US20040150083A1 - Method for manufacturing digital micro-mirror device (DMD) - Google Patents

Method for manufacturing digital micro-mirror device (DMD) Download PDF

Info

Publication number
US20040150083A1
US20040150083A1 US10/761,835 US76183504A US2004150083A1 US 20040150083 A1 US20040150083 A1 US 20040150083A1 US 76183504 A US76183504 A US 76183504A US 2004150083 A1 US2004150083 A1 US 2004150083A1
Authority
US
United States
Prior art keywords
semiconductor chip
wafer
base substrate
dmd
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/761,835
Inventor
Jong-Kon Choi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority to US10/761,835 priority Critical patent/US20040150083A1/en
Publication of US20040150083A1 publication Critical patent/US20040150083A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124—Aluminium (Al) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
    • H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01046—Palladium [Pd]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/162—Disposition
    • H01L2924/16235—Connecting to a semiconductor or solid-state bodies, i.e. cap-to-chip
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3025—Electromagnetic shielding

Definitions

  • the present invention relates to a method for manufacturing semiconductor device packages, and more particularly to a method for manufacturing digital micro-mirror device (DMD) packages.
  • DMD digital micro-mirror device
  • a display In order to keep pace with the development of personal computers, a display has been developed from a cathode-ray tube type display into a liquid crystal display or a mirror type display. Especially, with the increasing demand for digital broadcasting appliances, a digital light processing (DLP) technology for high resolution becomes more and more important.
  • DLP digital light processing
  • a DMD which is an essential component for the DLP technology, requires significant expertise in the manufacturing process for mirrors so that high reliability and low cost in the manufacturing process can be obtained.
  • the DMD process involves driving the mirrors, and thus the proper driving of mirrors is very important. Further, moisture and dust within the packages affect the picture quality or resolution of the DMD as well as its reliability or durability. Therefore, during the fabrication of the DMD packages, the DMD packages themselves need to be protected from moisture and dust.
  • FIG. 1 is a plan view showing a conventional semiconductor chip 12 for the DMD
  • FIG. 2 is a cross-sectional view showing a DMD package 100 containing the semiconductor chip 12 of FIG. 1.
  • the semiconductor chip 12 is attached to an upper surface 21 of a base substrate 20 by interposing an Ag-epoxy adhesive 30 therebetween.
  • the semiconductor chip 12 and the base substrate 20 are electrically interconnected to each other with one or more bonding wires 40 .
  • a metal sealing ring 24 with a predetermined height is provided at the periphery of the upper surface 21 of the base substrate 20 .
  • the components, including the semiconductor chip 12 are hermetically sealed up with a window lid 50 .
  • a heat sink stud 60 is attached to the lower surface 23 of the base substrate 20 .
  • the window lid 50 comprises a metal lid frame 52 contacting the metal sealing ring 24 , and a window 54 .
  • a reflectance coating film 56 is applied to the lower surface of the window 54 along the periphery thereof.
  • the metal sealing ring 24 and the base substrate 20 form a cavity 29 , and a moisture getter (absorbent) 58 is attached to the lower surface of the metal lid frame 52 of the window lid 50 within the cavity 29 .
  • External terminals are formed on the lower surface 23 of the base substrate 20 .
  • a plurality of mirrors 16 are formed on the active surface of the semiconductor chip 12 at the center thereof, and one or more electrode pads 14 are formed on the active surface at the periphery thereof for interconnection via the one or more bonding wires 40 .
  • FIG. 3 is a flow chart 90 describing a manufacturing process of the conventional DMD package 100 . Each step of the manufacturing process is described briefly below.
  • a wafer comprising a plurality of the semiconductor chips 12 is prepared (step 71 ).
  • a photoresist film is formed on the upper surface of the wafer in the predetermined portion.
  • the photoresist film prevents damage to the mirrors 16 from the external environment by covering the mirrors 16 .
  • the photoresist film is not formed on the electrode pads 14 .
  • the wafer Prior to wafer-breaking, the wafer is half-cut (step 72 ).
  • the photoresist film on the upper surface of the wafer is removed (step 73 ), and to shield the mirrors 16 from dust or moisture, a first anti-sticking film is formed thereon (step 74 ).
  • the wafer is broken and separated into individual semiconductor chips 12 (step 75 ).
  • a breaking means in a dome shape is brought into contact with to the back surface of the wafer and urged upwardly. As a result, the half-cut wafer is broken into a plurality of individual semiconductor chips 12 .
  • the semiconductor chip 12 is attached to the upper surface 21 of the base substrate 20 by the Ag-epoxy adhesive 30 (step 77 ), and the Ag-epoxy adhesive 30 is cured (step 78 ).
  • the semiconductor chip 12 is electrically interconnected to the base substrate 20 with the bonding wires 40 (step 79 ).
  • step 80 The organic compounds remaining on the upper surface 21 of the base substrate 20 , the semiconductor chip 12 on the surface 21 , and the bonding wires 40 are removed (step 80 ). A second anti-sticking film is formed thereon (step 81 ).
  • the metal sealing ring 24 is mounted on the upper surface 21 of the base substrate 20 , and the components are hermetically sealed by the window lid 50 having the moisture getter 58 attached thereon (step 82 ).
  • the heat sink stud 60 is attached to the lower surface 23 of the base substrate 20 (step 83 ).
  • the DMD package 100 is thus complete.
  • the manufacturing process is very complicated. The major reason is that the manufacturing process for the conventional DMD package employs the wafer-breaking method for separating the wafer into individual semiconductor chips 12 . Since the wafer-breaking method comprises a first step of half-cutting the wafer and a second step of breaking the wafer, compared to the full-cutting method, which completely cuts the wafer at once, this method further involves an additional step, i.e. the wafer-breaking step.
  • the mirrors within the semiconductor chip 12 can be easily damaged by the silicon particles generated in the wafer-breaking step.
  • the silicon particles positioned between the mirrors 16 cannot be properly removed by the washing step. Since the wafer-breaking step is carried out after the step of removing the photoresist, damage to the mirrors 16 by the silicon particles commonly occurs.
  • the Ag-epoxy adhesive is used to attach the semiconductor chip 12 to the base substrate 20 , moisture enters the package due to the hygroscopicity of the Ag-epoxy. Further, an exhaust gas generated during the curing of the Ag-epoxy adhesive contaminates the mirrors 16 on the active surface of the semiconductor chip 12 . Therefore, it is preferable to use solder as the adhesive means. However, with the use of the solder, damage such as the burning of the first anti-sticking film or the deformation of the mirrors can occur. In other words, to attach the semiconductor chip to the base substrate, the solder must be melted at a temperature of 150° C. or more. Such a high temperature causes the burning of the first anti-sticking film or the deformation of the mirrors 16 in the semiconductor chip 12 .
  • an object of the present invention is to simplify the manufacturing process of the DMD packages.
  • a method for manufacturing digital micro-mirror device (DMD) packages comprises preparing a wafer including a plurality of DMD semiconductor chips, each chip having a plurality of mirrors formed on the center of an active surface, a plurality of electrode pads formed on the edges of the active surface, and a photoresist for protecting the mirrors.
  • the method further comprises forming a metallic layer on a back surface of the wafer, said metallic layer being made of a metal having a low melting point. It further comprises separating the wafer into the individual semiconductor chips. It also comprises attaching each semiconductor chip to an upper surface of a base substrate with an adhesive made of a metal having a low melting point.
  • the method then comprises the steps of interconnecting the electrode pads of the semiconductor chip to the base substrate with a bonding wire, removing the photoresist from the semiconductor chips, and forming an anti-sticking film on the active surface of the semiconductor chip for protecting the semiconductor chips from dust and moisture. Finally, the method comprises hermetically sealing the semiconductor chip and the bonding wires on the upper surface of the base substrate by using a window lid.
  • the metallic layer is made of a metal having a low melting point selected from the group consisting of Va, Au, Ni, Ag, Cu, Al, Pb, Sn, Sb, Pd and metallic compounds thereof.
  • the step of forming a metallic layer comprises lapping the back surface of the wafer and forming on the back surface a metallic layer made of a metal having a low melting point.
  • Solder is preferably used as the metal adhesive having a low melting point.
  • the manufacturing method of the DMD packages further comprises attaching a heat sink stud to the lower surface of the base substrate. Further, it is preferable that the step of hermetically sealing the semiconductor chip and the bonding wires is carried out at a temperature which is no higher than the temperature of the step of attaching the semiconductor chip to the base substrate.
  • FIG. 1 is a schematic plan view showing a conventional semiconductor chip for digital micro-mirror device (DMD);
  • FIG. 2 is a cross-sectional view showing a conventional DMD package containing the semiconductor chip of FIG. 1;
  • FIG. 3 is a flowchart describing a conventional manufacturing process of the DMD package in FIG. 2;
  • FIG. 4 is a cross-sectional view showing a DMD package in accordance with an embodiment of the present invention.
  • FIG. 5 is a flow chart describing a manufacturing process of the DMD package in FIG. 4;
  • FIGS. 6 through FIG. 16 illustrate schematically each step of the manufacturing process in FIG. 5; wherein FIG. 6 is a schematic plan view that illustrates a wafer used in the DMD packages; FIG. 7 is a plan view that illustrates the manufactured wafer;
