US20020100974A1 - Semiconductor device, semiconductor device mounting structure, liquid crystal device, and electronic apparatus - Google Patents

Semiconductor device, semiconductor device mounting structure, liquid crystal device, and electronic apparatus Download PDF

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US20020100974A1
US20020100974A1 US09/519,436 US51943600A US2002100974A1 US 20020100974 A1 US20020100974 A1 US 20020100974A1 US 51943600 A US51943600 A US 51943600A US 2002100974 A1 US2002100974 A1 US 2002100974A1
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semiconductor device
electrodes
electrode
substrate
bump electrodes
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US6448663B1 (en
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Kenji Uchiyama
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BOE Technology Group Co Ltd
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Seiko Epson Corp
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Assigned to BOE TECHNOLOGY GROUP CO., LTD. reassignment BOE TECHNOLOGY GROUP CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BOE TECHNOLOGY (HK) LIMITED
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    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
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Definitions

  • the present invention relates to a semiconductor device (hereinafter sometimes referred to as an “IC”), a mounting structure thereof, a liquid crystal device using the mounting structure, and an electronic apparatus using the liquid crystal device.
  • a semiconductor device hereinafter sometimes referred to as an “IC”
  • a mounting structure thereof a liquid crystal device using the mounting structure
  • an electronic apparatus using the liquid crystal device.
  • FIG. 8A when mounting an IC using such an anisotropic conductive film 6 , the film is deposited on an IC mounting region 9 of a substrate, such as a glass or flexible wiring substrate. A driving IC 13 ′ is then arranged on the surface of this anisotropic conductive film 6 . Next, as shown in FIG. 8B, the driving IC 13 ′ is mounted to the substrate by thermal compression bonding using a bonding head 5 . As a result, the resin component of the anisotropic conductive film 6 is melted and fluidized.
  • the anisotropic conductive film 6 is cured, and then the resin component of the anisotropic conductive film 6 is solidified, to mount the driving IC 13 ′ onto the IC mounting region 9 .
  • the bump electrodes 130 ′ of the driving IC 13 ′ are electrically connected to electrode terminals 16 on the substrate side through conductive particles 60 contained in the anisotropic conductive film 6 .
  • the number of conductive particles 60 positioned between the bump electrodes 130 ′ and the electrode terminals 16 greatly influences the electrical resistance, reliability, etc.
  • each bump electrode 130 ′ of the driving IC 13 ′ is conventionally formed at a pitch of approximately 100 ⁇ m, and the shape of the bump electrodes 130 ′ is straight with a fixed width.
  • the surface of the bump electrodes 130 ′ facing, i.e., opposing, the electrode terminals 16 may be curved.
  • the bump electrodes 130 ′ tend to be arranged in higher density as the number of pixels increases, which causes a problem that makes it difficult, if not impossible, to even use conventional bump electrodes 130 ′ in liquid crystal devices. That is, when the bump electrode density is increased such that the pitch of the bump electrodes 130 ′ is approximately 40 ⁇ m, conductive particles 60 will gather in high density between adjacent bump electrodes 130 ′ when the anisotropic conductive film 6 is melted, causing short-circuiting between bump electrodes 130 ′.
  • the bump electrodes 130 ′ are made narrower in width, the number of conductive particles 60 between the bump electrodes 130 ′ and the electrode terminals 16 will decrease, impairing the electrical characteristics (e.g., resistivity, etc.) and reliability of the device.
  • one aspect of the invention provides a semiconductor device comprising a first substrate, and a plurality of electrodes, each having a base portion formed on the first substrate and an upper portion, and each adapted to be electrically connected to a corresponding electrode terminal on a second substrate through an anisotropic conductive film containing conductive particles.
  • the base portion of each electrode has a cross-sectional width that is substantially less than the cross-sectional width of the upper portion facing the corresponding electrode terminal to the base portion.
  • the semiconductor device of the present invention When the semiconductor device of the present invention is mounted to a substrate through an anisotropic conductive film to electrically connect the electrode terminals on the second substrate and the bump electrodes on the semiconductor device side, the resin component of the anisotropic conductive film is melted and the conductive particles will flow from the inner areas between the semiconductor device and the substrate toward the outer periphery. Because the base portions of the bump electrodes are made narrower, there are wide gaps between the base portions of adjacent bump electrodes even when such electrodes are formed in high density.
  • the anisotropic conductive film when the anisotropic conductive film is melted and the conductive particles flow from the inner area between the semiconductor device and the substrate toward the outer periphery of semiconductor device, a large number of conductive particles do not gather between adjacent bump electrodes, so that the conductive particles do not cause short-circuiting between the bump electrodes.
  • the bump electrodes are made narrower at the base portion, the upper portions thereof facing the electrode terminals of the substrate are wider, such that the area of the surface of each bump electrodes which faces a corresponding electrode terminal is large.
  • a large number of conductive particles exist between the bump electrodes and the electrode terminals, so that a satisfactory electrical connection is effected between the bump electrodes and the electrode terminals.
  • the bump electrodes of the semiconductor device are formed in high density, it is possible to achieve a high level of reliability.
  • the semiconductor and semiconductor mounting structure of the present invention is applicable to various types of semiconductor devices.
  • a liquid crystal device the semiconductor device of the present invention is effectively mounted on either one of the substrates forming a liquid crystal panel or on a wiring substrate electrically connected to the liquid crystal panel.
  • a higher display quality can be achieved without compromising reliablity.
  • the number of display pixels in the liquid crystal device can be increased to increase display quality.
  • the invention also provides a method of manufacturing a semiconductor device.
  • the method comprises forming a plurality of electrodes on a surface of a semiconductor substrate, applying a photosensitive resist layer to the surface of the semiconductor, exposing the photosensitive resist layer to light through an exposure mask having a plurality of shielding portions, each aligned with a respective one of the plurality of electrodes, creating a plurality of openings in the photosensitive resist layer, each opening being aligned with a corresponding one of the plurality of electrodes and having a reversed-taper shape, filling the plurality of openings with an electrode plating material; and removing the photosensitive resist layer.
