preferably is set identical to the distance between the Talbot planes.
  • the fluorescence activity of the dye molecules is suppressed in the region of the black areas (grid distribution) through illumination patterns in beam 1 (from LQ 2 ) generated by means of grids.
  • LQ 1 and LQ 2 are advantageously pulsed for this purpose.
  • the dye With a pulse from LQ 1 , the dye is first excited. Before the life of the fluorescence is over (in the nanoseconds range), the de-excitation of the fluorescence molecules by the light distribution of LQ 2 takes place. After this, detection of the fluorescence photons takes place through spontaneous emission of the remaining excited fluorescence molecules. Following this, a new excitation can be homogenously effected in a new cycle with a pulse of LQ 1 .
  • the excitation of the fluorescence molecules takes place in the regions previously not irradiated as a result of the light distribution of LQ 1 .
  • the fluorescence photons are detected as a result of spontaneous emission in the regions previously not irradiated.
  • the dye Upon the switching of the dye properties with the illumination structure of LQ 2 , the dye is illuminated until all dye molecules in the region of the illumination structure of LQ 2 are switched “dark.” Following this in the period of time in which the dye is present with these altered properties, the fluorescence molecules in the regions not previously radiated are excited through the light distribution of LQ 1 , and the fluorescence photons generated through spontaneous emission are detected.
  • the depth resolution of the objective lens can in addition be reduced to a region smaller than d (distance between the Talbot levels).
  • SPEM method according to the state of the art can be utilized (Lit.: Saturated patterned excitation microscopy, J. Opt. Soc. Am. A, Vol 19, No. 8, 2002).
  • a simultaneous structuring in axial and lateral direction takes place.
  • the simultaneous structuring in lateral and axial direction takes place through the interferometric superimposition of 3 waves ( ⁇ 1, 0, +1) which are planar in at least one axis.
  • the generation of the 3 degrees can take place in various manners, by way of example through radiation of an amplitude grid with a planar wave.
  • special beam splitter arrangements can be utilized (Lit.: High efficiency beam splitter for multifocal multiphoton microscopy, J. of. Microscopy, Vol. 201, Pt3, 2001, page 1), with then only 3 degrees are generated or used.
  • the described invention represents a significant expansion of the application possibilities of fast confocal laser scanning microscopes.
  • the significance of such a further development can be deduced with the aid of the standard literature of cellular biology and the rapid cellular and subcellular processes described there 1 and the utilized investigation methods with a large number of dyes 2 .
  • the invention is particularly significant for the following processes and events:
  • the described invention is suitable among other things for the investigation of development processes which are distinguished above all by dynamic processes in the range of tenths of a second up to hours.
  • Exemplary applications on the level of associations of cells and of entire organisms are described here by way of example:
  • the described invention is excellently suited for investigation of intercellular transport events since in such investigations quite small motile structures, for example proteins, with high speed (for the most part in the range of hundredths of a second) must be represented.
  • applications such as FRAP and ROI bleaching are also often utilized. Examples of such studies are described here by way of example:
  • the described invention is particularly suited for the representation of molecular and other subcellular interactions.
  • very small structures with high speed in the range of hundredths of a second
  • indirect techniques such as FRET with ROI bleaching also must be used. Exemplary applications are described here:
  • the described invention is outstandingly suited for the investigation of for the most part extremely fast signal transmission events. These for the most part neurophysiologic events place the highest of requirements for temporal resolution since the activities mediated through ions take place in the range of hundredths of a second to smaller than a thousandth of a second. Exemplary applications of investigations in the muscular or nerve system are described below:

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US12/973,130 USRE43702E1 (en) 2004-07-16 2010-12-20 Microscope with heightened resolution and linear scanning

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WO2014049127A1 (fr) 2012-09-28 2014-04-03 Carl Zeiss Microscopy Gmbh Microscope confocal à balayage multispot avec éclairage incident
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US20180202935A1 (en) * 2005-05-25 2018-07-19 Massachusetts Institute Of Technology Multifocal imaging systems and method
US10222599B2 (en) 2012-01-18 2019-03-05 Nikon Corporation Structured illuminating apparatus, structured illuminating microscopy apparatus, and structured illuminating method
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DE102006047912A1 (de) 2006-10-06 2008-04-10 Carl Zeiss Microimaging Gmbh Verfahren und Anordnung zur parallelisierten mikroskopischen Bildgebung
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US7729049B2 (en) 2007-05-26 2010-06-01 Zeta Instruments, Inc. 3-d optical microscope
FR2922658B1 (fr) * 2007-10-18 2011-02-04 Centre Nat Rech Scient Systeme d'illuminations structuree d'un echantillon
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US8228601B2 (en) * 2008-05-13 2012-07-24 Applied Materials Israel, Ltd. Scanning microscopy using inhomogeneous polarization
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EP1617259B1 (fr) 2014-06-04
JP5150823B2 (ja) 2013-02-27
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GB0512343D0 (en) 2005-07-27
DE102004034962A1 (de) 2006-02-16

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