  • FIG. 8 is a cross-sectional view taken along the line 8 - 8 in FIG. 7;
  • FIG. 9 is a partial cross-sectional view showing back-lapping the wafer
  • FIG. 10 is a cross-sectional view that illustrates forming a metal layer on the back surface of the wafer
  • FIG. 11 is a cross-sectional view that illustrates cutting the wafer into individual semiconductor chip
  • FIG. 12 is a cross-sectional view that illustrates attaching a semiconductor chip to a base substrate
  • FIG. 13 is a cross-sectional view that illustrates wire-bonding
  • FIG. 14 is a cross-sectional view that illustrates removing the photoresist
  • FIG. 15 is a cross-sectional view that illustrates hermetically sealing the package with a window lid.
  • FIG. 16 is a cross-sectional view that illustrates attaching a heat sink stud on the lower surface of the base substrate.
  • FIG. 4 is a cross-sectional view showing a DMD package 200 in accordance with an embodiment of the present invention.
  • a semiconductor chip 112 is attached to an upper surface 121 of a base substrate 120 with a metallic adhesive 130 having a low melting point, and a metallic layer 115 made of a metal having a low melting point is formed on the back surface of the semiconductor chip 112 .
  • the base substrate is preferably a ceramic board, a plastic board, or a printed circuit board.
  • the metallic layer 115 enables the metallic adhesive 130 to be firmly attached to the semiconductor chip 112 .
  • Other components are the same as those of the conventional DMD package 100 of FIG. 1. Referring to FIGS. 5 through 16, a manufacturing process of the DMD packages in accordance with an embodiment of the present invention is described below.
  • FIG. 5 is a flow chart 190 illustrating a manufacturing process of the DMD package 200 in FIG. 4.
  • FIGS. 6 through 16 show each step of the manufacturing process of FIG. 5.
  • the manufacturing process starts with preparing the wafer 110 (step 191 ).
  • the silicon wafer 110 comprises a plurality of mirror-driving integrated circuits (not shown) formed by conventional techniques.
  • a plurality of semiconductor chips 112 is formed on the wafer 110 . Scribe lines 118 are also formed between the neighboring semiconductor chips 112 , where the circuits are not formed.
  • the photoresist 113 is formed on a predetermined portion of the upper surface 10 a of the wafer 110 .
  • the photoresist 113 prevents damage to the mirrors 116 from the external environment.
  • the photoresist 113 is not formed on the electrode pads 114 .
  • a metallic layer 115 is formed on the back surface 110 b of the wafer (step 192 ).
  • the metallic layer 115 enables the metallic adhesive to be firmly attached to the back surface 110 b of the wafer 110 .
  • the back surface 110 b is lapped with a lapping device 180 . Because the silicon oxide layer is naturally formed on the back surface of the wafer 110 , if the metallic layer is formed on the back surface of the wafer 110 without any treatment, adhesion between the back surface of the wafer 110 and the metallic layer 115 can be undesirably weak.
  • the back surface 110 b is lapped with the lapping device 180 .
  • the back surface may be lapped by any suitable conventional etching techniques.
  • the metallic layer 115 is formed on the lapped back surface 110 b of the wafer 110 .
  • the metal can be Va (Vanadium), Au (Gold), Ni (Nickel), Ag (Silver), Cu (Copper), Al (Aluminum), Pb (Lead), Sn (Tin), Sb (Stibium), Pd (Palladium) and metal-containing compounds thereof.
  • the present invention is not limited to such metals and compounds. Those of ordinary skill in the art should also be aware the other suitable metals or metallic compounds are well within the broad scope of the present invention.
  • the wafer 110 is separated into individual semiconductor chips 112 by the full-cutting method (step 193 ).
  • a scribe blade 170 saws the wafer 110 along the scribe lines 118 and thereby separates the wafer 110 into individual semiconductor chips 112 .
  • This wafer-sawing step is carried out with the wafer 110 having the adhesive tape (not shown) attached to the back surface 10 b of the wafer 110 . Then, the wafer-washing step is performed.
  • the mirrors 116 of the semiconductor chips 112 are coated with the photoresist 113 , damage to the mirrors 116 by contaminants such as silicon particles during the wafer sawing process can be prevented.
  • a step of removing the photoresist normally follows the washing step.
  • a chip attachment step (step 194 ) is followed.
  • Each of the semiconductor chips 112 is separated from the wafer ( 110 in FIG. 11), and attached to the upper surface 121 of the base substrate 120 by interposing an adhesive 130 having a low melting point such as solder therebetween.
  • the adhesive 130 is solidified at room temperature, and therefore the curing step for the Ag-epoxy adhesive is omitted. Since a metallic layer 115 is formed on the back surface of the semiconductor chip 112 , the adhesive 130 is more firmly attached to the semiconductor chip 112 .
  • the adhesive 130 can be provided in various forms such as a ribbon, paste, wire or any other suitable patterns.
  • the die-attaching step is carried out at higher temperature than if the Ag-epoxy adhesive is used.
  • the die attaching step is processed at a temperature of approximately 150° C. or more.
  • the mirrors 116 of the semiconductor chip are coated with the photoresist 113 , although the die-attaching step is carried out at a high temperature, the mirrors 116 of the semiconductor chips are not damaged.
  • this embodiment uses the base substrate 120 having a flat upper surface, other base substrates having a dented upper surface may be used.
  • a ceramic substrate having low hygroscopicity and high thermal conductivity preferably is used, although other plastic substrates or a printed circuit board may be used.
  • the wire-bonding step is carried out (step 195 ).
  • the ball-bonding method using an Au bonding wire or the wedge-bonding method using an Al bonding wire may be alternatively employed.
  • FIG. 13 shows the wedge-bonding method between the electrode pads 114 of the semiconductor chip 112 and the base substrate 120 .
  • the photoresist ( 113 in FIG. 13) is removed (step 196 ), and an anti-sticking film is formed (step 197 ).
  • the photoresist 113 is not removed until after the wire-bonding step. This prevents the contamination of the mirrors 116 due to dust or moisture.
  • the photoresist 113 on the mirrors 116 is removed, because the mirrors 116 in the semiconductor chip 112 are protected from the outside when sealing the components including the semiconductor chip with the window lid. Then, the anti-sticking film for preventing the sticking of dust or moisture is formed.
  • the photoresist 113 is removed from the semiconductor chip 112 attached to the base substrate 120 .
  • the embodiment of the present invention discloses the manufacturing process of the DMD packages, on which a single semiconductor chip 112 is mounted on the base substrate 120 .
  • a plurality of the semiconductor chips 112 are mounted on the base substrate 120 in rows, and multiple packages are simultaneously manufactured.
  • the photoresist 113 formed on a plurality of the semiconductor chips 112 are collectively removed.
  • the components including the semiconductor chip 112 are hermetically sealed (step 198 ).
  • the semiconductor chip 112 and the bonding wire 140 are hermetically sealed.
  • a window lid 150 is attached to a metal sealing ring 124 on the periphery of the base substrate 120 by thermo-compression, and thereby the cavity ( 129 in FIG. 4) containing the semiconductor chip 112 is hermetically sealed.
  • the window lid 150 comprises a metal lid frame 152 in contact with the metal sealing ring 124 , and a window 154 perforating the metal lid frame 152 on the center.
  • a reflectance coating film 156 is formed on the lower surface of the window 154 on its periphery, and a moisture getter 158 is attached to a lower surface of the metal lid frame 152 .
  • a distance between the upper surface of the base substrate 120 and the lower surface of the window lid 150 is greater than the height of the bonding wire.
  • a portion of the metal lid frame 152 attached to the metal sealing ring 124 has a thickness less than the thickness of the other portion of the metal lid frame 152 . This allows the effective heat transfer from a thermo-compression means through the upper surface of the metal lid frame 152 .
  • An adhesive means having a lower melting point than that of the above-described metal adhesive 130 is used between the metal sealing ring 124 and the metal lid frame 152 . This prevents the conventional deformation problem that results from re-melting the metal adhesive 130 .
  • the heat sink stud 160 is attached (step 199 ). In order to effectively draw heat away from heat-generating semiconductor chip 112 , the heat sink stud 160 is attached to the lower surface 123 of the base substrate below the semiconductor chip 112 . The manufacture of the improved DMD package 200 is complete.
  • the present invention simplifies the manufacturing process of the DMD packages as follows:
  • the present invention since the wafer is sawed by the full-cutting method, the present invention thus reduces the number of steps required for individual semiconductor chip 112 singulation.
  • the present invention can omit the conventional step of forming the first anti-sticking film.
  • the present invention also omits the conventional step of removing undesirable organic particulate or compounds after the wire-bonding step. During the step for removing the photoresist, the present invention also removes any the organic compounds remaining on the upper surface of the base substrate, the semiconductor chip and the bonding wire.
  • the mirrors 116 of the semiconductor chip 112 are protected by the photoresist 113 . Therefore, instead of the Ag-epoxy adhesive, a metal having a low melting point such as a solder can be used in the chip-attaching step. Although the chip attaching step is carried out at high temperatures, the mirrors 116 formed with the photoresist thereon thus are prevented from high temperature damage (e.g. deformation) that may otherwise occur.
  • the present invention solves the affixation and out-gassing problems described above involving a metal adhesive with a low melting point and an Ag-epoxy adhesive (relating to the hygroscopicity of the Ag-epoxy adhesive and the exhaust gas generated during curing of the Ag-epoxy).
  • the photoresist-removing step is performed with the semiconductor chip being mounted on the base substrate 120 , it is very easy to handle the inverted DMD semiconductor chip 112 .

