US11726259B2 - Optical circuit element, optical communication apparatus, and method for manufacturing optical circuit element - Google Patents

Optical circuit element, optical communication apparatus, and method for manufacturing optical circuit element Download PDF

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US11726259B2
US11726259B2 US17/164,500 US202117164500A US11726259B2 US 11726259 B2 US11726259 B2 US 11726259B2 US 202117164500 A US202117164500 A US 202117164500A US 11726259 B2 US11726259 B2 US 11726259B2
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waveguide
width
segment
coupled
tapered
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US20210239905A1 (en
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Takeshi Baba
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Fujitsu Optical Components Ltd
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Fujitsu Optical Components Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/40—Transceivers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12152—Mode converter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04J—MULTIPLEX COMMUNICATION
    • H04J14/00—Optical multiplex systems
    • H04J14/06—Polarisation multiplex systems

Definitions

  • the embodiments discussed herein are related to an optical circuit element, an optical communication apparatus, and a method for manufacturing the optical circuit element.
  • the transmission side implements large-capacity transmission by multi-valued optical modulation signals and wavelength division multiplexing (WDM), and the reception side handles high-speed large-capacity communication by digital coherent transmission technology.
  • WDM wavelength division multiplexing
  • optical circuit elements such as an optical coupler, a polarization rotator, a polarizing beam splitter, and an optical modulator are monolithically integrated on a silicon chip.
  • a configuration to perform higher-order polarization conversion between TE1 mode and TM0 mode, using a vertically asymmetric core structure in which the width of an upper core and the width of a lower core are different is known (see, for example, International Publication Pamphlet No. WO 2014/208601).
  • an optical circuit element formed on a substrate includes a first waveguide and a second waveguide having a shape in a width direction, the shape being asymmetrical to the first waveguide, wherein the first waveguide includes a first segment and a second segment, the first segment having a width that changes along alight propagation direction, the second segment continuous with the first segment, the second waveguide includes a coupled waveguide adjacent to the second segment of the first waveguide, and at least one of the second segment and the coupled waveguide has a shape with a width that changes along the light propagation direction.
  • FIG. 1 A is diagram for describing a technical problem found by the inventor
  • FIG. 1 B is diagram for describing a technical problem found by the inventor
  • FIG. 1 C is diagram for describing a technical problem found by the inventor
  • FIG. 2 is a schematic diagram of an optical transmitter/receiver to which an optical circuit element of an embodiment is applied;
  • FIG. 3 A is a schematic diagram of polarization rotation and mode conversion
  • FIG. 3 B is a schematic diagram of mode conversion and polarization rotation
  • FIG. 4 is a schematic plan view of an optical circuit element of a first embodiment
  • FIG. 5 is a cross-sectional view taken along line I-I′ of FIG. 4 ;
  • FIG. 6 is a diagram illustrating an operation of polarization rotation
  • FIG. 7 is a diagram for describing conversion between TE0 mode and TE1 mode in a directional coupler
  • FIG. 8 is a diagram illustrating a configuration and a function of a TM0 cut filter
  • FIG. 9 A is diagram illustrating effect of improving tolerance for manufacturing errors and a polarization extinction ratio of the configuration of the first embodiment
  • FIG. 9 B is diagram illustrating effect of improving tolerance for manufacturing errors and a polarization extinction ratio of the configuration of the first embodiment
  • FIG. 10 is a schematic plan view of an optical circuit element of a second embodiment
  • FIG. 11 A is diagram illustrating effect of improving tolerance for manufacturing errors and a polarization extinction ratio of a configuration of the second embodiment
  • FIG. 11 is diagram illustrating effect of improving tolerance for manufacturing errors and a polarization extinction ratio of a configuration of the second embodiment
  • FIG. 12 is a schematic plan view of an optical circuit element according to a third embodiment
  • FIG. 13 A is diagram for describing conversion between TE0 mode and TE1 mode in a directional coupler of the third embodiment
  • FIG. 13 B is diagram for describing conversion between TE0 mode and TE1 mode in a directional coupler of the third embodiment
  • FIG. 14 is a view illustrating a configuration of a modification
  • FIG. 15 is a view illustrating a configuration of a modification.
  • a polarization conversion configuration realizes conversion between TE0 mode and TM0 mode by combining a higher-order polarization conversion element with an asymmetric directional coupler.
  • the mode conversion between TE1 and TE0 is performed by the asymmetric directional coupler.
  • the asymmetric directional coupler has low tolerance for deviation in waveguide width due to manufacturing error. When the waveguide width deviates from a design value, an effective refractive index for TE1 mode light and an effective refractive index for TE0 mode light are different from each other, conversion efficiency decreases, and intensity of output light decreases.
  • An object of the present embodiment is to improve tolerance for manufacturing errors and the like in an optical circuit element and suppress variations among each of products.
