TWM569376U - Dry pump component - Google Patents

Dry pump component Download PDF

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Publication number
TWM569376U
TWM569376U TW107206375U TW107206375U TWM569376U TW M569376 U TWM569376 U TW M569376U TW 107206375 U TW107206375 U TW 107206375U TW 107206375 U TW107206375 U TW 107206375U TW M569376 U TWM569376 U TW M569376U
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TW
Taiwan
Prior art keywords
layer
nip
ptfe
dry pump
rotor
Prior art date
Application number
TW107206375U
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Chinese (zh)
Inventor
爾尼斯特 金奈爾德 霍布魯克艾倫
史堤芬 葛拉漢尹各
威廉 拉克詹姆士
克萊姆 墨菲布萊恩
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英商愛德華有限公司
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Publication of TWM569376U publication Critical patent/TWM569376U/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00Rotary-piston machines or pumps
    • F04C2/08Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/126Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C21/00Oscillating-piston pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00Manufacture
    • F04C2230/90Improving properties of machine parts
    • F04C2230/91Coating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/16Wear
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00Arrangements for preventing or removing deposits or corrosion
    • F04C2280/04Preventing corrosion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The present invention relates to an improved vacuum pump, in particular an improved coating for internal shaft, rotor and/or stator components of dry vacuum pumps with a first layer comprising a high phosphorous nickel plating (NiP) and wherein the first layer is coated with a second layer comprising a high phosphorous nickel with nickel phosphorous and fluoropolymer (NiP-PTFE).

Description

乾式泵組件 Dry pump assembly

本創作係關於一種改良式真空泵,特定言之本創作係關於一種用於一乾式泵組件(諸如乾式真空泵之內部軸組件、轉子組件及/或定子組件)之改良式塗層。 This creation relates to an improved vacuum pump, in particular to an improved coating for a dry pump assembly such as an internal shaft assembly, a rotor assembly and/or a stator assembly of a dry vacuum pump.

乾式真空泵廣泛用於工業製程中以提供產品之製造之一清潔及/或低壓環境。應用包含醫藥製造業、半導體製造業及平板製造業。此等泵包含一基本上乾式(或無油)泵送機構,但大體上亦包含需要潤滑以有效之用於驅動該泵送機構之一些組件(諸如軸承及傳動齒輪)。乾式泵之實例包含Roots、Northey(或「爪」)、螺旋泵及渦旋泵。併入Roots轉子組件及/或Northey轉子組件之乾式泵通常係包括界定複數個泵送腔室之一定子組件之多級正排量泵,各泵送腔室容置一對各自互相嚙合的轉子組件。轉子組件位於相對旋轉軸上,且可在各腔室中具有相同類型之輪廓或輪廓可逐腔室改變。 Dry vacuum pumps are widely used in industrial processes to provide a clean and/or low pressure environment for the manufacture of products. Applications include pharmaceutical manufacturing, semiconductor manufacturing and flat panel manufacturing. These pumps include a substantially dry (or oil-free) pumping mechanism, but generally also contain components (such as bearings and drive gears) that require lubrication to effectively drive the pumping mechanism. Examples of dry pumps include Roots, Northey (or "claw"), screw pumps, and scroll pumps. A dry pump incorporating a Roots rotor assembly and/or a Northey rotor assembly typically includes a multi-stage positive displacement pump defining one of a plurality of pumping chambers, each pumping chamber housing a pair of mutually intermeshing rotors Component. The rotor assembly is located on a relative axis of rotation and may have the same type of profile or profile in each chamber that may vary from chamber to chamber.