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

A method for manufacturing a semiconductor package is disclosed. A wafer including a plurality of semiconductor chips is provided. Each chip has one or more mirrors mounted thereon. Further, a plurality of bond pads formed on a periphery of the chip. Next, a photoresist is formed over the one or more mirrors. Then, the semiconductor chips are singulated from the wafer. One ore more semiconductor chips are mounted on a base substrate. The bond pads of the semiconductor chip are electrically connected with the base substrate. The photoresist is then removed from the semiconductor chips.

Description

  • This application is a divisional of U.S. patent application Ser. No. 09/847,620 filed on May 2, 2001, now pending, which is herein incorporated by reference in its entirety.[0001]
    • BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0002]
  • The present invention relates to a method for manufacturing semiconductor device packages, and more particularly to a method for manufacturing digital micro-mirror device (DMD) packages. [0003]
  • 2. Description of the Related Arts [0004]
  • In order to keep pace with the development of personal computers, a display has been developed from a cathode-ray tube type display into a liquid crystal display or a mirror type display. Especially, with the increasing demand for digital broadcasting appliances, a digital light processing (DLP) technology for high resolution becomes more and more important. A DMD, which is an essential component for the DLP technology, requires significant expertise in the manufacturing process for mirrors so that high reliability and low cost in the manufacturing process can be obtained. [0005]
  • The DMD process involves driving the mirrors, and thus the proper driving of mirrors is very important. Further, moisture and dust within the packages affect the picture quality or resolution of the DMD as well as its reliability or durability. Therefore, during the fabrication of the DMD packages, the DMD packages themselves need to be protected from moisture and dust. [0006]
  • FIG. 1 is a plan view showing a [0007] conventional semiconductor chip 12 for the DMD, and FIG. 2 is a cross-sectional view showing a DMD package 100 containing the semiconductor chip 12 of FIG. 1. With reference to FIG. 1 and FIG. 2, the semiconductor chip 12 is attached to an upper surface 21 of a base substrate 20 by interposing an Ag-epoxy adhesive 30 therebetween. The semiconductor chip 12 and the base substrate 20 are electrically interconnected to each other with one or more bonding wires 40. In order to protect the semiconductor chip 12 from external environmental stresses, a metal sealing ring 24 with a predetermined height is provided at the periphery of the upper surface 21 of the base substrate 20.
  • The components, including the [0008] semiconductor chip 12, are hermetically sealed up with a window lid 50. A heat sink stud 60 is attached to the lower surface 23 of the base substrate 20. The window lid 50 comprises a metal lid frame 52 contacting the metal sealing ring 24, and a window 54. A reflectance coating film 56 is applied to the lower surface of the window 54 along the periphery thereof. The metal sealing ring 24 and the base substrate 20 form a cavity 29, and a moisture getter (absorbent) 58 is attached to the lower surface of the metal lid frame 52 of the window lid 50 within the cavity 29. External terminals (not shown) are formed on the lower surface 23 of the base substrate 20.
  • A plurality of mirrors [0009] 16 (only a typical one of which is depicted in FIG. 2) are formed on the active surface of the semiconductor chip 12 at the center thereof, and one or more electrode pads 14 are formed on the active surface at the periphery thereof for interconnection via the one or more bonding wires 40.
  • FIG. 3 is a [0010] flow chart 90 describing a manufacturing process of the conventional DMD package 100. Each step of the manufacturing process is described briefly below.
  • A wafer comprising a plurality of the [0011] semiconductor chips 12 is prepared (step 71). Herein, a photoresist film is formed on the upper surface of the wafer in the predetermined portion. The photoresist film prevents damage to the mirrors 16 from the external environment by covering the mirrors 16. The photoresist film is not formed on the electrode pads 14.
  • Prior to wafer-breaking, the wafer is half-cut (step [0012] 72). The photoresist film on the upper surface of the wafer is removed (step 73), and to shield the mirrors 16 from dust or moisture, a first anti-sticking film is formed thereon (step 74). The wafer is broken and separated into individual semiconductor chips 12 (step 75). A breaking means in a dome shape is brought into contact with to the back surface of the wafer and urged upwardly. As a result, the half-cut wafer is broken into a plurality of individual semiconductor chips 12.
  • In the wafer-breaking step, silicon particle scraps are generated. Therefore, the silicon particles are removed (step [0013] 76).
  • The [0014] semiconductor chip 12 is attached to the upper surface 21 of the base substrate 20 by the Ag-epoxy adhesive 30 (step 77), and the Ag-epoxy adhesive 30 is cured (step 78). The semiconductor chip 12 is electrically interconnected to the base substrate 20 with the bonding wires 40 (step 79).
  • The organic compounds remaining on the [0015] upper surface 21 of the base substrate 20, the semiconductor chip 12 on the surface 21, and the bonding wires 40 are removed (step 80). A second anti-sticking film is formed thereon (step 81).
  • The [0016] metal sealing ring 24 is mounted on the upper surface 21 of the base substrate 20, and the components are hermetically sealed by the window lid 50 having the moisture getter 58 attached thereon (step 82).
  • The [0017] heat sink stud 60 is attached to the lower surface 23 of the base substrate 20 (step 83). The DMD package 100 is thus complete.
  • The above-described method for manufacturing the conventional DMD packages has several problems as follows; [0018]
  • The manufacturing process is very complicated. The major reason is that the manufacturing process for the conventional DMD package employs the wafer-breaking method for separating the wafer into [0019] individual semiconductor chips 12. Since the wafer-breaking method comprises a first step of half-cutting the wafer and a second step of breaking the wafer, compared to the full-cutting method, which completely cuts the wafer at once, this method further involves an additional step, i.e. the wafer-breaking step.
  • Even if the full-cutting method is employed to prevent this drawback, another problem occurs in the step of removing the photoresist after separating the wafer into the semiconductor chips by the full-cutting method. Conventionally, the wafer comprising separated semiconductor chips has the adhesive tape on its back surface. In the photoresist-removing step after the wafer-cutting step, the adhesive from the adhesive tape and the photoresist are unnecessarily removed together. Thus, the individual semiconductor chips can be undesirably detached from the adhesive tape. Therefore, the conventional manufacturing process normally cannot employ the full-cutting method. [0020]
  • The mirrors within the [0021] semiconductor chip 12 can be easily damaged by the silicon particles generated in the wafer-breaking step. The silicon particles positioned between the mirrors 16 cannot be properly removed by the washing step. Since the wafer-breaking step is carried out after the step of removing the photoresist, damage to the mirrors 16 by the silicon particles commonly occurs.
  • Since the Ag-epoxy adhesive is used to attach the [0022] semiconductor chip 12 to the base substrate 20, moisture enters the package due to the hygroscopicity of the Ag-epoxy. Further, an exhaust gas generated during the curing of the Ag-epoxy adhesive contaminates the mirrors 16 on the active surface of the semiconductor chip 12. Therefore, it is preferable to use solder as the adhesive means. However, with the use of the solder, damage such as the burning of the first anti-sticking film or the deformation of the mirrors can occur. In other words, to attach the semiconductor chip to the base substrate, the solder must be melted at a temperature of 150° C. or more. Such a high temperature causes the burning of the first anti-sticking film or the deformation of the mirrors 16 in the semiconductor chip 12.