  • An embodiment increases the tolerance for manufacturing errors of an optical circuit element monolithically formed on a substrate such as a polarization rotator or a polarization converter and suppresses variations among each of products.
  • the embodiment suppresses variations in transmission characteristics of converted light, and highly maintains intensity of output light.
  • FIGS. 1 A to 1 C are diagrams illustrating low tolerance for manufacturing errors and deterioration of transmission characteristics in a known configuration.
  • FIG. 1 A is a schematic diagram of a known polarization rotator
  • FIG. 1 is a diagram illustrating error distribution of a refractive index of an optical waveguide in the known configuration
  • FIG. 1 C is a diagram illustrating attenuation of transmission intensity of the TE0 mode light in the known configuration.
  • a first waveguide WG 1 and a second waveguide WG 2 having different waveguide widths form a directional coupler DC that is asymmetrical in a horizontal direction, that is, in a right-left direction with respect to a center line between the two waveguides.
  • the first waveguide WG 1 and the second waveguide WG 2 are rib waveguides formed on a slab waveguide SLB.
  • the slab waveguide SLB may be referred to as a “lower core”, and the first waveguide WG 1 and the second waveguide WG 2 may be referred to as an “upper core”.
  • the shape of the entire core is asymmetrical with respect to a center in a height direction.
  • the TM0 mode light is incident on the first waveguide WG 1 and propagates through a rib waveguide TP having a tapered shape in plane, thereby to be converted into the TE1 mode light. Since, in the tapered rib waveguide TP, the symmetry in the height direction collapses, the TM0 mode and the TE1 mode are coupled near a center position in a length direction of a tapered region, and mode conversion is adiabatically performed.
  • the TE1 mode light is coupled to the second waveguide WG 2 as TE0 mode light by the asymmetric directional coupler DC and is output.
  • the asymmetric directional coupler DC an optimum coupling length is selected such that an effective refractive index perceived by the TE1 mode light propagating through the first waveguide WG 1 with a width W 1 accords with the refractive index perceived by the TE0 mode light propagating through the second waveguide WG 2 with a width W 2 .
  • mode conversion is performed between the TE1 mode (higher-order mode) and the TE0 mode (basic mode) when the first waveguide WG 1 is coupled to the second waveguide WG 2 .
  • the asymmetric directional coupler DC has low tolerance for manufacturing errors in waveguide width. Due to the variation in waveguide width, the refractive index of the waveguide perceived by the TE1 mode light and the refractive index of the waveguide perceived by the TE0 mode light deviate even though the coupling length is optimally designed, and the conversion efficiency between TE0 and TE1 decreases.
  • FIG. 1 B is a two-dimensional map of a difference in refractive index.
  • the horizontal direction represents the width W 1 of the first waveguide WG 1
  • the vertical direction represents the width W 2 of the second waveguide WG 2 .
  • Each of the width W 1 and the width W 2 is changed in 25-nm increments within a range of ⁇ 50 nm from the center condition without changing a pitch (center distance).
  • the difference in refractive index becomes the largest. Furthermore, when the width W 1 changes in the decreasing direction and the width W 2 changes in the increasing direction (the lower left corner of the matrix), the difference in refractive index is also large.
  • the distance between the first waveguide WG 1 and the second waveguide WG 2 fluctuates as the width W 2 becomes narrow or thick even if the width W 1 does not change, the difference in refractive index between the TE1 mode and the TE0 mode becomes large.
  • FIG. 1 C illustrates a two-dimensional map of transmittance intensity of the TE0 mode light.
  • the transmission intensity of when the light incident in the TE1 mode is output as TE0 mode light is calculated by a finite difference time domain (FDTD) method and is mapped with respect to the deviation in the waveguide width W 1 and the deviation in the waveguide width W 2 .
  • the calculation is performed on the assumption that the distance between the first waveguide WG 1 and the second waveguide WG 2 is 150 nm.
  • FDTD finite difference time domain
  • the intensity of a TE0 component output with respect to the input TM0 mode light deteriorates, and a polarization extinction ratio deteriorates. Not only in the worst condition but when at least one of W 1 and W 2 deviates from the design value, the polarization extinction ratio between the TE0 component and a TM0 component deteriorates.
  • the light converted into the TE0 mode by the asymmetric directional coupler DC is output as it is.
  • the TM0 mode component is mixed with the TE0 mode light
  • the TM0 mode light is also output as it is, so that the output intensity of the TE0 light decreases.
  • the optical waveguide forming the optical circuit element is designed in an arrangement or shape that easily absorbs the manufacturing errors of the asymmetric directional coupler, thereby increasing the tolerance for the manufacturing errors and suppressing manufacturing variation. As a result, the conversion efficiency between the TE1 mode and the TE0 mode is improved.
  • the optical waveguide is designed to have a filter function to remove unintended polarization components.
  • FIG. 2 is a schematic diagram of an optical transmitter/receiver 1 to which an optical circuit element of an embodiment is applied.
