CN209604238U - Vacuum pump part and dry vacuum pump - Google Patents

Vacuum pump part and dry vacuum pump Download PDF

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Publication number
CN209604238U
CN209604238U CN201790000807.2U CN201790000807U CN209604238U CN 209604238 U CN209604238 U CN 209604238U CN 201790000807 U CN201790000807 U CN 201790000807U CN 209604238 U CN209604238 U CN 209604238U
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China
Prior art keywords
layer
nip
ptfe
pump part
dry type
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CN201790000807.2U
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Chinese (zh)
Inventor
A.E.K.霍尔布鲁克
I.S.格雷厄姆
J.W.洛克
B.C.墨菲
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Edwards Ltd
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Edwards Ltd
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/126—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C21/00—Oscillating-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/16—Wear
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/04—Preventing corrosion

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The utility model relates to improved vacuum pumps, improved coating especially for the inner shaft of dry vacuum pump, rotor and/or stator component, it has the first layer including high phosphorus nickel coating (NiP), and wherein the first layer is coated with the second layer, and the second layer includes high phosphorus nickel and nickel phosphorus and fluoropolymer (NiP-PTFE).

Description

Vacuum pump part and dry vacuum pump
Technical field
The utility model relates to a kind of improved vacuum pumps, especially for dry vacuum pump such as inner shaft, rotor and/ Or the improved coating of the dry type pump part of stator component.
Background technique
Dry vacuum pump is widely used in industrial processes, provides cleaning and/or environment under low pressure with the manufacture for product. Using including pharmacy, semiconductor and plate manufacturing industry.This pump includes the pumping mechanism of substantially dry (or oil-free), but usually It further include some components for driving such as bearing and transmission gear of the pumping mechanism, the component needs to lubricate to have Effect operation.The example of dry pump includes lobe pump, Northey (Northey or " claw type ") pump, screw pump and vortex pump.Include Roots And/or the dry pump of Northey rotor part is usually multistage positive displacement pump comprising the stator component of multiple pumping chamber is limited, Each pumping chamber accommodates corresponding intermeshing rotor part pair.Rotor part is located on the axis of rotation reversely with each other, and The profile or the profile that can have same type in each room can change between the chambers.
Due to its intensity and machinability, spheroidal graphite cast-iron (SG) casting has had long been used for manufacture dry vacuum pump Axis, stator and rotor part.However, in the semiconductor industry, the high temperature used more and more (it is Celsius to be typically greater than 150 Degree) and the gas of such as chlorine of big flow rate, the relatively corrosive property of boron chloride, hydrogen bromide, fluorine and tri-chlorination fluorine led to spheroidal graphite The serious corrosion of the axis, stator and rotor part of cast iron, and therefore lead to the relatively short service life.In fact, temperature increases 10 degrees Celsius double corrosion rate almost.Except processing caused by the relevant cost of replacement of pump or corroded components and thus Except downtime, this corrosion can also result in equipment fault, the leakage of processing gas and possible processing pollution.
In consideration of it, it is well known that by forming fluoropolymer on the parts surface for being exposed to corrosive gas and high temperature Or the resin or polymer coating of polyimide material passively protect these components.This coating has to degrade at any time Trend, peeling or exfoliating obtained by coating makes following cast iron be exposed to corrosive gas.
Another alternative solution is by rich nihard (such as ductility ni-resist) or the stainless steel with excellent anticorrosive To form these components.But anti-corrosion nihard and stainless steel are relatively expensive and be difficult to, and therefore cannot provide and be used for Manufacture the cost-effective selection of rotor and stator component.In addition, anti-corrosion nihard and stainless steel have when using at high temperature High fever expansion is horizontal and therefore loses performance.