    • SUMMARY OF THE INVENTION
  • Accordingly, an object of the present invention is to simplify the manufacturing process of the DMD packages. [0023]
  • Another object of the present invention is to prevent failures generated in the sequence of steps including first half-cutting and second full-cutting the wafer. Still another object of the present invention is to prevent failures due to the use of the Ag-epoxy adhesive. [0024]
  • In order to achieve the foregoing and other objects, a method for manufacturing digital micro-mirror device (DMD) packages comprises preparing a wafer including a plurality of DMD semiconductor chips, each chip having a plurality of mirrors formed on the center of an active surface, a plurality of electrode pads formed on the edges of the active surface, and a photoresist for protecting the mirrors. The method further comprises forming a metallic layer on a back surface of the wafer, said metallic layer being made of a metal having a low melting point. It further comprises separating the wafer into the individual semiconductor chips. It also comprises attaching each semiconductor chip to an upper surface of a base substrate with an adhesive made of a metal having a low melting point. The method then comprises the steps of interconnecting the electrode pads of the semiconductor chip to the base substrate with a bonding wire, removing the photoresist from the semiconductor chips, and forming an anti-sticking film on the active surface of the semiconductor chip for protecting the semiconductor chips from dust and moisture. Finally, the method comprises hermetically sealing the semiconductor chip and the bonding wires on the upper surface of the base substrate by using a window lid. [0025]
  • It is preferable that the metallic layer is made of a metal having a low melting point selected from the group consisting of Va, Au, Ni, Ag, Cu, Al, Pb, Sn, Sb, Pd and metallic compounds thereof. [0026]
  • The step of forming a metallic layer comprises lapping the back surface of the wafer and forming on the back surface a metallic layer made of a metal having a low melting point. [0027]
  • Solder is preferably used as the metal adhesive having a low melting point. [0028]
  • After the step of hermetically sealing the semiconductor chip and the bonding wires, the manufacturing method of the DMD packages further comprises attaching a heat sink stud to the lower surface of the base substrate. Further, it is preferable that the step of hermetically sealing the semiconductor chip and the bonding wires is carried out at a temperature which is no higher than the temperature of the step of attaching the semiconductor chip to the base substrate.[0029]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • The various features and advantages of the present invention will be readily understood with reference to the following detailed description taken in conjunction with the accompanying drawings, wherein like reference numerals designate like structural elements, and, in which: [0030]
  • FIG. 1 is a schematic plan view showing a conventional semiconductor chip for digital micro-mirror device (DMD); [0031]
  • FIG. 2 is a cross-sectional view showing a conventional DMD package containing the semiconductor chip of FIG. 1; [0032]
  • FIG. 3 is a flowchart describing a conventional manufacturing process of the DMD package in FIG. 2; [0033]
  • FIG. 4 is a cross-sectional view showing a DMD package in accordance with an embodiment of the present invention; [0034]
  • FIG. 5 is a flow chart describing a manufacturing process of the DMD package in FIG. 4; [0035]
  • FIGS. [0036] 6 through FIG. 16 illustrate schematically each step of the manufacturing process in FIG. 5; wherein FIG. 6 is a schematic plan view that illustrates a wafer used in the DMD packages; FIG. 7 is a plan view that illustrates the manufactured wafer;
  • FIG. 8 is a cross-sectional view taken along the line [0037] 8-8 in FIG. 7;
  • FIG. 9 is a partial cross-sectional view showing back-lapping the wafer; [0038]
  • FIG. 10 is a cross-sectional view that illustrates forming a metal layer on the back surface of the wafer; [0039]
  • FIG. 11 is a cross-sectional view that illustrates cutting the wafer into individual semiconductor chip; [0040]
  • FIG. 12 is a cross-sectional view that illustrates attaching a semiconductor chip to a base substrate; [0041]
  • FIG. 13 is a cross-sectional view that illustrates wire-bonding; [0042]
  • FIG. 14 is a cross-sectional view that illustrates removing the photoresist; [0043]
  • FIG. 15 is a cross-sectional view that illustrates hermetically sealing the package with a window lid; and [0044]
  • FIG. 16 is a cross-sectional view that illustrates attaching a heat sink stud on the lower surface of the base substrate.[0045]
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. [0046]
  • FIG. 4 is a cross-sectional view showing a [0047] DMD package 200 in accordance with an embodiment of the present invention. With reference to FIG. 4, a semiconductor chip 112 is attached to an upper surface 121 of a base substrate 120 with a metallic adhesive 130 having a low melting point, and a metallic layer 115 made of a metal having a low melting point is formed on the back surface of the semiconductor chip 112. The base substrate is preferably a ceramic board, a plastic board, or a printed circuit board. Herein, the metallic layer 115 enables the metallic adhesive 130 to be firmly attached to the semiconductor chip 112. Other components are the same as those of the conventional DMD package 100 of FIG. 1. Referring to FIGS. 5 through 16, a manufacturing process of the DMD packages in accordance with an embodiment of the present invention is described below.
  • FIG. 5 is a [0048] flow chart 190 illustrating a manufacturing process of the DMD package 200 in FIG. 4. FIGS. 6 through 16 show each step of the manufacturing process of FIG. 5.
  • As shown in FIGS. 6 through 8, the manufacturing process starts with preparing the wafer [0049] 110 (step 191). The silicon wafer 110 comprises a plurality of mirror-driving integrated circuits (not shown) formed by conventional techniques. A plurality of semiconductor chips 112 is formed on the wafer 110. Scribe lines 118 are also formed between the neighboring semiconductor chips 112, where the circuits are not formed.
  • The [0050] photoresist 113 is formed on a predetermined portion of the upper surface 10 a of the wafer 110. The photoresist 113 prevents damage to the mirrors 116 from the external environment. The photoresist 113 is not formed on the electrode pads 114.
  • A [0051] metallic layer 115 is formed on the back surface 110 b of the wafer (step 192). The metallic layer 115 enables the metallic adhesive to be firmly attached to the back surface 110 b of the wafer 110. As shown in FIG. 9, the back surface 110 b is lapped with a lapping device 180. Because the silicon oxide layer is naturally formed on the back surface of the wafer 110, if the metallic layer is formed on the back surface of the wafer 110 without any treatment, adhesion between the back surface of the wafer 110 and the metallic layer 115 can be undesirably weak.
  • For this reason, in this embodiment, the [0052] back surface 110 b is lapped with the lapping device 180. However, the back surface may be lapped by any suitable conventional etching techniques. As shown in FIG. 10, the metallic layer 115 is formed on the lapped back surface 110 b of the wafer 110. With respect to the adhesive means and the temperature in the chip attachment process, it is preferable to use a metal having a low melting point as the metallic layer 115. For example, the metal can be Va (Vanadium), Au (Gold), Ni (Nickel), Ag (Silver), Cu (Copper), Al (Aluminum), Pb (Lead), Sn (Tin), Sb (Stibium), Pd (Palladium) and metal-containing compounds thereof. Of course, the present invention is not limited to such metals and compounds. Those of ordinary skill in the art should also be aware the other suitable metals or metallic compounds are well within the broad scope of the present invention.
  • As shown in FIG. 11, the [0053] wafer 110 is separated into individual semiconductor chips 112 by the full-cutting method (step 193). A scribe blade 170 saws the wafer 110 along the scribe lines 118 and thereby separates the wafer 110 into individual semiconductor chips 112. This wafer-sawing step is carried out with the wafer 110 having the adhesive tape (not shown) attached to the back surface 10 b of the wafer 110. Then, the wafer-washing step is performed.