  • the optical transmitter/receiver 1 includes an optical integrated circuit chip 2 that is an optical-electric conversion front-end circuit.
  • the optical transmitter/receiver 1 may include an electric circuit chip 3 connected to the optical integrated circuit chip 2 .
  • the optical transmitter/receiver 1 is, for example, a transmitter/receiver in a dual polarization-quadrature phase shift keying (DP-QPSK) method for transmitting 4-bit information using two orthogonal polarization components and two orthogonal optical phase components.
  • DP-QPSK dual polarization-quadrature phase shift keying
  • optical circuit element 10 In the optical integrated circuit chip 2 , various optical elements including an optical circuit element 10 are monolithically formed on a substrate.
  • the optical circuit element 10 is used for each of a transmitter TX and a receiver RX.
  • an optical signal modulated by an IQ modulator (mod YI and mod YQ) on a Y polarization side undergoes polarization rotation and polarization conversion at the optical circuit element 10 .
  • Output light of the optical circuit element 10 is combined with an optical signal modulated by an IQ modulator (mod XI and mod XQ) on an X polarization side by a polarizing beam combiner (PBC) and output.
  • PBC polarizing beam combiner
  • the input optical signal is split by a polarizing beam splitter (PBS), and one of polarization components (for example, a Y polarization component) undergoes the polarization rotation and polarization conversion by the optical circuit element 10 .
  • PBS polarizing beam splitter
  • one of polarization components for example, a Y polarization component
  • an I component and a Q component are extracted by interference with local emission LO with a 90° hybrid optical mixer (illustrated as “90° Hybrid” in FIG. 2 ).
  • Output light from the 90° hybrid optical mixer is detected by receivers (PDXI, PDXQ, PDYI, and PDYQ).
  • FIG. 3 A is a schematic diagram of the polarization rotation and the polarization conversion.
  • a polarization multiplex signal received by the optical transmitter/receiver 1 includes a TE0 mode optical signal and a TM0 mode optical signal.
  • the TE0 mode light separated by PBS directly enters the receiver.
  • the TM0 mode light is converted into TE1 mode light by a polarization rotator 11 of the optical circuit element 10 and is converted into basic TE0 mode light by a polarization converter 12 , and enters the receiver.
  • This polarization rotation and polarization conversion are performed using a passive waveguide.
  • FIG. 3 B is a schematic diagram of the polarization conversion and polarization rotation.
  • a part of the TE0 mode modulated optical signal generated by the optical transmitter/receiver 1 is converted into the TE1 mode light by the polarization converter 12 of the optical circuit element 10 and is converted into the TM0 mode optical signal by the polarization rotator 11 .
  • the TM0 mode optical signal is combined with the remaining TE0 mode optical signal in PBC and output. This polarization conversion and polarization rotation are performed using a passive waveguide, as will be described below.
  • FIG. 4 is a schematic plan view of an optical circuit element 10 A of a first embodiment.
  • FIG. 5 is a cross-sectional view taken along line I-I′ of FIG. 4 .
  • the optical circuit element 10 A includes a first waveguide 110 and a second waveguide 120 A. As illustrated in FIG. 5 , the first waveguide 110 and the second waveguide 120 A are formed by a rib-shaped waveguide core having a shape in a height direction being asymmetrical with respect to a center in the height direction.
  • a lower part of the first waveguide 110 and the second waveguide 120 A is, for example, a slab layer 130 formed using silicon, and a rib-shaped upper core formed using silicon is formed on the slab layer 130 .
  • the slab layer 130 serves as a lower core of the first waveguide 110 and the second waveguide 120 A.
  • the thickness of the slab layer 130 is 100 nm
  • the thickness of the rib-shaped upper core is 220 nm.
  • the slab layer 30 and the rib-shaped upper core are formed by processing a layer of a core material such as silicon using an individual mask respectively. Since the first waveguide 110 and the second waveguide 120 A are expected to be asymmetrical in a vertical direction, that is, in the height direction, the misalignment of the upper core with respect to the slab layer 30 does not significantly affect the polarization conversion.
  • the first waveguide 110 and the second waveguide 120 A formed by the slab layer 130 and the upper core are surrounded by, for example, a cladding 150 of SiO 2 having a refractive index lower than silicon to form a vertically asymmetric waveguide core.
  • the first waveguide 110 has a first segment 111 with a width gradually expanding with respect to incident light, and a second segment 112 continuous with the first segment 111 .
  • the width of the second segment 112 changes along a light propagation direction. Therefore, in the following description, the first segment is referred to as “first tapered waveguide 111 ” and the second segment 112 is referred to as “second tapered waveguide 112 ”.
  • the first tapered waveguide 111 is a passive waveguide that performs polarization conversion between the TM0 mode and the TE1 mode, and functions as the polarization rotator 11 .