  • FIG. 1 is a perspective view of a liquid crystal device, constructed according to embodiments of the invention.
  • FIG. 2 is an exploded, perspective view of the liquid crystal device shown in FIG. 1;
  • FIG. 3A is a plan view showing the surface of a driving IC, including an arrangement of bump electrodes formed thereon, according to embodiments of the invention.
  • FIG. 3B is a sectional view taken along the line X-X′ of FIG. 3A;
  • FIGS. 4A through 4C are sectional views showing the process for mounting a driving IC of the type shown in FIGS. 3A and 3B onto a second transparent substrate which may constitute a liquid crystal panel;
  • FIGS. 5A through 5E are sectional views showing the method of forming the bump electrodes of a driving IC of the type shown in FIGS. 3A and 3B;
  • FIGS. 6A and 6B are sectional views showing the main parts of a mobile telephone (electronic apparatus) having a liquid crystal device constructed according to embodiments of the invention
  • FIG. 7 is a perspective view of a mobile telephone (electronic apparatus) having a liquid crystal device constructed according to embodiments of the invention.
  • FIGS. 8A through 8C are sectional views showing the process for mounting a conventional IC on a substrate.
  • FIG. 1 is a perspective view showing a passive matrix type liquid crystal device
  • FIG. 2 is an exploded, perspective view thereof
  • a liquid crystal device 10 includes a first transparent substrate 1 and a second transparent substrate, each of which can be formed, for example, by a transparent glass.
  • a seal material 3 is formed on one of these substrates by printing or the like, and the first and second transparent substrates 1 and 2 are secured to each other, with the seal material 3 placed therebetween.
  • a liquid crystal sealing region 40 defined by the seal material 3 has liquid crystals 41 sealed therein.
  • a polarizing plate 4 a is attached to the outer surface of the first transparent substrate 1 by adhesive or the like
  • another polarizing plate 4 b is attached to the outer surface of the second transparent substrate 2 by adhesive or the like.
  • the second transparent substrate 2 is larger than the first transparent substrate 1 , a part of the second transparent substrate 2 protrudes from the lower edge of the first transparent substrate 1 when the first transparent substrate 1 is superimposed on the second transparent substrate 2 , as shown in FIG. 2.
  • a driving IC 13 which is a semiconductor device
  • COG-mounted by face down bonding Such mounting, which will be described in more detail below, is effected by placing an anisotropic conductive film between the second transparent substrate 2 and the driving IC 13 and thermal compression bonding them together.
  • the bump electrodes of the driving IC 13 are electrically connected to the electrode terminals of the IC mounting region 9 of the second transparent substrate 2 via the anisotropic conductive film.
  • input terminals 12 are formed below the IC mounting region 9 , and a flexible printed circuit board (not shown) is connected to these input terminals 12 by heat sealing or the like.
  • an electrode pattern consisting of a plurality of stripe-shaped electrodes extending horizontally inside the liquid crystal sealing region 40 , and a wiring pattern for connecting the stripe-shaped electrodes to each terminal outside the liquid crystal sealing region 40 .
  • This electrode pattern is formed of a transparent ITO (indium tin oxide) film or the like.
  • An electrode pattern (thin film pattern) and wiring pattern are also formed on the inner surface of the second transparent substrate 2 .
  • the electrode pattern (thin film pattern) consists of a plurality of stripe-shaped electrodes extending vertically inside the liquid crystal sealing region 40 , with the wiring pattern connecting the stripe-shaped electrodes to the IC mounting region 9 or the like outside the liquid crystal sealing region 40 .
  • This electrode pattern is also formed of a transparent ITO film or the like.
  • the stripe-shaped electrodes of the first transparent substrate 1 and the stripe-shaped electrodes of the second transparent substrate 2 intersect with each other to thereby form pixels. Further, in the gap between the first transparent substrate 1 and the second transparent substrate 2 , liquid crystals 41 are sealed in the liquid crystal sealing region 40 .
  • the driving IC 13 when driving power and a driving signal are supplied to the driving IC 13 , the driving IC 13 applies voltage to a desired stripe-shaped electrode in accordance with the driving signal to control the orientation of the liquid crystals 41 for each pixel, so that a desired image is displayed on the liquid crystal device 10 .
  • FIG. 3A is a plan view showing the surface of the driving IC 13 which is mounted on the second transparent substrate 2
  • FIG. 3B is a sectional view taken along the line X-X′ in FIG. 3A
  • FIGS. 4A through 4C are diagrams showing the process by which the driving IC 13 is mounted on the substrate.
  • a large number of wiring pattern ends are gathered in the IC mounting region 9 . These ends, e.g., the forward end portions of the wiring pattern, constitute electrode terminals 16 .
  • One way to improve the display quality of the liquid crystal device 10 is to increase the number of pixels. This results in an increase in the number of stripe-shaped electrodes formed in the liquid crystal panel, and further results in a high density arrangement of the electrode terminals 16 (see FIG. 4).
  • the plurality of bump electrodes 130 formed on a mounting surface 13 a of the driving IC 13 will also be disposed at a higher density, as the number of pixels of the liquid crystal device 10 increases. That is, the bump electrodes 130 are formed with a narrower pitch along the chip sides 13 b , for example, with a pitch of approximately 40 ⁇ m.
  • the upper surface of each bump electrode 130 is rectangular in shape and has a width of approximately 15 to 20 ⁇ m, so that upper portions 131 of adjacent bump electrodes 130 are separated from each other by a small gap of approximately 20 ⁇ m to 25 ⁇ m.
  • the width of the base portions 132 of the bump electrodes 130 of the driving IC 13 are narrower than that of the upper portions 131 that face the electrode terminals 16 of the second transparent substrate 2 . More specifically, the width of the base portions 132 is about 10 to 15 ⁇ m. Thus, while the upper portions 131 of adjacent bump electrodes 130 are spaced apart from each other by narrow gaps of 20 ⁇ m to 25 ⁇ m, the base portions 132 thereof are spaced apart from each other by wider gaps of about 25 to 30 ⁇ m.