  • Since the [0054] mirrors 116 of the semiconductor chips 112 are coated with the photoresist 113, damage to the mirrors 116 by contaminants such as silicon particles during the wafer sawing process can be prevented.
  • Conventionally, a step of removing the photoresist normally follows the washing step. However, with the conventional method, a delamination problem of the semiconductor chip from the adhesive tape occurs. In order to prevent this problem, in accordance with the embodiment of the present invention, as shown in FIG. 12, a chip attachment step (step [0055] 194) is followed. Each of the semiconductor chips 112 is separated from the wafer (110 in FIG. 11), and attached to the upper surface 121 of the base substrate 120 by interposing an adhesive 130 having a low melting point such as solder therebetween. Herein, the adhesive 130 is solidified at room temperature, and therefore the curing step for the Ag-epoxy adhesive is omitted. Since a metallic layer 115 is formed on the back surface of the semiconductor chip 112, the adhesive 130 is more firmly attached to the semiconductor chip 112. The adhesive 130 can be provided in various forms such as a ribbon, paste, wire or any other suitable patterns.
  • If the adhesive [0056] 130 is used, the die-attaching step is carried out at higher temperature than if the Ag-epoxy adhesive is used. For example, with the solder, the die attaching step is processed at a temperature of approximately 150° C. or more. However, since the mirrors 116 of the semiconductor chip are coated with the photoresist 113, although the die-attaching step is carried out at a high temperature, the mirrors 116 of the semiconductor chips are not damaged.
  • Although this embodiment uses the [0057] base substrate 120 having a flat upper surface, other base substrates having a dented upper surface may be used. For the base substrate, however, a ceramic substrate having low hygroscopicity and high thermal conductivity preferably is used, although other plastic substrates or a printed circuit board may be used.
  • As shown in FIG. 13, the wire-bonding step is carried out (step [0058] 195). Herein, the ball-bonding method using an Au bonding wire or the wedge-bonding method using an Al bonding wire may be alternatively employed. FIG. 13 shows the wedge-bonding method between the electrode pads 114 of the semiconductor chip 112 and the base substrate 120.
  • As shown in FIG. 14, the photoresist ([0059] 113 in FIG. 13) is removed (step 196), and an anti-sticking film is formed (step 197). The photoresist 113 is not removed until after the wire-bonding step. This prevents the contamination of the mirrors 116 due to dust or moisture. However, after the wire-bonding step, the photoresist 113 on the mirrors 116 is removed, because the mirrors 116 in the semiconductor chip 112 are protected from the outside when sealing the components including the semiconductor chip with the window lid. Then, the anti-sticking film for preventing the sticking of dust or moisture is formed.
  • The [0060] photoresist 113 is removed from the semiconductor chip 112 attached to the base substrate 120. The embodiment of the present invention discloses the manufacturing process of the DMD packages, on which a single semiconductor chip 112 is mounted on the base substrate 120. However, it still falls within the spirit and scope of the present invention that a plurality of the semiconductor chips 112 are mounted on the base substrate 120 in rows, and multiple packages are simultaneously manufactured. In such case, the photoresist 113 formed on a plurality of the semiconductor chips 112 are collectively removed.
  • As shown in FIG. 15, the components including the [0061] semiconductor chip 112 are hermetically sealed (step 198). In order to protect the semiconductor chip 112 on the base substrate 120 and the bonding wire 140 from the external environment, the semiconductor chip 112 and the bonding wire 140 are hermetically sealed. A window lid 150 is attached to a metal sealing ring 124 on the periphery of the base substrate 120 by thermo-compression, and thereby the cavity (129 in FIG. 4) containing the semiconductor chip 112 is hermetically sealed.
  • The [0062] window lid 150 comprises a metal lid frame 152 in contact with the metal sealing ring 124, and a window 154 perforating the metal lid frame 152 on the center. A reflectance coating film 156 is formed on the lower surface of the window 154 on its periphery, and a moisture getter 158 is attached to a lower surface of the metal lid frame 152.
  • In order to prevent the [0063] bonding wires 140 from contacting the lower surface of the window lid 150 attached to the metal sealing ring 124, it is preferable that a distance between the upper surface of the base substrate 120 and the lower surface of the window lid 150 is greater than the height of the bonding wire.
  • When the [0064] metal lid frame 152 is attached to the metal sealing ring 124 by thermo-compression, a portion of the metal lid frame 152 attached to the metal sealing ring 124 has a thickness less than the thickness of the other portion of the metal lid frame 152. This allows the effective heat transfer from a thermo-compression means through the upper surface of the metal lid frame 152. An adhesive means having a lower melting point than that of the above-described metal adhesive 130 is used between the metal sealing ring 124 and the metal lid frame 152. This prevents the conventional deformation problem that results from re-melting the metal adhesive 130.
  • As shown in FIG. 16, the [0065] heat sink stud 160 is attached (step 199). In order to effectively draw heat away from heat-generating semiconductor chip 112, the heat sink stud 160 is attached to the lower surface 123 of the base substrate below the semiconductor chip 112. The manufacture of the improved DMD package 200 is complete.
  • Accordingly, in the manufacturing process of the present invention, since the photoresist is not removed immediately after the separation of the wafer into individual semiconductor chips, but is removed after the wire-bonding step, the present invention simplifies the manufacturing process of the DMD packages as follows: [0066]
  • First, since the wafer is sawed by the full-cutting method, the present invention thus reduces the number of steps required for [0067] individual semiconductor chip 112 singulation. Second, because the mirrors 116 of the semiconductor chip 112 are protected with the photoresist 113, the present invention can omit the conventional step of forming the first anti-sticking film. The present invention also omits the conventional step of removing undesirable organic particulate or compounds after the wire-bonding step. During the step for removing the photoresist, the present invention also removes any the organic compounds remaining on the upper surface of the base substrate, the semiconductor chip and the bonding wire.
  • In the present invention, the [0068] mirrors 116 of the semiconductor chip 112 are protected by the photoresist 113. Therefore, instead of the Ag-epoxy adhesive, a metal having a low melting point such as a solder can be used in the chip-attaching step. Although the chip attaching step is carried out at high temperatures, the mirrors 116 formed with the photoresist thereon thus are prevented from high temperature damage (e.g. deformation) that may otherwise occur. Accordingly, the present invention solves the affixation and out-gassing problems described above involving a metal adhesive with a low melting point and an Ag-epoxy adhesive (relating to the hygroscopicity of the Ag-epoxy adhesive and the exhaust gas generated during curing of the Ag-epoxy).
  • Further, because the photoresist-removing step is performed with the semiconductor chip being mounted on the [0069] base substrate 120, it is very easy to handle the inverted DMD semiconductor chip 112.
  • Although preferred embodiments of the present invention have been described in detail hereinabove, it should be understood that many variations and/or modifications of the basic inventive concepts herein taught which may appear to those skilled in the art will still fall within the spirit and scope of the present invention as defined in the appended claims. [0070]