  • the second waveguide 120 A includes a coupled waveguide 121 A, a third tapered waveguide 122 A with a width gradually expanding from the coupled waveguide 121 A, and a fourth tapered waveguide 123 A with a width gradually and continuously narrowing from the third tapered waveguide 122 A.
  • the second tapered waveguide 112 of the first waveguide 110 and the coupled waveguide 121 A of the second waveguide 120 A form a directional coupler 12 A asymmetrical in the width direction.
  • the distance (gap) between the coupled waveguide 121 A and the second tapered waveguide 112 is set in a fixed manner.
  • the TM0 mode light When the TM0 mode light is input to the first waveguide 110 , the TM0 mode light is converted into the TE1 mode light by the first tapered waveguide 111 , which is asymmetrical in the height direction. The operation of the polarization rotation by the first tapered waveguide 111 will be described with reference to FIG. 6 .
  • FIG. 6 illustrates the refractive indexes of the TM0 mode and the TE1 mode as a function of the position of the first tapered waveguide 111 in a length direction.
  • a left-end origin is an incident position.
  • the width of the first tapered waveguide 111 increases from the incident position along the length direction or the light propagation direction.
  • the effective refractive index in the TM0 mode is higher than the effective refractive index in the TE1 mode.
  • the effective refractive index in the TE1 mode is higher than the effective refractive index in the TM0 mode.
  • the effective refractive index in the TM0 mode in which only a magnetic field oscillates in a cross section orthogonal to the light propagation direction, changes little regardless of the position in the length direction of the first tapered waveguide 111 .
  • the effective refractive index in the TE1 mode in which only an electric field oscillates in a cross section orthogonal to the light propagation direction, changes significantly from the incident position of the first tapered waveguide 111 toward the termination.
  • the magnitude relation between the effective refractive indexes in the TM0 mode and in the TE1 mode is switched near the center in the length direction.
  • This area has a TM0-TE1 hybrid mode in which no separate TM0 mode and TE1 mode are present.
  • Polarization conversion is adiabatically performed using the coupling of the TM0 mode and the TE1 mode.
  • a polarized wave converted into the TE1 mode by the first tapered waveguide 111 is coupled from the second tapered waveguide 112 to the coupled waveguide 121 A of the second waveguide 120 A.
  • the second tapered waveguide 112 of the first waveguide 110 and the coupled waveguide 121 A of the second waveguide 120 A form the directional coupler 12 A asymmetrical in the height direction and in the width direction, as an example of the polarization converter 12 .
  • the width of the second tapered waveguide 112 of the first waveguide 110 changes along the light propagation direction.
  • the width of the second tapered waveguide 112 decreases along the light propagation direction.
  • the effective refractive index in each mode changes when the waveguide width fluctuates from the design value due to manufacturing errors or the like (see FIG. 11 ).
  • the coupling length is determined to be a predetermined value, the conversion efficiency decreases by the amount of change in the effective refractive index of each mode due to the manufacturing errors.
  • a taper angle of the second tapered waveguide 112 is set to compensate for the change in the effective refractive index in the TE1 mode due to the width fluctuation, within a range of assumed manufacturing errors. According to a calculation result, there is a point at which the effective refractive index in the TE1 mode of the first waveguide 110 and the effective refractive index in the TE0 mode of the second waveguide 120 A coincide or intersect with each other within a range up to 1 ⁇ m in the length direction from a starting point of the second tapered waveguide 112 of the first waveguide 110 . Thereby, the tolerance for the manufacturing errors of the asymmetric directional coupler is improved, and the conversion efficiency or the transmission characteristics may be highly maintained.
  • the light propagating through the coupled waveguide 121 A of the second waveguide 120 A passes through the third tapered waveguide 122 A and is output through the fourth tapered waveguide 123 A as the TE0 mode light.
  • the fourth tapered waveguide 123 A functions as a cut filter for unnecessary polarization components (for example, the TM0 component).
  • the fourth tapered waveguide 123 A is tapered to remove the TM0 component and improve the polarization extinction ratio.
  • FIG. 8 is a diagram for describing a TM0 removal effect of the fourth tapered waveguide 123 A.
  • FIG. 8 illustrates planar shapes of the third tapered waveguide 122 A and the fourth tapered waveguide 123 A, and positional dependency of the refractive index of each propagation mode.
  • the waveguide width is widened to w 1 by the third tapered waveguide 122 A before reaching the fourth tapered waveguide 123 A and is narrowed to w 3 in a light traveling direction. Since the waveguide width w 3 is set to the width at which the TE1 mode is cut, the mode converted from the TM0 to the TE1 by the fourth tapered waveguide 123 A is cut in the waveguide portion with the width w 3 , and the TM0 mode component having entered the third tapered waveguide 122 A is not output. For the above reasons, the fourth tapered waveguide 123 A can be caused to appropriately function as the TM0 cut filter at the starting point of the fourth tapered waveguide 123 A.