球墨鑄鐵(SG)鑄件歸因於其強度及機械可加工性而長時間用於乾式真空泵之軸組件、定子組件及轉子組件之製造。然而,在半導體行業中,越來越多地使用高溫(通常大於攝氏150度)及高流率之相對腐蝕性氣體(諸如氯、三氯化硼、溴化氫、氟及三氟化氯)已導致球墨鑄鐵軸組件、定子 組件及轉子組件之嚴重腐蝕,及因此相對較短壽命。事實上,溫度增加10攝氏度幾乎使腐蝕速率加倍。除與泵或腐蝕部件之替換造成的製程停工時間相關聯之成本之外,此腐蝕可導致設備故障、處理氣體之洩漏及可能的製程污染。 Ductile iron (SG) castings have long been used in the manufacture of shaft assemblies, stator assemblies and rotor assemblies for dry vacuum pumps due to their strength and mechanical processability. However, in the semiconductor industry, relatively high temperatures (usually greater than 150 degrees Celsius) and high flow rates of relatively corrosive gases (such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride) are increasingly used. Has led to ductile iron shaft assembly, stator Severe corrosion of components and rotor components, and therefore relatively short life. In fact, an increase in temperature of 10 degrees Celsius almost doubles the corrosion rate. In addition to the costs associated with process downtime caused by the replacement of pumps or corroded components, this corrosion can result in equipment failure, process gas leakage, and possible process contamination.

據此,已知藉由在曝露於腐蝕性氣體及高溫之組件表面上形成一含氟聚合物或聚醯亞胺材料之一樹脂或聚合物塗層以被動保護此等組件。此等塗層趨向於隨時間降級,其中造成的塗層剝離或剝除使下面的鑄鐵曝露於腐蝕性氣體。 Accordingly, it is known to passively protect such components by forming a resin or polymer coating of one of a fluoropolymer or polyimide material on the surface of the component exposed to corrosive gases and high temperatures. These coatings tend to degrade over time, with the resulting peeling or stripping of the coating exposing the underlying cast iron to corrosive gases.

另一替代方案係由一富含鎳之鑄鐵(例如延性耐蝕鎳)或具有優異耐腐蝕性之一不銹鋼形成此等組件。然而,耐蝕鎳鑄鐵及不銹鋼相對較昂貴且難以加工,且因此不提供用於轉子組件及定子組件之製造之成本有效選項。此外,耐蝕鎳鑄鐵及不銹鋼在高溫下使用時具有一高位準之熱膨脹且因此損失效能。 Another alternative is to form such components from a nickel-rich cast iron (such as ductile nickel) or one of the stainless steels with excellent corrosion resistance. However, corrosion resistant nickel cast iron and stainless steel are relatively expensive and difficult to process, and therefore do not provide a cost effective option for the manufacture of rotor assemblies and stator assemblies. In addition, corrosion resistant nickel cast iron and stainless steel have a high level of thermal expansion when used at high temperatures and thus lose performance.

另一替代方案係由通常含有10%至12%磷之一高磷鎳鍍覆(NiP)形成此等組件。高磷NiP鍍覆之優點係其提供高耐腐蝕性,因為表面較均勻且無導致腐蝕之針孔。另外,基板之機械可加工性未改變且添加NiP鍍覆不顯著改變一零件之熱性質。然而,在乾式真空泵中之鑄鐵及不銹鋼上使用NiP鍍覆具有當存在轉子對定子接觸時引起泵送機構之捕獲較大缺點。兩個組件之表面材料在滑動接觸時(例如當一旋轉轉子接觸一乾式真空泵中之一定子時)可黏附(亦稱為磨蝕)。NiP鍍覆將在鑄鐵、不銹鋼或僅NiP鍍覆上摩擦時磨蝕。 Another alternative is to form such components from a high phosphorus nickel plating (NiP), typically containing 10% to 12% phosphorus. The advantage of high phosphorus NiP plating is that it provides high corrosion resistance because the surface is relatively uniform and there are no pinholes that cause corrosion. In addition, the mechanical processability of the substrate is unchanged and the addition of NiP plating does not significantly alter the thermal properties of a part. However, the use of NiP plating on cast iron and stainless steel in dry vacuum pumps has the major disadvantage of causing capture of the pumping mechanism when there is rotor-to-stator contact. The surface material of the two components can adhere (also known as abrasion) when in sliding contact, such as when a rotating rotor contacts one of the stators of a dry vacuum pump. NiP plating will be abraded when rubbed on cast iron, stainless steel or NiP only.

防止磨蝕之一已知方法係在NiP鍍覆中併入包括一鎳磷及一含氟聚合物(PTFE)之一層,藉此產生NiP-PTFE。 One known method of preventing abrasion is to incorporate a layer comprising a nickel phosphorus and a fluoropolymer (PTFE) in NiP plating, thereby producing NiP-PTFE.

藉助一NiP-PTFE鍍覆,其僅解決NiP鍍覆之磨蝕之問題,然而,NiP-PTFE具有比相同厚度之一純NiP鍍覆少之耐化學性。 With NiP-PTFE plating, it only solves the problem of abrasion of NiP plating, however, NiP-PTFE has less chemical resistance than one of pure NiP plating of the same thickness.

本創作之目的係藉由產生耐化學性高及防止磨蝕兩者之一鍍覆以克服此等問題。 The purpose of this creation is to overcome such problems by producing one of high chemical resistance and protection against abrasion.

本創作提供一種乾式泵組件,其塗佈有包括至少5μm厚度之一高磷鎳鍍覆(NiP)之一第一層且其中該第一層塗佈有包括具有至少5μm厚度之鎳磷及一含氟聚合物(NiP-PTFE)之一高磷鎳之一第二層,其中NiP之該第一層之厚度與NiP-PTFE之該第二層之厚度之比例提供高耐腐蝕性及耐磨蝕性。 The present application provides a dry pump assembly coated with a first layer comprising one of high phosphorous nickel plating (NiP) having a thickness of at least 5 μm and wherein the first layer is coated with nickel phosphorus and having a thickness of at least 5 μm a second layer of one of high-phosphorus nickel, one of fluoropolymers (NiP-PTFE), wherein the ratio of the thickness of the first layer of NiP to the thickness of the second layer of NiP-PTFE provides high corrosion resistance and wear resistance Corrosive.

令人驚訝地發現塗佈有包括具有一鎳磷及一含氟聚合物(PTFE)(即至少5μm厚度之NiP-PTFE塗層)之一高磷鎳(NiP)之一第二層的包括至少5μm厚度之一高磷鎳鍍覆之一第一層之一組合提供如同僅NiP之長壽優良耐腐蝕性,但具有如同僅含氟聚合物之低磨蝕效應。 Surprisingly, it has been found that coating a second layer comprising one of high phosphorus nickel (NiP) having a nickel phosphorus and a fluoropolymer (PTFE) (ie a NiP-PTFE coating of at least 5 μm thickness) includes at least One of the first layers of high-phosphorus nickel plating, one of 5 μm thickness, provides excellent long-life corrosion resistance as NiP only, but has a low abrasive effect like a fluoropolymer alone.

隨附申請專利範圍中界定本創作之其他較佳及/或選用態樣。 Other preferred and/or alternative aspects of the creation are defined in the scope of the accompanying application.

10‧‧‧多級乾式真空泵 10‧‧‧Multi-stage dry vacuum pump

12‧‧‧定子組件/定子 12‧‧‧ Stator assembly / stator

14‧‧‧泵送腔室/入口泵送腔室 14‧‧‧Pumping chamber/inlet pumping chamber

16‧‧‧泵送腔室 16‧‧‧ pumping chamber

18‧‧‧泵送腔室 18‧‧‧ pumping chamber

20‧‧‧泵送腔室 20‧‧‧ pumping chamber

22‧‧‧泵送腔室/排放泵送腔室 22‧‧‧ pumping chamber/drain pumping chamber

24‧‧‧入口導管 24‧‧‧Inlet catheter

26‧‧‧排放導管 26‧‧‧Draining conduit

28‧‧‧圓周通道 28‧‧‧Circular channel

30‧‧‧圓周通道 30‧‧‧Circular channel

32‧‧‧圓周通道 32‧‧‧Circular channel

34‧‧‧圓周通道 34‧‧‧Circular channel

36‧‧‧第一軸 36‧‧‧first axis

38‧‧‧第二軸 38‧‧‧second axis

40‧‧‧軸承 40‧‧‧ bearing

42‧‧‧端板 42‧‧‧End board

44‧‧‧端板 44‧‧‧End board

46‧‧‧驅動馬達 46‧‧‧Drive motor

47‧‧‧定時齒輪 47‧‧‧ Timing gear

48‧‧‧箭頭 48‧‧‧ arrow

50‧‧‧箭頭 50‧‧‧ arrow

52‧‧‧齒輪箱 52‧‧‧ Gearbox

54‧‧‧油 54‧‧‧ oil

56‧‧‧轉子組件/轉子 56‧‧‧Rotor assembly/rotor

58‧‧‧轉子組件/轉子 58‧‧‧Rotor assembly/rotor

100‧‧‧第二層 100‧‧‧ second floor

102‧‧‧第一層 102‧‧‧ first floor

A-A‧‧‧線 A-A‧‧‧ line

為較好地理解本創作,現將參考附圖描述本創作之一實施例(其僅依舉例方式給定),其中:圖1係透過一多級乾式真空泵之一橫截面;圖2係沿圖1中之線A-A展示根據本創作之層的一視圖;圖3繪示本創作之一雙層鍍鎳;圖4繪示先前技術之一單層鍍鎳。 For a better understanding of the present invention, an embodiment of the present invention (which is given by way of example only) will now be described with reference to the accompanying drawings in which: Figure 1 is a cross section through a multi-stage dry vacuum pump; Line AA in Fig. 1 shows a view of a layer according to the present creation; Fig. 3 shows a double layer nickel plating of the present invention; and Fig. 4 shows a single layer nickel plating of the prior art.

參考圖1及圖2,一多級乾式真空泵10包括一定子組件12,較佳地塗佈有包括一高磷鎳鍍覆((NiP)之一第一層102且該第一層塗佈有包括具有一鎳磷及一含氟聚合物(NiP-PTFE)之一高磷鎳之一第二層100,其具有界定複數個泵送腔室14、16、18、20、22之一系列壁。用於將待泵送之氣體至傳送至入口泵送腔室14之一入口導管24及用於自排放泵送腔室22排放泵送氣體之一排放導管26亦形成於定子12中。形成於定子12中之圓周通道28、30、32及34串聯連接泵送腔室14、16、18、20、22。 Referring to Figures 1 and 2, a multi-stage dry vacuum pump 10 includes a sub-assembly 12, preferably coated with a first layer 102 comprising a high phosphorous nickel plating ((NiP) and the first layer is coated A second layer 100 comprising one of nickel-phosphorus and one of high-phosphorus nickel, a fluoropolymer (NiP-PTFE) having a series of walls defining a plurality of pumping chambers 14, 16, 18, 20, 22 A discharge conduit 26 for conveying the gas to be pumped to one of the inlet pumping chamber 14 and one for discharging the pumping gas from the discharge pumping chamber 22 is also formed in the stator 12. The circumferential passages 28, 30, 32 and 34 in the stator 12 are connected in series to the pumping chambers 14, 16, 18, 20, 22.

定子12容置一第一軸36及(自第一軸間隔且平行於第一軸)一第二軸38。用於支撐軸36、38之軸承40提供於定子12之端板42、44中。軸36之一者連接至一驅動馬達46,軸藉由定時齒輪47耦合在一起使得在使用中軸36、38依相同速度但在相反方向上旋轉,如圖2中之箭頭48及50所指示。附接至泵10之側之一齒輪箱52含有用於潤滑定時齒輪47之油54。 The stator 12 houses a first shaft 36 and a second shaft 38 ( spaced from the first shaft and parallel to the first shaft). Bearings 40 for supporting the shafts 36, 38 are provided in the end plates 42, 44 of the stator 12. One of the shafts 36 is coupled to a drive motor 46 that is coupled together by timing gears 47 such that the shafts 36, 38 rotate at the same speed but in opposite directions during use, as indicated by arrows 48 and 50 in FIG. One of the gearboxes 52 attached to the side of the pump 10 contains oil 54 for lubricating the timing gear 47.

在各泵送腔室內,軸36、38支撐各自轉子組件56、58,其等亦可塗佈有包括一高磷鎳鍍覆((NiP)之一第一層102且該第一層塗佈有包括具有一鎳磷及一含氟聚合物(NiP-PTFE)之一高磷鎳之一第二層100。在此實施例中,轉子56、58在各泵送腔室內具有一Roots類型輪廓,儘管Roots類型輪廓及/或Northey類型輪廓之一混合物可提供於泵10內。替代地,轉子可為一螺絲類型轉子輪廓。轉子56、58位於相對於定子12之一內表面之各泵送腔室中使得轉子56、58可依本身已知之一互相嚙合方式作用。 Within each pumping chamber, the shafts 36, 38 support respective rotor assemblies 56, 58, which may also be coated with a first layer 102 comprising a high phosphorous nickel plating ((NiP) and the first layer coated There is a second layer 100 comprising one of nickel-phosphorus and one of the high-phosphorus nickels of a fluoropolymer (NiP-PTFE). In this embodiment, the rotors 56, 58 have a Roots type profile within each pumping chamber. A mixture of one of the Roots type profile and/or the Northey type profile may be provided within the pump 10. Alternatively, the rotor may be a screw type rotor profile. The rotors 56, 58 are each pumped relative to one of the inner surfaces of the stator 12. The rotors 56, 58 are allowed to act in a mutually intermeshing manner in one of the chambers.

在使用中,氣體透過入口導管24推進至泵10中且傳遞至入口泵送腔室14中。氣體由位於入口泵送腔室14內之轉子56、58壓縮且由通道28饋送至下一泵送腔室16中。泵送腔室16中饋送之氣體類似地由泵送腔室16中之轉子56、58壓縮,且由通道30饋送至下一泵送腔室18中。類似氣體 壓縮發生在泵送腔室18、20及22中,其中經泵送氣體最終自泵10透過排放導管26排放。 In use, gas is propelled into the pump 10 through the inlet conduit 24 and into the inlet pumping chamber 14. The gas is compressed by the rotors 56, 58 located within the inlet pumping chamber 14 and fed by the passage 28 into the next pumping chamber 16. The gas fed in the pumping chamber 16 is similarly compressed by the rotors 56, 58 in the pumping chamber 16, and fed by the passage 30 into the next pumping chamber 18. Similar gas Compression occurs in the pumping chambers 18, 20, and 22, wherein the pumped gas is ultimately discharged from the pump 10 through the exhaust conduit 26.

藉由塗佈軸組件、轉子組件及/或定子組件及/或端板組件12、42、44、56、58包括至少5μm厚度之一高磷鎳鍍覆(NiP)之一第一層102及包括具有至少5μm厚度之鎳磷及含氟聚合物(NiP-PTFE)之一高磷鎳之一第二層100,形成歸因於轉子與定子接觸而具有低機會之捕獲之一特別耐腐蝕性乾式真空泵。應用至少5μm厚度之兩個層提供比僅兩個層之一者應用於一乾式真空泵組件時大之塗佈強度及黏合性之一加乘效應。 By coating the shaft assembly, the rotor assembly and/or the stator assembly and/or the end plate assembly 12, 42, 44, 56, 58 comprising a first layer 102 of one of high phosphorous nickel plating (NiP) having a thickness of at least 5 μm and A second layer 100 comprising nickel phosphorus having a thickness of at least 5 μm and one of high-phosphorus nickel, one of fluoropolymers (NiP-PTFE), forms one of the special corrosion resistances due to the low chance of capture due to contact of the rotor with the stator. Dry vacuum pump. Applying two layers of at least 5 μm thickness provides a multiplier effect of coating strength and adhesion greater than when only one of the two layers is applied to a dry vacuum pump assembly.

如圖3及圖4中所繪示,第一層102可包括高磷鎳之若干塗層;即第一層可藉由塗佈乾式泵組件複數次而產生。藉由(例如)無電電鍍形成高磷鎳之複數個塗層,形成減少第一層中之缺陷連續性且減少塗層之總體孔隙度兩者之一強很多之第一層。第一層中之總磷含量平均介於10%與12%之間。NiP之第一層可由一單一塗層或多個塗層形成以形成至少5μm厚度之一層,較佳地形成介於6.2μm與15.5μm之間的一總第一層厚度。 As illustrated in Figures 3 and 4, the first layer 102 can comprise several coatings of high phosphorous nickel; that is, the first layer can be produced by coating the dry pump assembly multiple times. Forming a plurality of coatings of high phosphorus nickel by, for example, electroless plating, forms a first layer that is much stronger than reducing one of the defect continuity in the first layer and reducing the overall porosity of the coating. The total phosphorus content in the first layer is between 10% and 12% on average. The first layer of NiP may be formed from a single coating or a plurality of coatings to form one layer of at least 5 μm thickness, preferably a total first layer thickness between 6.2 μm and 15.5 μm .

第二層100(其係含有PTFE(聚四氟乙烯)、NiP-PTFE之子顆粒之一高磷鎳矩陣)再次藉由無電電鍍形成於第一層上方。若第二層係至少5μm厚度,則總厚度較佳地係約8.8μm至約14.1μm厚,但其可視需要大於或小於此厚度。亦可能在矩陣中使用其他含氟聚合物,例如PFA(全氟醚)或PEI(聚乙烯亞胺)。 The second layer 100, which is a high phosphorus nickel matrix containing PTFE (polytetrafluoroethylene), a subparticle of NiP-PTFE, is again formed over the first layer by electroless plating. If the second layer is at least 5 μm thick, the total thickness is preferably from about 8.8 μm to about 14.1 μm thick, but it may be greater or less than this thickness as desired. It is also possible to use other fluoropolymers in the matrix, such as PFA (perfluoroether) or PEI (polyethyleneimine).

實例:Example:

在鍍覆表面上之一系列化學測試中,具有12.5μm NiP-PTFE之一第二層之12.5μm NiP第一層(如圖3中所繪示)上之氣泡之數目小於相較於25μm NiP之一單層(如圖4中所繪示)之氣泡之數目之一半。 In a series of chemical tests on a plated surface, the number of bubbles on the first layer of 12.5 μm NiP (shown in Figure 3) with a second layer of 12.5 μm NiP-PTFE is less than 25 μm One half of the number of bubbles of a single layer of NiP (as shown in Figure 4).

在Atotech鍍覆化學上實施一陣列測試。24個試樣在200℃下曝露於一腔室中之氟。12個試樣具有NiP之25μm基底層且另12個試樣具有NiP之12.5μm基底層+NiP-PTFE之12.5μm頂層。 An array test was performed on Atotech plating chemistry. 24 samples were exposed to fluorine in a chamber at 200 °C. Twelve samples had a 25 μm base layer of NiP and the other 12 samples had a 12.5 μm base layer of NiP + a 12.5 μm top layer of NiP-PTFE.

試樣測試之前及之後稱重。下文表1中展示各層系統之平均重量變化。單一鍍覆層存在一些重量損失且雙層(兩層)鍍覆存在一較小重量增益。在曝露於氟800小時之後亦使用一蔡司(Zeiss)顯微鏡觀察試樣。田口(Taguchi)分析已用以計算各試樣之面上發現之氣泡之平均數目;此等氣泡數目在表1中展示。單層之平均數係雙層之數目之兩倍以上。 Weigh the sample before and after the test. The average weight change for each layer system is shown in Table 1 below. There is some weight loss in a single plating layer and a small weight gain in double layer (two layer) plating. The sample was also observed using a Zeiss microscope after exposure to fluorine for 800 hours. The Taguchi analysis has been used to calculate the average number of bubbles found on the faces of each sample; the number of such bubbles is shown in Table 1. The average number of single layers is more than twice the number of double layers.

此實例繪示令人驚訝的效應:使用NiP及NiP-PTFE鍍覆之特定組合提供優於僅使用純NiP鍍覆之耐化學性,同時維持NiP-PTFE之耐磨蝕性。 This example shows a surprising effect: the specific combination of NiP and NiP-PTFE plating provides better chemical resistance than pure NiP plating alone, while maintaining the abrasion resistance of NiP-PTFE.

類似地,若存在NiP之至少一5μm基底層及NiP-PTFE之至少一5μm頂層,則NiP及NiP-PTFE之任何組合可用以輸送如上文在表1中所概述之相同優點。下文在表2中展示一NiP基底層與一NiP-PTFE頂層之比例之實例。 Similarly, if at least a 5 [mu]m base layer of NiP and at least a 5 [mu]m top layer of NiP-PTFE are present, any combination of NiP and NiP-PTFE can be used to deliver the same advantages as outlined above in Table 1. An example of the ratio of a NiP base layer to a NiP-PTFE top layer is shown below in Table 2.

Claims (7)

一種乾式泵組件,其塗佈有包括至少5 µm厚度之一高磷鎳鍍覆(NiP)之一第一層,該第一層塗佈有包括具有至少5 µm厚度之鎳磷及含氟聚合物(NiP-PTFE)之一高磷鎳之一第二層,其中NiP之該第一層之該厚度與NiP-PTFE之該第二層之該厚度之比例提供高耐腐蝕性及耐磨蝕性。A dry pump assembly coated with a first layer comprising one of high phosphorous nickel plating (NiP) having a thickness of at least 5 μm, the first layer being coated with nickel phosphorus and a fluorine-containing polymerization comprising a thickness of at least 5 μm a second layer of one of the high-phosphorus nickels of NiP-PTFE, wherein the ratio of the thickness of the first layer of NiP to the thickness of the second layer of NiP-PTFE provides high corrosion resistance and abrasion resistance Sex. 如請求項1之乾式泵組件,其中NiP之該第一層具有自約6.2 µm至約15.5 µm之厚度之一範圍。The dry pump assembly of claim 1, wherein the first layer of NiP has a range from about 6.2 μm to about 15.5 μm. 如請求項1之乾式泵組件,其中NiP-PTFE之該第二層具有自約8.8 µm至約14.1 µm之厚度之一範圍。The dry pump assembly of claim 1, wherein the second layer of NiP-PTFE has a range from about 8.8 μm to about 14.1 μm. 如請求項1之乾式泵組件,其中NiP之該第一層與NiP-PTFE之該第二層之比例係以µm為單位之以下厚度之至少一者:5 +20、5+30、10+15、10+25、12.5+12.5、15+10、15+20、20+5、20 +15、25 + 5、25+10或30+5。The dry pump assembly of claim 1, wherein the ratio of the first layer of NiP to the second layer of NiP-PTFE is at least one of the following thicknesses in units of μm: 5 + 20, 5 + 30, 10 + 15, 10+25, 12.5+12.5, 15+10, 15+20, 20+5, 20+15, 25+5, 25+10 or 30+5. 如請求項1之乾式泵組件,其中該第二層中之該含氟聚合物包含聚四氟乙烯、全氟醚及聚乙烯亞胺之至少一者。The dry pump assembly of claim 1, wherein the fluoropolymer in the second layer comprises at least one of polytetrafluoroethylene, perfluoroether, and polyethyleneimine. 如請求項1之乾式泵組件,其中該泵組件係一定子組件、一端板、一轉子軸組件及一轉子組件之至少一者。The dry pump assembly of claim 1, wherein the pump assembly is at least one of a subassembly, an end plate, a rotor shaft assembly, and a rotor assembly. 如請求項6之乾式泵組件,其中該轉子組件具有一Northey (爪)轉子輪廓、一Roots轉子輪廓或一Screw轉子輪廓之一者。The dry pump assembly of claim 6, wherein the rotor assembly has one of a Northey rotor profile, a Roots rotor profile, or a Screw rotor profile.
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