Another alternative solution is to form these components by the high phosphorus nickel coating (NiP) of the typically phosphorus containing 10-12%.High phosphorus NiP Coating has an advantage that it provides high corrosion resistance, because surface more evenly and not will lead to the pinprick of corrosion.In addition, base The machinability of matter has not been changed and adds the hot property that NiP coating will not substantially change component.But in dry vacuum pump Cast iron and stainless steel on using NiP coating have following significant drawback, that is, cause to pump in the contact there are rotor with stator Send the tile kilning of mechanism.The surfacing of two components in sliding contact (such as when the rotor that is rotated in dry vacuum pump with When stator contact) it can bond, this bonding is otherwise known as abrading.It is plated on cast iron, stainless steel, or in NiP When the upper friction of layer itself, NiP coating will be abraded.
The layer for preventing abrasive known method to be in NiP coating include nickel phosphorus and fluoropolymer (PTFE), by This generates NiP-PTFE.
Using NiP-PTFE coating, it solves the problems, such as to abrade in individual NiP coating, still, the NiP-PTFE With the poor chemical resistance of the pure NiP coating than same thickness.
The purpose of this utility model is to overcome this by generating the coating for both having high chemical resistance and preventing scratch A little problems.
Utility model content
The utility model provides dry type pump part, is coated with the including high phosphorus nickel coating (NiP) of at least 5 μ m-thicks One layer, and what wherein first layer was coated at least 5 μ m-thicks includes high phosphorus nickel and nickel phosphorus and fluoropolymer (NiP-PTFE) The second layer, wherein provided for the thickness of the first layer of NiP and the ratio of the thickness of the second layer for NiP-PTFE high corrosion-resistant Property and marresistance.
It has been surprisingly found that, the first layer applied atop including high phosphorus nickel coating of at least 5 μ m-thicks has at least 5 The combination of the second layer including high phosphorus nickel (NiP) and nickel phosphorus and fluoropolymer (PTFE) (that is, NiP-PTFE) coating of μ m-thick The excellent anticorrosive with the long-life as independent NiP is provided, while being had low as independent fluoropolymer Both scratch effects.
The utility model further relates to a kind of dry vacuum pump comprising at least one previously described dry type pump part.In Other preferred and/or optional aspects of the utility model are limited in the preferred embodiment of the application.
Detailed description of the invention
In order to better understanding the utility model, this reality being merely given as examples is described with reference to the drawings With novel embodiment, in the accompanying drawings:
Fig. 1 is through the sectional view of multi-stage dry vacuum pump；
Fig. 2 is the view of the line A-A in Fig. 1, and it illustrates layers according to the present utility model；
Fig. 3 shows the double-deck nickel coating of the utility model；
Fig. 4 shows the single layer nickel coating of the prior art.
Specific embodiment
With reference to Fig. 1 and Fig. 2, multi-stage dry vacuum pump 10 includes stator component 12, is preferably coated with including high phosphorus nickel The first layer 102 of coating (NiP), and first layer is coated with the second layer 100, the second layer includes high phosphorus nickel and nickel phosphorus and fluorine-containing Polymer (NiP-PTFE), the stator component have a series of walls, these walls limit multiple pumping chamber 14,16,18,20,22. For gas to be pumped to be delivered to the inlet duct 24 of entrance pumping chamber 14 and is used for from exhaust 22 discharge pump of pumping chamber The exhaust pipe 26 of body of supplying gas is also formed in stator 12.The circumferential passageway 28,30,32 and 34 formed within the stator 12 will pump Room 14,16,18,20,22 is connected in series.
Stator 12 accommodates first axle 36 and is spaced apart with first axle and the second axis 38 in parallel.Be used to support axis 36, 38 bearing 40 is arranged in the end plate 42,44 of stator 12.One in axis 36 is connected to drive motor 46, these axis warp It is coupled together by timing gears 47, so that axis 36,38 with identical speed but rotates in mutually opposite directions when in use, such as Shown in arrow 48 and 50 in Fig. 2.The gear-box 52 for being attached to the side of pump 10 includes the oil for lubricating timing gears 47 54。
In each pumping chamber, axis 36,38 supports corresponding rotor part 56,58, and the rotor part can also be coated with First layer 102 including high phosphorus nickel coating (NiP), and first layer is coated with including high phosphorus nickel and nickel phosphorus and fluoropolymer (NiP-PTFE) the second layer 100.In this embodiment, rotor 56,58 has in each indoor Roots type profile of pumping, to the greatest extent The combination of Roots and/or Northey type profile can be arranged in pipe in pump 10.Alternatively, rotor can have screw type rotor wheel It is wide.Rotor 56,58 is located in each pumping chamber relative to the inner surface of stator 12, allows rotor 56,58 with public affairs itself The intermeshing mode known works.