Claims (2)

What is claimed is:
1. A digital micro-mirror device (DMD) packages, comprising:
a base substrate having a top surface and a bottom surface;
a metallic layer formed on the top surface of the base substrate;
a metallic adhesive formed on the metallic layer;
a semiconductor chip mounted on the metallic adhesive, the base substrate electrically connected with the semiconductor chip;
one or more mirrors mounted on the semiconductor chip;
a hermetic sealing means covering the semiconductor chip including the one more mirrors.
2. The DMD package of claim 1, which further comprises a heat sink attached on the bottom surface of the base substrate.
US10/761,835 2000-05-10 2004-01-20 Method for manufacturing digital micro-mirror device (DMD) Abandoned US20040150083A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/761,835 US20040150083A1 (en) 2000-05-10 2004-01-20 Method for manufacturing digital micro-mirror device (DMD)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020000024951A KR100332967B1 (en) 2000-05-10 2000-05-10 Method for manufacturing digital micro-mirror device(DMD) package
KR2000-24951 2000-05-10
US09/847,620 US6720206B2 (en) 2000-05-10 2001-05-02 Method for manufacturing digital micro-mirror device (DMD) packages
US10/761,835 US20040150083A1 (en) 2000-05-10 2004-01-20 Method for manufacturing digital micro-mirror device (DMD)

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US09/847,620 Division US6720206B2 (en) 2000-05-10 2001-05-02 Method for manufacturing digital micro-mirror device (DMD) packages

Publications (1)

Publication Number Publication Date
US20040150083A1 true US20040150083A1 (en) 2004-08-05

Family

ID=19668340

Family Applications (2)

Application Number Title Priority Date Filing Date
US09/847,620 Expired - Fee Related US6720206B2 (en) 2000-05-10 2001-05-02 Method for manufacturing digital micro-mirror device (DMD) packages
US10/761,835 Abandoned US20040150083A1 (en) 2000-05-10 2004-01-20 Method for manufacturing digital micro-mirror device (DMD)

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US09/847,620 Expired - Fee Related US6720206B2 (en) 2000-05-10 2001-05-02 Method for manufacturing digital micro-mirror device (DMD) packages

Country Status (2)

Country Link
US (2) US6720206B2 (en)
KR (1) KR100332967B1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100096708A1 (en) * 2005-08-04 2010-04-22 Gerald Eckstein Chip Module for Installing in Sensor Chip Cards for Fluidic Applications and Method for Producing a Chip Module of This Type
CN106019579A (en) * 2015-03-27 2016-10-12 精工爱普生株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
US9971147B2 (en) 2016-09-26 2018-05-15 Xerox Corporation Integrated micro-channel heatsink in DMD substrate for enhanced cooling capacity
WO2020260001A1 (en) * 2019-06-28 2020-12-30 Valeo Vision Optical module comprising a micro-mirror array

