US20050248071A1 - Vacuum pump vibration isolator - Google Patents

Vacuum pump vibration isolator Download PDF

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Publication number
US20050248071A1
US20050248071A1 US11/124,931 US12493105A US2005248071A1 US 20050248071 A1 US20050248071 A1 US 20050248071A1 US 12493105 A US12493105 A US 12493105A US 2005248071 A1 US2005248071 A1 US 2005248071A1
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United States
Prior art keywords
pump
damper
vacuum chamber
damper mechanism
elastomer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/124,931
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English (en)
Inventor
Rami Ben-Maimon
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Individual
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Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of US20050248071A1 publication Critical patent/US20050248071A1/en
Abandoned legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/08—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with rubber springs ; with springs made of rubber and metal

Definitions

  • the present invention relates to vibration isolation of high vacuum pumps, in general, and in particular, to devices for isolating vibrations of turbo pumps from vacuum chambers.
  • Turbo pumps are used to provide deep vacuum in sensitive inspection machines, such as scanning electron microscopes. As the pumps rotate, they produce vibrations which can prevent proper operation of the inspection machines. Accordingly, it is desired to provide vibration isolation of the pump from the vacuum chamber to which it is connected.
  • dampers are connected between the pump, which rotates at high speed, and the vacuum chamber. The purpose of these dampers is to isolate the sensitive equipment from the vibration of the pumps.
  • FIG. 1 One example of a known damper is shown in FIG. 1 .
  • a pump ( 1 A) is connected to a vacuum chamber (not shown) by a sealing mechanism.
  • the sealing mechanism consists of a metal bellow ( 2 A), which connects the pump ( 1 A) and the vacuum chamber, and a damper ( 3 A) which is built around the bellow.
  • Damper ( 3 A) is usually a rubber or elastomer ring that fits around the metal bellow.
  • a fiber-reinforced diaphragm is preferred at present.
  • the elastomer diaphragm enables the pump to move in all six degrees of freedom, while transferring minimum force to the chamber.
  • an intermediate pumping technique may be used.
  • the mid-section between the diaphragms is connected to the roughing pump, the back up pump for the turbo.
  • the diaphragm may be made out of any flexible, vacuum-tight material, or a very thin metal diaphragm whose ends are sealed by an elastomer.
  • damper mechanism including an elastomeric diaphragm coupled between the pump and the vacuum chamber so as to permit the pump to move in six degrees of freedom, while transferring minimum force to the chamber.
  • the elastomeric diaphragm is fiber reinforced.
  • the damping is provided by three elastomer dampers: an isolation mass is connected between two elastomer dampers.
  • pneumatic integrated isolators may be utilized.
  • tuned dampers may be added to the elastomer damper. By measuring the tuned damper acceleration amplitude and maximizing it by changing the rotational speed of the pump, minimum transmissibility is achieved.
  • the tuned dampers are tuned to the basic rotational speed of the pump.
  • FIG. 1 is a sectional illustration of a pump with a damper mechanism according to the prior art
  • FIG. 2A is a sectional illustration of a pump with a damper mechanism constructed and operative in accordance with one embodiment of the present invention
  • FIG. 2B is a sectional illustration of a pump with a damper mechanism constructed and operative in accordance with another embodiment of the present invention
  • FIG. 2C is a sectional illustration of a pump with a damper mechanism constructed and operative in accordance with a further embodiment of the present invention.
  • FIG. 2D is a sectional illustration of a pump with a damper mechanism constructed and operative in accordance with another embodiment of the present invention.
  • FIG. 2E is a sectional illustration of a pump with a damper mechanism constructed and operative in accordance with a further embodiment of the present invention.
  • the present invention relates to a vibration damper mechanism that connects a vacuum pump, particularly a turbo pump, to a vacuum chamber.
  • the damper consists of a flexible elastomer diaphragm that connects the pump to the chamber and enables the pump to move in all directions.
  • the elastomer diaphragm provides a vacuum-tight seal.
  • the damper mechanism consists of three or more dampers that carry the vacuum load and pump mass and isolate the pump vibration from the chamber.