  • the difference in refractive index of the target TE0 mode light from other propagation modes is large, and is thus not coupled to other modes and propagates through the fourth tapered waveguide 123 A as it is.
  • the TE0 mode light that passes from the coupled waveguide 121 through the third tapered waveguide 122 A and enters the fourth tapered waveguide 123 A is output through the fourth tapered waveguide 123 A as the TE0 mode light.
  • the refractive indexes of the modes approach each other in the range of 10 to 30 ⁇ m from the starting point of the TM0 cut filter, and the symmetry in the height direction collapses in the cross-sectional shape of the fourth tapered waveguide 123 A. Therefore, coupling between the TE1 mode and the TM0 mode occurs.
  • the TM0 mode light when the TM0 mode light enters the third tapered waveguide 122 A, the TM0 mode light is converted into the TE1 mode light by the coupling in the fourth tapered waveguide 123 A, but the TE1 mode falls in a cutoff condition at the position of the waveguide width w 3 and is removed.
  • the TM0 cut filter may be called “TE1 cut filter”.
  • the TE1 mode light is output as the TM0 mode light.
  • the fourth tapered waveguide 123 A is connected to a subsequent stage of the asymmetric directional coupler 12 A that converts the TE1 mode into the TE0 mode, the TE1 mode light is rarely input to the fourth tapered waveguide 123 A in practice. Even if a TE1 component is slightly generated from the TM0 component in the part where the waveguide width of the third tapered waveguide 122 A is widened to the width w 1 , the amount of generated TE1 component is negligibly small.
  • the TM0 component is mixed in the light to be coupled to the second waveguide 120 A in the directional coupler 12 A, the TM0 component is removed by the TM0 cut filter by the configuration of the fourth tapered waveguide 123 A. Therefore, the polarization extinction ratio between TE0 and TM0 is improved.
  • FIGS. 9 A and 9 B are diagrams illustrating effect of improving the tolerance for manufacturing errors and the polarization extinction ratio according to the first embodiment.
  • FIG. 9 A is a schematic diagram of the directional coupler 12 A of the optical circuit element 10 A of the first embodiment
  • FIG. 9 B is a two-dimensional map of the transmission intensity of the TE0 mode.
  • the waveguide width at the starting point of the taper of the first waveguide 110 is W 1 .
  • the width of the first waveguide 110 gradually narrows from W 1 along the propagation direction.
  • the transmission intensity of when the light incident in the TE1 mode is output as the TE0 mode light is calculated by the finite difference time domain (FDTD) method.
  • FDTD finite difference time domain
  • What kind of loss occurs at an optimum coupling point of the first waveguide 110 (for example, a point of an optimum design width 0.7 ⁇ m in FIG. 1 ) when the width W 1 at the taper starting point of the first waveguide 110 and the width W 2 of the second waveguide 120 A deviate is mapped.
  • the calculation is performed on the assumption that the distance between the first waveguide 110 and the second waveguide 120 A is 150 nm.
  • Each of the width W 1 and the width W 2 is changed in 25-nm increments within a range of ⁇ 50 nm from the center condition without changing a pitch (center distance), similarly to FIGS. 1 A to 1 C .
  • the attenuation decreases and the transmission characteristics are greatly improved even if the condition deviates from the center condition. Even if only the width of either the first waveguide 110 or the second waveguide 120 A deviates from the design value even at the four corners of the table farthest from the center condition, the coupling loss from TE1 to TE0 is effectively suppressed.
  • FIG. 10 is a schematic plan view of an optical circuit element 10 B of a second embodiment.
  • the optical circuit element 10 B includes a first waveguide 110 and a second waveguide 120 B. Consider a case in which light is coupled from the first waveguide 110 to the second waveguide 120 B side.
  • the first waveguide 110 is the same as the first waveguide 110 of the first embodiment, and includes a first tapered waveguide 111 with a width gradually expanding with respect to incident light, and a second tapered waveguide 112 with a width gradually changing from the first tapered waveguide 111 .
  • the second waveguide 120 B includes a coupled waveguide 121 B optically coupled to the first waveguide 110 and a fourth tapered waveguide 123 B with a width continuously narrowing from the coupled waveguide 121 B.
  • a third tapered waveguide having a variable waveguide width may be inserted between the coupled waveguide 121 B and the fourth tapered waveguide 123 B as in the first embodiment.
  • the coupled waveguide 121 B of the second waveguide 120 B forms an asymmetric directional coupler 12 B in a horizontal direction and a height direction together with the second tapered waveguide 112 of the first waveguide 110 .
  • the fourth tapered waveguide 123 B functions as a cut filter for unnecessary polarization components (for example, a TM0 component).
  • Cross-sectional shapes of the first waveguide 110 and the second waveguide 120 B in the directional coupler 128 form a rib-shaped waveguide on a slab layer 130 , and is surrounded by a cladding of SiO 2 or the like, similarly to the cross-sectional view in FIG. 5 .