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US6816375B2 (en) * 2001-08-03 2004-11-09 Texas Instruments Incorporated Heat sink attachment
US7127793B2 (en) * 2002-04-24 2006-10-31 Fuji Photo Film Co., Ltd. Method of producing solid state pickup device
US7163838B2 (en) * 2002-07-22 2007-01-16 Texas Instruments Incorporated Method and apparatus for forming a DMD window frame with molded glass
US7023605B2 (en) * 2003-03-24 2006-04-04 Memphis Eye & Cataract Associates Ambulatory Surgery Center Digital micromirror device having a window transparent to ultraviolet (UV) light
ATE535828T1 (en) * 2003-06-02 2011-12-15 Seiko Epson Corp DIGITAL MICRO MIRROR DEVICE ATTACHMENT SYSTEM
US7203394B2 (en) * 2003-07-15 2007-04-10 Rosemount Aerospace Inc. Micro mirror arrays and microstructures with solderable connection sites
US8619352B2 (en) * 2003-07-29 2013-12-31 Silicon Quest Kabushiki-Kaisha Projection display system using laser light source
US8194305B2 (en) * 2003-11-01 2012-06-05 Silicon Quest Kabushiki-Kaisha Package for micromirror device
US7397067B2 (en) 2003-12-31 2008-07-08 Intel Corporation Microdisplay packaging system
US20050266592A1 (en) * 2004-05-28 2005-12-01 Intersil Americas, Inc. Method of fabricating an encapsulated chip and chip produced thereby
US20050266602A1 (en) * 2004-05-28 2005-12-01 Intersil Americas, Inc. Encapsulated chip and method of fabrication thereof
KR100626380B1 (en) * 2004-07-14 2006-09-20 삼성전자주식회사 Semiconductor package
KR100722617B1 (en) * 2004-10-08 2007-05-28 삼성전기주식회사 Packaging structure for optical modulator
KR100772039B1 (en) * 2004-12-24 2007-10-31 엘지전자 주식회사 Scanning micromirror package, manufacturing method thereof, and optical scanning device thereby
US7848002B2 (en) * 2006-12-26 2010-12-07 Silicon Quest Kabushiki-Kaisha Method for aligning die to substrate
JP2008258541A (en) * 2007-04-09 2008-10-23 Nec Electronics Corp Semiconductor device and its manufacturing method
US8237271B2 (en) * 2007-06-19 2012-08-07 International Business Machines Corporation Direct edge connection for multi-chip integrated circuits
US8409925B2 (en) * 2011-06-09 2013-04-02 Hung-Jen LEE Chip package structure and manufacturing method thereof
CN103197414B (en) * 2013-03-26 2014-01-08 北京大学 Electrostatic drive type miniature torsion device based on electroplating process and preparation method thereof
JP6682976B2 (en) * 2016-04-15 2020-04-15 株式会社Ｊｖｃケンウッド Optical device
US10629515B2 (en) * 2016-12-20 2020-04-21 Xerox Corporation System and method for cooling digital mirror devices

Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617348A (en) * 1969-10-15 1971-11-02 Motorola Inc Method and apparatus for the evaporation of chromium-silver
US4554573A (en) * 1980-10-01 1985-11-19 Hitachi, Ltd. Glass-sealed ceramic package type semiconductor device
US5037778A (en) * 1989-05-12 1991-08-06 Intel Corporation Die attach using gold ribbon with gold/silicon eutectic alloy cladding
US5050040A (en) * 1988-10-21 1991-09-17 Texas Instruments Incorporated Composite material, a heat-dissipating member using the material in a circuit system, the circuit system
US5241133A (en) * 1990-12-21 1993-08-31 Motorola, Inc. Leadless pad array chip carrier
US5293511A (en) * 1993-03-16 1994-03-08 Texas Instruments Incorporated Package for a semiconductor device
US5397917A (en) * 1993-04-26 1995-03-14 Motorola, Inc. Semiconductor package capable of spreading heat
US5435876A (en) * 1993-03-29 1995-07-25 Texas Instruments Incorporated Grid array masking tape process
US5490324A (en) * 1993-09-15 1996-02-13 Lsi Logic Corporation Method of making integrated circuit package having multiple bonding tiers
US5516728A (en) * 1994-03-31 1996-05-14 At&T Corp. Process for fabircating an integrated circuit
US5583377A (en) * 1992-07-15 1996-12-10 Motorola, Inc. Pad array semiconductor device having a heat sink with die receiving cavity
US5605489A (en) * 1993-06-24 1997-02-25 Texas Instruments Incorporated Method of protecting micromechanical devices during wafer separation
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5650915A (en) * 1994-05-25 1997-07-22 Texas Instruments Incorporated Thermally enhanced molded cavity package having a parallel lid
US5668405A (en) * 1994-09-14 1997-09-16 Nec Corporation Semiconductor device with a film carrier tape
US5856911A (en) * 1996-11-12 1999-01-05 National Semiconductor Corporation Attachment assembly for integrated circuits
US5869905A (en) * 1996-01-15 1999-02-09 Kabushiki Kaisha Toshiba Molded packaging for semiconductor device and method of manufacturing the same
US5923995A (en) * 1997-04-18 1999-07-13 National Semiconductor Corporation Methods and apparatuses for singulation of microelectromechanical systems
US5936758A (en) * 1996-04-12 1999-08-10 Texas Instruments Incorporated Method of passivating a micromechanical device within a hermetic package
US6005649A (en) * 1998-07-22 1999-12-21 Rainbow Displays, Inc. Tiled, flat-panel microdisplay array having visually imperceptible seams
US6063696A (en) * 1997-05-07 2000-05-16 Texas Instruments Incorporated Method of reducing wafer particles after partial saw using a superhard protective coating
US6122171A (en) * 1999-07-30 2000-09-19 Micron Technology, Inc. Heat sink chip package and method of making
US6154940A (en) * 1996-03-08 2000-12-05 Matsushita Electric Industrial Co., Ltd. Electronic part and a method of production thereof
US6188814B1 (en) * 1999-08-03 2001-02-13 Lucent Technologies Inc. Packaged microelectromechanical devices and systems
US6335224B1 (en) * 2000-05-16 2002-01-01 Sandia Corporation Protection of microelectronic devices during packaging
US20020003432A1 (en) * 1995-08-09 2002-01-10 James Marc Leas Semiconductor wafer test and burn-in
US6369455B1 (en) * 2000-01-04 2002-04-09 Siliconware Precision Industries Co., Ltd. Externally-embedded heat-dissipating device for ball grid array integrated circuit package
US6476886B2 (en) * 1999-02-15 2002-11-05 Rainbow Displays, Inc. Method for assembling a tiled, flat-panel microdisplay array
US6507098B1 (en) * 1999-08-05 2003-01-14 Siliconware Precision Industries Co., Ltd. Multi-chip packaging structure
US6507082B2 (en) * 2000-02-22 2003-01-14 Texas Instruments Incorporated Flip-chip assembly of protected micromechanical devices
US6541832B2 (en) * 2000-01-31 2003-04-01 Texas Instruments Incorporated Plastic package for micromechanical devices
US6542282B2 (en) * 2000-12-29 2003-04-01 Texas Instruments Incorporated Post metal etch clean process using soft mask
US6545351B1 (en) * 1998-07-21 2003-04-08 Intel Corporation Underside heat slug for ball grid array packages
US6882042B2 (en) * 2000-12-01 2005-04-19 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115548A (en) * 1980-02-19 1981-09-10 Mitsubishi Electric Corp Isolating method of semiconductor wafer
JPS59198714A (en) * 1983-04-26 1984-11-10 Fujitsu Ltd Manufacture of semiconductor element
JPH0793329B2 (en) * 1987-03-10 1995-10-09 日本鉱業株式会社 How to fix semiconductor pellets
JP2501835B2 (en) * 1987-08-25 1996-05-29 昭和電工株式会社 Metallic adhesive material
JPH0239442A (en) * 1988-07-28 1990-02-08 Nec Corp Manufacture of semiconductor device
JP2665062B2 (en) * 1991-02-12 1997-10-22 三菱電機株式会社 Method for manufacturing semiconductor device
JP3212110B2 (en) * 1991-07-15 2001-09-25 沖電気工業株式会社 Method for manufacturing semiconductor device
US5597767A (en) * 1995-01-06 1997-01-28 Texas Instruments Incorporated Separation of wafer into die with wafer-level processing
KR19980039491A (en) * 1996-11-27 1998-08-17 김광호 Solder Plating Method for Die Attach
JP3546630B2 (en) * 1997-02-12 2004-07-28 富士ゼロックス株式会社 Surface emitting semiconductor laser device and method of manufacturing the same
KR19990059029A (en) * 1997-12-30 1999-07-26 김규현 Manufacturing method of semiconductor package