  • the dampers can utilize three or more different concepts of damping: the first, an elastomer damper with intermediate mass; the second, an integrated air or pneumatic damper, the third a tuned damper wherein the pump's main speed is tuned to the damper's resonance via a closed loop.
  • FIG. 2A there is shown a sectional illustration of a pump ( 1 A) with a damper mechanism constructed and operative in accordance with one embodiment of the present invention.
  • vacuum pump ( 1 A) is connected to a base ( 2 ) via a standard vacuum-tight flange, ISO style or other.
  • a sandwich of two elastomer diaphragms ( 3 ) is built with one side on the base ( 2 ). The other side of these diaphragms ( 3 ) is connected to a static flange ( 4 ), which is coupled to the vacuum chamber. These double diaphragms are vacuum-tight and sealed to base ( 2 ) and static flange ( 4 ). The static flange ( 4 ) is connected to a vacuum chamber ( 5 ) via a standard vacuum flange, ISO style or other.
  • the space between the two diaphragms is connected via a tube ( 9 ) to the outlet of the vacuum pump ( 10 ), which is connected to a roughing pump. This serves to reduce the pressure between the diaphragms ( 3 ), thereby providing a double seal with an intermediate pump.
  • the vacuum sealing may consist of a very thin metal diaphragm ( 31 ) whose ends are sealed by an elastomer, shaped, in this example, as two o-rings ( 32 ) on each side of the metal diaphragm.
  • One side of the diaphragm 31 is mounted on the base ( 2 ) of the pump and the other side is mounted on a static flange ( 4 ) coupled to the vacuum chamber.
  • the metal does not contact the vacuum chamber, and the elastomer serves to absorb the vibrations.
  • only one diaphragm is required.
  • dampers Since the atmospheric pressure tends to pull the vacuum pump into the vacuum chamber, it is essential to connect additional dampers between the vacuum pump and the vacuum chamber.
  • three additional dampers are provided. These dampers consist of two conventional elastomer dampers ( 6 ) with a damping mass ( 7 ) connected between the two elastomer dampers ( 6 ).
  • FIG. 2B a sectional illustration of a pump ( 1 A) with a damper mechanism constructed and operative in accordance with another embodiment of the present invention.
  • Pump ( 1 A) is connected to the vacuum chamber ( 5 ) via a double elastomer seal ( 3 ), substantially as shown and described in FIG. 2A , and via a pneumatic vibration isolator ( 20 ) mounted between a static flange ( 4 ) coupled to the vacuum chamber and a post.
  • the pneumatic damper ( 20 ) is connected to a pressurized air supply ( 21 ).
  • FIG. 2E Another way to achieve a pneumatic vibration damper is shown in FIG. 2E .
  • the base ( 2 ) is connected to the static flange ( 4 ) by a flexible diaphragm ( 43 ), thus creating an annular volume ( 44 ). Pressurizing this volume ( 44 ) from a source of pressurized air ( 41 ) serves to create the force needed to overcome the vacuum forces, thus achieving a pneumatic vibration isolator.
  • FIG. 2C a sectional illustration of a pump ( 1 A) with a damper mechanism constructed and operative in accordance with a further embodiment of the present invention.
  • a tuned damper is connected to the base of existing dampers.
  • This embodiment can apply to the embodiment with elastomer dampers as well as to the embodiment having a pneumatic damper.
  • the tuned damper consists of a spring ( 12 ) and a mass ( 13 ).
  • the resonance frequency of the mass-spring system is roughly tuned to the pump main speed frequency. It is a particular feature of the present invention that this exact tuning is accomplished, not by adjusting the frequency of the tuned damper, as in conventional systems, but by adjusting the rotational speed of the pump to the frequency of the tuned damper.
  • an accelerometer ( 15 ) is coupled to the mass of the tuned damper and the acceleration of the mass measured. Changing the rotational speed of the pump maximizes the acceleration measured by this accelerometer. When maximum acceleration of the mass is achieved, the rotational speed of the pump is exactly at the tuned mass frequency, which is optimal. It will be appreciated that the tuned damper frequency is designed to be at the desired rotational speed of the pump.
  • the damper mechanism is a horizontal system, not vertical as in conventional systems.
  • the pump is closer to the chamber and the damper can be very short. In this way, the pumping speed that is achieved in the chamber is very similar to the basic pumping speed of the pump.
US11/124,931 2004-05-09 2005-05-09 Vacuum pump vibration isolator Abandoned US20050248071A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL161900A IL161900A (en) 2004-05-09 2004-05-09 Vibration reliever for vacuum pump
IL161900 2004-05-10