  • the anisotropic conductive film 6 is first deposited on the IC mounting region 9 of the second transparent substrate 2 , as shown in FIG. 4A. Then the driving IC 13 is arranged on the surface of this anisotropic conductive film 6 , with the bump electrodes 130 facing downward for face down bonding. In this anisotropic conductive film 6 , conductive particles 60 that are formed in a metallic film on the surface of plastic balls are dispersed in a thermosetting resin. Next, as shown in FIG. 4B, the driving IC 13 is heat-bonded onto the second substrate 2 using a bonding head 5 . As a result, the resin component of the anisotropic conductive film 6 is melted.
  • the melted anisotropic conductive film 6 is fluidized and cured, and then the resin component of the anisotropic conductive film 6 is solidified, to securely mount the driving IC 13 onto the IC mounting region 9 and to electrically connect the bump electrodes 130 of the driving IC 13 to the electrode terminals 16 on the substrate side through the conductive particles 60 contained in the anisotropic conductive film 6 .
  • the resin component of the anisotropic conductive film 6 is melted, and, as indicated by the arrows A in FIG. 3A, the resin component and the conductive particles 60 between the driving IC 13 and the second transparent substrate 2 will flow from an inner area of the driving IC 13 toward an outer periphery thereof through the gaps between the bump electrodes 130 .
  • the base portions 132 of the bump electrodes 130 of the driving IC 13 are tapered and relatively thin, as shown in FIG. 3B and FIGS.
  • the base portions 132 of the adjacent bump electrodes 130 are spaced apart from each other by wider gaps than the corresponding upper portions 131 .
  • These wider gaps at the base portions 132 act as channels through which the resin component and the conductive particles 60 of the anisotropic conductive film 6 pass to prevent large numbers of conductive particles 60 from collecting between adjacent bump electrodes 130 and short-circuiting the bump electrodes 130 .
  • the narrower base portions 132 of bump electrodes prevent or at least minimize short-circuiting
  • the wider upper portions 131 improve the electrical connection between the bump electrodes and corresponding electrode terminals 16 .
  • each bump electrode provides more surface area facing the electrode terminals 16 whose corresponding facing surfaces have like-sized surface areas.
  • a large number of conductive particles 60 collect between the facing surfaces of the bump electrodes 130 and the electrode terminals 16 , so that the bump electrodes 130 and the electrode terminals 16 are electrically connected to each other in a satisfactory manner.
  • FIGS. 5A through 5E are sectional views showing the process for forming bump electrodes 130 .
  • Electrodes 136 are formed on the surface of a semiconductor substrate 135 forming the driving IC 13 .
  • a photosensitive resist 150 is applied.
  • This photosensitive resist 150 is a negative type.
  • the photosensitive resist 150 is exposed to light through an exposure mask 151 , only the regions of the photosensitive resist 150 which are covered with shielding portions 152 of the exposure mask 151 are removed in the etching (development) process, as shown in FIG. 5C.
  • the light applied is also diffused in the horizontal direction in the exposure process shown in FIG. 5B, so that the boundary between the non-exposed portion 155 and the exposed portion 156 exhibits a reverse-tapered shape.
  • the side wall of the opening portions 157 of the resist 150 exhibits a reverse-tapered shape.
  • the surface of the electrodes 136 is plated.
  • plating 135 is effected on the surface side of the electrodes 136 in such a way as to fill the opening portions 157 of the resist 150 .
  • bump electrodes 130 are formed with the base portions 132 narrower than the upper portions 131 thereof, as shown in FIG. 5E.
  • FIG. 7 shows a mobile telephone 30 which is an example of one type of electronic apparatus which may embody a liquid crystal device constructed in accordance with the present invention.
  • the liquid crystal device of the present invention is also applicable to other electronic apparatuses, such as mobile information terminals, electronic organizers, or video camera finders.
  • the mobile telephone 30 comprises various components such as an antenna 31 , a speaker 32 , a liquid crystal device 10 , a key pad 33 and a microphone 34 , accommodated in an outer case 36 that serves as the housing. Also provided in the case 36 is a control circuit board 37 on which a control circuit to control the operation of the above components is mounted.
  • the liquid crystal device 10 is of the type shown in FIG. 1.
  • signals input through the key pad 33 and the microphone 34 , reception data received by the antenna 31 , etc. are input to the control circuit on the control circuit board 37 .
  • the control circuit displays images such as numbers, characters, patterns, etc. in accordance with various items of input data, and further receives reception data from the antenna 31 .
  • FIGS. 6A and 6B are sectional views showing the main parts of a mobile telephone 100 (electronic apparatus) in which the liquid crystal device 10 is mounted in accordance with this embodiment of the invention.
  • a transparent light guide plate 19 of acrylic resin or polycarbonate is superimposed on the first transparent substrate 1 side of the liquid crystal device 10 , and a flexible wiring substrate 120 is drawn out from between a light guide plate 19 and the second transparent substrate 2 and is electrically and mechanically connected to a printed circuit board 90 which forms the circuit board of the mobile telephone 100 main body.
  • a backlight light emitting device 50 Adjacent to a side (or end portion) of the light guide plate 19 , there is arranged a backlight light emitting device 50 for emitting light toward the end portion (light incident portion) of the light guide plate 19 .
  • An LED or the like is used as this backlight light emitting device 50 , and is mounted on the printed circuit board 90 .
  • the backlight device 50 is mounted on the printed circuit board 90
  • device 50 can also be mounted on the flexible wiring substrate 120 at any position which allows incident light to fall on the light guide plate 19 .
  • the liquid crystal device 10 is fastened to the light guide plate 19 by a double-sided tape or the like and restrained by frame 110 .
  • the light guide plate 19 secures the liquid crystal device 10 and integrally holds the printed circuit board 90 by, for example, engaging with it.
  • the light guide plate 19 is also fastened to the frame 110 of the mobile telephone 100 .
  • a glass cover 111 is placed on the second transparent substrate 2 side.
  • the driving IC 13 is COG-mounted on the second transparent substrate 2 which may constitute the liquid crystal panel
  • the driving IC 13 may also be COF-mounted on the flexible wiring substrate which is electrically connected to the liquid crystal panel. Even in the latter case, the driving IC 13 may be mounted on the flexible wiring substrate through the anisotropic conductive film 6 instead of the second transparent substrate 2 , in the mounting process described with reference to FIGS. 4A through 4C.
  • the bump electrodes of the IC are tapered toward the base portions, so that, even when the bump electrodes are formed in high density, the base portions of the adjacent bump electrodes are spaced apart from each other by wide gaps.
  • the anisotropic conductive film is melted and fluidized, during the mounting of the IC to the substrate via the anisotropic conductive film, a large number of conductive particles do not gather between adjacent bump electrodes. Instead, most of the conductive particles that would otherwise gather between adjacent bump electrodes flow out through the wider gaps between the bump electrode bases and collect at the periphery of the IC substrate. As a result, the conductive particles do not cause short-circuiting between the bump electrodes.
  • the upper portions of the bump electrodes are wider and the opposing surface areas of both the bump electrodes and the electrode terminals are relatively large, a higher density and hence a relatively large number of conductive particles become positioned between the bump electrodes and the electrode terminals. This ensures that the bump electrodes and the electrode terminals are electrically connected in a satisfactory manner. Therefore, it is possible to achieve a high level of reliability even when the bump electrodes of the IC are formed in high density.

Abstract

A semiconductor device, a mounting structure thereof, a liquid crystal device, and an electronic apparatus having an improved bump electrode structure, such that the bump electrodes and corresponding electrode terminals can be electrically connected through an anisotropic conductive film without compromising, or causing deterioration of, the electrical characteristics or reliability of the device, even when the bump electrodes are formed with a narrow pitch. Since the bump electrodes of the semiconductor device are tapered inward from top to bottom, the base portions of adjacent bump electrodes are spaced apart from each other by wider gaps than the corresponding upper portions. Thus, a large number of conductive particles in the conductive film do not gather between adjacent bump electrodes to cause short-circuiting therebetween. Further, since the upper portions of the bump electrodes are wider and the opposing surface areas of both the bump electrodes and the electrode terminals are relatively large, a large number of conductive particles are distributed between the bump electrodes and the electrode terminals. This ensures that the bump electrodes and the electrode terminals are electrically connected in a satisfactory manner. Therefore, with this arrangement, a high level of reliability can be achieved, even when the bump electrodes are formed in high density.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • The present invention relates to a semiconductor device (hereinafter sometimes referred to as an “IC”), a mounting structure thereof, a liquid crystal device using the mounting structure, and an electronic apparatus using the liquid crystal device. [0002]
  • 2. Description of the Related Art [0003]
  • With either the COG (chip on glass) or COF (chip on film) mounting methods, mounting a face-down-bonding type IC using an ACF (anisotropic conductive film) makes it possible to cope with fine pitches and to collectively connect a plurality of contacts electrically, thus making the method suitable for mounting a driving IC on electrode terminals formed on a liquid crystal panel or on a flexible wiring substrate. [0004]
  • As shown in FIG. 8A, when mounting an IC using such an anisotropic [0005] conductive film 6, the film is deposited on an IC mounting region 9 of a substrate, such as a glass or flexible wiring substrate. A driving IC 13′ is then arranged on the surface of this anisotropic conductive film 6. Next, as shown in FIG. 8B, the driving IC 13′ is mounted to the substrate by thermal compression bonding using a bonding head 5. As a result, the resin component of the anisotropic conductive film 6 is melted and fluidized. Thereafter, the anisotropic conductive film 6 is cured, and then the resin component of the anisotropic conductive film 6 is solidified, to mount the driving IC 13′ onto the IC mounting region 9. During this step, the bump electrodes 130′ of the driving IC 13′ are electrically connected to electrode terminals 16 on the substrate side through conductive particles 60 contained in the anisotropic conductive film 6. Here, the number of conductive particles 60 positioned between the bump electrodes 130′ and the electrode terminals 16 greatly influences the electrical resistance, reliability, etc.
  • In this mounting structure, each [0006] bump electrode 130′ of the driving IC 13′ is conventionally formed at a pitch of approximately 100 μm, and the shape of the bump electrodes 130′ is straight with a fixed width. The surface of the bump electrodes 130′ facing, i.e., opposing, the electrode terminals 16 may be curved.
  • However, in a liquid crystal device (e.g., a liquid crystal display device), the [0007] bump electrodes 130′ tend to be arranged in higher density as the number of pixels increases, which causes a problem that makes it difficult, if not impossible, to even use conventional bump electrodes 130′ in liquid crystal devices. That is, when the bump electrode density is increased such that the pitch of the bump electrodes 130′ is approximately 40 μm, conductive particles 60 will gather in high density between adjacent bump electrodes 130′ when the anisotropic conductive film 6 is melted, causing short-circuiting between bump electrodes 130′. On the other hand, when the bump electrodes 130′ are made narrower in width, the number of conductive particles 60 between the bump electrodes 130′ and the electrode terminals 16 will decrease, impairing the electrical characteristics (e.g., resistivity, etc.) and reliability of the device.
    • SUMMARY OF THE INVENTION
  • Objects of the Invention [0008]
  • Therefore, it is an object of the present invention to overcome the aforementioned problems. [0009]
  • It is another object of the invention to provide an IC and a mounting structure thereof with an improved bump electrode structure, whereby the bump electrodes are electrically connected to electrode terminals on a substrate through an anisotropic conductive film without compromising, or causing deterioration of, the electrical characteristics or reliability, even when the bump electrodes are formed with a narrow (e.g., small) pitch. [0010]
  • It is further object of the invention to provide a liquid crystal device employing such an IC or mounting structure thereof. [0011]
  • It is yet another object of the invention to provide an electronic apparatus employing such an IC or mounting structure thereof. [0012]
  • To achieve the above objects, one aspect of the invention provides a semiconductor device comprising a first substrate, and a plurality of electrodes, each having a base portion formed on the first substrate and an upper portion, and each adapted to be electrically connected to a corresponding electrode terminal on a second substrate through an anisotropic conductive film containing conductive particles. In accordance with the invention, the base portion of each electrode has a cross-sectional width that is substantially less than the cross-sectional width of the upper portion facing the corresponding electrode terminal to the base portion. [0013]
  • When the semiconductor device of the present invention is mounted to a substrate through an anisotropic conductive film to electrically connect the electrode terminals on the second substrate and the bump electrodes on the semiconductor device side, the resin component of the anisotropic conductive film is melted and the conductive particles will flow from the inner areas between the semiconductor device and the substrate toward the outer periphery. Because the base portions of the bump electrodes are made narrower, there are wide gaps between the base portions of adjacent bump electrodes even when such electrodes are formed in high density. Thus, when the anisotropic conductive film is melted and the conductive particles flow from the inner area between the semiconductor device and the substrate toward the outer periphery of semiconductor device, a large number of conductive particles do not gather between adjacent bump electrodes, so that the conductive particles do not cause short-circuiting between the bump electrodes. Further, although the bump electrodes are made narrower at the base portion, the upper portions thereof facing the electrode terminals of the substrate are wider, such that the area of the surface of each bump electrodes which faces a corresponding electrode terminal is large. Thus, a large number of conductive particles exist between the bump electrodes and the electrode terminals, so that a satisfactory electrical connection is effected between the bump electrodes and the electrode terminals. Thus, even if the bump electrodes of the semiconductor device are formed in high density, it is possible to achieve a high level of reliability. [0014]
  • The semiconductor and semiconductor mounting structure of the present invention is applicable to various types of semiconductor devices. In a liquid crystal device, the semiconductor device of the present invention is effectively mounted on either one of the substrates forming a liquid crystal panel or on a wiring substrate electrically connected to the liquid crystal panel. When such a liquid crystal device is used as a display device for an electronic apparatus, such as a mobile telephone, a higher display quality can be achieved without compromising reliablity. By utilizing a semiconductor device of the present invention, which permits a higher density arrangement of bump electrodes without short circuiting the device, the number of display pixels in the liquid crystal device can be increased to increase display quality. Although a large number of conductive particles do not gather between bump electrodes to create short circuiting problems, a large number of such particles are secured between the bump electrodes and the electrode terminals, thereby making it possible to effect satisfactory electrical connection between the bump electrodes and the electrode terminals. [0015]
  • The invention also provides a method of manufacturing a semiconductor device. The method comprises forming a plurality of electrodes on a surface of a semiconductor substrate, applying a photosensitive resist layer to the surface of the semiconductor, exposing the photosensitive resist layer to light through an exposure mask having a plurality of shielding portions, each aligned with a respective one of the plurality of electrodes, creating a plurality of openings in the photosensitive resist layer, each opening being aligned with a corresponding one of the plurality of electrodes and having a reversed-taper shape, filling the plurality of openings with an electrode plating material; and removing the photosensitive resist layer.[0016]
  • Other objects and attainments together with a fuller understanding of the invention will become apparent and appreciated by referring to the following description and claims taken in conjunction with the accompanying drawings. [0017]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • In the drawings, wherein like reference symbols refer to like parts: [0018]
  • FIG. 1 is a perspective view of a liquid crystal device, constructed according to embodiments of the invention; [0019]
  • FIG. 2 is an exploded, perspective view of the liquid crystal device shown in FIG. 1; [0020]
  • FIG. 3A is a plan view showing the surface of a driving IC, including an arrangement of bump electrodes formed thereon, according to embodiments of the invention; [0021]
  • FIG. 3B is a sectional view taken along the line X-X′ of FIG. 3A; [0022]
  • FIGS. 4A through 4C are sectional views showing the process for mounting a driving IC of the type shown in FIGS. 3A and 3B onto a second transparent substrate which may constitute a liquid crystal panel; [0023]
  • FIGS. 5A through 5E are sectional views showing the method of forming the bump electrodes of a driving IC of the type shown in FIGS. 3A and 3B; [0024]
  • FIGS. 6A and 6B are sectional views showing the main parts of a mobile telephone (electronic apparatus) having a liquid crystal device constructed according to embodiments of the invention; [0025]
  • FIG. 7 is a perspective view of a mobile telephone (electronic apparatus) having a liquid crystal device constructed according to embodiments of the invention; and [0026]
  • FIGS. 8A through 8C are sectional views showing the process for mounting a conventional IC on a substrate.[0027]
    • DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Embodiments of the present invention will be described with reference to the accompanying drawings. [0028]
  • General Construction [0029]
  • FIG. 1 is a perspective view showing a passive matrix type liquid crystal device, and FIG. 2 is an exploded, perspective view thereof In FIGS. 1 and 2, a [0030] liquid crystal device 10 includes a first transparent substrate 1 and a second transparent substrate, each of which can be formed, for example, by a transparent glass. A seal material 3 is formed on one of these substrates by printing or the like, and the first and second transparent substrates 1 and 2 are secured to each other, with the seal material 3 placed therebetween. In the gap (e.g., cell gap) between the first and second transparent substrates 1 and 2, a liquid crystal sealing region 40 defined by the seal material 3 has liquid crystals 41 sealed therein. A polarizing plate 4 a is attached to the outer surface of the first transparent substrate 1 by adhesive or the like, and another polarizing plate 4 b is attached to the outer surface of the second transparent substrate 2 by adhesive or the like.
  • Because the second [0031] transparent substrate 2 is larger than the first transparent substrate 1, a part of the second transparent substrate 2 protrudes from the lower edge of the first transparent substrate 1 when the first transparent substrate 1 is superimposed on the second transparent substrate 2, as shown in FIG. 2. Formed on this protruding portion is an IC mounting region 9, where a driving IC 13, which is a semiconductor device, is COG-mounted by face down bonding. Such mounting, which will be described in more detail below, is effected by placing an anisotropic conductive film between the second transparent substrate 2 and the driving IC 13 and thermal compression bonding them together. As a result, the bump electrodes of the driving IC 13 are electrically connected to the electrode terminals of the IC mounting region 9 of the second transparent substrate 2 via the anisotropic conductive film.
  • Also, on the second [0032] transparent substrate 2, input terminals 12 are formed below the IC mounting region 9, and a flexible printed circuit board (not shown) is connected to these input terminals 12 by heat sealing or the like.
  • Further, although not shown in detail in FIGS. 1 and 2, on the inner surface of the first [0033] transparent substrate 1, there is formed an electrode pattern (thin film pattern) consisting of a plurality of stripe-shaped electrodes extending horizontally inside the liquid crystal sealing region 40, and a wiring pattern for connecting the stripe-shaped electrodes to each terminal outside the liquid crystal sealing region 40. This electrode pattern is formed of a transparent ITO (indium tin oxide) film or the like. An electrode pattern (thin film pattern) and wiring pattern are also formed on the inner surface of the second transparent substrate 2. In this case, the electrode pattern (thin film pattern) consists of a plurality of stripe-shaped electrodes extending vertically inside the liquid crystal sealing region 40, with the wiring pattern connecting the stripe-shaped electrodes to the IC mounting region 9 or the like outside the liquid crystal sealing region 40. This electrode pattern is also formed of a transparent ITO film or the like.
  • When the first [0034] transparent substrate 1 and the second transparent substrate 2, constructed as described above, are bonded together as shown in FIG. 1 to form a panel (e.g., a liquid crystal panel) while effecting electrical connection at specified positions, the stripe-shaped electrodes of the first transparent substrate 1 and the stripe-shaped electrodes of the second transparent substrate 2 intersect with each other to thereby form pixels. Further, in the gap between the first transparent substrate 1 and the second transparent substrate 2, liquid crystals 41 are sealed in the liquid crystal sealing region 40. Thus, when driving power and a driving signal are supplied to the driving IC 13, the driving IC 13 applies voltage to a desired stripe-shaped electrode in accordance with the driving signal to control the orientation of the liquid crystals 41 for each pixel, so that a desired image is displayed on the liquid crystal device 10.
  • Mounting Structure for Driving [0035] IC 13
  • FIG. 3A is a plan view showing the surface of the driving [0036] IC 13 which is mounted on the second transparent substrate 2, and FIG. 3B is a sectional view taken along the line X-X′ in FIG. 3A. FIGS. 4A through 4C are diagrams showing the process by which the driving IC 13 is mounted on the substrate.
  • In the [0037] liquid crystal device 10 shown in FIGS. 1 and 2, a large number of wiring pattern ends are gathered in the IC mounting region 9. These ends, e.g., the forward end portions of the wiring pattern, constitute electrode terminals 16. One way to improve the display quality of the liquid crystal device 10 is to increase the number of pixels. This results in an increase in the number of stripe-shaped electrodes formed in the liquid crystal panel, and further results in a high density arrangement of the electrode terminals 16 (see FIG. 4).
  • Thus, as shown in FIG. 3A, the plurality of [0038] bump electrodes 130 formed on a mounting surface 13 a of the driving IC 13 will also be disposed at a higher density, as the number of pixels of the liquid crystal device 10 increases. That is, the bump electrodes 130 are formed with a narrower pitch along the chip sides 13 b, for example, with a pitch of approximately 40 μm. The upper surface of each bump electrode 130 is rectangular in shape and has a width of approximately 15 to 20 μm, so that upper portions 131 of adjacent bump electrodes 130 are separated from each other by a small gap of approximately 20 μm to 25 μm.
  • Here, as shown in FIG. 3B, the width of the [0039] base portions 132 of the bump electrodes 130 of the driving IC 13 are narrower than that of the upper portions 131 that face the electrode terminals 16 of the second transparent substrate 2. More specifically, the width of the base portions 132 is about 10 to 15 μm. Thus, while the upper portions 131 of adjacent bump electrodes 130 are spaced apart from each other by narrow gaps of 20 μm to 25 μm, the base portions 132 thereof are spaced apart from each other by wider gaps of about 25 to 30 μm.
  • The IC mounting structure of this embodiment will be described by describing the process of mounting the driving [0040] IC 13 constructed as described above.
  • When mounting the driving [0041] IC 13 of this embodiment on the mounting region 9 of the second transparent substrate 2, the anisotropic conductive film 6 is first deposited on the IC mounting region 9 of the second transparent substrate 2, as shown in FIG. 4A. Then the driving IC 13 is arranged on the surface of this anisotropic conductive film 6, with the bump electrodes 130 facing downward for face down bonding. In this anisotropic conductive film 6, conductive particles 60 that are formed in a metallic film on the surface of plastic balls are dispersed in a thermosetting resin. Next, as shown in FIG. 4B, the driving IC 13 is heat-bonded onto the second substrate 2 using a bonding head 5. As a result, the resin component of the anisotropic conductive film 6 is melted.
  • In the next step, shown in FIG. 4C, the melted anisotropic [0042] conductive film 6 is fluidized and cured, and then the resin component of the anisotropic conductive film 6 is solidified, to securely mount the driving IC 13 onto the IC mounting region 9 and to electrically connect the bump electrodes 130 of the driving IC 13 to the electrode terminals 16 on the substrate side through the conductive particles 60 contained in the anisotropic conductive film 6.