Patent Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617348A (en) * 1969-10-15 1971-11-02 Motorola Inc Method and apparatus for the evaporation of chromium-silver
US4554573A (en) * 1980-10-01 1985-11-19 Hitachi, Ltd. Glass-sealed ceramic package type semiconductor device
US5050040A (en) * 1988-10-21 1991-09-17 Texas Instruments Incorporated Composite material, a heat-dissipating member using the material in a circuit system, the circuit system
US5037778A (en) * 1989-05-12 1991-08-06 Intel Corporation Die attach using gold ribbon with gold/silicon eutectic alloy cladding
US5241133A (en) * 1990-12-21 1993-08-31 Motorola, Inc. Leadless pad array chip carrier
US5583377A (en) * 1992-07-15 1996-12-10 Motorola, Inc. Pad array semiconductor device having a heat sink with die receiving cavity
US5293511A (en) * 1993-03-16 1994-03-08 Texas Instruments Incorporated Package for a semiconductor device
US5435876A (en) * 1993-03-29 1995-07-25 Texas Instruments Incorporated Grid array masking tape process
US5397917A (en) * 1993-04-26 1995-03-14 Motorola, Inc. Semiconductor package capable of spreading heat
US5605489A (en) * 1993-06-24 1997-02-25 Texas Instruments Incorporated Method of protecting micromechanical devices during wafer separation
US5490324A (en) * 1993-09-15 1996-02-13 Lsi Logic Corporation Method of making integrated circuit package having multiple bonding tiers
US5516728A (en) * 1994-03-31 1996-05-14 At&T Corp. Process for fabircating an integrated circuit
US5650915A (en) * 1994-05-25 1997-07-22 Texas Instruments Incorporated Thermally enhanced molded cavity package having a parallel lid
US5668405A (en) * 1994-09-14 1997-09-16 Nec Corporation Semiconductor device with a film carrier tape
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US20020003432A1 (en) * 1995-08-09 2002-01-10 James Marc Leas Semiconductor wafer test and burn-in
US5869905A (en) * 1996-01-15 1999-02-09 Kabushiki Kaisha Toshiba Molded packaging for semiconductor device and method of manufacturing the same
US6154940A (en) * 1996-03-08 2000-12-05 Matsushita Electric Industrial Co., Ltd. Electronic part and a method of production thereof
US5936758A (en) * 1996-04-12 1999-08-10 Texas Instruments Incorporated Method of passivating a micromechanical device within a hermetic package
US5856911A (en) * 1996-11-12 1999-01-05 National Semiconductor Corporation Attachment assembly for integrated circuits
US5923995A (en) * 1997-04-18 1999-07-13 National Semiconductor Corporation Methods and apparatuses for singulation of microelectromechanical systems
US6063696A (en) * 1997-05-07 2000-05-16 Texas Instruments Incorporated Method of reducing wafer particles after partial saw using a superhard protective coating
US6545351B1 (en) * 1998-07-21 2003-04-08 Intel Corporation Underside heat slug for ball grid array packages
US6005649A (en) * 1998-07-22 1999-12-21 Rainbow Displays, Inc. Tiled, flat-panel microdisplay array having visually imperceptible seams
US6476886B2 (en) * 1999-02-15 2002-11-05 Rainbow Displays, Inc. Method for assembling a tiled, flat-panel microdisplay array
US6122171A (en) * 1999-07-30 2000-09-19 Micron Technology, Inc. Heat sink chip package and method of making
US6188814B1 (en) * 1999-08-03 2001-02-13 Lucent Technologies Inc. Packaged microelectromechanical devices and systems
US6507098B1 (en) * 1999-08-05 2003-01-14 Siliconware Precision Industries Co., Ltd. Multi-chip packaging structure
US6369455B1 (en) * 2000-01-04 2002-04-09 Siliconware Precision Industries Co., Ltd. Externally-embedded heat-dissipating device for ball grid array integrated circuit package
US6541832B2 (en) * 2000-01-31 2003-04-01 Texas Instruments Incorporated Plastic package for micromechanical devices
US6507082B2 (en) * 2000-02-22 2003-01-14 Texas Instruments Incorporated Flip-chip assembly of protected micromechanical devices
US6335224B1 (en) * 2000-05-16 2002-01-01 Sandia Corporation Protection of microelectronic devices during packaging
US6882042B2 (en) * 2000-12-01 2005-04-19 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging
US6542282B2 (en) * 2000-12-29 2003-04-01 Texas Instruments Incorporated Post metal etch clean process using soft mask

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100096708A1 (en) * 2005-08-04 2010-04-22 Gerald Eckstein Chip Module for Installing in Sensor Chip Cards for Fluidic Applications and Method for Producing a Chip Module of This Type
CN106019579A (en) * 2015-03-27 2016-10-12 精工爱普生株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
US9971147B2 (en) 2016-09-26 2018-05-15 Xerox Corporation Integrated micro-channel heatsink in DMD substrate for enhanced cooling capacity
WO2020260001A1 (en) * 2019-06-28 2020-12-30 Valeo Vision Optical module comprising a micro-mirror array
FR3097978A1 (en) * 2019-06-28 2021-01-01 Valeo Vision Optical module comprising a matrix of micro-mirrors

Also Published As

Publication number Publication date
US20010041381A1 (en) 2001-11-15
KR100332967B1 (en) 2002-04-19
KR20010103891A (en) 2001-11-24
US6720206B2 (en) 2004-04-13

Similar Documents

Publication Publication Date Title
US6720206B2 (en) Method for manufacturing digital micro-mirror device (DMD) packages
US7340181B1 (en) Electrical die contact structure and fabrication method
US8211750B2 (en) Semiconductor device comprising light-emitting element and light-receiving element, and manufacturing method therefor
US6661089B2 (en) Semiconductor package which has no resinous flash formed on lead frame and method for manufacturing the same
US7638887B2 (en) Package structure and fabrication method thereof
JP3462026B2 (en) Method for manufacturing semiconductor device
JP2001196407A (en) Semiconductor device and method of forming the same
US7425503B1 (en) Apparatus and method for enhanced thermal conductivity packages for high powered semiconductor devices
US20080197438A1 (en) Sensor semiconductor device and manufacturing method thereof
WO2007034791A1 (en) Solder layer, heat sink using such solder layer and method for manufacturing such heat sink
JPH11214448A (en) Semiconductor device and method for manufacturing semiconductor device
US20060197203A1 (en) Die structure of package and method of manufacturing the same
JP4009505B2 (en) Manufacturing method of semiconductor device
JPH09330992A (en) Semiconductor device mounting body and its manufacture
JP2001077266A (en) Manufacture of resin sealed semiconductor device
WO2009145726A1 (en) Micro electro mechanical device package and method of manufacturing a micro electro mechanical device package
JP2004186643A (en) Semiconductor device and its manufacturing method
JP2002164362A (en) Chip-size semiconductor device and method of manufacturing the same
KR100308393B1 (en) Semiconductor Package and Manufacturing Method
KR100728956B1 (en) Method for fabricating semiconductor package
JP2003124240A (en) Method for manufacturing semiconductor device
JPH0474433A (en) Method and apparatus for manufacturing semiconductor intergrated circuit device
JP2001196331A (en) Method of manufacturing chip-size package
KR20020044988A (en) chip scale package and method for fabricating the same in wafer level
JPS63318744A (en) Semiconductor device

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION