FR3118648B1 - Dry vacuum pump and manufacturing process - Google Patents

Dry vacuum pump and manufacturing process Download PDF

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Publication number
FR3118648B1
FR3118648B1 FR2100054A FR2100054A FR3118648B1 FR 3118648 B1 FR3118648 B1 FR 3118648B1 FR 2100054 A FR2100054 A FR 2100054A FR 2100054 A FR2100054 A FR 2100054A FR 3118648 B1 FR3118648 B1 FR 3118648B1
Authority
FR
France
Prior art keywords
rotors
stator
nickel
vacuum pump
bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2100054A
Other languages
French (fr)
Other versions
FR3118648A1 (en
Inventor
Igor Forestier
Laëtitia Popin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2100054A priority Critical patent/FR3118648B1/en
Priority to TW110149571A priority patent/TW202237987A/en
Priority to PCT/EP2022/050067 priority patent/WO2022148744A1/en
Publication of FR3118648A1 publication Critical patent/FR3118648A1/en
Application granted granted Critical
Publication of FR3118648B1 publication Critical patent/FR3118648B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating

Abstract

Pompe à vide (1) sèche comportant un stator (2) et deux rotors (5) reçus dans au moins une chambre de compression (3) du stator (2), les rotors (5) étant configurés pour tourner de façon synchronisée en sens inverse pour entraîner un gaz à pomper entre une aspiration (4) et un refoulement de la pompe à vide (1), le corps (9) du stator (2) et/ou les corps (10) des rotors (5) étant réalisés en fonte grise, la paroi interne du corps (9) du stator (2) d’au moins une chambre de compression (3) et/ou les parois des corps (10) des rotors (5) étant revêtus d’un revêtement à base de nickel (11), le revêtement à base de nickel étant obtenu par :- une première étape d’amorçage du dépôt du revêtement à base de nickel (11) par électrodéposition sur la paroi interne du corps (9) du stator (2) et/ou les parois des corps (10) des rotors (5), suivi d’- une deuxième étape de dépôt du revêtement à base de nickel (11) par nickelage chimique sur la paroi interne du corps (9) du stator (2) et/ou les parois des corps (10) des rotors (5). Figure d’abrégé : fig 3Dry vacuum pump (1) comprising a stator (2) and two rotors (5) received in at least one compression chamber (3) of the stator (2), the rotors (5) being configured to rotate synchronously in direction reverse to drive a gas to be pumped between a suction (4) and a discharge of the vacuum pump (1), the body (9) of the stator (2) and/or the bodies (10) of the rotors (5) being made made of gray cast iron, the internal wall of the body (9) of the stator (2) of at least one compression chamber (3) and/or the walls of the bodies (10) of the rotors (5) being coated with a coating with nickel base (11), the nickel-based coating being obtained by: - a first step of initiating the deposition of the nickel-based coating (11) by electrodeposition on the internal wall of the body (9) of the stator (2 ) and/or the walls of the bodies (10) of the rotors (5), followed by - a second step of depositing the nickel-based coating (11) by chemical nickel plating on the internal wall of the body (9) of the stator ( 2) and/or the walls of the bodies (10) of the rotors (5). Abstract figure: fig 3

FR2100054A 2021-01-05 2021-01-05 Dry vacuum pump and manufacturing process Active FR3118648B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2100054A FR3118648B1 (en) 2021-01-05 2021-01-05 Dry vacuum pump and manufacturing process
TW110149571A TW202237987A (en) 2021-01-05 2021-12-30 Dry vacuum pump and method of manufacture
PCT/EP2022/050067 WO2022148744A1 (en) 2021-01-05 2022-01-04 Dry vacuum pump and method of manufacture

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2100054A FR3118648B1 (en) 2021-01-05 2021-01-05 Dry vacuum pump and manufacturing process
FR2100054 2021-01-05

Publications (2)

Publication Number Publication Date
FR3118648A1 FR3118648A1 (en) 2022-07-08
FR3118648B1 true FR3118648B1 (en) 2023-10-27

Family

ID=74860188

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2100054A Active FR3118648B1 (en) 2021-01-05 2021-01-05 Dry vacuum pump and manufacturing process

Country Status (3)

Country Link
FR (1) FR3118648B1 (en)
TW (1) TW202237987A (en)
WO (1) WO2022148744A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023112788A1 (en) * 2021-12-15 2023-06-22 株式会社ファインスティールエンジニアリング Iron cast part, assembly part, and method for manufacturing iron cast part

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009018213B4 (en) * 2009-04-21 2015-07-09 Oerlikon Leybold Vacuum Gmbh vacuum pump housing
GB2551107A (en) * 2016-04-27 2017-12-13 Edwards Ltd Vacuum pump component
FR3051852B1 (en) * 2016-05-24 2018-06-15 Pfeiffer Vacuum STATOR, ROTARY SHAFT, DRY TYPE VACUUM PUMP, AND METHODS OF MANUFACTURING THE SAME

Also Published As

Publication number Publication date
WO2022148744A1 (en) 2022-07-14
TW202237987A (en) 2022-10-01
FR3118648A1 (en) 2022-07-08

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