  • When the driving [0043] IC 13 is mounted in this way, the resin component of the anisotropic conductive film 6 is melted, and, as indicated by the arrows A in FIG. 3A, the resin component and the conductive particles 60 between the driving IC 13 and the second transparent substrate 2 will flow from an inner area of the driving IC 13 toward an outer periphery thereof through the gaps between the bump electrodes 130. In this embodiment, the base portions 132 of the bump electrodes 130 of the driving IC 13 are tapered and relatively thin, as shown in FIG. 3B and FIGS. 4A through 4C, so that even if the bump electrodes 130 are formed in high density, the base portions 132 of the adjacent bump electrodes 130 are spaced apart from each other by wider gaps than the corresponding upper portions 131. These wider gaps at the base portions 132 act as channels through which the resin component and the conductive particles 60 of the anisotropic conductive film 6 pass to prevent large numbers of conductive particles 60 from collecting between adjacent bump electrodes 130 and short-circuiting the bump electrodes 130. While the narrower base portions 132 of bump electrodes prevent or at least minimize short-circuiting, the wider upper portions 131 improve the electrical connection between the bump electrodes and corresponding electrode terminals 16. The wider upper portion 132 of each bump electrode provides more surface area facing the electrode terminals 16 whose corresponding facing surfaces have like-sized surface areas. As a result, a large number of conductive particles 60 collect between the facing surfaces of the bump electrodes 130 and the electrode terminals 16, so that the bump electrodes 130 and the electrode terminals 16 are electrically connected to each other in a satisfactory manner. Thus, with this arrangement, it is possible to achieve a high level of reliability, even if the bump electrodes 130 of the driving IC 13 are formed in high density.
  • Method of [0044] Producing Bump Electrodes 130 of Driving IC 13
  • Regarding the method of producing the driving [0045] IC 13 used in this mounting structure, the process for forming the bump electrodes 130 will be described with reference to FIGS. 5A through 5E, which are sectional views showing the process for forming bump electrodes 130.
  • First, as shown in FIG. 5A, [0046] electrodes 136 are formed on the surface of a semiconductor substrate 135 forming the driving IC 13. Then, as shown in FIG. 5B, a photosensitive resist 150 is applied. This photosensitive resist 150 is a negative type. Thus, when the photosensitive resist 150 is exposed to light through an exposure mask 151, only the regions of the photosensitive resist 150 which are covered with shielding portions 152 of the exposure mask 151 are removed in the etching (development) process, as shown in FIG. 5C.
  • When forming the resist [0047] 150 in such a specified or predetermined pattern, the light applied is also diffused in the horizontal direction in the exposure process shown in FIG. 5B, so that the boundary between the non-exposed portion 155 and the exposed portion 156 exhibits a reverse-tapered shape. Thus, as shown in FIG. 5C, the side wall of the opening portions 157 of the resist 150 exhibits a reverse-tapered shape.
  • After thus forming the resist [0048] 150 in a specified or predetermined pattern, the surface of the electrodes 136 is plated. As a result, as shown in FIG. 5D, plating 135 is effected on the surface side of the electrodes 136 in such a way as to fill the opening portions 157 of the resist 150.
  • Thus, when the resist [0049] 150 is removed after the plating, bump electrodes 130 are formed with the base portions 132 narrower than the upper portions 131 thereof, as shown in FIG. 5E.
  • Example of Mounting in Electronic Apparatus [0050]
  • FIG. 7 shows a [0051] mobile telephone 30 which is an example of one type of electronic apparatus which may embody a liquid crystal device constructed in accordance with the present invention. The liquid crystal device of the present invention is also applicable to other electronic apparatuses, such as mobile information terminals, electronic organizers, or video camera finders.
  • The [0052] mobile telephone 30 comprises various components such as an antenna 31, a speaker 32, a liquid crystal device 10, a key pad 33 and a microphone 34, accommodated in an outer case 36 that serves as the housing. Also provided in the case 36 is a control circuit board 37 on which a control circuit to control the operation of the above components is mounted. The liquid crystal device 10 is of the type shown in FIG. 1.
  • In this [0053] mobile telephone 30, signals input through the key pad 33 and the microphone 34, reception data received by the antenna 31, etc. are input to the control circuit on the control circuit board 37. The control circuit displays images such as numbers, characters, patterns, etc. in accordance with various items of input data, and further receives reception data from the antenna 31.
  • FIGS. 6A and 6B are sectional views showing the main parts of a mobile telephone [0054] 100 (electronic apparatus) in which the liquid crystal device 10 is mounted in accordance with this embodiment of the invention.
  • In [0055] mobile telephone 100, shown in FIGS. 6A and 6B, a transparent light guide plate 19 of acrylic resin or polycarbonate is superimposed on the first transparent substrate 1 side of the liquid crystal device 10, and a flexible wiring substrate 120 is drawn out from between a light guide plate 19 and the second transparent substrate 2 and is electrically and mechanically connected to a printed circuit board 90 which forms the circuit board of the mobile telephone 100 main body. Adjacent to a side (or end portion) of the light guide plate 19, there is arranged a backlight light emitting device 50 for emitting light toward the end portion (light incident portion) of the light guide plate 19. An LED or the like is used as this backlight light emitting device 50, and is mounted on the printed circuit board 90. While in this embodiment the backlight device 50 is mounted on the printed circuit board 90, device 50 can also be mounted on the flexible wiring substrate 120 at any position which allows incident light to fall on the light guide plate 19. Further, it is also possible to mount device 50 on a sub-substrate which is separate from the printed circuit board 90. Here, the liquid crystal device 10 is fastened to the light guide plate 19 by a double-sided tape or the like and restrained by frame 110. Further, the light guide plate 19 secures the liquid crystal device 10 and integrally holds the printed circuit board 90 by, for example, engaging with it. The light guide plate 19 is also fastened to the frame 110 of the mobile telephone 100. A glass cover 111 is placed on the second transparent substrate 2 side.