In use, gas is driven into pump 10 by inlet duct 24 and is sent in entrance pumping chamber 14.Gas The rotor 56,58 being located in entrance pumping chamber 14 compresses, and is supplied in next pumping chamber 16 by channel 28.It is fed into Gas in pumping chamber 16 is similarly compressed by the rotor 56,58 in pumping chamber, and is supplied to next pumping by channel 30 Room 18.Similar gas compression occurs in pumping chamber 18,20 and 22, and the gas of pumping is eventually by exhaust pipe 26 from pump 10 Discharge.
By coating axis, rotor and/or stator and/or end plate member 12,42,44,56,58 with the packet of at least 5 μ m-thicks The first layer 102 and at least 5 μ m-thicks for including high phosphorus nickel coating (NiP) include high phosphorus nickel and nickel phosphorus and fluoropolymer (NiP- PTFE the second layer 100) forms especially corrosion resistant dry vacuum pump, is caused with low by rotor and stator contact Tile kilning possibility.Application is that two layers of at least 5 μ m-thicks is applied to dry vacuum pumping section than only one in described two layers The synergistic effect of bigger strength of coating and bond properties is provided when part.
As shown in Figure 3 and Figure 4, first layer 102 may include multiple high phosphorus nickel coatings；That is, first layer can be by more Secondary coating dry type pump part generates.For example, by forming multiple high phosphorus nickel coatings by chemical plating, form much strong First layer, the first layer reduce both total porositys of the continuity of defect and reduction coating in first layer.It is total in first layer Phosphorus content is average between 10% and 12%.It can be formed by single or multiple coatings for the first layer of NiP to form at least 5 μ m-thicks Layer, the total first layer thickness being preferably formed between 6.2 μm and 15.5 μm.
The second layer 100 is formed on the first layer by chemical plating again, and the second layer is to include PTFE(polytetrafluoroethylene (PTFE)) Submicron high phosphorus Ni substrate (that is, NiP-PTFE).Overall thickness (if the second layer is at least 5 μ m-thicks) is preferably about 8.8 μ M is to 14.1 μ m-thicks, but if can be more than or less than the thickness if needing.It is also possible in the matrix use other fluorinated polymers Object, such as PFA(perfluoro-ether) or PEI(polyethyleneimine).
Example:
In a series of test chemicals on coating surface, at 12.5 μm of the second layer of the NiP-PTFE with 12.5 μm NiP first layer (as shown in Figure 3) on bubble NiP of the quantity less than 25 μm single layer (as shown in Figure 4) number of bubbles The half of amount.
Array test is carried out at Atotech electroplating chemical (Atotech plating chemistry).24 samples are existed Fluorine is exposed in 200 DEG C of room.12 in these samples with 25 μm of bottoms for NiP and other 12 samples have and are 12.5 μm of bottoms of NiP+be NiP-PTFE 12.5 μm of top layers.
It weighs before testing with after test to sample.The average weight variation of every layer system is shown in following table 1.It is single Coating there are some weight loss and bilayer (dual) coating there are lesser weight to increase.It is being exposed to fluorine 800 hours Afterwards, the micro- sem observation sample of Zeiss is also used.Field mouthful analysis (Taguchi analysis) has been used for calculating in each sample The average bubble quantity found on surface；These are shown in table 1.Single layer is averagely twice or more of the double-deck quantity.
Thickness and type Weight change (μ g) Number of bubbles
It is individually 25 μm of bottoms of NiP (there is no top layer) -2.16 2.92
For NiP 12.5 μm of bottoms+be NiP-PTFE 12.5 μm of top layers 1.45 1.42
Table 1: average weight variation and bubble quantitative comparison plating systems.
This example illustrate following wonderful effects, provide ratio using the specific combination of NiP and NiP-PTFE coating The individual pure superior chemical resistance of NiP coating, while keeping the marresistance of NiP-PTFE.
Likewise, it is assumed that in the presence of at least 5 μm be NiP bottom and at least 5 μm be NiP-PTFE top layer, NiP The identical benefit summarized such as table 1 above can be used to provide with any combination of NiP-PTFE.NiP bottom and NiP- It is shown in the example following table 2 of the ratio of PTFE top layer.
NiP bottom (μm) NiP-PTFE top layer (μm)
5 20
5 30
10 15
10 25
12.5 12.5
15 10
15 20
20 5
20 15
25 10
30 5
The specific combination ratio of table 2:NiP underlayer thickness and NiP-PTFE top layer thickness.

Claims (8)

1. a kind of dry type pump part, which is characterized in that the dry type pump part was coated at least 5 μ m-thicks includes that high phosphorus nickel plates The first layer of layer (NiP), that the first layer is coated at least 5 μ m-thicks includes high phosphorus nickel and nickel phosphorus and fluoropolymer (NiP- PTFE the second layer), wherein the ratio of the thickness for the first layer for being NiP and the thickness for the second layer for being NiP-PTFE Rate provides high corrosion resistance and marresistance.
2. dry type pump part according to claim 1, wherein the thickness range for the first layer for being NiP is 6.2 μm and arrives 15.5µm。
3. dry type pump part according to claim 1, wherein the thickness range for the second layer for being NiP-PTFE is 8.8 μm to 14.1 μm.
4. dry type pump part according to claim 1, wherein for NiP the first layer thickness be NiP-PTFE's The ratio of the thickness of the second layer is at least one of following thickness, by μm as unit of: 5:20,5:30,10:15,10: 25,12.5:12.5,15:10,15:20,20:5,20:15,25:5,25:10 or 30:5.
5. dry type pump part according to any one of the preceding claims, wherein the fluoropolymer in the second layer Including at least one of polytetrafluoroethylene (PTFE), perfluoro-ether and polyethyleneimine.
6. dry type pump part according to any one of claim 1 to 4, wherein the pump part is stator component, end At least one of plate, axis and rotor part.
7. dry type pump part according to claim 6, wherein the rotor part has Northey rotor, roots rotor Or one of screw rotor profile.
8. a kind of dry vacuum pump, which is characterized in that it includes that at least one is according to any one of the preceding claims Dry type pump part.
CN201790000807.2U 2016-04-27 2017-04-19 Vacuum pump part and dry vacuum pump Active CN209604238U (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1607303.3A GB2551107A (en) 2016-04-27 2016-04-27 Vacuum pump component
GB1607303.3 2016-04-27
PCT/GB2017/051081 WO2017187137A1 (en) 2016-04-27 2017-04-19 Vacuum pump component

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Publication Number Publication Date
CN209604238U true CN209604238U (en) 2019-11-08

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CN201790000807.2U Active CN209604238U (en) 2016-04-27 2017-04-19 Vacuum pump part and dry vacuum pump

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KR (1) KR20180003547U (en)
CN (1) CN209604238U (en)
GB (1) GB2551107A (en)
TW (2) TWM569376U (en)
WO (1) WO2017187137A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3101921B1 (en) * 2019-10-14 2022-11-18 Pfeiffer Vacuum Dry vacuum pump and method of manufacture
FR3118648B1 (en) * 2021-01-05 2023-10-27 Pfeiffer Vacuum Dry vacuum pump and manufacturing process

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* Cited by examiner, † Cited by third party
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DE19860526A1 (en) * 1998-12-30 2000-07-06 Basf Ag Heat exchangers with reduced tendency to form deposits and processes for their production
JPWO2004111460A1 (en) * 2003-06-11 2006-07-27 松下電器産業株式会社 Vane rotary air pump
JP2006194163A (en) * 2005-01-14 2006-07-27 Matsushita Electric Ind Co Ltd Rotary vane air pump
CN2932283Y (en) * 2006-07-10 2007-08-08 吴浩 Plate-type heat exchanger anticorrosive metal-based laminated synthetic plate
FR3011308B1 (en) * 2013-10-02 2017-01-13 Vallourec Oil & Gas France CONNECTING ELEMENT OF A TUBULAR COMPONENT COATED WITH A COMPOSITE METAL DEPOSITION

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TW201739963A (en) 2017-11-16
WO2017187137A1 (en) 2017-11-02
GB2551107A (en) 2017-12-13
TWM569376U (en) 2018-11-01
KR20180003547U (en) 2018-12-18

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