Publications (1)

Publication Number Publication Date
US20050248071A1 true US20050248071A1 (en) 2005-11-10

Family

ID=34938261

Family Applications (2)

Application Number Title Priority Date Filing Date
US11/125,387 Active 2026-01-08 US7478710B2 (en) 2004-05-09 2005-05-09 Vacuum pump vibration isolator
US11/124,931 Abandoned US20050248071A1 (en) 2004-05-09 2005-05-09 Vacuum pump vibration isolator

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US11/125,387 Active 2026-01-08 US7478710B2 (en) 2004-05-09 2005-05-09 Vacuum pump vibration isolator

Country Status (3)

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US (2) US7478710B2 (de)
EP (1) EP1596072A3 (de)
IL (1) IL161900A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100065995A1 (en) * 2006-10-19 2010-03-18 Barrie Dudley Brewster Vibration isolator
US20110278777A1 (en) * 2010-05-13 2011-11-17 Jason Douglas Allaire Vibration damping device for vertically cantilevered pump assemblies

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007059631B4 (de) * 2007-12-10 2009-09-17 Integrated Dynamics Engineering Gmbh Schwingungsisolator zur Verwendung im Vakuum
EP3318763B1 (de) * 2016-11-04 2020-07-01 Pfeiffer Vacuum Gmbh Vakuumdichtung, doppeldichtung, vakuumsystem und vakuumpumpe
NL2034497B1 (en) * 2023-04-04 2024-03-05 Phe Nx Knowledge B V Vacuum coupling with integrated vibration insulator.

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595179B2 (ja) * 1979-05-18 1984-02-03 富士通株式会社 真空機器の防振構造
US4568243A (en) * 1981-10-08 1986-02-04 Barry Wright Corporation Vibration isolating seal for mounting fans and blowers
JPH03234938A (ja) 1989-08-25 1991-10-18 Bridgestone Corp 振動減衰装置
JP3282302B2 (ja) 1992-09-30 2002-05-13 株式会社島津製作所 加振装置または振動除去装置
US5931441A (en) 1996-02-29 1999-08-03 Nikon Corporation Method of isolating vibration in exposure apparatus
US5864273A (en) 1997-03-12 1999-01-26 General Electric Company Cryocooler vibration isolation and noise reduction in magnetic resonance imaging
US6323494B1 (en) 1999-04-09 2001-11-27 Nikon Corporation Vertical direction force transducer
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
US7095482B2 (en) * 2001-03-27 2006-08-22 Nikon Corporation Multiple system vibration isolator
JP2002295372A (ja) 2001-03-30 2002-10-09 Boc Edwards Technologies Ltd ダンパ装置、及び真空ポンプ
DE10119075A1 (de) 2001-04-19 2002-10-24 Leybold Vakuum Gmbh Vakuumleitung
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
EP1533530B1 (de) * 2003-11-18 2006-04-26 VARIAN S.p.A. Vakuumpumpe mit Schwingungsdämpfer
ATE362051T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2867823B1 (fr) * 2004-03-22 2006-07-14 Cit Alcatel Raccord amortisseur pour pompe a vide
KR101185265B1 (ko) * 2004-10-15 2012-09-21 에드워즈 가부시키가이샤 댐퍼 및 진공 펌프

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100065995A1 (en) * 2006-10-19 2010-03-18 Barrie Dudley Brewster Vibration isolator
US8322694B2 (en) * 2006-10-19 2012-12-04 Edwards Limited Vibration isolator
US20110278777A1 (en) * 2010-05-13 2011-11-17 Jason Douglas Allaire Vibration damping device for vertically cantilevered pump assemblies
US8998185B2 (en) * 2010-05-13 2015-04-07 Flowserve Management Company Vibration damping device for vertically cantilevered pump assemblies

Also Published As

Publication number Publication date
IL161900A0 (en) 2005-11-20
IL161900A (en) 2011-01-31
EP1596072A3 (de) 2012-04-25
EP1596072A2 (de) 2005-11-16
US7478710B2 (en) 2009-01-20
US20050248072A1 (en) 2005-11-10

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