  • the first tapered waveguide 111 of the first waveguide 110 is a passive waveguide that performs polarization conversion between a TM0 mode and a TE1 mode, and functions as a polarization rotator 11 .
  • a magnitude relationship between an effective refractive index of the TM0 mode and an effective refractive index of the TE1 mode is switched near a center in a length direction of the first tapered waveguide 111 , and the polarization conversion is adiabatically performed using coupling of the TM0 mode and the TE1 mode.
  • a polarized wave converted into the TE1 mode by the first tapered waveguide 111 is coupled from the second tapered waveguide 112 to the coupled waveguide 121 B of the second waveguide 120 B in the directional coupler 12 B.
  • the width of the second tapered waveguide 112 of the first waveguide 110 continuously changes along a light propagation direction.
  • the width of the coupled waveguide 121 B of the second waveguide 120 B continuously changes along the light propagation direction.
  • the TE mode light is output from the coupled waveguide 121 B through the fourth tapered waveguide 123 B.
  • the width on an output side of the fourth tapered waveguide 123 B is set to satisfy a cutoff condition for the TE1 mode.
  • the TM0 component is converted into the TE1 mode by the fourth tapered waveguide 123 B, and a TE component can be removed. Thereby, a polarization extinction ratio between TE0 and TM0 is improved.
  • the attenuation decreases and the transmission characteristics are greatly improved even if the condition deviates from the center condition.
  • the second waveguide 120 C includes a coupled waveguide 121 C with a width gradually expanding along a propagation direction, a third tapered waveguide 122 C with a width continuously expanding from the coupled waveguide 121 C, and a fourth tapered waveguide 123 C with a width gradually and continuously narrowing from the third tapered waveguide 122 C.
  • the coupled waveguide 121 C forms an asymmetric directional coupler 12 C in a horizontal direction and a height direction together with the second tapered waveguide 112 of the first waveguide 110 .
  • the fourth tapered waveguide 123 C functions as a cut filter for unnecessary polarization components (for example, a TM0 component).
  • Cross-sectional shapes of the first waveguide 110 and the second waveguide 120 C in the directional coupler 12 C form a rib-shaped waveguide on a slab layer 130 , and is surrounded by a cladding of SiO 2 or the like, similarly to the cross-sectional view in FIG. 5 .
  • a polarized wave converted into a TE1 mode by the first tapered waveguide 111 is coupled from the second tapered waveguide 112 to the coupled waveguide 121 C of the second waveguide 120 C in the directional coupler 12 C.
  • the width of the second tapered waveguide 112 of the first waveguide 110 continuously changes along a light propagation direction.
  • the width of the coupled waveguide 121 C of the second waveguide 120 C continuously changes along the light propagation direction.
  • a width change in the second tapered waveguide 112 and a width change in the coupled waveguide 121 C are designed such that the effective refractive index perceived by TE1 mode light propagating through the second tapered waveguide 112 and the effective refractive index perceived by TE0 mode light propagating through the coupled waveguide 121 C become the same.
  • the distance between the second tapered waveguide 112 and the coupled waveguide 121 C is fixed.
  • the TE1 mode light is coupled to the coupled waveguide 121 C of the second waveguide 120 C with the maximum efficiency as the TE0 mode light at the point where the difference in effective refractive index between the TE0 mode and the TE1 mode is minimized.
  • the TE mode light is output from the coupled waveguide 121 C through the third tapered waveguide 122 C and the fourth tapered waveguide 123 C.
  • the width on an output side of the fourth tapered waveguide 123 C is set to satisfy a cutoff condition for the TE1 mode.
  • the width at a starting point of the third tapered waveguide 122 C coincides with the width of an end point of the coupled waveguide 121 C.
  • the width of an end point of the third tapered waveguide 122 C accords with the width of a starting point of the fourth tapered waveguide 123 C designed to properly remove the TM0 mode.
  • TM0 component Even in a case where a TM0 component is mixed in coupling light to the coupled waveguide 121 C due to the change in the width of the second tapered waveguide 112 , the TM0 component is converted into the TE1 mode by the fourth tapered waveguide 123 C, and a TE1 component can be removed. Thereby, a polarization extinction ratio between TE0 and TM0 is improved.
  • FIGS. 13 A and 13 B are diagrams for describing conversion between the TE1 mode and the TE0 mode in the directional coupler 12 C.
  • FIG. 13 A illustrates a schematic plan view of the directional coupler 12 C and
  • FIG. 13 B illustrates positional dependency of the refractive index in each mode.
  • a width W 1 _ 1 at the starting point of the second tapered waveguide 112 of the first waveguide 110 forming the directional coupler 12 C is designed to be 0.725 ⁇ m, and a width W 1 _ 2 at the termination is designed to be 0.645 ⁇ m. Furthermore, a width W 2 _ 1 at the starting point of the coupled waveguide 121 C of the second waveguide 120 C is designed to be 0.28 ⁇ m, and a width W 2 _ 2 at the termination is designed to be 0.36 ⁇ m.