  • Other Embodiments [0056]
  • While in the above-described embodiments the driving [0057] IC 13 is COG-mounted on the second transparent substrate 2 which may constitute the liquid crystal panel, the driving IC 13 may also be COF-mounted on the flexible wiring substrate which is electrically connected to the liquid crystal panel. Even in the latter case, the driving IC 13 may be mounted on the flexible wiring substrate through the anisotropic conductive film 6 instead of the second transparent substrate 2, in the mounting process described with reference to FIGS. 4A through 4C.
  • Advantages [0058]
  • As described above, in the present invention, the bump electrodes of the IC are tapered toward the base portions, so that, even when the bump electrodes are formed in high density, the base portions of the adjacent bump electrodes are spaced apart from each other by wide gaps. Thus, when the anisotropic conductive film is melted and fluidized, during the mounting of the IC to the substrate via the anisotropic conductive film, a large number of conductive particles do not gather between adjacent bump electrodes. Instead, most of the conductive particles that would otherwise gather between adjacent bump electrodes flow out through the wider gaps between the bump electrode bases and collect at the periphery of the IC substrate. As a result, the conductive particles do not cause short-circuiting between the bump electrodes. Furthermore, since the upper portions of the bump electrodes are wider and the opposing surface areas of both the bump electrodes and the electrode terminals are relatively large, a higher density and hence a relatively large number of conductive particles become positioned between the bump electrodes and the electrode terminals. This ensures that the bump electrodes and the electrode terminals are electrically connected in a satisfactory manner. Therefore, it is possible to achieve a high level of reliability even when the bump electrodes of the IC are formed in high density. [0059]
  • While the invention has been described in conjunction with several specific embodiments, many further alternatives, modifications, variations and applications will be apparent to those skilled in the art in light of the foregoing description. Thus, the invention described herein is intended to embrace all such alternatives, modifications,, variations and applications as may fall within the spirit and scope of the appended claims. [0060]

Claims (14)

What is claimed is:
1. A semiconductor device, comprising:
a first substrate; and
a plurality of electrodes, each having a base portion formed on the first substrate and an upper portion, and each adapted to be electrically connected to a corresponding electrode terminal on a second substrate through an anisotropic conductive film containing conductive particles;
wherein the base portion of each electrode has a cross-sectional width that is substantially less than the cross-sectional width of the upper portion facing the corresponding electrode terminal to the base portion.
2. The semiconductor device of claim 1, wherein each electrode has a reverse-taper structure, such that the cross-sectional width of each electrode decreases linearly from the upper portion.
3. The semiconductor device of claim 1, wherein each electrode has an upper surface facing a surface of the corresponding electrode terminal, each upper surface having a width of between about 15 μm and about 20 μm.
4. The semiconductor device of claim 2, wherein the conductive particles have a relatively high density of distribution between facing surfaces of the electrodes and the electrode terminals and at an outer periphery of the first substrate and have a relatively low density of distribution between adjacent electrodes.
5. The semiconductor device of claim 1, wherein the upper portions of adjacent electrodes are separated from each other by a gap of between about 20 μm and about 25 μm.
6. A semiconductor device mounting structure, comprising:
a semiconductor device including a first substrate and a plurality of electrodes, each having a base portion formed on the first substrate and an upper portion; and
a second substrate having a plurality of electrode terminals formed thereon, each electrode terminal being electrically connected to a corresponding one of the electrodes through an anisotropic conductive film containing conductive particles;
wherein the base portion of each electrode has a cross-sectional width that is substantially less than the cross-sectional width of the upper portion facing the corresponding electrode terminal.
7. The semiconductor device mounting structure of claim 6, wherein each electrode has a reverse-taper structure, such that the cross-sectional width of each electrode decreases linearly from the upper portion to the base portion.
8. The semiconductor device mounting structure of claim 6, wherein each electrode has an upper surface facing a surface of the corresponding electrode terminal, each upper surface having a width of between about 15 μm and about 20 μm.
9. The semiconductor device mounting structure of claim 6, wherein the conductive particles have a relatively high density of distribution between facing surfaces of the electrodes and the electrode terminals and at an outer periphery of the first substrate and have a relatively low density of distribution between adjacent electrodes.
10. The semiconductor device mounting structure of claim 6, wherein the upper portions of adjacent electrodes are separated from each other by a gap of between about 20 μm and about 25 μm.
11. A liquid crystal device, comprising:
a pair of transparent substrates having liquid crystals sealed therebetween to form a liquid crystal panel; and
a semiconductor device, comprising:
a first substrate and a plurality of electrodes, each having a base portion formed on the first substrate and an upper portion; and
a second substrate having a plurality of electrode terminals formed thereon, each electrode terminal being electrically connected to a corresponding one of the electrodes through an anisotropic conductive film containing conductive particles;
wherein the base portion of each electrode has a cross-sectional width that is substantially less than the cross-sectional width of the upper portion facing the corresponding electrode terminal; and
wherein the semiconductor device is mounted on one of the pair of transparent substrates or a wiring substrate electrically connected to the liquid crystal panel.
12. The liquid crystal device of claim 11, wherein the semiconductor device is mounted on a protruding portion of one of the pair of transparent substrates.
13. An electronic apparatus comprising the liquid crystal device of claim 12.
14. A method of manufacturing a semiconductor device, comprising:
forming a plurality of electrodes on a surface of a semiconductor substrate;
applying a photosensitive resist layer to the surface of the semiconductor;
exposing the photosensitive resist layer to light through an exposure mask having a plurality of shielding portions, each aligned with a respective one of the plurality of electrodes;
creating a plurality of openings in the photosensitive resist layer, each opening being aligned with a corresponding one of the plurality of electrodes and having a reversed-taper shape;
filling the plurality of openings with an electrode plating material; and
removing the photosensitive resist layer.
US09/519,436 1999-03-08 2000-03-03 Semiconductor device, semiconductor device mounting structure, liquid crystal device, and electronic apparatus Expired - Lifetime US6448663B1 (en)

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CN1266283A (en) 2000-09-13
JP3826605B2 (en) 2006-09-27

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