  • FIG. 13 B illustrates all the refractive indexes of when W 1 _ 1 , W 1 _ 2 , W 2 _ 1 , and W 2 _ 2 are changed in a range of ⁇ 50 nm in a superimposed manner respectively.
  • the effective refractive index perceived by the TE1 mode light propagating through the second tapered waveguide 112 of the first waveguide 110 intersects with the effective refractive index perceived by the TE0 mode light propagating through the coupled waveguide 121 C of the second waveguide 120 C in a region R up to 1.3 ⁇ m from the starting point of the directional coupler 12 C.
  • the point at which the refractive index perceived by the TE1 mode light propagating through the first waveguide 110 coincides with the refractive index perceived by the TE0 mode light propagating through the second waveguide 120 C is present under any waveguide width condition in the region R.
  • the point at which the refractive index of TE1 coincides with the refractive index of TE0 is present even if one or both of the waveguide widths deviate due to manufacturing errors or the like.
  • FIG. 14 illustrates a specific configuration of an optical circuit element 10 D as still another configuration example.
  • the optical circuit element 10 D includes a first waveguide 110 D and a second waveguide 120 D.
  • the first waveguide 110 D includes a first tapered waveguide 111 , a second tapered waveguide 112 D, and a curved waveguide 113 .
  • the first tapered waveguide 111 functions as a polarization rotator 11 .
  • the curved waveguide 113 functions as an optical terminator.
  • the second waveguide 120 D includes a coupled waveguide 121 D, a third tapered waveguide 122 D, and a fourth tapered waveguide 123 D.
  • the coupled waveguide 121 D forms an asymmetric directional coupler 12 D together with the second tapered waveguide 112 D of the first waveguide 110 D.
  • the fourth tapered waveguide 123 D functions as a cut filter for unnecessary polarization components (for example, a TM0 component).
  • the first waveguide 110 D and the second waveguide 120 D are height-asymmetric waveguides having a rib waveguide formed on a slab layer 130 .
  • the thickness of the slab layer 130 and the height of a waveguide core are appropriately designed.
  • the height of the rib waveguide (upper core) is 0.22 ⁇ m
  • the thickness of the slab layer 130 is 0.1 ⁇ m.
  • a width w 11 on an input side of the first tapered waveguide 111 of the first waveguide 110 D is 0.4 ⁇ m.
  • the width is once widened to a width w 12 of 0.65 ⁇ m with a taper length L 11 of 60 ⁇ m, and a taper angle is then increased and widened up to a width w 13 of 1.6 ⁇ m.
  • TM0 mode and TE1 mode conversion is performed in a tapered region between w 11 and w 12 .
  • the first tapered waveguide 111 with the extended width is connected as the second tapered waveguide 112 D to the asymmetric directional coupler 12 D.
  • the first waveguide 110 D and the second waveguide 120 D are asymmetrical with each other in a width direction.
  • the second tapered waveguide 112 D is narrowed to a width w 14 of 0.78 ⁇ m, then narrowed with a gentle taper, and narrowed up to a width w 15 of 0.57 ⁇ m.
  • a taper length L 12 is 8 ⁇ m. In a tapered region between w 14 and w 15 , an influence of deviation in the waveguide width due to manufacturing errors or the like is absorbed.
  • a curved waveguide 113 is formed following the second tapered waveguide 112 D.
  • the curved waveguide 113 is curved in a direction away from the second waveguide 120 D and has a tapered shape. This is to reduce unintended reflections.
  • a distance s 11 between the second tapered waveguide 112 D of the first waveguide 110 D and the coupled waveguide 121 D of the second waveguide 120 D is 0.15 ⁇ m, which is fixed.
  • a width w 16 of the coupled waveguide 121 D is set to a fixed value of 0.33 ⁇ m.
  • the coupled waveguide 121 D is extended to a width w 17 of 1.6 ⁇ m by the third tapered waveguide 122 D and is connected to the fourth tapered waveguide 123 D.
  • the waveguide width is narrowed to a width w 18 of 0.65 ⁇ m, and is then gently tapered up to a width w 19 of 0.4 ⁇ m.
  • a taper length L 13 in a region from w 18 to w 19 is 60 ⁇ m. This tapered region functions as a cut filter that removes unnecessary polarization components.
  • FIG. 15 illustrates a specific configuration of an optical circuit element 10 E as still another configuration example.
  • the optical circuit element 10 E includes a first waveguide 110 E and a second waveguide 120 E.
  • the first waveguide 110 E includes a first tapered waveguide 111 , a second tapered waveguide 112 E, and a curved waveguide 113 .
  • the first tapered waveguide 111 functions as a polarization rotator 11 .
  • the second waveguide 120 E includes a coupled waveguide 121 E, a third tapered waveguide 122 E, and a fourth tapered waveguide 123 E.
  • the width of the coupled waveguide 121 E of the second waveguide 120 E is also designed to be variable.
  • the second tapered waveguide 112 E of the first waveguide 110 E and the coupled waveguide 121 E of the second waveguide 120 E form an asymmetric directional coupler 12 E.
  • the fourth tapered waveguide 123 E functions as a cut filter for unnecessary polarization components (for example, a TM0 component).
  • a width w 21 on an input side of the first tapered waveguide 111 of the first waveguide 110 E is 0.4 ⁇ m and is once widened to a width w 22 of 0.65 ⁇ m, and a taper angle is then increased and widened up to a width w 23 of 1.6 ⁇ m.
  • a taper length L 21 between w 21 and w 22 is set to 60 ⁇ m, and TM0 mode and TE1 mode conversion is performed in the tapered region.
  • the first tapered waveguide 111 with the extended width is connected as the second tapered waveguide 112 E to the asymmetric directional coupler 12 E.
  • the second tapered waveguide 112 E is narrowed to a width w 24 of 0.78 ⁇ m and is then narrowed with a gentle taper up to a width w 25 of 0.69 ⁇ m.
  • a taper length L 22 from w 24 to w 25 is 10 ⁇ m. In this tapered region, the influence of deviation in the waveguide width in the asymmetric directional coupler 12 E is absorbed.
  • the curved waveguide 113 extends from the second tapered waveguide 112 E.
  • the curved waveguide 113 is curved in a direction away from the second waveguide 120 E and has a tapered shape in order to reduce unintended reflections, similarly to FIG. 14 .
  • a distance s 21 between the second tapered waveguide 112 E of the first waveguide 110 E and the coupled waveguide 121 E of the second waveguide 120 E is, for example, 0.15 ⁇ m, which is fixed.
  • the width of the coupled waveguide 121 E gradually increases from a width w 26 of 0.23 ⁇ m to a width w 27 of 0.31 ⁇ m.
  • the width is extended to a width w 28 of 1.6 ⁇ m by the third tapered waveguide 122 E and is connected to the fourth tapered waveguide 123 E.
  • the waveguide width is narrowed to a width w 29 of 0.65 ⁇ m, and is then gently tapered up to a width w 31 of 0.4 ⁇ m.
  • a taper length L 23 in a region from w 29 to w 31 is 60 ⁇ m. This tapered region functions as a cut filter that removes unnecessary polarization components.
  • the present embodiments have been described on the basis of the specific configuration examples. However, the present embodiments are not limited to the above-described configuration examples, and include various modifications and combinations.
  • the waveguide widths of the first tapered waveguide 111 and the second tapered waveguide 112 of the first waveguide 110 do not need to linearly change and may change in a curved manner. Even in this case, the TM0 and TE1 mode conversion is performed in the first tapered waveguide 111 , and the influence of deviation in the waveguide width due to manufacturing errors and the like can be absorbed in the second tapered waveguide 112 .
  • the width of at least one of the second segment 112 of the first waveguide 110 or the coupled waveguide 121 of the second waveguide 120 is simply changed along the propagation direction. Therefore, the width of the second segment 112 may be changed by a fixed width and the width of the coupled waveguide 121 may be changed in the light propagation direction.
  • the shape of the fourth tapered waveguide 123 of the second waveguide 120 can be appropriately designed within a range that satisfies the cutoff condition of unnecessary polarization components.
  • the width on the output end of the fourth tapered waveguide 123 may be set to an appropriate value that is equal to or smaller than 0.5 ⁇ m to satisfy the cutoff condition of TEL.
  • the taper length of a portion of the fourth tapered waveguide 123 which functions as the cutoff filter, may be set to an appropriate length within a range of 50 ⁇ m ⁇ 15 ⁇ m.
  • the propagation of light is not limited to the propagation from the first waveguide 110 to the second waveguide 120 , and may be the propagation from the second waveguide 120 to the first waveguide 110 .
  • the incident light is coupled as the TE1 mode light to the first waveguide 110 in the asymmetric directional coupler.
  • the effective refractive index for the TE0 mode light and the effective refractive index for the TE1 mode light coincide with or approach each other at any point in the light propagation direction. Thereby, the light can be coupled with the maximum conversion efficiency.
  • the TE1 mode light coupled to the first waveguide 110 is converted into the TM0 mode light by the first tapered waveguide 111 and output.
  • the influence of deviation in the waveguide width due to manufacturing errors or the like is minimized in the asymmetric directional coupler, the variations among each of the products are suppressed, and the conversion efficiency and the transmission characteristics are stabilized.

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WO2021222714A1 (en) * 2020-05-01 2021-11-04 Analog Photonics LLC Integrated polarization rotation and splitting using mode hybridization between multiple core structures
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WO2023095323A1 (ja) * 2021-11-29 2023-06-01 株式会社アドバンテスト 偏波に依存しない出力光を提供するための光回路、光集積回路および方法
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